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1.发明授权公开(公告)号：US11435175B2
公开(公告)日：2022-09-06
申请号：US17336794
申请日：2021-06-02
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki Morii
Abstract: Provided are a displacement detector, a surface shape measuring apparatus, and a roundness measuring apparatus capable of measuring displacement in a plurality of directions, having a simple configuration, and capable of highly accurate measurement. A displacement measurer includes: a detector body; a substantially L-shaped stylus having a contactor to be in contact with a measuring surface of an object to be measured; a stylus holding part that is provided in the detector body and holds the stylus in a swingable manner, with a swing plane being a plane including a first direction and a second direction that are perpendicular to each other; and a displacement detecting unit that is provided in the detector body and detects displacement of the contactor associated with contact between the contactor and the measuring surface.
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公开(公告)号：US10571238B2
公开(公告)日：2020-02-25
申请号：US16535936
申请日：2019-08-08
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki Morii
Abstract: The detector for a surface measuring device includes: an arm including a contact at a tip end of the arm; a rotation shaft configured to rotatably support the arm; a transmission part having one end connected to the arm at a position on a side opposite to the contact with respect to the rotation shaft; an elastic part having one end connected to another end of the transmission part and configured to generate a measuring force to be applied to the contact; a position adjusting part connected to another end of the elastic part and configured to move a position of the another end of the elastic part in a moving direction; and a tilt adjusting part connected to the arm and including a contact part arranged at position where the contact part can be brought into contact with the transmission part.
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Patent Agency Ranking
公开(公告)号：US11859969B2
公开(公告)日：2024-01-02
申请号：US17976612
申请日：2022-10-28
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki Morii , Takuya Inoue
Abstract: A measurement device includes: a probe part including a probe configured to measure a surface of an object to be measured and is attached so as to swing around a swing center according to a shape of the surface of the object to be measured; a scale configured to measure displacement by swinging of the probe part; a scale head configured to read a scale mark of the scale; and an arm part to which the probe part is attached, the arm part is attached so as to swing around the swing center integrally with the probe part, and the scale is attached to the arm part. When thermal expansion coefficients of the probe part, the arm part and the scale are α, β and γ respectively, the measurement device satisfies a condition of (α+γ)−1/2α≤β≤(α+γ)+1/2α.
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公开(公告)号：US11740074B2
公开(公告)日：2023-08-29
申请号：US17939226
申请日：2022-09-07
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki Morii , Katsufumi Moriyama , Hiroaki Kimura
CPC classification number: G01B11/2408 , G01B11/002 , G01B11/26
Abstract: The following are observed using a camera: a first position of a small hole of a workpiece, which is fixed to a linear-and-tilting-motion stage and rotating with a rotating body, and a second position thereof different from the first position, at a first rotation angle of the rotating body; and the first position and the second position of the small hole of the workpiece at a second rotation angle different from the first rotation angle of the rotating body. A position and a tilt of the small hole are calculated from coordinates of the respective observed positions, and small hole information, which includes the position and the tilt of the small hole, is outputted.
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公开(公告)号：US10724841B2
公开(公告)日：2020-07-28
申请号：US16544609
申请日：2019-08-19
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki Morii
Abstract: There are provided a detector, a surface property measuring machine and a roundness measuring machine for automatically measuring a plurality of surfaces to shorten the time necessary for measurement. This problem is solved by a detector provided with a stylus for supporting a contact coming in contact with a surface of an object to be measured, a holder configured to hold the stylus, a measuring part configured to hold the holder to be capable of swinging by a rotating shaft and detect a displacement of the holder, and a body configured to accommodate the measuring part, wherein the holder holds the stylus such that a stylus axis as an axis of the stylus and a body axis as an axis of the body are in parallel, and the stylus axis and the body axis are offset in a first direction perpendicular to the body axis and the rotating shaft.
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公开(公告)号：US11940463B2
公开(公告)日：2024-03-26
申请号：US18459132
申请日：2023-08-31
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Natsumi Hayashi , Hideki Morii , Tetsuo Yoshida , Toshiyuki Kimura
CPC classification number: G01R1/06711 , G01R1/07314
Abstract: The particle measurement device includes: an acquiring unit configured to acquire pad surface shape data indicating a surface shape of an electrode pad including a probe needle mark where a probe needle has contacted; a roughness calculating unit configured to calculate volume of a recessed portion recessed from a pad reference surface and volume of a protruding portion protruding from the pad reference surface based on the pad surface shape data; and a particle quantity calculating unit configured to calculate a particle quantity from a volume difference between the volume of the recessed portion and the volume of the protruding portion.
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公开(公告)号：US11740072B2
公开(公告)日：2023-08-29
申请号：US17939080
申请日：2022-09-07
Applicant: Tokyo Seimitsu Co., Ltd.
Inventor： Hideki Morii , Katsufumi Moriyama
CPC classification number: G01B11/12 , G01B5/201 , G01B11/002 , G01B21/042
Abstract: The inner surface shape measurement device, which measures an inner surface shape of a small hole formed in a workpiece, includes: a rotating body for rotating the workpiece around a rotation axis, and a linear-and-tilting-motion stage; an elongated probe capable of being inserted into the small hole of the workpiece; a probe linear-and-tilting-motion mechanism capable of adjusting posture of the probe; a camera, configured to be rotatable integrally with the rotating body, for imaging the probe from at least three circumferential positions on a rotation trajectory centered on a rotation axis; and a controller for adjusting the posture of the probe using the probe linear-and-tilting-motion mechanism based on an image taken by the camera at each of the circumferential positions.
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