Pressure sensor
    1.
    发明授权
    Pressure sensor 失效
    压力传感器

    公开(公告)号:US4314226A

    公开(公告)日:1982-02-02

    申请号:US109489

    申请日:1980-01-04

    CPC分类号: G01L19/147 H01L29/84

    摘要: A pressure sensor having a silicon diaphragm whose opposite surfaces are subjected to fluid pressures for measurement. The diaphragm includes a diffused resistor as a pressure-sensitive element on a silicon base, a protective layer composed of a silicon epitaxial layer opposite in conductive type to the resistor and formed on the diffused resistor in order to prevent the resistor from being exposed to a corresponding fluid pressure, and an electrically insulating layer formed on an outer surface of the protective layer.

    摘要翻译: 一种具有硅膜片的压力传感器,其相对表面经受用于测量的流体压力。 隔膜包括作为硅基底上的压敏元件的扩散电阻器,由与电阻器相反的导电类型的硅外延层构成的保护层,并形成在扩散电阻器上,以防止电阻器暴露于 相应的流体压力,以及形成在保护层的外表面上的电绝缘层。

    Pressure sensor
    2.
    发明授权
    Pressure sensor 失效
    压力传感器

    公开(公告)号:US4287501A

    公开(公告)日:1981-09-01

    申请号:US109484

    申请日:1980-01-04

    摘要: A pair of semiconductor diaphragm blocks, each having a diaphragm on a front surface of which a diffused resistor is formed as a pressure-sensitive element, and a circumferential support integral therewith, are confined within a sealed hollow package and bonded at their circumferential supports to opposite inside surfaces of the package such that the front surfaces of the diaphragms are positioned within a vacuum space within the package. This package is provided with through holes through which fluid pressures subject to measurement are introduced so as to arrive at the back surfaces of the diaphragms.

    摘要翻译: 一对半导体膜片块,其前表面上形成有扩散电阻器作为压敏元件的隔膜和与其形成一体的周向支撑件,被限制在密封的中空包装内并且在其周向支撑件处粘合 使得膜片的前表面位于包装内的真空空间内。 该包装件设置有通孔,通过该通孔引入测量的流体压力以到达隔膜的后表面。

    Pressure sensor
    3.
    发明授权
    Pressure sensor 失效
    压力传感器

    公开(公告)号:US4276533A

    公开(公告)日:1981-06-30

    申请号:US116795

    申请日:1980-01-30

    IPC分类号: G01L9/04 G01L9/00 G01L1/22

    摘要: A diaphragm assembly includes a silicon diaphragm block which has a diaphragm at an eccentric position thereof, a diffused resistor formed as a pressure-sensitive element on a front surface of the diaphragm, and a silicon support plate bonded to the diaphragm block so as to cover a back surface of the diaphragm. The diaphragm assembly is accommodated sealingly within and bonded to the inside of a hollow package at an end portion of the assembly remote from the diaphragm in the direction of extension of the bonded surfaces of the block and the support plate. The front surface of the diaphragm and the diffused resistor thereon are exposed to a vacuum while a fluid pressure subject to measurement is introduced through a passage extending through the package and the end portion of the assembly bonded to the package so as to arrive at a back surface of the diaphragm.

    摘要翻译: 膜片组件包括在其偏心位置处具有隔膜的硅隔膜块,在隔膜的前表面上形成为压敏元件的扩散电阻器,以及结合到隔膜块的硅支撑板,以覆盖 隔膜的后表面。 隔膜组件在远离隔膜的组件的端部沿块体和支撑板的接合表面的延伸方向密封地容纳在中空包装体的内部并结合到中空包装体的内部。 膜片的前表面和其上的扩散电阻器暴露于真空,同时通过延伸穿过封装件的通道和接合到封装件的组件的端部部分引入测量的流体压力,以便到达后面 隔膜表面。

    Pressure sensor
    4.
    发明授权
    Pressure sensor 失效
    压力传感器

    公开(公告)号:US4315236A

    公开(公告)日:1982-02-09

    申请号:US109476

    申请日:1980-01-04

    摘要: A sensor block is disposed within a package and includes a semiconductor diaphragm and a circumferential support bonded to the inside of the package. The semiconductor diaphragm is provided with at least one diffused resistor layer formed thereon as a pressure-sensitive element, one surface of the diaphragm being subjected to a reference pressure whereas the other surface is subjected to a fluid pressure to be measured. A diaphragm breakage detecting element including an electrical conductor filament is provided zigzagging back and forth laterally across the boundary between the diaphragm and the circumferential support, the point subject to maximum stress, the conductor filament material being of substantially the same mechanical strength as the diaphragm material, so that, when the diaphragm is broken, the conductor filament is also broken, thus allowing immediate indication of the diaphragm breakage. The detecting element may include a U-shaped protrusion extending radially inwards, substantially reaching the center of the diaphragm in order to detect breakage of the diaphragm at the center thereof, where a second maximum stress occurs.

    摘要翻译: 传感器块设置在封装内,并且包括半导体隔膜和结合到封装内部的周向支撑件。 半导体膜片设置有形成在其上的至少一个扩散电阻层作为压敏元件,隔膜的一个表面受到基准压力,而另一个表面经受要测量的流体压力。 包括电导体细丝的隔膜破损检测元件横向跨越隔膜和周向支撑件之间的边界并且受到最大应力的点的横向前后方向设置,导体细丝材料具有与隔膜材料基本相同的机械强度 ,因此当隔膜破裂时,导体细丝也会断裂,从而立即显示隔膜破损。 检测元件可以包括径向向内延伸的U形突起,基本上到达隔膜的中心,以便检测在其中心处出现第二最大应力的隔膜的断裂。

    Electrically charged filter and mask
    5.
    发明授权
    Electrically charged filter and mask 有权
    充电过滤器和面罩

    公开(公告)号:US09289632B2

    公开(公告)日:2016-03-22

    申请号:US13696536

    申请日:2011-05-02

    摘要: Provided is an electrically charged filter which has a high initial filtering efficiency and is not liable to decline in filtering efficiency, by including a liquid-charged nonwoven fabric layer that is charged by application of force via a polar liquid, and a tribo-electrically charged nonwoven fabric layer that is charged by friction between fiber components of a plurality of types.

    摘要翻译: 提供一种带电过滤器,其具有高的初始过滤效率,并且不容易降低过滤效率,包括通过极性液体施加力而带电的带液体的非织造织物层和摩擦带电的 无纺布层,其通过多种类型的纤维部件之间的摩擦而带电。

    ELECTRICALLY CHARGED FILTER AND MASK
    6.
    发明申请
    ELECTRICALLY CHARGED FILTER AND MASK 有权
    电动充电过滤器和面罩

    公开(公告)号:US20130047856A1

    公开(公告)日:2013-02-28

    申请号:US13696536

    申请日:2011-05-02

    IPC分类号: B03C3/30 A62B7/10

    摘要: Provided is an electrically charged filter which has a high initial filtering efficiency and is not liable to decline in filtering efficiency, by including a liquid-charged nonwoven fabric layer that is charged by application of force via a polar liquid, and a tribo-electrically charged nonwoven fabric layer that is charged by friction between fiber components of a plurality of types.

    摘要翻译: 提供一种带电过滤器,其具有高的初始过滤效率,并且不容易降低过滤效率,包括通过极性液体施加力而带电的带液体的非织造织物层和摩擦带电的 无纺布层,其通过多种类型的纤维部件之间的摩擦而带电。