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公开(公告)号：US20210388498A1
公开(公告)日：2021-12-16
申请号：US17285182
申请日：2019-10-15
发明人： J. Gary Eden , Sung-Jin Park , Andrey Mironov , Jinhong Kim
IPC分类号： C23C16/455 , H01L21/02 , H01J37/32 , C23C16/40 , C23C16/509 , C23C16/48
摘要： An in-chamber plasma source in a deposition reactor system includes an array of microcavity or microchannel plasma devices having a first electrode and a second electrode isolated from plasma in microcavities or microchannels. An inlet provides connection to deposition precursor. A region interacts deposition precursor with plasma. An outlet directs precursor dissociated with the plasma onto a substrate for deposition. A reactor system includes a substrate holder across from the outlet, a chamber enclosing the in-chamber plasma source and the substrate holder, an exhaust from the chamber, and conduit supplying precursors from sources or bubblers to the inlet. A reactor system can conduct plasma enhanced atomic layer deposition at high pressures and is capable of forming a complete layer in a single cycle.
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公开(公告)号：US09800011B2
公开(公告)日：2017-10-24
申请号：US14149396
申请日：2014-01-07
发明人： J. Gary Eden , John Darby Hewitt
CPC分类号： H01S3/094096 , H01S3/0408 , H01S3/094092 , H01S3/0941 , H01S3/095 , H01S3/2207 , H01S3/227
摘要： A laser pumping method pumps a primary amount of energy into a laser medium to populate an intermediate level near an upper laser level. A lesser amount of energy is pumped into the laser medium to populate an excited level that lies above the upper laser level and transfers atomic or molecular population to the upper laser level by a nonradiative process. A laser device includes a laser medium supporting four levels, including a lower laser level, an upper laser level, an excited level above the laser level from which population transfers to the upper laser level via nonradiative transition, and an intermediate level within a few kT of the upper laser level.
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3.发明申请EFFICIENT DISSOCIATION OF WATER VAPOR IN ARRAYS OF MICROCHANNEL PLASMA DEVICES 审中-公开水蒸汽在微波等离子体装置阵列中的有效分解公开(公告)号：US20160327310A1
公开(公告)日：2016-11-10
申请号：US15150107
申请日：2016-05-09
发明人： Zhen Dai , Thomas J. Houlahan , J. Gary Eden , Sung-Jin Park
CPC分类号： F24H1/186 , B01J19/0093 , B01J19/088 , B01J2219/00786 , B01J2219/00795 , B01J2219/00824 , B01J2219/0084 , B01J2219/00853 , B01J2219/0086 , B01J2219/00959 , B01J2219/0841 , B01J2219/0894 , C01B3/045 , C01B13/0207 , C01B2203/0861 , Y02E60/364
摘要： The invention provides methods and systems for water dissociation with microplasma generated in microchannel plasma arrays or chips. Preferred methods and systems introduce water vapor into a microchannel plasma array. Electrical power is applied to the microchannel plasma array to create a plasma chemical reaction of the water vapor in the micorchannel plasma array. Dissociated hydrogen and/or oxygen gas is collected at an output of the microchannel plasma array. The water vapor can be entrained in a carrier gas, but is preferably introduced without carrier gas. Direct introduction of water vapor has been demonstrated to provide efficiencies at an above 60%. The use of carrier gas reduces efficiency, but still exceeds efficiencies of prior methods discussed in the background.
摘要翻译： 本发明提供了在微通道等离子体阵列或芯片中产生的用于水解离的微生物的方法和系统。 优选的方法和系统将水蒸气引入微通道等离子体阵列。 将电功率施加到微通道等离子体阵列以产生微通道等离子体阵列中的水蒸气的等离子体化学反应。 在微通道等离子体阵列的输出处收集离解的氢和/或氧气。 水蒸汽可以夹带在载气中，但优选在没有载气的情况下引入。 已经证明直接引入水蒸汽提供了高于60％的效率。 载气的使用降低了效率，但是仍然超过了在背景技术中讨论的现有方法的效率。
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4.发明授权Modular microplasma microchannel reactor devices, miniature reactor modules and ozone generation devices 有权模块化微等离子体微通道反应器装置，微型反应堆模块和臭氧发生装置公开(公告)号：US09390894B2
公开(公告)日：2016-07-12
申请号：US14495306
申请日：2014-09-24
发明人： J. Gary Eden , Min Hwan Kim , Jin Hoon Cho , Sung-Jin Park
IPC分类号： B01J19/08 , H01J37/32 , A23L3/3409 , C02F1/78 , A23L3/3445 , B01J19/00 , H05H1/24 , C01B13/10
CPC分类号： H01J37/32568 , A23L3/34095 , A23L3/3445 , A23V2002/00 , B01J19/0093 , B01J2219/00783 , B01J2219/00806 , B01J2219/0081 , B01J2219/00822 , B01J2219/00853 , B01J2219/0086 , B01J2219/00867 , B01J2219/00869 , B01J2219/00871 , B01J2219/0093 , C01B13/10 , C02F1/78 , C02F2305/02 , H01J37/32798 , H01J37/32908 , H01J2237/327 , H05H1/2406 , H05H2001/2418
摘要： A preferred modular microplasma microchannel reactor device includes a microchannel array arranged with respect to electrodes for generation of plasma and isolated by dielectric from the electrodes. A cover covers a central portion of the microchannel array, while leaving end portions of the microchannel array exposed. A gas inlet and product outlet are arranged to permit flow into, through and out of the microchannel array. Reactor modules of the invention include pluralities of the modular reactor devices. The reactors devices can be arranged by a housing or a frame to be in fluid communication. A system of the invention arranges pluralities of modules. Preferred module housings, frames and reactors include structural features to create alignments and connections. Preferred modules include fans to circulate feedstock and reaction product. Other reactor devices provide plasma actuation for flow.
摘要翻译： 优选的模块化微等离子体微通道反应器装置包括相对于用于产生等离子体并由电极通过电介质隔离的电极而布置的微通道阵列。 盖子覆盖微通道阵列的中心部分，同时使微通道阵列的端部暴露。 气体入口和产品出口布置成允许流入，通过和流出微通道阵列。 本发明的反应器模块包括多个模块化反应器装置。 反应器装置可以由壳体或框架布置成流体连通。 本发明的系统安排多个模块。 优选的模块外壳，框架和反应器包括用于产生对准和连接的结构特征。 优选的模块包括用于循环原料和反应产物的风扇。 其他反应器装置为流动提供等离子体驱动。
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公开(公告)号：US09263558B2
公开(公告)日：2016-02-16
申请号：US14452032
申请日：2014-08-05
发明人： J. Gary Eden , Paul A. Tchertchian , Clark J. Wagner , Dane J. Sievers , Thomas J. Houlahan , Benben Li
CPC分类号： H01J17/36 , H01J17/066 , H01J17/49 , H01J17/497 , H01L29/66234 , H01L29/73 , H01L33/02
摘要： A hybrid plasma semiconductor device has a thin and flexible semiconductor base layer. An emitter region is diffused into the base layer forming a pn-junction. An insulator layer is upon one side the base layer and emitter region. Base and emitter electrodes are isolated from each other by the insulator layer and electrically contact the base layer and emitter region through the insulator layer. A thin and flexible collector layer is upon an opposite side of the base layer. A microcavity is formed in the collector layer and is aligned with the emitter region. Collector electrodes are arranged to sustain a microplasma within the microcavity with application of voltage to the collector electrodes. A depth of the emitter region and a thickness of the base layer are set to define a predetermined thin portion of the base layer as a base region between the emitter region and the microcavity. Microplasma generated in the microcavity serves as a collector. Logic devices are provided in multiple sub collector and sub emitter microplasma devices formed in thin and flexible or not flexible semiconductor materials.
摘要翻译： 复合等离子体半导体器件具有薄且柔性的半导体基底层。 发射极区域扩散到形成pn结的基极层中。 绝缘体层位于基极层和发射极区域的一侧。 基极和发射极通过绝缘体层彼此隔离，并通过绝缘体层与基极层和发射极区域电接触。 薄且柔性的集电极层位于基层的相对侧。 在集电极层中形成微腔并与发射极区对准。 集电极被布置为通过向集电极施加电压来维持微腔内的微量。 将发射极区域的深度和基极层的厚度设定为将基底层的预定薄部分定义为发射极区域和微腔体之间的基极区域。 在微腔中产生的微血管作为收集器。 逻辑器件设置在形成为薄且柔性或不柔性半导体材料的多个子集电极和子发射体微质体器件中。
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公开(公告)号：US09184341B2
公开(公告)日：2015-11-10
申请号：US14330254
申请日：2014-07-14
发明人： J. Gary Eden , Paul A. Tchertchian , Clark J. Wagner , Dane J. Sievers , Thomas J. Houlahan , Benben Li
CPC分类号： H01L33/02 , H01J17/066 , H01J17/49 , H01L29/0821 , H01L29/7317
摘要： Preferred embodiment flexible and on wafer hybrid plasma semiconductor devices have at least one active solid state semiconductor region; and a plasma generated in proximity to the active solid state semiconductor region(s). A preferred device is a hybrid plasma semiconductor device having base, emitting and microcavity collector regions formed on a single side of a device layer. Visible or ultraviolet light is emitted during operation by plasma collectors in the array. In preferred embodiments, individual PBJTs in the array serve as sub-pixels of a full-color display.
摘要翻译： 优选实施例柔性和晶片上混合等离子体半导体器件具有至少一个活性固态半导体区域; 以及在活性固态半导体区域附近产生的等离子体。 优选的装置是混合等离子体半导体器件，其具有形成在器件层的单侧上的基极，发射和微腔集电极区域。 在阵列中的等离子体收集器的操作期间发出可见光或紫外光。 在优选实施例中，阵列中的各个PBJT用作全色显示器的子像素。
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公开(公告)号：US20140319654A1
公开(公告)日：2014-10-30
申请号：US14330254
申请日：2014-07-14
发明人： J. Gary Eden , Paul A. Tchertchian , Clark J. Wagner , Dane J. Sievers , Thomas J. Houlahan , Benben Li
IPC分类号： H01L33/02
CPC分类号： H01L33/02 , H01J17/066 , H01J17/49 , H01L29/0821 , H01L29/7317
摘要： Preferred embodiment flexible and on wafer hybrid plasma semiconductor devices have at least one active solid state semiconductor region; and a plasma generated in proximity to the active solid state semiconductor region(s). A preferred device is a hybrid plasma semiconductor device having base, emitting and microcavity collector regions formed on a single side of a device layer. Visible or ultraviolet light is emitted during operation by plasma collectors in the array. In preferred embodiments, individual PBJTs in the array serve as sub-pixels of a full-color display.
摘要翻译： 优选实施例柔性和晶片上混合等离子体半导体器件具有至少一个活性固态半导体区域; 以及在活性固态半导体区域附近产生的等离子体。 优选的装置是混合等离子体半导体器件，其具有形成在器件层的单侧上的基极，发射和微腔集电极区域。 在阵列中的等离子体收集器的操作期间发出可见光或紫外光。 在优选实施例中，阵列中的各个PBJT用作全色显示器的子像素。
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公开(公告)号：US11690160B2
公开(公告)日：2023-06-27
申请号：US17012539
申请日：2020-09-04
发明人： J. Gary Eden , Peng Sun , Wenyuan Chen , Yin Huang
IPC分类号： H05H1/24
CPC分类号： H05H1/2406 , H05H1/2431 , H05H1/2437
摘要： The invention provides a microplasma photonic crystal for reflecting, transmitting and/or storing incident electromagnetic energy includes a periodic array of elongate microtubes confining microplasma therein and having a column-to-column spacing, average electron density and plasma column diameter selected to produce a photonic response to the incident electromagnetic energy entailing the increase or suppression of crystal resonances and/or shifting the frequency of the resonances. The crystal also includes electrodes for stimulating microplasma the elongated microtubes Electromagnetic energy can be interacted with the periodic array of microplasma to reflect, transmit and/or trap the incident electromagnetic energy.
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公开(公告)号：US20190252843A1
公开(公告)日：2019-08-15
申请号：US15778535
申请日：2016-11-21
发明人： Jose A. Rivera , Tom Galvin , J. Gary Eden
摘要： A resonator is provided that includes opposing mirrors arranged substantially parallel to each other and separated to confine reflections for gain. A gain medium is between the opposing mirrors. A pump pumps the gain medium. At least one microrefractive element, or tens, hundreds, thousands, millions or more, stabilizes the resonator. The refractive element is disposed between the opposing mirrors and is configured to support a laser beam at a position of the refractive element. A method for producing laser light directs pump light onto one or a plurality of microrefractive elements. Reflections from the one or a plurality of microrefractive elements are confined in a resonator volume. Gain is provided in the resonator volume. Laser energy is emitted from the resonator volume.
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10.发明授权Logic function generation from single microplasma transistor devices and arrays of devices 有权单个微等离子体晶体管器件和器件阵列的逻辑功能生成公开(公告)号：US09330877B2
公开(公告)日：2016-05-03
申请号：US14727156
申请日：2015-06-01
发明人： J. Gary Eden , Paul A. Tchertchian , Clark J. Wagner , Dane J. Sievers , Thomas J. Houlahan , Benben Li
CPC分类号： H01J17/36 , H01J17/066 , H01J17/49 , H01J17/497 , H01L29/66234 , H01L29/73 , H01L33/02
摘要： Logic devices are provided in multiple sub-collector and sub-emitter microplasma devices formed in thin and flexible, or inflexible, semiconductor materials. Logic operations are provided with one of a plurality of microplasmas forming sub-collectors with a common emitter, or a common collector plasma with a plurality of sub-emitter regions in a solid state semi-conductor pn-junction, and generating a logic output from an electrode, based upon electrode inputs to two other electrodes.
摘要翻译： 逻辑器件设置在以薄而柔性或不灵活的半导体材料形成的多个子集电极和子发射极微质体器件中。 逻辑运算具有多个微型积分器中的一种，其形成具有公共发射极的子集电极，或者具有在固态半导体pn结中具有多个子发射极区域的公共集电极等离子体，并且产生逻辑输出 电极，基于电极输入到另外两个电极。
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