摘要:
There is a problem in that when the demand accuracy with respect to a semiconductor pattern dimension comes close to a resist molecule size with miniaturization, the device performance is deteriorated due to edge roughness of a resist pattern to exert a bad influence on the system performance. The present invention overcomes the problem by the procedure in which super-molecules which are small in dimension as compared with the conventional polymers are used as main components, the reaction number required for the change of molecule solubility is made constant and as large as possible, and an acid generator is made clathrate or combinatory n super molecules to make an acid catalyst concentration large. As a result, it is possible to form a pattern of molecular accuracy with high productivity even with respect to the pattern dimension less than 50 nm, thereby realizing the high performance system.
摘要:
There is a problem in that when the demand accuracy with respect to a semiconductor pattern dimension comes close to a resist molecule size with miniaturization, the device performance is deteriorated due to edge roughness of a resist pattern to exert a bad influence on the system performance. The present invention overcomes the problem by the procedure in which super-molecules which are small in dimension as compared with the conventional polymers are used as main components, the reaction number required for the change of molecule solubility is made constant and as large as possible, and an acid generator is made clathrate or combinatory n super molecules to make an acid catalyst concentration large. As a result, it is possible to form a pattern of molecular accuracy with high productivity even with respect to the pattern dimension less than 50 nm, thereby realizing the high performance system.
摘要:
To form a fine resist pattern without collapse, the invention patterns a resist by applying a resist composition to a substrate to form a resist film, exposing the resist film to radiation in a desired pattern, and developing the exposed resist film using supercritical carbon dioxide at 200 atm or lower. The resist composition mainly includes a polymer having a solubility parameter equal to or lower than that of supercritical carbon dioxide.
摘要:
A comb-like or dot-like phase shifter pattern is added to a phase shifter used in phase shifting mask technology, which is then exposed onto a wafer. This enables the formation of extremely fine line patterns or space patterns having widths different from each other simultaneously. Further, when two reticles are disposed such that phase shifter patterns disposed therein intersect each other and are exposed consecutively onto a wafer, a fine hole pattern or dot pattern can be formed at a position where the phase shifter patterns intersect each other.
摘要:
A lever fitting-type connecter of the present invention has housing having a main body and a pair of projections; a lever having holes into which the projections are inserted, the lever rotated in a state that the projections are inserted into the holes from a non-fitting position before being fitted to another connector to a fitting position fitted to the other connector by rotating around the projection; an engagement receiving portion arranged in the projection so as to sandwich the lever between the main body and the engagement receiving portion; a first overlapping position arranged in the lever and overlapped with the engagement receiving portion at the non-fitting position; a second overlapping position arranged in the lever and overlapped with the engagement receiving portion at the fitting position; and an engaging portion arranged between the first and second overlapping positions and engaged to the engagement receiving portion.
摘要:
A storage device having a plurality of recording devices in which a decrease in vibrations from the recording devices can be achieved with a small number of parts. A storage device having a plurality of recording devices mounted therein includes a handle for inserting and withdrawing the recording device into and out of the storage device. Two holding members each include a mounting portion where the recording device is mounted and a frame extending from the mounting portion to the handle. Two protrusions are formed to extend inwardly of a region surrounded by the recording device, the handle, and the two frames. A restriction plate is disposed so as to overlap the respective surfaces of the two protrusions; and a viscoelastic body is disposed at the overlapping portion for joining the two protrusions and the restriction plate to one another.
摘要:
A lever fitting-type connecter of the present invention has housing having a main body and a pair of projections; a lever having holes into which the projections are inserted, the lever rotated in a state that the projections are inserted into the holes from a non-fitting position before being fitted to another connector to a fitting position fitted to the other connector by rotating around the projection; an engagement receiving portion arranged in the projection so as to sandwich the lever between the main body and the engagement receiving portion; a first overlapping position arranged in the lever and overlapped with the engagement receiving portion at the non-fitting position; a second overlapping position arranged in the lever and overlapped with the engagement receiving portion at the fitting position; and an engaging portion arranged between the first and second overlapping positions and engaged to the engagement receiving portion.
摘要:
A radiation image capturing system includes at least one image capturing apparatus including a radiation detector, at least one image capturing apparatus including a stimulable phosphor panel for generating radiation image information, which is readable by an image reading apparatus, and at least one control device for controlling at least the image capturing apparatus and the image reading apparatus based on image capturing instruction information supplied from an external source. The control device includes a change setting unit for changing settings of the image capturing instruction information depending on whether the image capturing apparatus and the image reading apparatus are usable or not, and a controller for controlling the image capturing apparatus and the image reading apparatus based on the changed settings of the image capturing instruction information.
摘要:
Disclosed is a game system which is capable of matching the replay range with the replay fee, even when the replay range is set to a portion of the played range. A game system allows a user to play the game in the predetermined range when an initial fee is collected from the user, and sets the play fee necessary for playing the game in the replay range according to the setting of the replay range. After the game is over in the predetermined range, the replay process is performed for allowing the user to play the game in the replay range, on the condition that the set play fee is collected from the user.
摘要:
A technique is proposed for reducing leakage electromagnetic field that reduces the electromagnetic leakage from a connection point between a communication coupler and a signal transmission apparatus and that can conduct both communication and transmission of electric power. The signal transmission apparatus includes: a first sheet conductive body portion constituting a lower portion electrode; and a second sheet conductive body portion in a mesh shape which is laminated on the first sheet conductive body portion while a gap area is sandwiched therebetween and which includes an uneven mesh size area on which a sheet impedance is continuously changed.