公开(公告)号：US10548210B2

公开(公告)日：2020-01-28

申请号：US15279057

申请日：2016-09-28

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Paul V. Braun ,  Sung-Jin Park ,  Hee Jun Yang ,  Peng Sun ,  Runyu Zhang

IPC分类号： H05H1/24

摘要： Non-disperse, periodic microplasmas are generated in a volume lacking interfering structures, such as electrodes, to enable photonic interaction between incident electromagnetic energy and the non-disperse, periodic microplasmas. Preferred embodiments leverage 1D, 2D, 3D and super 3D non-disperse, periodic microplasmas. In preferred embodiments, the non-disperse, periodic microplasmas are elongate columnar microplasmas. In other embodiments, the non-disperse, periodic microplasmas are discrete isolated microplasmas. The photonic properties can change by selectively activating groups of the periodic microplasmas.

公开(公告)号：US20170207523A1

公开(公告)日：2017-07-20

申请号：US15279057

申请日：2016-09-28

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Paul V. Braun ,  Sung-Jin Park ,  Hee Jun Yang ,  Peng Sun

IPC分类号： H01Q1/36

CPC分类号： H05H1/2406 ,  H05H1/24 ,  H05H2001/2412

摘要： Non-disperse, periodic microplasmas are generated in a volume lacking interfering structures, such as electrodes, to enable photonic interaction between incident electromagnetic energy and the non-disperse, periodic microplasmas. Preferred embodiments leverage 1D, 2D, 3D and super 3D non-disperse, periodic microplasmas. In preferred embodiments, the non-disperse, periodic microplasmas are elongate columnar microplasmas. In other embodiments, the non-disperse, periodic microplasmas are discrete isolated microplasmas. The photonic properties can change by selectively activating groups of the periodic microplasmas.

公开(公告)号：US20210388498A1

公开(公告)日：2021-12-16

申请号：US17285182

申请日：2019-10-15

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Sung-Jin Park ,  Andrey Mironov ,  Jinhong Kim

IPC分类号： C23C16/455 ,  H01L21/02 ,  H01J37/32 ,  C23C16/40 ,  C23C16/509 ,  C23C16/48

摘要： An in-chamber plasma source in a deposition reactor system includes an array of microcavity or microchannel plasma devices having a first electrode and a second electrode isolated from plasma in microcavities or microchannels. An inlet provides connection to deposition precursor. A region interacts deposition precursor with plasma. An outlet directs precursor dissociated with the plasma onto a substrate for deposition. A reactor system includes a substrate holder across from the outlet, a chamber enclosing the in-chamber plasma source and the substrate holder, an exhaust from the chamber, and conduit supplying precursors from sources or bubblers to the inlet. A reactor system can conduct plasma enhanced atomic layer deposition at high pressures and is capable of forming a complete layer in a single cycle.

公开(公告)号：US20180099257A1

公开(公告)日：2018-04-12

申请号：US15728986

申请日：2017-10-10

申请人： The Board of Trustees of the University of Illinois

发明人： James Gary Eden ,  Sung-Jin Park ,  Charles Shin ,  Andrey Mironov

IPC分类号： B01J19/00 ,  C01B13/11

CPC分类号： B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00853 ,  B01J2219/0086 ,  B01J2219/0093 ,  B01J2219/00936 ,  B01J2219/0095 ,  B01J2219/0801 ,  B01J2219/0807 ,  B01J2219/083 ,  B01J2219/0835 ,  B01J2219/0841 ,  B01J2219/0843 ,  B01J2219/0894 ,  B01J2219/2402 ,  B01J2219/2419 ,  C01B13/115 ,  C01B2201/22 ,  C01B2201/82

摘要： A method for generating a hybrid reaction flows feedstock gas that is also a plasma medium through microchannels. Plasma is generated with the plasma medium via excitation with a time-varying voltage. UV or VUV emissions are generated at a wavelength selected to break a chemical bond in the feedstock gas. The UV or VUV emissions are directed into the microchannels to interact with the plasma medium and generate a reaction product from the plasma medium. A hybrid reactor device includes a microchannel plasma array having inlets and outlets for respectively flowing gas feedstock into and reaction product out of the microchannel plasma array. A UV or VUV emission lamp has its emissions directed into microchannels of the microchannel plasma array. Electrodes ignite plasma in the microchannels and stimulating the UV or VUV emission lamp to generate UV or VUV emissions. One common or plural phased time-varying voltage sources drive the plasma array and the UV or VUV emission lamp.

公开(公告)号：US20160327310A1

公开(公告)日：2016-11-10

申请号：US15150107

申请日：2016-05-09

申请人： The Board of Trustees of the University of Illinois

发明人： Zhen Dai ,  Thomas J. Houlahan ,  J. Gary Eden ,  Sung-Jin Park

IPC分类号： F24H1/18 ,  B01J19/08 ,  C01B3/04

CPC分类号： F24H1/186 ,  B01J19/0093 ,  B01J19/088 ,  B01J2219/00786 ,  B01J2219/00795 ,  B01J2219/00824 ,  B01J2219/0084 ,  B01J2219/00853 ,  B01J2219/0086 ,  B01J2219/00959 ,  B01J2219/0841 ,  B01J2219/0894 ,  C01B3/045 ,  C01B13/0207 ,  C01B2203/0861 ,  Y02E60/364

摘要： The invention provides methods and systems for water dissociation with microplasma generated in microchannel plasma arrays or chips. Preferred methods and systems introduce water vapor into a microchannel plasma array. Electrical power is applied to the microchannel plasma array to create a plasma chemical reaction of the water vapor in the micorchannel plasma array. Dissociated hydrogen and/or oxygen gas is collected at an output of the microchannel plasma array. The water vapor can be entrained in a carrier gas, but is preferably introduced without carrier gas. Direct introduction of water vapor has been demonstrated to provide efficiencies at an above 60%. The use of carrier gas reduces efficiency, but still exceeds efficiencies of prior methods discussed in the background.

摘要翻译： 本发明提供了在微通道等离子体阵列或芯片中产生的用于水解离的微生物的方法和系统。 优选的方法和系统将水蒸气引入微通道等离子体阵列。 将电功率施加到微通道等离子体阵列以产生微通道等离子体阵列中的水蒸气的等离子体化学反应。 在微通道等离子体阵列的输出处收集离解的氢和/或氧气。 水蒸汽可以夹带在载气中，但优选在没有载气的情况下引入。 已经证明直接引入水蒸汽提供了高于60％的效率。 载气的使用降低了效率，但是仍然超过了在背景技术中讨论的现有方法的效率。

公开(公告)号：US09390894B2

公开(公告)日：2016-07-12

申请号：US14495306

申请日：2014-09-24

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Min Hwan Kim ,  Jin Hoon Cho ,  Sung-Jin Park

IPC分类号： B01J19/08 ,  H01J37/32 ,  A23L3/3409 ,  C02F1/78 ,  A23L3/3445 ,  B01J19/00 ,  H05H1/24 ,  C01B13/10

CPC分类号： H01J37/32568 ,  A23L3/34095 ,  A23L3/3445 ,  A23V2002/00 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00806 ,  B01J2219/0081 ,  B01J2219/00822 ,  B01J2219/00853 ,  B01J2219/0086 ,  B01J2219/00867 ,  B01J2219/00869 ,  B01J2219/00871 ,  B01J2219/0093 ,  C01B13/10 ,  C02F1/78 ,  C02F2305/02 ,  H01J37/32798 ,  H01J37/32908 ,  H01J2237/327 ,  H05H1/2406 ,  H05H2001/2418

摘要： A preferred modular microplasma microchannel reactor device includes a microchannel array arranged with respect to electrodes for generation of plasma and isolated by dielectric from the electrodes. A cover covers a central portion of the microchannel array, while leaving end portions of the microchannel array exposed. A gas inlet and product outlet are arranged to permit flow into, through and out of the microchannel array. Reactor modules of the invention include pluralities of the modular reactor devices. The reactors devices can be arranged by a housing or a frame to be in fluid communication. A system of the invention arranges pluralities of modules. Preferred module housings, frames and reactors include structural features to create alignments and connections. Preferred modules include fans to circulate feedstock and reaction product. Other reactor devices provide plasma actuation for flow.

摘要翻译： 优选的模块化微等离子体微通道反应器装置包括相对于用于产生等离子体并由电极通过电介质隔离的电极而布置的微通道阵列。 盖子覆盖微通道阵列的中心部分，同时使微通道阵列的端部暴露。 气体入口和产品出口布置成允许流入，通过和流出微通道阵列。 本发明的反应器模块包括多个模块化反应器装置。 反应器装置可以由壳体或框架布置成流体连通。 本发明的系统安排多个模块。 优选的模块外壳，框架和反应器包括用于产生对准和连接的结构特征。 优选的模块包括用于循环原料和反应产物的风扇。 其他反应器装置为流动提供等离子体驱动。

公开(公告)号：US20150270110A1

公开(公告)日：2015-09-24

申请号：US14495306

申请日：2014-09-24

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Min Hwan Kim ,  Jin Hoon Cho ,  Sung-Jin Park

IPC分类号： H01J37/32 ,  A23L3/3409 ,  C02F1/78

CPC分类号： H01J37/32568 ,  A23L3/34095 ,  A23L3/3445 ,  A23V2002/00 ,  B01J19/0093 ,  B01J2219/00783 ,  B01J2219/00806 ,  B01J2219/0081 ,  B01J2219/00822 ,  B01J2219/00853 ,  B01J2219/0086 ,  B01J2219/00867 ,  B01J2219/00869 ,  B01J2219/00871 ,  B01J2219/0093 ,  C01B13/10 ,  C02F1/78 ,  C02F2305/02 ,  H01J37/32798 ,  H01J37/32908 ,  H01J2237/327 ,  H05H1/2406 ,  H05H2001/2418

摘要： A preferred modular microplasma microchannel reactor device includes a microchannel array arranged with respect to electrodes for generation of plasma and isolated by dielectric from the electrodes. A cover covers a central portion of the microchannel array, while leaving end portions of the microchannel array exposed. A gas inlet and product outlet are arranged to permit flow into, through and out of the microchannel array. Reactor modules of the invention include pluralities of the modular reactor devices. The reactors devices can be arranged by a housing or a frame to be in fluid communication. A system of the invention arranges pluralities of modules. Preferred module housings, frames and reactors include structural features to create alignments and connections. Preferred modules include fans to circulate feedstock and reaction product. Other reactor devices provide plasma actuation for flow.

摘要翻译： 优选的模块化微等离子体微通道反应器装置包括相对于用于产生等离子体并由电极通过电介质隔离的电极而布置的微通道阵列。 盖子覆盖微通道阵列的中心部分，同时使微通道阵列的端部暴露。 气体入口和产品出口布置成允许流入，通过和流出微通道阵列。 本发明的反应器模块包括多个模块化反应器装置。 反应器装置可以由壳体或框架布置成流体连通。 本发明的系统安排多个模块。 优选的模块外壳，框架和反应器包括用于产生对准和连接的结构特征。 优选的模块包括用于循环原料和反应产物的风扇。 其他反应器装置为流动提供等离子体驱动。

公开(公告)号：US08870618B2

公开(公告)日：2014-10-28

申请号：US13971443

申请日：2013-08-20

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Sung-Jin Park ,  JeKwon Yoon ,  Brian Chung

IPC分类号： H01J9/02 ,  H05H1/24 ,  C02F1/461 ,  C01B13/10 ,  H01T21/00 ,  C02F1/48 ,  C02F1/46 ,  C02F1/32 ,  B01D53/32 ,  C02F1/78

CPC分类号： H01T21/00 ,  B01D53/32 ,  B01D2257/104 ,  B01D2257/91 ,  B01D2258/06 ,  B01D2259/818 ,  C01B13/10 ,  C02F1/32 ,  C02F1/4608 ,  C02F1/46109 ,  C02F1/48 ,  C02F1/78 ,  C02F2001/46133 ,  C02F2001/46152 ,  C02F2303/04 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2245/121

摘要： Methods of the invention can form microtip microplasma devices having the first and second metal microtips and metal oxide in a monolithic, unitary structure. Methods can form arrays that can be flexible, can be arranged in stacks, and can be formed into cylinders, for example, for gas and liquid processing devices, air filters and other applications. A preferred method of forming an array of microtip microplasma devices provides a metal mesh with an array of micro openings therein. Electrode areas of the metal mesh are masked leaving planned connecting metal oxide areas of the metal mesh unmasked. Planned connecting metal oxide areas are electrochemically etched to convert the planned connecting metal oxide areas to metal oxide that encapsulates opposing metal microtips therein. The mask is removed. The electrode areas are electrochemically etched to encapsulate the electrode areas in metal oxide.

摘要翻译： 本发明的方法可以形成具有第一和第二金属微尖端和金属氧化物的单片，整体结构的微尖端微型装置。 方法可以形成可以是柔性的阵列，可以堆叠布置，并且可以形成为例如气体和液体处理装置，空气过滤器等应用的气缸。 形成微尖锐微量器件阵列的优选方法提供了金属网，其中具有微孔开口阵列。 金属网的电极区域被掩蔽，留下金属网的计划连接的金属氧化物区域未被掩蔽。 计算的连接金属氧化物区域进行电化学蚀刻，以将计划的连接金属氧化物区域转换成在其中封装相对的金属微尖端的金属氧化物。 去除面具。 电化学蚀刻电极区域以将电极区域包封在金属氧化物中。

公开(公告)号：US20130337718A1

公开(公告)日：2013-12-19

申请号：US13971443

申请日：2013-08-20

申请人： The Board of Trustees of the University of Illinois

发明人： J. Gary Eden ,  Sung-Jin Park ,  Jekwon Yoon ,  Brian Chung

IPC分类号： H01T21/00

CPC分类号： H01T21/00 ,  B01D53/32 ,  B01D2257/104 ,  B01D2257/91 ,  B01D2258/06 ,  B01D2259/818 ,  C01B13/10 ,  C02F1/32 ,  C02F1/4608 ,  C02F1/46109 ,  C02F1/48 ,  C02F1/78 ,  C02F2001/46133 ,  C02F2001/46152 ,  C02F2303/04 ,  H05H1/2406 ,  H05H2001/2418 ,  H05H2245/121

摘要： Methods of the invention can form microtip microplasma devices having the first and second metal microtips and metal oxide in a monolithic, unitary structure. Methods can form arrays that can be flexible, can be arranged in stacks, and can be formed into cylinders, for example, for gas and liquid processing devices, air filters and other applications. A preferred method of forming an array of microtip microplasma devices provides a metal mesh with an array of micro openings therein. Electrode areas of the metal mesh are masked leaving planned connecting metal oxide areas of the metal mesh unmasked. Planned connecting metal oxide areas are electrochemically etched to convert the planned connecting metal oxide areas to metal oxide that encapsulates opposing metal microtips therein. The mask is removed. The electrode areas are electrochemically etched to encapsulate the electrode areas in metal oxide.

摘要翻译： 本发明的方法可以形成具有第一和第二金属微尖端和金属氧化物的单片，整体结构的微尖端微型装置。 方法可以形成可以是柔性的阵列，可以堆叠布置，并且可以形成为例如气体和液体处理装置，空气过滤器等应用的气缸。 形成微尖锐微量器件阵列的优选方法提供了金属网，其中具有微孔开口阵列。 金属网的电极区域被掩蔽，留下金属网的计划连接的金属氧化物区域未被掩蔽。 计算的连接金属氧化物区域进行电化学蚀刻，以将计划的连接金属氧化物区域转换成在其中封装相对的金属微尖端的金属氧化物。 去除面具。 电化学蚀刻电极区域以将电极区域包封在金属氧化物中。

公开(公告)号：US10240815B2

公开(公告)日：2019-03-26

申请号：US15150107

申请日：2016-05-09

申请人： The Board of Trustees of the University of Illinois

发明人： Zhen Dai ,  Thomas J. Houlahan ,  J. Gary Eden ,  Sung-Jin Park

IPC分类号： F24H1/18 ,  B01J19/08 ,  C01B3/04 ,  B01J19/00 ,  C01B13/02

摘要： The invention provides methods and systems for water dissociation with microplasma generated in microchannel plasma arrays or chips. Preferred methods and systems introduce water vapor into a microchannel plasma array. Electrical power is applied to the microchannel plasma array to create a plasma chemical reaction of the water vapor in the microchannel plasma array. Dissociated hydrogen and/or oxygen gas is collected at an output of the microchannel plasma array. The water vapor can be entrained in a carrier gas, but is preferably introduced without carrier gas. Direct introduction of water vapor has been demonstrated to provide efficiencies at an above 60%. The use of carrier gas reduces efficiency, but still exceeds efficiencies of prior methods discussed in the background.