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    Semiconductor device having schottky junction electrode
    1.
    发明申请
    Semiconductor device having schottky junction electrode 失效
    具有肖特基结电极的半导体器件

    公开(公告)号：US20050151255A1

    公开(公告)日：2005-07-14

    申请号：US10518602

    申请日：2003-06-17

    申请人： Yuji Ando ,  Hironobu Miyamoto ,  Yasuhiro Okamoto ,  Kensuke Kasahara ,  Tatsuo Nakayama ,  Masaaki Kuzuhara

    发明人： Yuji Ando ,  Hironobu Miyamoto ,  Yasuhiro Okamoto ,  Kensuke Kasahara ,  Tatsuo Nakayama ,  Masaaki Kuzuhara

    IPC分类号： H01L29/872 ,  H01L21/338 ,  H01L29/20 ,  H01L29/423 ,  H01L29/47 ,  H01L29/778 ,  H01L29/812 ,  H01L31/0328

    CPC分类号： H01L29/7787 ,  H01L29/2003 ,  H01L29/475 ,  H01L29/7781 ,  H01L29/812

    摘要： A GaN semiconductor device with improved heat resistance of the Schottky junction electrode and excellent power performance and reliability is provided. In this semiconductor device having a Schottky gate electrode 17 which is in contact with an AlGaN electron supplying layer 14, a gate electrode 17 comprises a laminated structure wherein a first metal layer 171 formed of any of Ni, Pt and Pd, a second metal layer 172 formed of any of Mo, Pt, W, Ti, Ta, MoSi, PtSi, WSi, TiSi, TaSi, MoN, WN, TiN and TaN, and a third metal layer formed of any of Au, Cu, Al and Pt. Since the second metal layer comprises a metal material having a high melting point, it works as a barrier to the interdiffusion between the first metal layer and the third metal layer, and the deterioration of the gate characteristics caused by high temperature operation is suppressed. Since the first metal layer contacting the AlGaN electron supplying layer 14 has a high work function, the Schottky barrier is high, and superior Schottky contact is obtained.

    摘要翻译： 提供了具有肖特基接合电极的耐热性改善并且具有优异的功率性能和可靠性的GaN半导体器件。 在具有与AlGaN电子供给层14接触的肖特基栅电极17的该半导体器件中，栅电极17包括层叠结构，其中由Ni，Pt和Pd中的任一种形成的第一金属层171，第二金属层 由Mo，Pt，W，Ti，Ta，MoSi，PtSi，WSi，TiSi，TaSi，MoN，WN，TiN和TaN中的任一种形成的第一金属层，以及由Au，Cu，Al和Pt中的任一种形成的第三金属层。 由于第二金属层包括具有高熔点的金属材料，所以它作为第一金属层和第三金属层之间的相互扩散的障碍，并且抑制了由高温操作引起的栅极特性的劣化。 由于与AlGaN电子供给层14接触的第一金属层具有高功函数，所以肖特基势垒高，得到优异的肖特基接触。

    Semiconductor device having Schottky junction electrode
    2.
    发明授权
    Semiconductor device having Schottky junction electrode 失效
    具有肖特基结电极的半导体器件

    公开(公告)号：US07071526B2

    公开(公告)日：2006-07-04

    申请号：US10518602

    申请日：2003-06-17

    申请人： Yuji Ando ,  Hironobu Miyamoto ,  Yasuhiro Okamoto ,  Kensuke Kasahara ,  Tatsuo Nakayama ,  Masaaki Kuzuhara

    发明人： Yuji Ando ,  Hironobu Miyamoto ,  Yasuhiro Okamoto ,  Kensuke Kasahara ,  Tatsuo Nakayama ,  Masaaki Kuzuhara

    IPC分类号： H01L27/095 ,  H01L29/47

    CPC分类号： H01L29/7787 ,  H01L29/2003 ,  H01L29/475 ,  H01L29/7781 ,  H01L29/812

    摘要： A GaN semiconductor device with improved heat resistance of the Schottky junction electrode and excellent power performance and reliability is provided. In this semiconductor device having a Schottky gate electrode 17 which is in contact with an AlGaN electron supplying layer 14, a gate electrode 17 comprises a laminated structure wherein a first metal layer 171 formed of any of Ni, Pt and Pd, a second metal layer 172 formed of any of Mo, Pt, W, Ti, Ta, MoSi, PtSi, WSi, TiSi, TaSi, MoN, WN, TiN and TaN, and a third metal layer formed of any of Au, Cu, Al and Pt. Since the second metal layer comprises a metal material having a high melting point, it works as a barrier to the interdiffusion between the first metal layer and the third metal layer, and the deterioration of the gate characteristics caused by high temperature operation is suppressed. Since the first metal layer contacting the AlGaN electron supplying layer 14 has a high work function, the Schottky barrier is high, and superior Schottky contact is obtained.

    摘要翻译： 提供了具有肖特基接合电极的耐热性改善并且具有优异的功率性能和可靠性的GaN半导体器件。 在具有与AlGaN电子供给层14接触的肖特基栅电极17的该半导体器件中，栅电极17包括层叠结构，其中由Ni，Pt和Pd中的任一种形成的第一金属层171，第二金属层 由Mo，Pt，W，Ti，Ta，MoSi，PtSi，WSi，TiSi，TaSi，MoN，WN，TiN和TaN中的任一种形成的第一金属层，以及由Au，Cu，Al和Pt中的任一种形成的第三金属层。 由于第二金属层包括具有高熔点的金属材料，所以它作为第一金属层和第三金属层之间的相互扩散的障碍，并且抑制了由高温操作引起的栅极特性的劣化。 由于与AlGaN电子供给层14接触的第一金属层具有高功函数，所以肖特基势垒高，得到优异的肖特基接触。

    Semiconductor device
    3.
    发明申请
    Semiconductor device 审中-公开
    半导体器件

    公开(公告)号：US20060054929A1

    公开(公告)日：2006-03-16

    申请号：US10515886

    申请日：2004-11-29

    申请人： Tatsuo Nakayama ,  Yuji Ando ,  Hironobu Miyamoto ,  Kensuke Kasahara ,  Yasuhiro Okamoto ,  Masaaki Kuzuhara

    发明人： Tatsuo Nakayama ,  Yuji Ando ,  Hironobu Miyamoto ,  Kensuke Kasahara ,  Yasuhiro Okamoto ,  Masaaki Kuzuhara

    IPC分类号： H01L31/109

    CPC分类号： H01L29/7783 ,  H01L29/2003

    摘要： A semiconductor device includes, on a substrate (101), a buffer layer (102), and an channel layer (104), consisting essentially of semiconductor of a wultzite compound of group III-V, having a (0001) plane as a principal plane. The channel layer is subjected to compressive strain. A carrier supplying layer (103) is interposed between the channel layer (104) and the buffer layer (102). The carrier supplying layer (103) consists essentially of semiconductor of a wultzite compound of group III-V as a main component. N-type impurities are doped into the entire or part of the carrier supplying layer (103).

    摘要翻译： 半导体器件在衬底（101）上包括缓冲层（102）和沟道层（104），该沟道层（104）主要由具有（0001）面作为主体的III-V族的无丝绒化合物的半导体组成 飞机 通道层经受压应变。 载体供给层（103）插入在沟道层（104）和缓冲层（102）之间。 载体供给层（103）主要由作为主要成分的III-V族的无水锰矿化合物的半导体构成。 N型杂质被掺杂到载体供给层（103）的整个或部分中。

    Group III nitride semiconductor device of field effect transistor type having reduced parasitic capacitances
    7.
    发明授权
    Group III nitride semiconductor device of field effect transistor type having reduced parasitic capacitances 失效
    具有降低的寄生电容的场效应晶体管类型的III族氮化物半导体器件

    公开(公告)号：US06765241B2

    公开(公告)日：2004-07-20

    申请号：US10362883

    申请日：2003-02-27

    申请人： Yasuo Ohno ,  Nobuyuki Hayama ,  Kensuke Kasahara ,  Tatsuo Nakayama ,  Hironobu Miyamoto ,  Yuji Takahashi ,  Yuji Ando ,  Kohji Matsunaga ,  Masaaki Kuzuhara

    发明人： Yasuo Ohno ,  Nobuyuki Hayama ,  Kensuke Kasahara ,  Tatsuo Nakayama ,  Hironobu Miyamoto ,  Yuji Takahashi ,  Yuji Ando ,  Kohji Matsunaga ,  Masaaki Kuzuhara

    IPC分类号： H01L29812

    CPC分类号： H01L29/8126 ,  H01L21/0242 ,  H01L21/02458 ,  H01L21/0254 ,  H01L29/045 ,  H01L29/2003

    摘要： A group III nitride semiconductor device of field effect transistor type having improved productivity, reduced parasitic capacitances adapted for excellent device performance in high-speed operation as well as good heat diffusion characteristics. The device includes an epitaxial growth layer of a group III nitride semiconductor with a buffer layer laid under it, formed on an A plane (an (11-20) plane) of a sapphire. Thereon a gate electrode, a source electrode, a drain electrode, and pad electrodes are formed, and a ground conductor layer is formed on the back face of the sapphire substrate. A thickness of said sapphire substrate tsub satisfies the following Equation (1). t sub ≦ 10 ⁢ ϵ sub ⁢ S pad ϵ epi ⁢ S gate ⁢ t act where Spad is an area of the pad electrode; Sgate is an area of the gate electrode; &egr;sub is a relative permittivity of the sapphire substrate in the direction of the thickness; &egr;epi is a relative permittivity of the group III nitride semiconductor layer in the direction of the thickness; tsub is a thickness of the sapphire substrate; and tact is an effective thickness of the group III nitride semiconductor layer.

    摘要翻译： 具有提高生产率的场效应晶体管类型的III族氮化物半导体器件，适于在高速操作中优异的器件性能以及良好的热扩散特性的减小的寄生电容。 该器件包括形成在蓝宝石的A平面（（11-20）面）上的具有缓冲层的III族氮化物半导体的外延生长层。 在其上形成栅电极，源电极，漏电极和焊盘电极，并且在蓝宝石衬底的背面上形成接地导体层。 所述蓝宝石衬底tsub的厚度满足以下等式（1）。其中，Spad是焊盘电极的面积; Sgate是栅电极的面积; epsilonsub是蓝宝石衬底在厚度方向上的相对介电常数;εilon 是III族氮化物半导体层在厚度方向上的相对介电常数; tsub是蓝宝石衬底的厚度; andtact是III族氮化物半导体层的有效厚度。