Substrate processing apparatus and method of manufacturing semiconductor device
    1.
    发明授权
    Substrate processing apparatus and method of manufacturing semiconductor device 有权
    基板处理装置及半导体装置的制造方法

    公开(公告)号:US09028191B2

    公开(公告)日:2015-05-12

    申请号:US13163165

    申请日:2011-06-17

    IPC分类号: H01L21/67 H01J37/32

    摘要: Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and an auxiliary barrier unit installed between the substrate support and the barrier, wherein the auxiliary barrier unit is installed at places other than standby spaces of the end effectors.

    摘要翻译: 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响,因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括:负载锁定室,被配置为容纳堆叠的基板; 第一传送机构,其具有设置有第一端部执行器的第一传送臂,并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构,具有设置有第二端部执行器的第二传送臂,并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障,其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在所述基板支撑件和所述屏障之间的辅助屏障单元,其中所述辅助屏障单元安装在所述末端执行器的备用空间以外的位置。

    Mobile terminal
    2.
    发明授权
    Mobile terminal 有权
    移动终端

    公开(公告)号:US08963832B2

    公开(公告)日:2015-02-24

    申请号:US13582693

    申请日:2011-03-03

    申请人: Satoshi Takano

    发明人: Satoshi Takano

    摘要: In a mobile terminal of the present invention, when the finger of a user is approaching a touch panel, an estimation coordinate as a position of the finger and an estimation distance as a distance between the finger and the touch panel are determined based on a capacitance value between the finger and the touch panel, and capacitance distribution data showing a distribution of the capacitance values is generated. When the capacitance distribution data is similar to set capacitance distribution data, an object icon, which is arranged in the estimation coordinate, of a plurality of icons displayed on the touch panel is displayed on the touch panel in a size larger than in a basic size. In this way, only when detecting that the finger of the user is approaching the touch panel, the icon which is displayed on the touch panel is displayed in an expansion state. Therefore, a malfunction can be prevented and the improvement of operability can be attempted to the user.

    摘要翻译: 在本发明的移动终端中,当用户的手指接近触摸面板时,基于手指和触摸面板之间的距离来确定作为手指的位置的估计坐标和作为距离的估计距离, 产生手指和触摸面板之间的值,并且产生表示电容值分布的电容分布数据。 当电容分布数据类似于设定电容分布数据时,在触摸面板上显示的多个图标中的布置在估计坐标中的对象图标以大于基本尺寸的尺寸显示在触摸面板上 。 以这种方式,只有当检测到用户的手指接近触摸面板时,显示在触摸面板上的图标以展开状态显示。 因此,可以防止故障,并且可以向用户尝试提高可操作性。

    Exit monitor
    3.
    发明授权
    Exit monitor 有权
    退出监视器

    公开(公告)号:US08896454B2

    公开(公告)日:2014-11-25

    申请号:US13382148

    申请日:2010-06-24

    IPC分类号: G08B17/12 G01D18/00 G01T1/169

    CPC分类号: G01T1/169

    摘要: To examine a contamination state of a worker having worked in a radiation controlled zone, a first unit detects contamination of a front or back surface of the worker and outputs a first signal indicating a contamination state of the surface. A second unit detects contamination of an arm's inner side surface of the worker and outputs a second signal indicating a contamination state of the arm's side surface. A third unit detects contamination of a trunk's side surface of the worker and outputs a third signal indicating a contamination state of the trunk's side surface. A processing unit detects the presence of contamination of the front or back surface and the armpit's both sides based on the outputted first signal, on the second signal output when the second unit moves up together with the third unit, and on the third signal output when the third unit moves up.

    摘要翻译: 为了检查在辐射控制区域中工作的工人的污染状态,第一单元检测工作人员的正面或背面的污染物,并输出表示表面的污染状态的第一信号。 第二单元检测工作人员的手臂的内侧表面的污染并输出指示臂的侧表面的污染状态的第二信号。 第三单元检测工作人员的躯干侧表面的污染物,并输出指示躯干侧表面的污染状态的第三信号。 当第二单元与第三单元一起向上移动时,处理单元基于输出的第一信号,在第二信号输出上检测正面或背面和腋下两侧的污染的存在,以及在第三信号输出时, 第三单位向上移动。

    MOBILE ELECTRONIC EQUIPMENT WITH GYRO SENSOR, GYRO SENSOR CORRECTION METHOD, AND PROGRAM
    4.
    发明申请
    MOBILE ELECTRONIC EQUIPMENT WITH GYRO SENSOR, GYRO SENSOR CORRECTION METHOD, AND PROGRAM 有权
    带有陀螺传感器的移动电子设备,GYRO传感器校正方法和程序

    公开(公告)号:US20130325386A1

    公开(公告)日:2013-12-05

    申请号:US14000078

    申请日:2012-02-17

    申请人: Satoshi Takano

    发明人: Satoshi Takano

    IPC分类号: G01C19/5776

    摘要: A mobile electronic equipment includes a gyro sensor that detects an angular velocity, a first housing with the gyro sensor disposed therein, a second housing movably connected to the first housing, an angle formed between the respective housings being changed by movement of the first housing, and a control unit that calculates a change in an angle formed between the first housing and the second housing before and after the movement as a measured angle, based on output data of the gyro sensor. The control unit calculates a correction value for the output data of the gyro sensor based on the measured angle and a reference angle set in advance (see FIG. 1).

    摘要翻译: 移动电子设备包括检测角速度的陀螺仪传感器,设置有陀螺仪传感器的第一壳体,可移动地连接到第一壳体的第二壳体,通过第一壳体的移动改变各个壳体之间形成的角度, 以及控制单元,其基于陀螺传感器的输出数据,计算在移动之前和之后在第一壳体和第二壳体之间形成的角度作为测量角度的变化。 控制单元基于测量的角度和预先设定的参考角度来计算陀螺仪传感器的输出数据的校正值(参见图1)。

    RELAY
    5.
    发明申请
    RELAY 有权
    中继

    公开(公告)号:US20120223790A1

    公开(公告)日:2012-09-06

    申请号:US13465608

    申请日:2012-05-07

    IPC分类号: H01H45/00

    摘要: A relay is disclosed that includes a first opening and closing part including an openable and closable first gap; a second opening and closing part including an openable and closable second gap, the second opening and closing part being placed side by side with the first opening and closing part so that the first gap and the second gap are arranged side by side; a magnetization driving part configured to cause the first opening and closing part and the second opening and closing part to simultaneously operate; and a permanent magnet configured to apply a magnetic field on the first gap of the first opening and closing part and the second gap of the second opening and closing part in the same direction.

    摘要翻译: 公开了一种继电器,其包括:第一开闭部,包括可开闭的第一间隙; 第二开闭部,包括可开闭的第二间隙,所述第二开闭部与所述第一开闭部并列配置,使得所述第一间隙和所述第二间隙并排配置; 磁化驱动部,其构造成使所述第一开闭部和所述第二开闭部同时动作; 以及永久磁铁,其构造成在同一方向上的第一开闭部的第一间隙和第二开闭部的第二间隙上施加磁场。

    Image processing device, image processing method, and computer program product
    7.
    发明授权
    Image processing device, image processing method, and computer program product 有权
    图像处理装置,图像处理方法和计算机程序产品

    公开(公告)号:US08144378B2

    公开(公告)日:2012-03-27

    申请号:US12314650

    申请日:2008-12-15

    IPC分类号: H04N1/04

    摘要: An image processing device includes a unit for reducing original image data of an image scanned by a scanning unit to generate a preview image; a unit for saving/reading a preview image data item of the preview image data in/from a memory; a unit for transferring the preview image data item saved in the memory to a display unit; a unit for inputting information indicating a relationship between a main scanning direction in which the image is scanned and an upper side of the image; and a unit for changing an arrangement order of pixels in the preview image data item such that the main scanning direction extends from a left side to a right side and the sub scanning direction extends from the upper side to a lower side of the preview image, as viewed with the upper side of the preview image at the top.

    摘要翻译: 图像处理装置包括用于减少由扫描单元扫描的图像的原始图像数据以产生预览图像的单元; 用于将存储器中的预览图像数据的预览图像数据项保存/读取的单元; 用于将保存在存储器中的预览图像数据项传送到显示单元的单元; 用于输入指示扫描图像的主扫描方向与图像的上侧之间的关系的信息的单元; 以及用于改变预览图像数据项目中的像素排列顺序的单元,使得主扫描方向从左侧延伸到右侧,副扫描方向从预览图像的上侧延伸到下侧, 在顶部的预览图像的上侧观察。

    TOUCH PANEL DEVICE OPERATING AS IF IN THE EQUIVALENT MODE EVEN WHEN DETECTED REGION IS SMALLER THAN DISPLAY REGION OF DISPLAY DEVICE
    8.
    发明申请
    TOUCH PANEL DEVICE OPERATING AS IF IN THE EQUIVALENT MODE EVEN WHEN DETECTED REGION IS SMALLER THAN DISPLAY REGION OF DISPLAY DEVICE 审中-公开
    触摸面板设备操作,如果在等效模式下,即使检测到的区域比显示设备的显示区域更小

    公开(公告)号:US20110199326A1

    公开(公告)日:2011-08-18

    申请号:US13123940

    申请日:2009-10-14

    申请人: Satoshi Takano

    发明人: Satoshi Takano

    IPC分类号: G06F3/041

    CPC分类号: G06F3/0416

    摘要: In a touch panel device, a touch panel control circuit converts a detection signal from a touch panel by projective transformation into a coordinate signal on a display in such a manner that virtually enlarges at least a detection region of the touch panel over an entire display region of the display.

    摘要翻译: 在触摸面板装置中,触摸面板控制电路将来自触摸面板的检测信号通过投影变换转换为显示器上的坐标信号,使得在整个显示区域上实际上至少扩大触摸面板的检测区域 的显示。

    SHOE PRESS BELT FOR MAKING PAPER
    9.
    发明申请
    SHOE PRESS BELT FOR MAKING PAPER 有权
    用于制作纸的鞋带

    公开(公告)号:US20100101745A1

    公开(公告)日:2010-04-29

    申请号:US12530954

    申请日:2008-03-12

    申请人: Satoshi Takano

    发明人: Satoshi Takano

    IPC分类号: D21F3/00

    摘要: A belt (shoe press belt) for a paper making machine, which has good ability of squeezing water from moist paper and which, during use, has reduced damage (cracks and wear) on the outer peripheral surface of the belt. The shoe press belt for making paper carries felt for receiving water squeezed from moist paper. A water discharge groove extended on the surface on the felt side is formed as an intermittent groove, and the width and depth of the water discharge groove are continuously varied in the direction of travel (MD direction) of the groove. The shape of the intermittent groove can be asymmetrical or symmetrical at the left and right with respect to the width, or can be formed to have a narrow width at the center of the groove, or can be formed so that the groove is deep at the center. Because the water discharge groove is intermittent, water discharge ability, the quality of paper, and the smoothness of the surface of moist paper are enhanced at the same time.

    摘要翻译: 一种用于造纸机的带(靴式压榨带),其具有从潮湿纸挤压水的良好能力,并且在使用过程中减少了带的外周表面上的损伤(裂纹和磨损)。 用于制造纸的靴式压榨带带有毛毡,用于接收从湿纸张挤出的水。 在毛毡一侧的表面上延伸的排水槽形成为间歇槽,并且排水槽的宽度和深度在槽的行进方向(MD方向)上连续变化。 间隙槽的形状可以相对于宽度在左右对称或对称,或者可以形成为在槽的中心处具有窄的宽度,或者可以形成为使得凹槽在 中央。 由于排水沟间歇性,同时提高了排水能力,纸张质量和湿纸表面的光滑度。

    ELECTROMAGNETIC RELAY
    10.
    发明申请
    ELECTROMAGNETIC RELAY 有权
    电磁继电器

    公开(公告)号:US20100066468A1

    公开(公告)日:2010-03-18

    申请号:US12543547

    申请日:2009-08-19

    IPC分类号: H01H50/00

    摘要: An electromagnetic relay includes a coil, an armature that is electromagnetically attracted by the coil when current flows through the coil, two fixed contacts, a movable spring disposed to be movable to the fixed contacts, a conductive plate that is connected to the movable spring and including two movable contacts. The movable contacts are brought in contact with the fixed contacts respectively via the movable spring by the armature attracted by the coil. When the fixed contacts and the movable contacts are in contact, the fixed contacts are electrically connected to each other via the conductive plate. The movable spring is made of an insulating material.

    摘要翻译: 电磁继电器包括线圈,当电流流过线圈时由线圈电磁吸引的电枢,两个固定触点,设置成可移动到固定触点的可动弹簧,连接到可动弹簧的导电板和 包括两个可动触点。 可动触点分别通过可动弹簧与线圈所吸引的电枢相接触。 当固定触头和可动触头接触时,固定触头经由导电板彼此电连接。 可动弹簧由绝缘材料制成。