High-Resolution High-Speed Terahertz Spectrometer
    4.
    发明申请
    High-Resolution High-Speed Terahertz Spectrometer 失效
    高分辨率高速太赫兹光谱仪

    公开(公告)号:US20080165355A1

    公开(公告)日:2008-07-10

    申请号:US11885335

    申请日:2005-08-30

    CPC classification number: G01N21/3586

    Abstract: A high-resolution high-speed terahertz spectrometry for measuring a terahertz frequency spectrum at high speed with a laser mode-locking frequency which is the theoretical limitation frequency resolution of the terahertz time-domain spectroscopy. The mode-locking frequencies of two femtosecond laser light sources are controlled so that they are stabilized at high degree and the difference between the mode-locking frequencies is constant. The output of the laser light sources are used as a pumping light for generating terahertz pulses and a probe pulse light for terahertz detection. Since the time delay timings of the terahertz pulses and the probe pulse light the pulse periods of which are slightly different from each other shift from each other and the difference increases. Therefore, the temporally expanded terahertz pulses are measured by high-speed sampling without using any mechanical stage for time delay scanning. Part of the laser beams are extracted and time origin signals are generated by trigger signal generating means and used as trigger signals. Consequently the influence of the timing jitter can be eliminated. The terahertz electric field time waveform measured by high-speed sampling with the measurement time window of the pulse period is subjected to time-scale conversion and Fourier transform. Therefore, a terahertz frequency spectrum can be measured with high resolution of the theoretical limitation frequency resolution (=mode-locking frequency) and at high speed.

    Abstract translation: 高分辨率高速太赫兹光谱法,用于以激光锁模频率高速测量太赫兹频谱,这是太赫兹时域光谱的理论极限频率分辨率。 控制两个飞秒激光的模式锁定频率,使其稳定在高度,并且模式锁定频率之间的差异是恒定的。 激光源的输出用作产生太赫兹脉冲的泵浦光和用于太赫兹检测的探针脉冲光。 由于太赫兹脉冲和探针脉冲的时间延迟定时彼此稍微不同的脉冲周期彼此偏移并且差异增大。 因此,通过高速采样来测量时间上扩展的太赫兹脉冲,而不用任何用于时间延迟扫描的机械级。 部分激光束被提取,时间原点信号由触发信号发生装置产生并用作触发信号。 因此,可以消除定时抖动的影响。 用脉冲周期测量时间窗高速采样测得的太赫兹电场时间波形进行时标转换和傅里叶变换。 因此,可以以理论限制频率分辨率(=锁模频率)的高分辨率和高速度测量太赫兹频谱。

    Coloring composition
    5.
    发明授权
    Coloring composition 失效
    着色成分

    公开(公告)号:US5696200A

    公开(公告)日:1997-12-09

    申请号:US436212

    申请日:1995-05-15

    CPC classification number: C08K5/0041

    Abstract: Disclosed is a coloring composition comprising (1) a crosslinked block copolymer comprising molecular chains of a base block copolymer comprising at least one polymer block (A) comprised mainly of vinyl aromatic monomer units, and at least one polymer block (B) comprised mainly of conjugated diene monomer units, the molecular chains of the base block copolymer being crosslinked through a crosslinkage containing at least one linkage selected from the group consisting of an imide linkage, an amide linkage, an ester linkage and a urethane linkage; and (2) a colorant, and wherein the coloring composition has a gel content of 60% by weight or more. The coloring composition of the present invention has excellent properties, such as excellent melt adhesion properties with a thermoplastic resin, high thermal stability and high morphological stability. Therefore, by subjecting a thermoplastic resin composition containing the coloring composition of the present invention to molding, various colored shaped thermoplastic resin articles having not only a highly decorative, distinct spot pattern, such as a stone grain pattern, but also excellent mechanical strength, can be obtained. Examples of such shaped resin articles include exterior parts of household electrical appliances and office automation machines, and the main bodies of articles of furniture, lavatory equipment, bathtubs, and musical instruments.

    Abstract translation: PCT No.PCT / JP94 / 01653 Sec。 371日期1995年5月15日 102(e)日期1995年5月15日PCT 1994年10月3日PCT PCT。 公开号WO95 / 09891 日期1995年4月13日公开是着色组合物,其包含(1)包含基础嵌段共聚物的分子链的交联嵌段共聚物,所述基团嵌段共聚物包含至少一种主要由乙烯基芳族单体单元组成的聚合物嵌段(A)和至少一种聚合物嵌段 B)主要由共轭二烯单体单元组成,基础嵌段共聚物的分子链通过含有至少一个选自酰亚胺键,酰胺键,酯键和氨基甲酸酯键的键的交联而交联; 和(2)着色剂,其中着色组合物的凝胶含量为60重量%以上。 本发明的着色组合物具有优异的性能,例如与热塑性树脂的熔融粘合性优异,热稳定性高,形态稳定性高。 因此,通过使含有本发明的着色组合物的热塑性树脂组合物成型,不仅具有高度装饰性,明显的斑点图案,例如石纹图案,还具有优异的机械强度的各种着色成形的热塑性树脂制品 得到。 这种成型树脂制品的实例包括家用电器和办公自动化机器的外部部件,以及家具,厕所设备,浴缸和乐器的主体。

    Substrate processing apparatus and method of manufacturing semiconductor device
    6.
    发明授权
    Substrate processing apparatus and method of manufacturing semiconductor device 有权
    基板处理装置及半导体装置的制造方法

    公开(公告)号:US09028191B2

    公开(公告)日:2015-05-12

    申请号:US13163165

    申请日:2011-06-17

    Abstract: Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and an auxiliary barrier unit installed between the substrate support and the barrier, wherein the auxiliary barrier unit is installed at places other than standby spaces of the end effectors.

    Abstract translation: 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响,因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括:负载锁定室,被配置为容纳堆叠的基板; 第一传送机构,其具有设置有第一端部执行器的第一传送臂,并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构,具有设置有第二端部执行器的第二传送臂,并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障,其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在所述基板支撑件和所述屏障之间的辅助屏障单元,其中所述辅助屏障单元安装在所述末端执行器的备用空间以外的位置。

    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    8.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 审中-公开
    基板加工装置及制造半导体装置的方法

    公开(公告)号:US20120034570A1

    公开(公告)日:2012-02-09

    申请号:US13193220

    申请日:2011-07-28

    Abstract: A substrate processing apparatus reduces over-heating of a substrate transfer robot and suppresses deterioration of reliability or lifespan of the substrate transfer robot. The substrate processing apparatus includes a transfer chamber having a substrate transferred thereinto under a negative pressure; a process chamber connected to the transfer chamber and configured to heat the substrate; a transfer robot installed in the transfer chamber and configured to transfer the substrate into and out of the process chamber; and a cooling unit configured to cool an inner wall of the transfer chamber.

    Abstract translation: 基板处理装置减少基板传送机器人的过热,并且抑制基板传送机器人的可靠性或寿命的劣化。 基板处理装置包括在负压下转印有基板的转印室; 连接到所述传送室并被配置为加热所述衬底的处理室; 传送机器人,其安装在所述传送室中并且被配置为将所述基板传入和移出所述处理室; 以及冷却单元,其构造成冷却所述传送室的内壁。

    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    9.
    发明申请
    SUBSTRATE PROCESSING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE 有权
    基板加工装置及制造半导体装置的方法

    公开(公告)号:US20110311339A1

    公开(公告)日:2011-12-22

    申请号:US13163165

    申请日:2011-06-17

    Abstract: Reduction in cooling rate of a substrate having a lower temperature is suppressed because the substrate having a lower temperature is not affected by radiant heat of a substrate having a higher temperature while cooling a plurality of substrates in a cooling chamber. The substrate processing apparatus includes a load lock chamber configured to accommodate stacked substrates; a first transfer mechanism having a first transfer arm provided with a first end effector, and configured to transfer the substrates into/from the load lock chamber at a first side of the load lock chamber; a second transfer mechanism having a second transfer arm provided with a second end effector, and configured to transfer the substrates into/from the load lock chamber at a second side of the load lock chamber; a barrier installed between the substrates to be spaced apart from the substrates supported by a substrate support provided in the load lock chamber; and a barrier auxiliary unit installed between the substrate support and the barrier, wherein the barrier auxiliary unit is installed at places other than standby spaces of the end effectors.

    Abstract translation: 由于具有较低温度的基板在冷却室中冷却多个基板的同时不受具有较高温度的基板的辐射热的影响,因此抑制了具有较低温度的基板的冷却速率的降低。 基板处理装置包括:负载锁定室,被配置为容纳堆叠的基板; 第一传送机构,其具有设置有第一端部执行器的第一传送臂,并且被配置为在所述负载锁定室的第一侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 第二传送机构,具有设置有第二端部执行器的第二传送臂,并且被配置为在所述负载锁定室的第二侧将所述基板传送到所述负载锁定室中或从所述负载锁定室传送; 安装在基板之间的屏障,其与由设置在负载锁定室中的基板支撑件支撑的基板间隔开; 以及安装在基板支撑件和屏障之间的屏障辅助单元,其中屏障辅助单元安装在末端执行器的备用空间以外的位置。

    Rubbery polymer composition
    10.
    发明授权
    Rubbery polymer composition 有权
    橡胶聚合物组合物

    公开(公告)号:US07247678B2

    公开(公告)日:2007-07-24

    申请号:US10455724

    申请日:2003-06-06

    Abstract: A vulcanized rubbery polymer composition comprising a component (A) and a thermoplastic resin (B), wherein the component (A) comprises a hydrogenated copolymer (A-1), which is obtained by hydrogenating a copolymer comprising a conjugated diene monomer unit and an aromatic vinyl monomer unit and having an aromatic vinyl monomer content of not less than 5% by weight and not more than 90% by weight, and which has a crystallization peak calorie measured by a differential scan calorimetry of not more than 2 J/g, and at least one vulcanizable rubber (A-2) selected from the group consisting of a copolymer (a1) comprising an ethylene unit and an α-olefin unit of 3 to 20 carbon atoms and a hydrogenated rubber (a2) obtained from a homopolymer rubber of at least one conjugated diene monomer or a copolymer rubber comprising a conjugated diene monomer unit and an aromatic vinyl monomer unit and having an aromatic vinyl monomer content of less than 5% by weight.

    Abstract translation: 一种包含组分(A)和热塑性树脂(B)的硫化橡胶状聚合物组合物,其中组分(A)包含氢化共聚物(A-1),其通过氢化包含共轭二烯单体单元和 芳香族乙烯基单体单元,芳香族乙烯基单体含量为5重量%以上且90重量%以下,差示扫描量热法测定的结晶峰值卡热不超过2J / g, 和选自包含乙烯单元和3-20个碳原子的α-烯烃单元的共聚物(a1)和由均聚橡胶(a2)得到的氢化橡胶(a2)的至少一种可硫化橡胶(A-2) 的至少一种共轭二烯单体或包含共轭二烯单体单元和芳族乙烯基单体单元并且芳族乙烯基单体含量小于5重量%的共聚物橡胶。

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