摘要:
An exposure apparatus includes a gap measuring device for measuring a gap between a mask, having a mask membrane, and a substrate, a gap adjuster for adjusting the gap between the mask and the substrate and a driver for relatively moving the mask and the substrate relative to each other. The gap adjusting device adjusts the gap when the mask and the substrate are placed at a position at which they are opposed to each other in an area smaller than a predetermined area.
摘要:
An exposure apparatus for transferring a pattern, formed on a membrane of a mask, to an exposure region of a wafer disposed opposed to the mask with a small spacing kept therebetween. The apparatus includes an exposure system for transferring, by exposure, the pattern of the mask to different exposure regions of the wafer sequentially, a measuring system for producing deformation information related to at least one portion of the mask membrane, and an attitude controlling system for controlling attitude of at least one of the mask and the wafer, on the basis of the deformation information produced by the measuring system.
摘要:
There is provided a new glow plug that can be easily determined as to whether or not it is a new article.An additional circuit 12 formed by connecting a diode 13, a fuse 14, and an adjusting resistor 15 in series in this order is connected in parallel to a heating element 11 of a glow plug 1. The diode 13 is provided so as to have an anode located on the positive electrode side of the heating element 11 and a cathode located on the fuse 14 side. In the case of a unit inspection, by applying a positive voltage for test to a heating element negative electrode connecting portion 3a, it is possible to determine whether or not the glow plug 1 is normal without blowing the fuse 14 before the glow plug 1 is used in a vehicle.
摘要:
To suppress current fluctuations upon commencement of driving and prolong lifespan by reducing electric stress caused by current fluctuations.A glow plug 1, a glow switch 2, and a stabilizing coil 3 are series-connected, and upon commencement of the driving of the glow plug 1, a repetition frequency of PWM signals that control the opening and closing of the glow switch 2 is made into a higher frequency than a repetition frequency in a normal drive state and the opening and closing of the glow switch 2 is controlled (S104), and when a predetermined drive shift condition has been met (S106), the repetition frequency of the PWM signals is returned to the frequency during normal driving and the opening and closing of the glow switch 2 is controlled (S108), whereby the current upon commencement of driving is smoothed and the occurrence of an instantaneous large current is suppressed.
摘要:
A semiconductor memory device includes first and second driving transistors; first and second load transistors; and first and second transmission transistors. Their respective drain diffusion layers of the transistors are isolated from one another. The semiconductor memory device also includes a bit cell in which the first and second driving transistors, the first and second load transistors, and the first and second transmission transistors are arranged; a first wiring for connecting their respective drains of the first driving transistor, the first load transistor, and the first transmission transistor; and a second wiring for connecting their respective drains of the second driving transistor, the second load transistor, and the second transmission transistor.
摘要:
A semiconductor memory device includes first and second driving transistors; first and second load transistors; and first and second transmission transistors. Their respective drain diffusion layers of the transistors are isolated from one another. The semiconductor memory device also includes a bit cell in which the first and second driving transistors, the first and second load transistors, and the first and second transmission transistors are arranged; a first wiring for connecting their respective drains of the first driving transistor, the first load transistor, and the first transmission transistor; and a second wiring for connecting their respective drains of the second driving transistor, the second load transistor, and the second transmission transistor.
摘要:
A processing apparatus includes a sealed vacuum chamber which contains a processing portion; a pressure controlling system which keeps the internal pressure of the sealed vacuum chamber constant at a predetermined level by exhausting the ambient gas in the sealed vacuum chamber; and an ambient gas recirculating system which recirculates the ambient gas exhausted from the sealed vacuum chamber back into the sealed vacuum chamber; wherein the ambient as recirculated by the ambient gas recirculating system is blown into the sealed vacuum chamber so that a gas flow is generated in a predetermined direction along the processing portion.
摘要:
A packet recording/reproducing system is provided which records or reproduces packets on or from tracks formed in time sequence on a magnetic tape. In a recording operation, the packet recording/reproducing system adds to input packets time stamps whose values are synchronous with packet arrival time control clocks produced by the system. The timing with which the packets are recorded on the magnetic tape is controlled by the arrival time control clocks so that a given number of the packets inputted at high data rate are recorded within a one-track area, a two-track area, or a one-track over area defined across at least two of the tracks, thereby minimizing the loss of capacity of the magnetic tape.
摘要:
A fuse-data reading circuit is provided in a semiconductor integrated circuit device. In the fused-data reading circuit, a differential latch circuit compares a current depending on the resistance across a first fuse element, i.e., target element, with a current depending on the resistance of a series circuit including a second fuse element used as a reference fuse element and a resistor element. The differential latch circuit determines whether the first fuse element has been cut or not.
摘要:
The position of a connector 36 in the forward direction (Ya direction) is determined by having front end surfaces 36f1, 36g1 of protrusions 36f, 36g of the connector that protrude from the left side surface and the right side surface of the connector, respectively, contacting vertical wall portions 72a1, 74a1 of positioning concave portions 72a, 74a of supporting plates 72, 74 of a housing of the shield case. The position of the connector in the backward direction (Yb direction) is determined by having a back surface 36h of the connector 36 contacting a protrusion 70a of a dividing plate 70. The motion of the connector in the right-and-left directions (Xa-Xb directions) is controlled by having the left side surface and the right side surface of the connector facing the supporting plates, respectively, in close proximity. Since the connector is held in a status where no shaking occurs in any direction, there is no need to be sensitive about the assembling accuracy of the portion of the stereo device corresponding to the position of the electronic apparatus, and thus more freedom for back surface panel configuration of the stereo devices can be provided and this reduces the burden of the manufacturers when manufacturing the stereo devices.