Imprint apparatus and article manufacturing method
    5.
    发明授权
    Imprint apparatus and article manufacturing method 有权
    印刷装置及制品制造方法

    公开(公告)号:US09575407B2

    公开(公告)日:2017-02-21

    申请号:US14272782

    申请日:2014-05-08

    发明人: Hiroshi Sato

    摘要: The imprint apparatus of the present invention includes a holding unit configured to hold a mold; a particle inspection unit configured to inspect whether or not particle is present on an imprint area, in which the resin pattern is formed, of the substrate; a dispenser configured to apply an uncured resin to the imprint area; a movable unit configured to move the imprint area with respect to the holding unit; and a controller. The movable unit is capable of moving the imprint area to each of an inspection position by means of the inspection unit, an application position by means of the dispenser, and a contacting position by means of the holding unit. Also, the controller causes the inspection unit to perform inspection of the imprint area in association with the movement of the imprint area by means of the movable unit.

    摘要翻译: 本发明的压印装置包括:保持单元,其构造成保持模具; 粒子检查单元,被配置为检查在所述基板的形成树脂图案的印模区域上是否存在颗粒; 分配器,被配置为将未固化的树脂施加到所述压印区域; 可移动单元,其构造成相对于所述保持单元移动所述压印区域; 和控制器。 可移动单元能够通过检查单元,借助于分配器的施加位置和通过保持单元的接触位置将压印区域移动到检查位置。 此外,控制器使得检查单元通过可移动单元与压印区域的移动相关联地执行对压印区域的检查。

    COATING METHOD AND DEVICE
    9.
    发明申请
    COATING METHOD AND DEVICE 有权
    涂料方法和装置

    公开(公告)号:US20150155448A1

    公开(公告)日:2015-06-04

    申请号:US14377855

    申请日:2013-01-08

    摘要: [PROBLEM TO BE SOLVED] To provide a method and apparatus for applying a coating material that reacts at ordinary temperatures and increases in viscosity with lapse of time or a coating material that is difficult to handle, such as an unstable slurry in which sedimentation occurs at high rate, to a high-value-added object to be coated.[SOLUTION] Before at least applying coating material to an object to be coated, the coating amount is automatically measured using a highly-accurate measuring device set in an atmosphere that does not substantially affect the measurement to control the coating amount during production. Therefore, high-quality products can be mass-produced with a low production cost.

    摘要翻译: [待解决的问题]提供一种施加在常温下反应并随时间推移粘度增加或难以处理的涂料的涂料的方法和装置,例如在其中发生沉淀的不稳定浆料 高速率,高附加值待涂物体。 [解决方案]在至少将涂料施加到待涂覆的物体之前,使用在气氛中设置的高精度测量装置自动测量涂布量,所述测量装置在实质上不影响测量以控制生产期间的涂布量。 因此,高品质的产品可以大量生产,生产成本低。