公开(公告)号：US20110248700A1

公开(公告)日：2011-10-13

申请号：US13124913

申请日：2009-09-29

申请人： Thomas Huber ,  Martin Nirschl ,  Dana Pitzer ,  Matthias Schreiter

发明人： Thomas Huber ,  Martin Nirschl ,  Dana Pitzer ,  Matthias Schreiter

IPC分类号： G01R29/22

CPC分类号： G01N29/036 ,  G01N29/022 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426

摘要： A device for detecting at least one substance of a fluid, has a piezoacoustic thin film resonator with a piezoelectric layer on which electrode layers are arranged, and an adsorption surface for adsorbing the fluid substance, wherein the piezoelectric and electrode layers and the adsorption surface are designed and arranged on each other such that by electrically activating the electrode layers, an excitation alternating field can be coupled into the piezoelectric layer. The thin film resonator can be excited to a resonance oscillation frequency fR which depends on an amount of the substance adsorbed on the adsorption surface because of an excitation alternating field coupled into the piezoelectric layer. An electrical insulating layer is arranged directly on a side of one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of an aluminum electrode layer and a silicon dioxide insulating layer.

摘要翻译： 一种用于检测至少一种流体物质的装置，具有压电层薄膜谐振器，其上设置有电极层的压电层和用于吸附流体物质的吸附表面，其中压电层和电极层和吸附面是 设计和布置在彼此之间，使得通过电激活电极层，激励交变场可耦合到压电层中。 可以将薄膜谐振器激发到谐振振荡频率fR，其取决于吸附在吸附表面上的物质的量，因为耦合到压电层中的激发交变场。 电绝缘层直接布置在背离压电层的一个电极层的一侧上。 铝电极层和二氧化硅绝缘层的组合特别有利。

公开(公告)号：US09046464B2

公开(公告)日：2015-06-02

申请号：US13124913

申请日：2009-09-29

申请人： Thomas Huber ,  Martin Nirschl ,  Dana Pitzer ,  Matthias Schreiter

发明人： Thomas Huber ,  Martin Nirschl ,  Dana Pitzer ,  Matthias Schreiter

IPC分类号： G01R29/22 ,  G01N29/036 ,  G01N29/02

CPC分类号： G01N29/036 ,  G01N29/022 ,  G01N2291/0255 ,  G01N2291/0256 ,  G01N2291/0426

摘要： A device for detecting at least one substance of a fluid, has a piezoacoustic thin film resonator with a piezoelectric layer on which electrode layers are arranged, and an adsorption surface for adsorbing the fluid substance, wherein the piezoelectric and electrode layers and the adsorption surface are designed and arranged on each other such that by electrically activating the electrode layers, an excitation alternating field can be coupled into the piezoelectric layer. The thin film resonator can be excited to a resonance oscillation frequency fR which depends on an amount of the substance adsorbed on the adsorption surface because of an excitation alternating field coupled into the piezoelectric layer. An electrical insulating layer is arranged directly on a side of one of the electrode layers facing away from the piezoelectric layer. Particularly advantageous is the combination of an aluminum electrode layer and a silicon dioxide insulating layer.

摘要翻译： 一种用于检测至少一种流体物质的装置，具有压电层薄膜谐振器，其上设置有电极层的压电层和用于吸附流体物质的吸附表面，其中压电层和电极层和吸附面是 设计和布置在彼此之间，使得通过电激活电极层，激励交变场可耦合到压电层中。 可以将薄膜谐振器激发到谐振振荡频率fR，其取决于吸附在吸附表面上的物质的量，因为耦合到压电层中的激发交变场。 电绝缘层直接布置在背离压电层的一个电极层的一侧上。 铝电极层和二氧化硅绝缘层的组合特别有利。

公开(公告)号：US20110089786A1

公开(公告)日：2011-04-21

申请号：US12997094

申请日：2009-06-15

申请人： Dana Pitzer ,  Matthias Schreiter

发明人： Dana Pitzer ,  Matthias Schreiter

IPC分类号： H03H9/17 ,  H01L41/22 ,  G01N33/00

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  H03H3/04 ,  H03H9/0557 ,  H03H9/175 ,  H03H2003/025

摘要： In an arrangement of at least one piezoacoustic resonator on a substrate surface, the resonator has an piezoelectric layer, an electrode and a further electrode arranged such that activation of the electrodes leads to a resonance oscillation, the substrate surface is formed by an acoustic mirror integrated in the substrate for acoustically insulating substrate and resonator, and with a resonance frequency evaluation device being connected to the electrodes by tracks being routed through a mirror opening. The acoustic mirror has a Bragg reflector having λ/4-thick layers of different acoustic impedance. The topmost layer is made of silicon dioxide acting as an insulation layer in the mirror opening for electrically insulating the conductor track and the electrically conductive Bragg reflector layers. The arrangement is used as a physical transducer of a device for detecting a substance of a fluid, in particular of a fluid in the form of a liquid (biosensor).

摘要翻译： 在衬底表面上的至少一个压电声谐振器的布置中，谐振器具有压电层，电极和另外的电极，其布置成使得电极的激活导致谐振振荡，衬底表面由声镜组成 在用于声学绝缘衬底和谐振器的衬底中，并且谐振频率评估装置通过经由反射镜开口的轨道连接到电极。 声镜具有具有不同声阻抗的λ/ 4层的布拉格反射器。 最上层由用作电绝缘导体轨道和导电布拉格反射器层的反射镜开口中的绝缘层的二氧化硅制成。 该装置用作用于检测流体物质（特别是液体形式的流体（生物传感器））的物质的物理换能器。

公开(公告)号：US06440210B1

公开(公告)日：2002-08-27

申请号：US09787378

申请日：2001-03-16

申请人： Rainer Bruchhaus ,  Dana Pitzer ,  Robert Primig ,  Matthias Schreiter

发明人： Rainer Bruchhaus ,  Dana Pitzer ,  Robert Primig ,  Matthias Schreiter

IPC分类号： C30B102

CPC分类号： H01L28/56 ,  H01L21/31691

摘要： A method for producing self-polarized ferroelectric layers, in particular PZT layers, with a rhombohedral crystal structure includes providing a substrate and heating it to a temperature T1. Afterward the layer with a rhombohedral crystal structure is applied to the substrate by means of a sputtering method. This layer includes a Zr-deficient layer with a Curie temperature TC1 and a Zr-abundant layer with a Curie temperature TC2 wherein TC2

摘要翻译： 用于制造具有菱形晶体结构的自极化铁电体层，特别是PZT层的方法包括提供衬底并将其加热到温度T1。 之后，通过溅射法将具有菱形晶体结构的层施加到衬底。 该层包括具有居里温度TC1的Zr缺陷层和具有居里温度TC2的Zr丰富层，其中TC2

公开(公告)号：US08536764B2

公开(公告)日：2013-09-17

申请号：US12997094

申请日：2009-06-15

申请人： Dana Pitzer ,  Matthias Schreiter

发明人： Dana Pitzer ,  Matthias Schreiter

IPC分类号： H01L41/08

CPC分类号： G01N29/022 ,  G01N29/036 ,  G01N29/2437 ,  H03H3/04 ,  H03H9/0557 ,  H03H9/175 ,  H03H2003/025

摘要： In an arrangement of at least one piezoacoustic resonator on a substrate surface, the resonator has an piezoelectric layer, an electrode and a further electrode arranged such that activation of the electrodes leads to a resonance oscillation, the substrate surface is formed by an acoustic mirror integrated in the substrate for acoustically insulating substrate and resonator, and with a resonance frequency evaluation device being connected to the electrodes by tracks being routed through a mirror opening. The acoustic mirror has a Bragg reflector having λ/4-thick layers of different acoustic impedance. The topmost layer is made of silicon dioxide acting as an insulation layer in the mirror opening for electrically insulating the conductor track and the electrically conductive Bragg reflector layers. The arrangement is used as a physical transducer of a device for detecting a substance of a fluid, in particular of a fluid in the form of a liquid (biosensor).

摘要翻译： 在衬底表面上的至少一个压电声谐振器的布置中，谐振器具有压电层，电极和另外的电极，其布置成使得电极的激活导致谐振振荡，衬底表面由声镜组成 在用于声学绝缘衬底和谐振器的衬底中，并且谐振频率评估装置通过经由反射镜开口的轨道连接到电极。 声镜具有布拉格反射器，其具有不同声阻抗的λ/ 4层。 最上层由用作电绝缘导体轨道和导电布拉格反射器层的反射镜开口中的绝缘层的二氧化硅制成。 该装置用作用于检测流体物质（特别是液体形式的流体（生物传感器））的物质的物理换能器。

公开(公告)号：US6108191A

公开(公告)日：2000-08-22

申请号：US197888

申请日：1998-11-23

申请人： Rainer Bruchhaus ,  Dana Pitzer ,  Robert Primig ,  Wolfram Wersing ,  Wolfgang Honlein

发明人： Rainer Bruchhaus ,  Dana Pitzer ,  Robert Primig ,  Wolfram Wersing ,  Wolfgang Honlein

IPC分类号： H01G4/12 ,  H01G4/06 ,  H01G4/228 ,  H01G4/30

CPC分类号： H01G4/306

摘要： A thin-film technology multi-layer capacitor with enhanced capacitance and/or reduced space requirement. The dielectric layers of which are alternately disposed between electrode layers on a substrate. Through alternate electrode layer connections, parallel interconnection of the individual capacitor layers is obtained. The result is that the individual capacitances are additive, while the temperature response can be optimized by a suitable choice or combination of different dielectric layers.

摘要翻译： 一种具有增强电容和/或减少空间要求的薄膜技术多层电容器。 其介电层交替地设置在基板上的电极层之间。 通过交替的电极层连接，获得各个电容层的并联。 结果是单个电容是相加的，而温度响应可以通过合适的选择或不同介电层的组合来优化。

公开(公告)号：US06139971A

公开(公告)日：2000-10-31

申请号：US214809

申请日：1999-01-12

申请人： Rainer Bruchhaus ,  Dana Pitzer

发明人： Rainer Bruchhaus ,  Dana Pitzer

IPC分类号： H01L27/04 ,  H01L21/02 ,  H01L21/316 ,  H01L21/3205 ,  H01L21/822 ,  H01L27/115 ,  H01L41/09 ,  B32B17/00

CPC分类号： H01L27/11502 ,  H01L28/55

摘要： A layer structure has a substrate, a platinum layer and a ferroelectric layer. In order to improve adhesion between the platinum layer and the substrate, the structure has an intermediate layer of amorphous aluminum oxide. The intermediate layer also improves the morphology of the ferroelectric layer and ensures that the layer structure is uniform.

摘要翻译： PCT No.PCT / DE97 / 01396 Sec。 371日期1999年1月12日 102（e）1999年1月12日PCT PCT 1997年7月2日PCT公布。 公开号WO98 / 05062 日期：1998年2月5日层结构具有基板，铂层和铁电层。 为了提高铂层和基板之间的粘附性，该结构具有中间层的无定形氧化铝。 中间层也改善了铁电层的形态，确保了层结构均匀。

公开(公告)号：US06051485A

公开(公告)日：2000-04-18

申请号：US66245

申请日：1998-04-24

申请人： Gunther Schindler ,  Walter Hartner ,  Dana Pitzer

发明人： Gunther Schindler ,  Walter Hartner ,  Dana Pitzer

IPC分类号： H01L21/285 ,  H01L21/02 ,  H01L21/28 ,  H01L21/3205 ,  H01L21/8242 ,  H01L21/8246 ,  H01L21/8247 ,  H01L27/10 ,  H01L27/105 ,  H01L27/108 ,  H01L29/788 ,  H01L29/792

CPC分类号： H01L28/60

摘要： A method of producing a platinum-metal structure or pattern on a substrate, which includes the steps of applying a silicon oxide layer to the substrate; applying a mask to the silicon oxide layer which is formed with an opening at a location thereof at which the platinum-metal structure or pattern is to be produced; etching the silicon oxide layer so that the substrate surface area exposed by the opening formed in the mask is larger than the opening in the mask; applying a platinum-metal layer to the mask and the exposed substrate surface area; and removing the silicon oxide layer in an etching process, so that the platinum metal present on the mask is removed simultaneously therewith, and the platinum metal present on the substrate surface forms the platinum-metal pattern or structure.

摘要翻译： 一种在基板上制造铂金属结构或图案的方法，包括以下步骤：向基板施加氧化硅层; 在形成有铂金属结构或图案的位置处形成有开口的氧化硅层上施加掩模; 蚀刻氧化硅层，使得由形成在掩模中的开口露出的衬底表面积大于掩模中的开口; 将铂金层施加到掩模和暴露的基底表面区域; 并且在蚀刻工艺中除去氧化硅层，使得存在于掩模上的铂金属与其同时被除去，存在于衬底表面上的铂金属形成铂金属图案或结构。