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    QUARTZ GLASS MEMBER FOR PLASMA ETCHING
    1.
    发明申请
    QUARTZ GLASS MEMBER FOR PLASMA ETCHING 审中-公开
    用于等离子体蚀刻的QUARTZ玻璃成员

    公开(公告)号：US20110232847A1

    公开(公告)日：2011-09-29

    申请号：US12671903

    申请日：2008-07-24

    申请人： Tatsuhiro Sato ,  Kyoichi Inaki

    发明人： Tatsuhiro Sato ,  Kyoichi Inaki

    IPC分类号： H01L21/683 ,  C23F1/08

    CPC分类号： C03B19/01 ,  C03B2201/30 ,  C03B2201/34 ,  C03B2201/36 ,  C03B2201/40 ,  C03B2201/54 ,  C03C3/06 ,  C03C2201/36 ,  H01L21/67069 ,  H01L21/68757 ,  Y02P40/57

    摘要： Provided is a doped quartz glass member for plasma etching, which is used in a plasma etching process and is free from any problematic fluoride accumulation during use. The quartz glass member for plasma etching is used as a jig for semiconductor production in a plasma etching process, and includes at least two or more kinds of metal elements in a total amount of 0.01 wt % or more to less than 0.1 wt %, in which the metal elements are formed of at least one kind of a first metal element selected from metal elements belonging to Group 3B of the periodic table and at least one kind of a second metal element selected from the group consisting of Mg, Ca, Sr, Ba, Sc, Y, Ti, Zr, Hf, lanthanoids, and actinoids.

    摘要翻译： 提供了用于等离子体蚀刻的掺杂石英玻璃构件，其用于等离子体蚀刻工艺中，并且在使用期间没有任何有问题的氟化物积聚。 用于等离子体蚀刻的石英玻璃构件用作等离子体蚀刻工艺中的半导体制造的夹具，并且包括总量为0.01重量％以上至小于0.1重量％的至少两种以上的金属元素， 金属元素由选自属于周期表第3B族的金属元素中的至少一种第一金属元素和选自Mg，Ca，Sr等的至少一种第二金属元素形成， Ba，Sc，Y，Ti，Zr，Hf，镧系元素和锕系元素。

    High purity opaque silica glass
    2.
    发明授权
    High purity opaque silica glass 失效
    高纯度不透明石英玻璃

    公开(公告)号：US5977000A

    公开(公告)日：1999-11-02

    申请号：US977887

    申请日：1997-11-25

    申请人： Tatsuhiro Sato ,  Akira Fujinoki ,  Kyoichi Inaki ,  Nobumasa Yoshida ,  Tohru Yokota

    发明人： Tatsuhiro Sato ,  Akira Fujinoki ,  Kyoichi Inaki ,  Nobumasa Yoshida ,  Tohru Yokota

    IPC分类号： C03B5/02 ,  C03B5/08 ,  C03B19/09 ,  C03B20/00 ,  C03C3/06 ,  C03C4/08 ,  C03C11/00

    CPC分类号： C03B5/08 ,  C03B19/09 ,  C03B20/00 ,  C03B5/021 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/80 ,  Y10S501/904 ,  Y10S501/905 ,  Y10T428/249969

    摘要： Opaque silica glass having a density of 2.0 to 2.18 g/cm.sup.3, sodium and potassium elements concentrations in the silica glass of each 0.5 ppm or less and an OH group concentration of 30 ppm or less, and containing bubbles which are independent bubbles having the following physical values: a bubble diameter of 300 .mu.m or less, and a bubble density of 100,000 to 1,000,000 bubbles/cm.sup.3, and a production process for opaque silica glass, including: filling quartz raw material grain having a particle size of 10 to 350 .mu.m in a heat resistant mold, heating it in a non-oxidizing atmosphere from a room temperature up to a temperature lower by 50 to 150.degree. C. than a temperature at which the above raw material grain is melted at a temperature-raising speed not exceeding 50.degree. C./minute, then, slowly heating it up to a temperature higher by 10 to 80.degree. C. than the temperature at which the quartz raw material grain is melted at the speed of 10.degree. C./minute or less, and cooling after maintaining at the above temperature.

    摘要翻译： 密度为2.0〜2.18g / cm 3的不透明二氧化硅玻璃，二氧化硅玻璃中的钠和钾元素浓度为0.5ppm以下，OH基浓度为30ppm以下，并且含有具有以下的独立气泡的气泡 物理值：气泡直径为300μm以下，气泡密度为100,000〜1,000,000个气泡/ cm 3，以及不透明石英玻璃的制造方法，其特征在于，填充粒径为10〜350μm的石英原料粒子 在耐热模具中，将其在非氧化性气氛中从室温加热到低于50-150℃的温度，而不是以不升温速度将上述原料颗粒熔化的温度 超过50℃/分钟，然后缓慢加热至高于10℃至80℃的温度，高于石英原料颗粒以10℃/分钟或更低的速度熔化的温度， 并保持冷却 在上述温度下。

    Process for producing opaque silica glass
    3.
    发明授权
    Process for producing opaque silica glass 失效
    生产不透明石英玻璃的方法

    公开(公告)号：US5772714A

    公开(公告)日：1998-06-30

    申请号：US682962

    申请日：1996-07-18

    申请人： Tatsuhiro Sato ,  Akira Fujinoki ,  Kyoichi Inaki ,  Nobumasa Yoshida ,  Tohru Yokota

    发明人： Tatsuhiro Sato ,  Akira Fujinoki ,  Kyoichi Inaki ,  Nobumasa Yoshida ,  Tohru Yokota

    IPC分类号： C03B5/02 ,  C03B5/08 ,  C03B19/09 ,  C03B20/00 ,  C03C3/06

    CPC分类号： C03B5/08 ,  C03B19/09 ,  C03B20/00 ,  C03B5/021 ,  C03C3/06 ,  C03C2201/02 ,  C03C2201/80 ,  Y10S501/904 ,  Y10S501/905 ,  Y10T428/249969

    摘要： A process for producing opaque silica glass in which a quartz raw material grain having a particle size of 10 to 350 .mu.m is filled into a heat resistant mold, the quartz raw material grain is heated in a non-oxidizing atmosphere from a room temperature up to a temperature lower by 50.degree. to 150.degree. C. than a temperature at which the above raw material grain is melted at a temperature-increase speed not exceeding 50.degree. C./minute, then, slowly heated up to a temperature higher by 10.degree. to 80.degree. C. than the temperature at which the quartz raw material grain is melted at the speed of 10.degree. C./minute or less, and the heated quartz raw material grain is further maintained at the temperature higher by 10.degree. to 80.degree. C. than the temperature at which the quartz raw material grain is melted, followed by cooling down to the room temperature. Especially, in the case of producing a large scale opaque silica glass block, a quartz raw material grain filled into a heat-resistant mold is heated by a belt-like heating source located perpendicularly to a trunk of a filling layer of the quartz raw material grain so as to form a moving heating zone in the filling layer and the heating zone is successively moved either upwardly starting at the lower end portion of the filling layer or downwardly starting at the upper end portion thereof in a non-oxidizing atomosphere.

    摘要翻译： 将具有10〜350μm粒径的石英原料颗粒填充到耐热性模具中的不透明石英玻璃的制造方法，将石英原料颗粒从室温下在非氧化性气氛中加热 比上述原料颗粒以不超过50℃/分钟的升温速度熔化的温度低于50℃至150℃的温度，然后缓慢加热至高于10℃的温度 相对于石英原料粒子以10℃/分钟以下的速度熔融的温度为80℃以下，加热的石英原料粒子进一步保持在10〜80℃ 比石英原料晶粒熔化的温度高，然后冷却至室温。 特别是，在生产大型不透明石英玻璃块的情况下，填充在耐热性模具中的石英原料颗粒通过垂直于石英原料填充层的树干的带状加热源加热 从而在填充层中形成移动的加热区域，并且加热区域从填充层的下端部开始向上移动，或者从非氧化性空气的上端向下移动。

    Black synthetic quartz glass with transparent layer and method for producing the same
    6.
    发明授权
    Black synthetic quartz glass with transparent layer and method for producing the same 有权
    具有透明层的黑色合成石英玻璃及其制造方法

    公开(公告)号：US09051203B2

    公开(公告)日：2015-06-09

    申请号：US13614398

    申请日：2012-09-13

    申请人： Hiroyuki Watanabe ,  Takayuki Imaizumi ,  Tatsuhiro Sato

    发明人： Hiroyuki Watanabe ,  Takayuki Imaizumi ,  Tatsuhiro Sato

    IPC分类号： B32B17/06 ,  C03B20/00 ,  C03C17/04 ,  C03C4/02 ,  C03C3/06 ,  C03C4/08 ,  C03B19/14

    CPC分类号： C03B20/00 ,  C03B19/1453 ,  C03B19/1469 ,  C03C3/06 ,  C03C4/02 ,  C03C4/08 ,  C03C17/04 ,  C03C2203/44

    摘要： Provided in a facile manner are a black synthetic quartz glass with a transparent layer, which meets demands for various shapes, has a black portion satisfying required light shield property and emissivity in an infrared region, keeps a purity equivalent to that of a synthetic quartz glass in terms of metal impurities, has a high-temperature viscosity characteristic comparable to that of a natural quartz glass, can be subjected to high-temperature processing such as welding, does not release carbon from its surface, and is free of bubbles and foreign matter in the transparent layer and the black quartz glass, and at an interface between the transparent layer and the black quartz glass, and a production method therefor.

    摘要翻译： 以简单的方式提供了具有透明层的黑色合成石英玻璃，其满足各种形状的要求，具有满足所需遮光性的黑色部分和红外区域中的发射率，保持与合成石英玻璃相当的纯度 在金属杂质方面，具有与天然石英玻璃相当的高温粘度特性，可以进行诸如焊接的高温加工，不会从其表面释放碳，并且没有气泡和异物 在透明层和黑色石英玻璃中，以及在透明层和黑色石英玻璃之间的界面处，及其制造方法。

    Operation arrangement support system and method thereof
    7.
    发明授权
    Operation arrangement support system and method thereof 有权
    操作布置支持系统及其方法

    公开(公告)号：US08364632B2

    公开(公告)日：2013-01-29

    申请号：US13057231

    申请日：2009-05-18

    申请人： Shuichiro Sakikawa ,  Tatsuhiro Sato ,  Toyohisa Morita ,  Hirotake Yoshida

    发明人： Shuichiro Sakikawa ,  Tatsuhiro Sato ,  Toyohisa Morita ,  Hirotake Yoshida

    IPC分类号： G06F17/30

    CPC分类号： G06F17/30575 ,  B61L27/0027 ,  G06F11/1469 ,  G06T1/60

    摘要： An operation arrangement work is accelerated by improving efficiency of not only process of generating an operation arrangement proposal but also process of confirming whether the operation arrangement proposal is good or not by a user. An operation support system has an operation arrangement proposal generation part (1110) which executes automatic generation of an operation arrangement proposal, a diagram prediction part which executes simulation of train operation in the future, a diagram display part (1120) which displays an operation schedule and the operation arrangement proposal as a diagram, and a user input part which receives input of a parameter from the user. The system has a snapshot restoration part (1130) which restores snapshots of the operation arrangement proposal in an automatic generation process on the basis of a diagram change history outputted by the operation arrangement proposal generation part (1110), and a snapshot display input part (1140) which displays to the user a snapshot according to input from the user.

    摘要翻译： 通过提高不仅生成操作布置方案的处理的效率，而且通过确认用户的操作安排方案是否良好的处理来加快操作布置工作。 操作支持系统具有执行动作排列方案的自动生成的操作安排提案生成部（1110），执行将来的列车运行的模拟的图预测部，显示操作进度的图表显示部（1120） 以及操作安排提案作为图，以及用户输入部分，其从用户接收参数的输入。 该系统具有快照恢复部（1130），其基于由操作安排提案生成部（1110）输出的图表变更历史，以及快照显示输入部（1130），在自动生成处理中恢复操作安排提案的快照， 1140），其根据用户的输入向用户显示快照。

    Computer product, information processing apparatus, and information search apparatus
    8.
    发明授权
    Computer product, information processing apparatus, and information search apparatus 有权
    计算机产品，信息处理装置和信息搜索装置

    公开(公告)号：US08193954B2

    公开(公告)日：2012-06-05

    申请号：US12913225

    申请日：2010-10-27

    申请人： Masahiro Kataoka ,  Tatsuhiro Sato

    发明人： Masahiro Kataoka ,  Tatsuhiro Sato

    IPC分类号： H03M7/40

    CPC分类号： H03M7/40 ,  H03M7/30 ,  H04L29/08072 ,  H04N19/61

    摘要： A recording medium stores an information processing program that causes a computer to execute storing a compression symbol map group having a bit string indicating for each character code, presence or absence of the character code in a file group, and a Huffman tree whose leaf corresponding to the character code has a pointer to a compression symbol map of the character code, the Huffman tree converting the character code into a compression symbol of the character code; compressing sequentially and according to the Huffman tree, a character code to be compressed and described in a file of the file group; detecting access to the leaf at the compressing; identifying by a pointer in the accessed leaf, a compression symbol map of the character code to be compressed; and updating a bit that indicates presence or absence of the character code to be compressed, in the identified compression symbol map.

    摘要翻译： 记录介质存储信息处理程序，使计算机执行存储具有针对每个字符代码指示的位串的压缩符号映射组，文件组中存在或不存在字符代码，以及与叶对应的霍夫曼树 所述字符代码具有指向所述字符代码的压缩符号映射的指针，所述霍夫曼树将所述字符代码转换为所述字符代码的压缩符号; 按照霍夫曼树顺序压缩要在文件组的文件中进行压缩和描述的字符代码; 在压缩时检测叶片的通路; 通过访问的叶中的指针识别要压缩的字符代码的压缩符号图; 并且在所识别的压缩符号图中更新指示要压缩的字符代码的存在或不存在的位。

    Method for producing quartz glass jig and quartz glass jig
    10.
    发明授权
    Method for producing quartz glass jig and quartz glass jig 有权
    生产石英玻璃夹具和石英玻璃夹具的方法

    公开(公告)号：US07497095B2

    公开(公告)日：2009-03-03

    申请号：US10824337

    申请日：2004-04-13

    申请人： Tatsuhiro Sato

    发明人： Tatsuhiro Sato

    IPC分类号： C03B11/00

    CPC分类号： C03C23/008 ,  C03B32/00 ,  C03B2201/03 ,  C03C15/00 ,  C03C23/0075 ,  C30B35/00 ,  H01L21/673

    摘要： The invention provides a method for producing a quartz glass jig for use in semiconductor industries, which enables increasing the surface layer cleanliness simply and surely at low cost; it also provides a quartz glass jig improved in surface layer cleanliness. The inventive means for resolution are a method comprising processing a quartz glass raw material into a desired shape by a treatment inclusive of fire working, annealing for stress removal, and cleaning treatment to obtain the final product, the method is characterized by that it comprises performing gas phase etching step and gas phase purification step on the surface layer of the quartz glass jig after applying the annealing treatment for stress removal but before the cleaning treatment, wherein the gas phase purification step is carried out continuously after the gas phase etching step.

    摘要翻译： 本发明提供一种用于制造半导体工业中使用的石英玻璃夹具的方法，其能够简单且可靠地以低成本提高表面层清洁度; 它还提供了改善表面清洁度的石英玻璃夹具。 本发明的解决方法是一种方法，其包括通过包括消防工作，应力消除退火和清洁处理的处理将石英玻璃原料处理成所需形状以获得最终产品，其特征在于，其包括执行 气相蚀刻工序和气相纯化工序，在进行应力消除后的退火处理之后，在清洗处理之前，在气相蚀刻工序之后连续进行气相纯化工序。