公开(公告)号：US20080038585A1

公开(公告)日：2008-02-14

申请号：US11575874

申请日：2005-10-07

申请人： Teruhiko Kumada ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Norihisa Matsumoto ,  Shigeru Matsuno

发明人： Teruhiko Kumada ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Norihisa Matsumoto ,  Shigeru Matsuno

IPC分类号： C23C8/00

CPC分类号： C23C16/38 ,  H01L21/318 ,  H01L21/76801

摘要： The present invention provides a method of manufacturing a film including the steps of using a compound with borazine skeleton (preferably a compound expressed by a chemical formula (1) below (where R1-R6 may be identical with or different from each other, and are each independently selected from a group consisting of a hydrogen atom, and an alkyl group, an alkenyl group and an alkynyl group each having a carbon number of 1-4, on condition that at least one of R1-R6 is not the hydrogen atom)) as a raw material, and forming the film on a substrate by using a chemical vapor deposition method, characterized in that a negative charge is applied to a site for placing the substrate, and a semiconductor device utilizing a film manufactured by the method. With the present invention, it is possible to provide a method of manufacturing a film, which method stably provides a low dielectric constant and a high mechanical strength over a long period of time, reduces the amount of a gas component (outgas) emitted in heating the film, and avoids any trouble in the device manufacturing process.

摘要翻译： 本发明提供一种膜的制造方法，其包括使用具有环硼氮烷骨架的化合物（优选以下述化学式（1）表示的化合物（其中R 1〜R 6） 并且各自独立地选自氢原子和烷基，链烯基和各自具有碳数为1-4的炔基， 条件是R 1 -R 6中的至少一个不是氢原子））作为原料，并且通过使用化学气相在基板上形成该膜 沉积方法，其特征在于将负电荷施加到用于放置所述衬底的位置，以及利用通过所述方法制造的膜的半导体器件。 通过本发明，可以提供一种膜的制造方法，该方法在长时间内稳定地提供低介电常数和高机械强度，减少了在加热中排出的气体成分（废气）的量 并避免了设备制造过程中的任何麻烦。

公开(公告)号：US20080029027A1

公开(公告)日：2008-02-07

申请号：US11577008

申请日：2005-10-07

申请人： Teruhiko Kumada ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Norihisa Matsumoto ,  Shigeru Matsuno

发明人： Teruhiko Kumada ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Norihisa Matsumoto ,  Shigeru Matsuno

IPC分类号： C23C16/00

CPC分类号： C23C16/38 ,  H01L21/318 ,  H01L21/76801

摘要： The present invention provides a plasma CVD device including means for supplying a compound with borazine skeleton, a plasma generator for generating a plasma, and means for applying a negative charge to an electrode for placing a substrate. According to the present invention, it is possible to provide a plasma CVD device which stably provides a low dielectric constant and a high mechanical strength over a long period of time, reducing the amount of a gas component (outgas) emitted in heating the film, and causing no trouble in a device manufacturing process.

摘要翻译： 本发明提供了一种等离子体CVD装置，其包括用于提供化合物与硼嗪骨架的装置，用于产生等离子体的等离子体发生器，以及用于将负电荷施加到用于放置基板的电极的装置。 根据本发明，可以提供一种能够长时间稳定地提供低介电常数和高机械强度的等离子体CVD装置，减少在加热膜时排出的气体成分（废气）的量， 并且在设备制造过程中没有麻烦。

公开(公告)号：US08288294B2

公开(公告)日：2012-10-16

申请号：US13001256

申请日：2009-06-25

申请人： Hidetaka Kafuku ,  Toshihito Fujiwara ,  Toshihiko Nishimori ,  Tadashi Shimazu ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Teruhiko Kumada ,  Takuya Kamiyama ,  Tetsuya Yamamoto ,  Shinya Shibata

发明人： Hidetaka Kafuku ,  Toshihito Fujiwara ,  Toshihiko Nishimori ,  Tadashi Shimazu ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Teruhiko Kumada ,  Takuya Kamiyama ,  Tetsuya Yamamoto ,  Shinya Shibata

IPC分类号： H01L21/31

CPC分类号： H01L21/318 ,  C23C16/342 ,  C23C16/507 ,  H01L21/02112 ,  H01L21/02274 ,  H01L23/5329 ,  H01L2924/0002 ,  H01L2924/00

摘要： An object is to provide an insulating film for a semiconductor device which has characteristics of a low permittivity, a low leakage current, and a high mechanical strength, undergoes less change in these characteristics with the elapse of time, and has an excellent water resistance, as well as to provide a process and an apparatus for producing the insulating film for a semiconductor device, a semiconductor device, and a process for producing the semiconductor device. A gas containing a raw material gas which gasified a predetermined alkylborazine compound is supplied in a chamber (2); an electromagnetic wave is introduced into the chamber (2) using with an inductive coupling type plasma generation mechanism (4, 5, 6) to convert the gas into a plasma; a substrate (8) is placed in a plasma diffusion region of the plasma; gas-phase polymerization is performed with borazine skeletal molecules, as a fundamental unit, dissociated from the alkylborazine compound by the plasma so as to form the insulating film for semiconductor devices on the substrate (8).

摘要翻译： 本发明的目的是提供具有低介电常数，低漏电流和高机械强度特性的半导体器件用绝缘膜，随着时间的推移，这些特性的变化变小，具有优异的耐水性， 以及提供用于制造用于半导体器件的绝缘膜，半导体器件和用于制造半导体器件的工艺的工艺和设备。 在室（2）内供给含有气化了规定的烷基
硼氮化合物的原料气体的气体。 使用电感耦合型等离子体产生机构（4,5,6）将电磁波引入腔室（2），以将气体转换成等离子体; 将衬底（8）放置在等离子体的等离子体扩散区域中; 用作为基本单元的环硼烷骨架分子进行气相聚合，通过等离子体与烷基硼氮化合物离解，从而在基板（8）上形成用于半导体器件的绝缘膜。

公开(公告)号：US07981790B2

公开(公告)日：2011-07-19

申请号：US12683949

申请日：2010-01-07

申请人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Kinya Goto ,  Masazumi Matsuura

发明人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Kinya Goto ,  Masazumi Matsuura

IPC分类号： H01L21/4763

CPC分类号： H01L21/02271 ,  H01L21/314 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76831 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/76835

摘要： There is provided a semiconductor device and method of fabricating the same that employs an insulation film of a borazine-based compound to provided enhanced contact between a material for insulation and that for interconnection, increased mechanical strength, and other improved characteristics. The semiconductor device includes a first insulation layer having a recess with a first conductor layer buried therein, an etching stopper layer formed on the first insulation layer, a second insulation layer formed on the etching stopper layer, a third insulation layer formed on the second insulation layer, and a second conductor layer buried in a recess of the second and third insulation layers. The second and third insulation layers are grown by chemical vapor deposition with a carbon-containing borazine compound used as a source material and the third insulation layer is smaller in carbon content than the second insulation layer.

摘要翻译： 提供一种半导体器件及其制造方法，其采用环硼氮烷化合物的绝缘膜，以提供绝缘材料和互连材料，增加的机械强度和其它改进的特性之间的增强的接触。 半导体器件包括具有埋设有第一导体层的凹部的第一绝缘层，形成在第一绝缘层上的蚀刻阻挡层，形成在蚀刻停止层上的第二绝缘层，形成在第二绝缘层上的第三绝缘层 层，以及埋在第二绝缘层和第三绝缘层的凹部中的第二导体层。 第二绝缘层和第三绝缘层通过化学气相沉积生长，其中含有碳源的环硼氮烷化合物用作源材料，第三绝缘层的碳含量比第二绝缘层小。

公开(公告)号：US20100181654A1

公开(公告)日：2010-07-22

申请号：US12664605

申请日：2009-06-13

申请人： Toshihito Fujiwara ,  Toshihiko Nishimori ,  Toshiya Watanabe ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Teruhiko Kumada ,  Chiho Mizushima ,  Takuya Kamiyama ,  Tetsuya Yamamoto

发明人： Toshihito Fujiwara ,  Toshihiko Nishimori ,  Toshiya Watanabe ,  Naoki Yasuda ,  Hideharu Nobutoki ,  Teruhiko Kumada ,  Chiho Mizushima ,  Takuya Kamiyama ,  Tetsuya Yamamoto

IPC分类号： H01L23/58 ,  H01L21/471

CPC分类号： H01L21/02118 ,  C23C16/342 ,  C23C16/505 ,  H01L21/02274 ,  H01L21/02348 ,  H01L21/02351 ,  H01L21/312 ,  H01L21/76801

摘要： An object to provide an insulating film for a semiconductor device, which has characteristics of low permittivity, a low leak current, and high mechanical strength, undergoes small time-dependent change of these characteristics, and has excellent water resistance, and to provide a manufacturing apparatus of the same, and a manufacturing method of the semiconductor device using the insulating film. The production process comprises a film forming step of supplying a mixed gas containing a carrier gas and a raw material gas, which is a gasified material having borazine skeletal molecules, into a chamber, causing the mixed gas to be in a plasma state, applying a bias to the substrate placed in the chamber, and carrying out gas-phase polymerization by using the borazine skeletal molecule as a fundamental unit so as to form the insulating film on the substrate; and a reaction promoting step of, after the film forming step, bringing the bias applied to the substrate to a different magnitude from the bias in the film forming step, supplying the mixed gas while gradually reducing only the raw material gas, which is the gasified material having the borazine skeletal molecules, treating the insulating film with a plasma mainly comprising the carrier gas.

摘要翻译： 提供具有低介电常数，低泄漏电流和高机械强度特性的半导体器件绝缘膜的目的是经历这些特性的小的时间依赖性变化，并且具有优异的耐水性，并且提供制造 以及使用该绝缘膜的半导体器件的制造方法。 制造方法包括：将含有载气的混合气体和作为具有环硼氮烷骨架分子的气化材料的原料气体供给到室中的成膜工序，使混合气体处于等离子体状态， 偏置于放置在室内的基板上，通过使用环硼氮烷骨架分子作为基本单元进行气相聚合，以在基板上形成绝缘膜; 以及反应促进步骤，在成膜步骤之后，使得施加到基板上的偏压与成膜步骤中的偏压大小不同，供给混合气体，同时逐渐减少气化的原料气体 具有环硼烷骨架分子的材料，以主要包含载气的等离子体处理绝缘膜。

公开(公告)号：US08404314B2

公开(公告)日：2013-03-26

申请号：US12294645

申请日：2007-03-23

申请人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda

发明人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda

IPC分类号： C23C8/00 ,  H01L23/58

CPC分类号： C23C16/30 ,  C23C16/342 ,  C23C16/511 ,  H01J37/32532 ,  H01L21/318

摘要： A plasma CVD apparatus including a reaction chamber including an inlet for supplying a compound including a borazine skeleton, a feeding electrode, arranged within the reaction chamber, for supporting a substrate and being applied with a negative charge, and a plasma generating mechanism, arranged opposite to the feeding electrode via the substrate, for generating a plasma within the reaction chamber. A method forms a thin film wherein a thin film is formed by using a compound including a borazine skeleton as a raw material, and a semiconductor device includes a thin film formed by such a method as an insulating film. The apparatus and method enable to produce a thin film wherein low dielectric constant and high mechanical strength are stably maintained for a long time and insulating characteristics are secured.

摘要翻译： 一种等离子体CVD装置，包括反应室，该反应室包括用于供给包含环硼氮烷骨架的化合物的入口，设置在反应室内的供电电极，用于支撑基板并施加负电荷;以及等离子体产生机构， 经由衬底到达馈电电极，用于在反应室内产生等离子体。 一种方法形成薄膜，其中通过使用包含环硼氮烷骨架的化合物作为原料形成薄膜，并且半导体器件包括通过诸如绝缘膜的方法形成的薄膜。 该装置和方法能够制造其中低介电常数和高机械强度长时间稳定地保持并且确保绝缘特性的薄膜。

公开(公告)号：US20090232987A1

公开(公告)日：2009-09-17

申请号：US12084568

申请日：2006-11-15

申请人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Tetsuya Yamamoto ,  Yasutaka Nakatani ,  Takuya Kamiyama

发明人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Tetsuya Yamamoto ,  Yasutaka Nakatani ,  Takuya Kamiyama

IPC分类号： C23C16/00 ,  C09D5/00

CPC分类号： C23C16/342 ,  C07F5/02 ,  C23C16/30 ,  H01L21/314 ,  H01L21/318

摘要： The present invention provides a composition for chemical vapor deposition film-formation comprising a borazine compound represented by the Chemical Formula 1 satisfying at least one of a condition that content of each halogen atom in the composition is 100 ppb or less or a condition that content of each metal element in the composition is 100 ppb or less. In the Chemical Formula 1, R1 may be the same or different, and is hydrogen atom, alkyl group, alkenyl group or alkynyl group, and at least one thereof is hydrogen atom; R2 may be the same or different, and is hydrogen atom, alkyl group, alkenyl group or alkynyl group, and at least one thereof is alkyl group, alkenyl group or alkynyl group. By using the composition, physical properties such as low dielectric constant property and mechanical strength of the thin film produced from a borazine-ring-containing compound can be improved.

摘要翻译： 本发明提供一种化学气相沉积膜形成用组合物，其含有化学式1表示的环硼氮烷化合物，其满足以下条件中的至少一种：组合物中的各卤素原子的含量为100ppb以下， 组合物中的每种金属元素为100ppb以下。 在化学式1中，R 1可以相同或不同，为氢原子，烷基，链烯基或炔基，其中至少一个为氢原子; R2可以相同或不同，为氢原子，烷基，烯基或炔基，其中至少一个为烷基，烯基或炔基。 通过使用该组合物，可以提高由含有环硼氮烷的化合物制造的薄膜的低介电常数性能和机械强度等物理性能。

公开(公告)号：US20100112805A1

公开(公告)日：2010-05-06

申请号：US12683949

申请日：2010-01-07

申请人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Kinya Goto ,  Masazumi Matsuura

发明人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Kinya Goto ,  Masazumi Matsuura

IPC分类号： H01L21/768

CPC分类号： H01L21/02271 ,  H01L21/314 ,  H01L21/76826 ,  H01L21/76829 ,  H01L21/76831 ,  H01L21/76832 ,  H01L21/76834 ,  H01L21/76835

摘要： There is provided a semiconductor device and method of fabricating the same that employs an insulation film of a borazine-based compound to provided enhanced contact between a material for insulation and that for interconnection, increased mechanical strength, and other improved characteristics. The semiconductor device includes a first insulation layer having a recess with a first conductor layer buried therein, an etching stopper layer formed on the first insulation layer, a second insulation layer formed on the etching stopper layer, a third insulation layer formed on the second insulation layer, and a second conductor layer buried in a recess of the second and third insulation layers. The second and third insulation layers are grown by chemical vapor deposition with a carbon-containing borazine compound used as a source material and the third insulation layer is smaller in carbon content than the second insulation layer.

摘要翻译： 提供一种半导体器件及其制造方法，其采用环硼氮烷化合物的绝缘膜，以提供绝缘材料和互连材料，增加的机械强度和其它改进的特性之间的增强的接触。 半导体器件包括具有埋设有第一导体层的凹部的第一绝缘层，形成在第一绝缘层上的蚀刻阻挡层，形成在蚀刻停止层上的第二绝缘层，形成在第二绝缘层上的第三绝缘层 层，以及埋在第二绝缘层和第三绝缘层的凹部中的第二导体层。 第二绝缘层和第三绝缘层通过化学气相沉积生长，其中含有碳源的环硼氮烷化合物用作源材料，第三绝缘层的碳含量比第二绝缘层小。

公开(公告)号：US20050181628A1

公开(公告)日：2005-08-18

申请号：US11107800

申请日：2005-04-18

申请人： Hideharu Nobutoki ,  Teruhiko Kumada ,  Toshiyuki Toyoshima ,  Naoki Yasuda ,  Suguru Nagae

发明人： Hideharu Nobutoki ,  Teruhiko Kumada ,  Toshiyuki Toyoshima ,  Naoki Yasuda ,  Suguru Nagae

IPC分类号： C08G79/08 ,  H01L21/312 ,  H01L21/314 ,  H01L21/768 ,  H01L23/522 ,  H01L23/532 ,  H01L29/51 ,  H01L21/8242

CPC分类号： H01L21/02118 ,  H01L21/02164 ,  H01L21/312 ,  H01L21/314 ,  H01L21/76801 ,  H01L21/76828 ,  H01L21/76829 ,  H01L21/76834 ,  H01L21/76835 ,  H01L23/53238 ,  H01L23/5329 ,  H01L29/51 ,  H01L2924/0002 ,  H01L2924/12044 ,  H01L2924/3011 ,  H01L2924/00

摘要： A process for preparing a low dielectric constant material comprising heat-treating a compound containing a borazine skeleton structure of the formula: wherein at least one of R1 to R6 is a bond which binds said borazine skeleton structure to a molecule of a inorganic or organic compound, and/or R1 to R6 are independently a hydrogen atom, an alkyl group having 1 to 20 carbon atoms, an aryl group, a substituted aryl group, an alkenyl group, an amino group, an alkylamino group, an alkoxyl group, a thioalkoxyl group, a carbonyl group, a silyl group, an alkylsilyl group, a phosphino group, an alkylphosphino group or a group of the formula: Si(OR7)(OR8)(OR9), and at least one of R1 to R6 is not a hydrogen atom.

摘要翻译： 一种制备低介电常数材料的方法，包括热处理含有下式的环硼氮烷骨架结构的化合物：其中R 1至R 6中的至少一个为 将所述环硼氮烷骨架结构结合成无机或有机化合物的分子和/或R 1至R 6的键独立地为氢原子，具有1个 20个碳原子，芳基，取代芳基，烯基，氨基，烷基氨基，烷氧基，硫代烷氧基，羰基，甲硅烷基，烷基甲硅烷基，膦基， 烷基膦基或下式的基团：Si（OR 7）（OR 8）（OR 9））和至少一个 R 1至R 6不是氢原子。

公开(公告)号：US08846148B2

公开(公告)日：2014-09-30

申请号：US12084568

申请日：2006-11-15

申请人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Tetsuya Yamamoto ,  Yasutaka Nakatani ,  Takuya Kamiyama

发明人： Teruhiko Kumada ,  Hideharu Nobutoki ,  Naoki Yasuda ,  Tetsuya Yamamoto ,  Yasutaka Nakatani ,  Takuya Kamiyama

IPC分类号： C23C16/00 ,  C07F5/02 ,  C23C16/30 ,  H01L21/314 ,  C23C16/34 ,  H01L21/318

CPC分类号： C23C16/342 ,  C07F5/02 ,  C23C16/30 ,  H01L21/314 ,  H01L21/318

摘要： A composition for chemical vapor deposition film-formation comprising a borazine compound represented by the Chemical Formula 1 satisfying at least one of a condition that content of each halogen atom in the composition is 100 ppb or less or a condition that content of each metal element in the composition is 100 ppb or less. In the Chemical Formula 1, R1 may be the same or different, and is hydrogen atom, alkyl group, alkenyl group or alkynyl group, and at least one thereof is hydrogen atom; R2 may be the same or different, and is hydrogen atom, alkyl group, alkenyl group or alkynyl group, and at least one thereof is alkyl group, alkenyl group or alkynyl group.

摘要翻译： 一种用于化学气相沉积膜形成的组合物，其包含由化学式1表示的环硼氮烷化合物，其满足组合物中每个卤素原子的含量为100ppb以下的条件中的至少一种或每种金属元素的含量 组合物为100ppb以下。 在化学式1中，R 1可以相同或不同，为氢原子，烷基，链烯基或炔基，其中至少一个为氢原子; R2可以相同或不同，为氢原子，烷基，烯基或炔基，其中至少一个为烷基，烯基或炔基。