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1.发明授权Process for producing actively addressing substrate, and liquid crystal display 失效用于生产主动寻址衬底和液晶显示器的工艺
公开(公告)号：US5886761A
公开(公告)日：1999-03-23
申请号：US539691
申请日：1995-10-05
IPC分类号： G02F1/1343 , G02F1/136 , G02F1/1362 , G02F1/1368 , G09F9/30 , H01L21/027 , H01L21/77 , H01L21/84 , H01L27/12 , H01L29/78 , H01L29/786 , G02F1/1333
CPC分类号： H01L21/0274 , H01L27/1214 , H01L27/1288 , H01L29/78669 , H01L29/78678 , G02F1/1362
摘要： A photoresist 10 is exposed to light from behind a substrate by using as photomask a wiring electrodes 2 and 4 and a switching element 8 which are individually composed of an opaque member, whereby a passivation layer 9 for the switching element 8 is patterned. By virtue of this method, a photomask becomes unnecessary and jogs of the passivation layer 9 can be formed outside the transparent pixel electrode 7. Therefore, an unsatisfactory orientation of a liquid crystal can be made invisible without enlarging the black matrix of a counter substrate. Furthermore, since a passivation layer can be removed in portions not requiring the passivation layer, image-sticking can be reduced and the quality of displayed picture can be greatly improved. The present invention makes it possible to reduce the number of photomasks used for production of an actively addressing substrate and improve the picture quality of a liquid crystal display.
摘要翻译： 通过使用由不透明构件单独构成的布线电极2和4以及开关元件8作为光掩模，将光致抗蚀剂10暴露于基板后面的光，由此形成用于开关元件8的钝化层9。 通过该方法，不需要光掩模，并且可以在透明像素电极7的外部形成钝化层9的点动。因此，不增加对向基板的黑矩阵，液晶的取向不能令人满意。 此外，由于可以在不需要钝化层的部分中去除钝化层，因此可以降低图像粘附，并且显着图像的质量可以大大提高。 本发明可以减少用于生产有源寻址衬底的光掩模的数量并提高液晶显示器的画面质量。
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2.发明授权Process for producing the passivation layer of an active matrix substrate by back exposure 失效通过反向曝光来制造有源矩阵基板的钝化层的工艺
公开(公告)号：US5477355A
公开(公告)日：1995-12-19
申请号：US9004
申请日：1993-01-26
IPC分类号： G02F1/1343 , G02F1/136 , G02F1/1362 , G02F1/1368 , G09F9/30 , H01L21/027 , H01L21/77 , H01L21/84 , H01L27/12 , H01L29/78 , H01L29/786 , H01L21/20
CPC分类号： H01L21/0274 , H01L27/1214 , H01L27/1288 , H01L29/78669 , H01L29/78678 , G02F1/1362
摘要： A photoresist 10 is exposed to light from behind a substrate by using as photomask a wiring electrodes 2 and 4 and a switching element 8 which are individually composed of an opaque member, whereby a passivation layer 9 for the switching element 8 is patterned. By virtue of this method, a photomask becomes unnecessary and jogs of the passivation layer 9 can be formed outside the transparent pixel electrode 7. Therefore, an unsatisfactory orientation of a liquid crystal can be made invisible without enlarging the black matrix of a counter substrate. Furthermore, since a passivation layer can be removed in portions not requiring the passivation layer, image-sticking can be reduced and the quality of displayed picture can be greatly improved. The present invention makes it possible to reduce the number of photomasks used for production of an actively addressing substrate and improve the picture quality of a liquid crystal display.
摘要翻译： 通过使用由不透明构件单独构成的布线电极2和4以及开关元件8作为光掩模，将光致抗蚀剂10暴露于基板后面的光，由此形成用于开关元件8的钝化层9。 通过该方法，不需要光掩模，并且可以在透明像素电极7的外部形成钝化层9的点动。因此，不增加对向基板的黑矩阵，液晶的取向不能令人满意。 此外，由于可以在不需要钝化层的部分中去除钝化层，因此可以降低图像粘附，并且显着图像的质量可以大大提高。 本发明可以减少用于生产有源寻址衬底的光掩模的数量并提高液晶显示器的画面质量。
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公开(公告)号：US5430460A
公开(公告)日：1995-07-04
申请号：US328547
申请日：1994-10-25
申请人： Masaru Takabatake , Masuyuki Ohta , Tohru Sasaki , Makoto Tsumura
发明人： Masaru Takabatake , Masuyuki Ohta , Tohru Sasaki , Makoto Tsumura
CPC分类号： G09G3/3648 , G09G3/3655 , G09G3/3659 , G09G2310/0224 , G09G2310/0227 , G09G2320/0247 , G09G3/3614
摘要： A method for driving a liquid crystal display unit is arranged to apply positive-polarity signals to drains of thin film transistors of active matrix liquid crystal elements during an interval of a 1/n field and to apply negative-polarity signals to the drains during an interval of a next 1/n field. This method does not need to invert a common electrode voltage V.sub.com and a signal voltage V.sub.D at each scan period (1H). This contributes to easier design of a voltage-alternating circuit for V.sub.D or V.sub.com and reduces flicker resulting from the inversed voltage on an overall screen.
摘要翻译： 驱动液晶显示单元的方法被布置为在1 / n场的间隔期间将正极性信号施加到有源矩阵液晶元件的薄膜晶体管的漏极，并且在 下一个1 / n字段的间隔。 该方法不需要在每个扫描周期（1H）下反转公共电极电压Vcom和信号电压VD。 这有助于更容易地设计用于VD或Vcom的电压交流电路，并减少由整个屏幕上的反相电压引起的闪烁。
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公开(公告)号：US5021774A
公开(公告)日：1991-06-04
申请号：US463823
申请日：1990-01-17
CPC分类号： G09G3/30 , G09G3/3648 , G09G3/3688 , G09G2300/08 , G09G2310/0275 , G09G2310/0297 , G09G3/2011 , G09G3/3614
摘要： A high-speed scanning method uses a K(K.gtoreq.3)-number of semiconductor switch elements each having a first main electrode responsive to an input signal, a second main electrode, and a control electrode responsive to a control signal for controlling the transmissive and intransmissive states of said input signal from the first main electrode to the second main electrode; and capacitive loads connected respectively with the second main electrode of each of said K-number of semiconductor switch elements, for shifting one of the K-number of semiconductor switch elements sequentially with a predetermined period from the transmissive state to the intransmissive state or vice versa, wherein, the time, for which an arbitary L(K>L.gtoreq.2)-number of semiconductor switch elements of adjacent scans are rendered transmissive, and the time, for which the L-number of semiconductor switch elements are rendered intransmissive, are included in at least one frame period, to elongate the period for which the scanning signals fluctuate, thereby permitting use of low-frequency semiconductor switches.
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公开(公告)号：US20100227425A1
公开(公告)日：2010-09-09
申请号：US12662961
申请日：2010-05-13
IPC分类号： H01L21/04
CPC分类号： G02F1/133345 , G02F1/133305 , G02F1/133504 , G02F1/133555 , G02F1/134363 , G02F1/136213 , G02F1/136227 , G02F1/1368 , G02F2001/13685 , H01L27/124 , H01L27/1248 , H01L29/78675
摘要： The present invention provides a liquid crystal display device having a large holding capacitance in the inside of a pixel. A liquid crystal display device includes a first substrate, a second substrate arranged to face the first substrate in an opposed manner, and liquid crystal sandwiched between the first substrate and the second substrate. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode thereof connected to the video signal line and a second electrode thereof connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film formed above the first silicon nitride film, a capacitance electrode formed above the organic insulation film, and a second silicon nitride film formed above the capacitance electrode and below the pixel electrode. The second silicon nitride film is a film which is formed at a temperature lower than a forming temperature of the first silicon nitride film. The first silicon nitride film and the second silicon nitride film form a contact hole therein by etching both of the first silicon nitride film and the second silicon nitride film collectively by dry etching. The second electrode and the pixel electrode are connected to each other via the contact hole. A potential different from a potential applied to the pixel electrode is applied to the capacitance electrode, and a holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
摘要翻译： 本发明提供一种在像素内部具有大的保持电容的液晶显示装置。 液晶显示装置包括第一基板，以相对的方式与第一基板相对地布置的第二基板和夹在第一基板和第二基板之间的液晶。 第一基板包括视频信号线，像素电极，具有连接到视频信号线的第一电极的薄膜晶体管和连接到像素电极的第二电极，形成在第二电极上方的第一氮化硅膜， 形成在第一氮化硅膜上方的有机绝缘膜，形成在有机绝缘膜上方的电容电极和形成在电容电极上方和像素电极下方的第二氮化硅膜。 第二氮化硅膜是在低于第一氮化硅膜的形成温度的温度下形成的膜。 第一氮化硅膜和第二氮化硅膜通过干法蚀刻同时蚀刻第一氮化硅膜和第二氮化硅膜两者而形成接触孔。 第二电极和像素电极经由接触孔相互连接。 将施加到像素电极的电位不同的电位施加到电容电极，并且由像素电极，第二氮化硅膜和电容电极形成保持电容。
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公开(公告)号：US07760281B2
公开(公告)日：2010-07-20
申请号：US12232791
申请日：2008-09-24
IPC分类号： G02F1/1368
CPC分类号： G02F1/1368 , G02F1/133345 , G02F1/1337 , G02F2201/50 , H01L27/124 , H01L27/1288
摘要： To take measures against defects in the conduction by preventing shavings of the orientation film from getting into the terminal portion for liquid crystal display devices using an organic passivation film on a TFT substrate.Image signal lines 107 extend to a terminal portion. The image signal lines 107, excluding the terminal portion, are covered with an inorganic passivation film 108 and an organic passivation film 109. In the terminal portion, terminal portion through holes are created in the organic passivation film 109 and the inorganic passivation film 108, in order to make electrical connection possible. The terminal portion is covered with an ITO film 120 in order to protect the video signal lines 107. The taper angle θ in the organic passivation film 109 in the terminal portion through holes is 35 degrees or less, and the thickness of the organic passivation film 109 in the periphery of the terminal portion through holes is 300 nm to 600 nm, so that shavings of the orientation film can be prevented from getting into the terminal portion, and thus, defects in the conduction can be prevented.
摘要翻译： 通过防止在TFT基板上使用有机钝化膜的液晶显示装置的取向膜的切屑进入端子部，来进行导通的缺陷的措施。 图像信号线107延伸到端子部分。 除了端子部分之外的图像信号线107被无机钝化膜108和有机钝化膜109覆盖。在端子部分中，在有机钝化膜109和无机钝化膜108中形成端子部分通孔， 以使电气连接成为可能。 端子部分被ITO膜120覆盖，以保护视频信号线107。 在端子部通孔中的有机钝化膜109中为35度以下，端子部贯通孔周围的有机钝化膜109的厚度为300nm〜600nm，因此取向膜 可以防止其进入端子部分，从而可以防止导通缺陷。
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公开(公告)号：US07742113B2
公开(公告)日：2010-06-22
申请号：US11802385
申请日：2007-05-22
IPC分类号： G02F1/1343
CPC分类号： G02F1/133345 , G02F1/133305 , G02F1/133504 , G02F1/133555 , G02F1/134363 , G02F1/136213 , G02F1/136227 , G02F1/1368 , G02F2001/13685 , H01L27/124 , H01L27/1248 , H01L29/78675
摘要： A liquid crystal display device includes first and second opposed facing substrates and liquid crystal sandwiched therebetween. The first substrate includes a thin film transistor having a first electrode thereof connected to a video signal line and a second electrode thereof connected to a pixel electrode, a first silicon nitride film, an organic insulation film, a capacitance electrode, and a second silicon nitride film. The second silicon nitride film is formed at a temperature lower than a forming temperature of the first silicon nitride film. The second electrode and the pixel electrode are connected to each other via a contact hole formed by the first and second silicon nitride films. A potential different from a potential applied to the pixel electrode is applied to the capacitance electrode, and a holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
摘要翻译： 液晶显示装置包括第一和第二相对的基板和夹在其间的液晶。 第一基板包括薄膜晶体管，其薄膜晶体管的第一电极连接到视频信号线，第二电极连接到像素电极，第一氮化硅膜，有机绝缘膜，电容电极和第二氮化硅 电影。 第二氮化硅膜在比第一氮化硅膜的成形温度低的温度下形成。 第二电极和像素电极通过由第一和第二氮化硅膜形成的接触孔相互连接。 将施加到像素电极的电位不同的电位施加到电容电极，并且由像素电极，第二氮化硅膜和电容电极形成保持电容。
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公开(公告)号：US20070188682A1
公开(公告)日：2007-08-16
申请号：US11674767
申请日：2007-02-14
申请人： Masaru Takabatake , Toshiki Kaneko , Hideo Tanabe
发明人： Masaru Takabatake , Toshiki Kaneko , Hideo Tanabe
IPC分类号： G02F1/1335
CPC分类号： G02F1/133555 , G02F1/136227
摘要： In a liquid crystal display device with a reflective area and a transmissive area, a reflective electrode and a transmissive electrode are manufactured without an extra process.A metal layer that forms the reflective electrode and a transparent conductive film that forms the transmissive electrode are successively laminated on pixels, each having the transmissive area and the reflective area. A resist film is exposed to light followed by development to form a first pattern so as to simultaneously etch the metal layer and the transparent conductive film. Thereafter, ashing is used to form a second pattern in the resist film so as to etch the metal layer. An organic resin layer is used as a mask to form a contact hole.
摘要翻译： 在具有反射区域和透射区域的液晶显示装置中，制造反射电极和透射电极而不需要额外的工艺。 形成反射电极的金属层和形成透射电极的透明导电膜依次层叠在各自具有透射区域和反射区域的像素上。 将抗蚀剂膜曝光，随后显影以形成第一图案，以便同时蚀刻金属层和透明导电膜。 此后，使用灰化在抗蚀剂膜中形成第二图案以蚀刻金属层。 使用有机树脂层作为掩模来形成接触孔。
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公开(公告)号：US08377765B2
公开(公告)日：2013-02-19
申请号：US13067281
申请日：2011-05-20
IPC分类号： H01L21/00
CPC分类号： G02F1/133345 , G02F1/133305 , G02F1/133504 , G02F1/133555 , G02F1/134363 , G02F1/136213 , G02F1/136227 , G02F1/1368 , G02F2001/13685 , H01L27/124 , H01L27/1248 , H01L29/78675
摘要： The present invention provides a liquid crystal display device having a large holding capacitance in the inside of a pixel. A liquid crystal display device includes a first substrate, a second substrate arranged to face the first substrate in an opposed manner, and liquid crystal sandwiched between the first substrate and the second substrate. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode thereof connected to the video signal line and a second electrode thereof connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film formed above the first silicon nitride film, a capacitance electrode formed above the organic insulation film, and a second silicon nitride film formed above the capacitance electrode and below the pixel electrode. The second silicon nitride film is a film which is formed at a temperature lower than a forming temperature of the first silicon nitride film. The first silicon nitride film and the second silicon nitride film form a contact hole therein by etching both of the first silicon nitride film and the second silicon nitride film collectively by dry etching. The second electrode and the pixel electrode are connected to each other via the contact hole. A potential different from a potential applied to the pixel electrode is applied to the capacitance electrode, and a holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
摘要翻译： 本发明提供一种在像素内部具有大的保持电容的液晶显示装置。 液晶显示装置包括第一基板，以相对的方式与第一基板相对地布置的第二基板和夹在第一基板和第二基板之间的液晶。 第一基板包括视频信号线，像素电极，具有连接到视频信号线的第一电极的薄膜晶体管和连接到像素电极的第二电极，形成在第二电极上方的第一氮化硅膜， 形成在第一氮化硅膜上方的有机绝缘膜，形成在有机绝缘膜上方的电容电极和形成在电容电极上方和像素电极下方的第二氮化硅膜。 第二氮化硅膜是在低于第一氮化硅膜的形成温度的温度下形成的膜。 第一氮化硅膜和第二氮化硅膜通过干法蚀刻同时蚀刻第一氮化硅膜和第二氮化硅膜两者而形成接触孔。 第二电极和像素电极经由接触孔相互连接。 将施加到像素电极的电位不同的电位施加到电容电极，并且由像素电极，第二氮化硅膜和电容电极形成保持电容。
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公开(公告)号：US20120299028A1
公开(公告)日：2012-11-29
申请号：US13568672
申请日：2012-08-07
IPC分类号： H01L33/62
CPC分类号： G02F1/133345 , G02F1/133305 , G02F1/133504 , G02F1/133555 , G02F1/134363 , G02F1/136213 , G02F1/136227 , G02F1/1368 , G02F2001/13685 , H01L27/124 , H01L27/1248 , H01L29/78675
摘要： A LCD device having a large pixel holding capacitance includes opposedly facing first and second substrates, and liquid crystal between them. The first substrate includes a video signal line, a pixel electrode, a thin film transistor having a first electrode connected to the video signal line and a second electrode connected to the pixel electrode, a first silicon nitride film formed above the second electrode, an organic insulation film above the first silicon nitride film, a capacitance electrode above the organic insulation film, and a second silicon nitride film above the capacitance electrode and below the pixel electrode. A contact hole etched in both the first and second silicon nitride films connects the second electrode and the pixel electrode to each other. A holding capacitance is formed by the pixel electrode, the second silicon nitride film and the capacitance electrode.
摘要翻译： 具有大像素保持电容的LCD装置包括相对的第一和第二基板以及它们之间的液晶。 第一基板包括视频信号线，像素电极，具有连接到视频信号线的第一电极的薄膜晶体管和连接到像素电极的第二电极，形成在第二电极上方的第一氮化硅膜，有机物 第一氮化硅膜上方的绝缘膜，有机绝缘膜上方的电容电极，以及电容电极上方和像素电极下方的第二氮化硅膜。 在第一和第二氮化硅膜中蚀刻的接触孔将第二电极和像素电极彼此连接。 保持电容由像素电极，第二氮化硅膜和电容电极形成。
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