公开(公告)号：US06172857B2

公开(公告)日：2001-01-09

申请号：US09225913

申请日：1999-01-05

申请人： Teruo Inaguma ,  Seiji Onoe ,  Hiroshi Kano ,  Yoshito Ikeda ,  Seiichi Onodera

发明人： Teruo Inaguma ,  Seiji Onoe ,  Hiroshi Kano ,  Yoshito Ikeda ,  Seiichi Onodera

IPC分类号： G11B552

CPC分类号： G11B5/53 ,  G11B5/0086 ,  G11B5/23 ,  G11B5/4893

摘要： A magnetoresistive head includes a magnetoresistive element sandwiched between a pair of soft magnetic material-made shields to detect signal from a magnetic tape under a magnetoresistance effect, the magnetoresistive element having a magnetic sensor disposed obliquely, at a predetermined azimuth angle, to a direction perpendicular in which the magnetic tape is fed or moved; the magnetoresistive head being installed on a rotating drum to read signal on the magnetic tape by the helical scanning method. A recording/reproducing apparatus includes a rotating drum having installed thereon the magnetoresistive head as reading head and an inductive magnetic head as writing head, to write and/or read signal from the magnetic tape by the helical scanning method.

摘要翻译： 磁阻头包括夹在一对软磁材料制成的屏蔽之间以在磁阻效应下检测来自磁带的信号的磁阻元件，磁阻元件具有以预定的方位角倾斜地垂直于垂直方向 其中磁带被馈送或移动; 磁阻头安装在旋转鼓上，通过螺旋扫描方法读取磁带上的信号。一种记录/再现装置，包括：旋转鼓，其上安装有作为读取头的磁阻头和作为书写头的感应磁头， 通过螺旋扫描方法从磁带写入和/或读取信号。

公开(公告)号：US20110146401A1

公开(公告)日：2011-06-23

申请号：US12968700

申请日：2010-12-15

申请人： Teruo Inaguma ,  Junichi Honda ,  Takanori Aoto ,  Koki Hino ,  Kazuo Takahashi ,  Hiroshi Onuma

发明人： Teruo Inaguma ,  Junichi Honda ,  Takanori Aoto ,  Koki Hino ,  Kazuo Takahashi ,  Hiroshi Onuma

IPC分类号： G01C19/56

CPC分类号： G01C19/5628

摘要： Provided is an angular velocity sensor including a first vibration element, a second vibration element, and a support substrate. The first vibration element detects a first angular velocity about an axis parallel to a first direction. The second vibration element detects a second angular velocity about an axis parallel to a second direction obliquely intersecting with the first direction, and generates an output signal corresponding to a third angular velocity about an axis parallel to a third direction orthogonal to the first direction. The support substrate supports the first vibration element and the second vibration element.

摘要翻译： 提供了包括第一振动元件，第二振动元件和支撑基板的角速度传感器。 第一振动元件围绕平行于第一方向的轴线检测第一角速度。 第二振动元件检测围绕平行于与第一方向倾斜相交的第二方向的轴的第二角速度，并且产生对应于平行于与第一方向正交的第三方向的轴的第三角速度的输出信号。 支撑基板支撑第一振动元件和第二振动元件。

公开(公告)号：US20100000322A1

公开(公告)日：2010-01-07

申请号：US12491915

申请日：2009-06-25

申请人： Junichi Honda ,  Teruo Inaguma ,  Tetsuya Shibayama

发明人： Junichi Honda ,  Teruo Inaguma ,  Tetsuya Shibayama

IPC分类号： G01C19/56 ,  H05K3/36

CPC分类号： G01C19/5628 ,  G01C19/5621

摘要： Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer.

摘要翻译： 公开了一种角速度传感器。 角速度传感器包括第一层，压电层和第二层。 第一层具有第一主表面和第二主表面，并且包括振动器部分和支撑振动器部分的基部。 压电层形成在第一层的第一主表面上。 第二层在第一层的第二主表面的一侧整体地结合到基部。

公开(公告)号：US07325452B2

公开(公告)日：2008-02-05

申请号：US11368153

申请日：2006-03-03

申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

IPC分类号： G01P3/00 ,  G01P9/00

CPC分类号： G01C19/5663 ,  Y10T29/49002

摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

摘要翻译： 一种振动陀螺仪传感器，包括振动陀螺传感器元件，所述振动陀螺传感器元件包括悬臂振子，所述振动器包括压电膜，驱动电极和在第一表面上的一对检测电极以及安装所述振动陀螺传感器元件的支撑基板。 振动陀螺传感器元件安装在支撑基板上，使得悬臂振动器的第一表面面向支撑基板。 将悬臂振子的第一面以外的区域定义为要设置用于调节悬臂振动器的振动特性的凹陷的激光加工区域。

公开(公告)号：US20060197414A1

公开(公告)日：2006-09-07

申请号：US11368144

申请日：2006-03-03

申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Junichi Honda ,  Koji Suzuki ,  Shigeto Watanabe ,  Shin Sasaki ,  Eiji Nakashio ,  Manabu Aizawa

IPC分类号： H01L41/113

CPC分类号： G01C19/5663 ,  G01C19/5783

摘要： A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.

摘要翻译： 振动陀螺传感器包括支撑基板，其上形成有多个平台的布线图案，以及安装在支撑基板的表面上的振动元件，其中至少两个振动元件安装在支撑基板上，用于检测不同的振动 轴向。

公开(公告)号：US20060196267A1

公开(公告)日：2006-09-07

申请号：US11368153

申请日：2006-03-03

申请人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

发明人： Kazuo Takahashi ,  Teruo Inaguma ,  Manabu Aizawa ,  Koji Suzuki ,  Shin Sasaki ,  Eiji Nakashio

IPC分类号： G01P15/08

CPC分类号： G01C19/5663 ,  Y10T29/49002

摘要： A vibrating gyroscopic sensor including a vibrating gyroscopic sensor element including a cantilever vibrator that includes a piezoelectric film, a driving electrode, and a pair of detection electrodes on a first surface, and a support substrate on which the vibrating gyroscopic sensor element is mounted. The vibrating gyroscopic sensor element is mounted on the support substrate so that the first surface of the cantilever vibrator faces the support substrate. An area other than the first surface of the cantilever vibrator is defined as a laser processing area where a depression for adjusting the vibration characteristics of the cantilever vibrator is to be provided.

摘要翻译： 一种振动陀螺仪传感器，包括振动陀螺传感器元件，所述振动陀螺传感器元件包括悬臂振子，所述振动器包括压电膜，驱动电极和在第一表面上的一对检测电极以及安装所述振动陀螺传感器元件的支撑基板。 振动陀螺传感器元件安装在支撑基板上，使得悬臂振动器的第一表面面向支撑基板。 将悬臂振子的第一面以外的区域定义为要设置用于调节悬臂振动器的振动特性的凹陷的激光加工区域。

公开(公告)号：US20050241395A1

公开(公告)日：2005-11-03

申请号：US11088480

申请日：2005-03-24

申请人： Kazuo Takahashi ,  Takashi Tamura ,  Junichi Honda ,  Teruo Inaguma

发明人： Kazuo Takahashi ,  Takashi Tamura ,  Junichi Honda ,  Teruo Inaguma

IPC分类号： G01C19/56 ,  G01C19/5656 ,  G01C19/5663 ,  H01L41/08 ,  H01L41/18 ,  H01L41/22 ,  H01L41/29 ,  H01L41/311

CPC分类号： G01C19/5642

摘要： Disclosed is a small-sized vibration type gyrosensor device of high sensitivity provided with a cantilevered oscillator. A cantilevered oscillator 11, provided with a lower electrode, a piezoelectric film and an upper electrode, formed on a single-crystal silicon substrate by a thin film forming process, includes, as an upper electrode, a driving electrode 6a, formed along the length of the oscillator 11 for applying the voltage for causing oscillations of the oscillator 11, and first and second detection electrodes 6b, 6c, formed on both sides of the driving electrode 6a parallel to the longitudinal direction of the oscillator, without contacting with the driving electrode 6a. With a width W0 of the driving electrode 6a, a width W1 of the first detection electrode 6b, a width W2 of the second detection electrode 6c and with W=W0+W1+W2, the condition of 0.5

摘要翻译： 公开了一种具有悬臂振荡器的高灵敏度的小型振动式陀螺仪。 通过薄膜形成工艺在单晶硅衬底上形成的具有下电极，压电膜和上电极的悬臂振荡器11包括沿着上电极形成的驱动电极6a， 用于施加用于引起振荡器11的振荡的电压的振荡器11的长度以及形成在驱动电极6的平行于振荡器的纵向的两侧上的第一和第二检测电极6b，6c，而不接触 与驱动电极6a连接。 驱动电极6a的宽度W 0，第一检测电极6b的宽度W 1，第二检测电极6c的宽度W 2，W = W 0 + W 1 + W 2，条件 为0.5 <（W 0 / W）<1。

公开(公告)号：US08516888B2

公开(公告)日：2013-08-27

申请号：US12491915

申请日：2009-06-25

申请人： Junichi Honda ,  Teruo Inaguma ,  Tetsuya Shibayama

发明人： Junichi Honda ,  Teruo Inaguma ,  Tetsuya Shibayama

IPC分类号： G01C19/00

CPC分类号： G01C19/5628 ,  G01C19/5621

摘要： Disclosed is an angular velocity sensor. The angular velocity sensor includes a first layer, a piezoelectric layer, and a second layer. The first layer has a first main surface and a second main surface, and includes a vibrator portion and a base portion that supports the vibrator portion. The piezoelectric layer is formed on the first main surface of the first layer. The second layer is integrally bonded to the base portion on a side of the second main surface of the first layer.

摘要翻译： 公开了一种角速度传感器。 角速度传感器包括第一层，压电层和第二层。 第一层具有第一主表面和第二主表面，并且包括振动器部分和支撑振动器部分的基部。 压电层形成在第一层的第一主表面上。 第二层在第一层的第二主表面的一侧整体地结合到基部。

公开(公告)号：US07428776B2

公开(公告)日：2008-09-30

申请号：US10737566

申请日：2003-12-16

申请人： Teruo Inaguma

发明人： Teruo Inaguma

IPC分类号： G11B5/17 ,  H05K3/06

CPC分类号： H01F5/003 ,  G11B5/127 ,  G11B5/17 ,  G11B5/3103 ,  G11B5/313 ,  H01F17/0006 ,  H01F41/042 ,  Y10T29/49041 ,  Y10T29/4906 ,  Y10T29/49062 ,  Y10T29/49073 ,  Y10T29/49155 ,  Y10T29/49156

摘要： A method of manufacturing a thin-film coil in which a first coil and a second coil each having a desired number of winding are electrically connected in series and the second coil is formed between winding portions of the first coil on substantially the same plane, comprising: forming the first coil having a predetermined number of windings via a first insulating film; forming a second insulating film on a surface of the first coil and between the winding portions of the first coil; forming an underlying conductive film on the second insulating film, and treating the underlying conductive film so as to leave only the bottom portions of the underlying conducting film between the winding portions of the first coil; and growing deposition originating from a remaing portion of the underlying conductive film on the bottom portions of the underlying conducting film between the winding portions of the first coil so as to form the second coil.

摘要翻译： 一种制造薄膜线圈的方法，其中具有期望数量的绕组的第一线圈和第二线圈串联地电连接，并且第二线圈形成在基本上在同一平面上的第一线圈的绕组部分之间，包括 ：经由第一绝缘膜形成具有预定数量的绕组的第一线圈; 在所述第一线圈的表面和所述第一线圈的绕组部之间形成第二绝缘膜; 在第二绝缘膜上形成下面的导电膜，并处理下面的导电膜，以便仅使底层导电膜的底部部分在第一线圈的绕组部分之间; 以及源自在第一线圈的绕组部分之间的下面的导电膜的底部上的下面的导电膜的再一部分的沉积，以形成第二线圈。

公开(公告)号：US20080196498A1

公开(公告)日：2008-08-21

申请号：US11960041

申请日：2007-12-19

申请人： Koji Suzuki ,  Teruo Inaguma ,  Kazuo Takahashi

发明人： Koji Suzuki ,  Teruo Inaguma ,  Kazuo Takahashi

IPC分类号： G01C19/56 ,  H01L41/22

CPC分类号： G01C19/5642 ,  Y10T29/42

摘要： A piezoelectric device is disclosed. A substrate has an arm portion. A piezoelectric member is disposed on the substrate. A drive electrode oscillates the arm portion by a piezoelectric operation of the piezoelectric member. First and second detection electrodes detect a Coriolis force from the oscillating arm portion. A first lead electrode having a first area is disposed on the substrate and connected to the first detection electrode and connects the first detection electrode to the outside. A second lead electrode has a second area substantially the same as the first area. The second lead electrode is disposed on the substrate asymmetrical to the first lead electrode with respect to an axis in a longitudinal direction of the arm portion and connected to the second detection electrode. The second lead electrode connects the second detection electrode to the outside. A third lead electrode connects the drive electrode to the outside.

摘要翻译： 公开了一种压电装置。 基板具有臂部。 压电构件设置在基板上。 驱动电极通过压电元件的压电操作来振荡臂部。 第一和第二检测电极从摆动臂部分检测科里奥利力。 具有第一区域的第一引线电极设置在基板上并连接到第一检测电极，并将第一检测电极连接到外部。 第二引线电极具有与第一区域基本相同的第二区域。 第二引线电极相对于臂部的长度方向的轴线配置在与第一引线电极不对称的基板上，并与第二检测电极连接。 第二引线电极将第二检测电极连接到外部。 第三引线电极将驱动电极连接到外部。