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公开(公告)号：US09766054B2
公开(公告)日：2017-09-19
申请号：US14379106
申请日：2013-02-08
发明人： Jinchun Hu , Yu Zhu , Wensheng Yin , Longmin Chen , Kaiming Yang , Ming Zhang , Dengfeng Xu , Haihua Mu , Chuxiong Hu , Zhao Liu
CPC分类号： G01B7/30 , G01D5/2013 , G01M13/00 , G03F7/70758
摘要： A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch τ along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.
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公开(公告)号：US09752643B2
公开(公告)日：2017-09-05
申请号：US14652055
申请日：2013-12-06
发明人： Yu Zhu , Ming Zhang , Zhao Liu , Rong Cheng , Jing Wang , Li Tian , Dengfeng Xu , Kaiming Yang , Jinchun Hu , Wensheng Yin , Haihua Mu , Hao Liu , Chuxiong Hu
IPC分类号： F16F15/067 , G03F7/20
CPC分类号： F16F15/067 , F16F2228/063 , G03F7/70 , G03F7/70716 , G03F7/70816 , G03F7/709
摘要： A negative stiffness system for gravity compensation of a micropositioner of wafer table in lithography machine, characterized in that, the negative stiffness system includes at least three sets of quasi-zero stiffness units, each of the sets of quasi-zero stiffness units comprises a pair of negative stiffness springs and a positive stiffness spring, the positive stiffness spring is vertically positioned, the pair of negative stiffness springs are obliquely and symmetrically positioned at two sides of the positive stiffness spring, upper ends of the negative stiffness springs and the positive stiffness spring are connected together and fixed to the bottom surface of a rotor of the micropositioner, and lower ends of the negative stiffness springs and the positive stiffness spring are connected to a base, respectively. The system reduces the stiffness in vertical direction and prevents the influence of permanent magnet on its surroundings, while improving the bearing capacity.
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3.发明申请公开(公告)号：US20150012242A1
公开(公告)日：2015-01-08
申请号：US14379106
申请日：2013-02-08
发明人： Jinchun Hu , Yu Zhu , Wensheng Yin , Longmin Chen , Kaiming Yang , Ming Zhang , Dengfeng Xu , Haihua Mu , Chuxiong Hu , Zhao Liu
CPC分类号： G01B7/30 , G01D5/2013 , G01M13/00 , G03F7/70758
摘要： A planar motor rotor displacement measuring device and its measuring method are provided. The motor is a moving-coil type planar motor. The device comprises probes, two sets of sine sensors, two sets of cosine sensors, a signal lead wire and a signal processing circuit. The method is arranging two sets of magnetic flux density sensors within a magnetic field pitch τ along two vertical movement directions in the rotor located in the sine magnetic field area. Sampled signals of the four sets of sensors are respectively processed with a frequency multiplication operation, four subdivision signals are obtained, the zero-crossing points of the four subdivision signals are detected, and then two sets of orthogonal pulse signals are generated. The pulse number of the orthogonal pulse signals is counted, and phase difference of the two sets of orthogonal pulse signals is respectively detected.
摘要翻译： 提供了一种平面电动机转子位移测量装置及其测量方法。 电动机是动圈式平面电动机。 该装置包括探针，两组正弦传感器，两组余弦传感器，信号引线和信号处理电路。 该方法是在位于正弦磁场区域的转子中沿着两个垂直移动方向在磁场间距τ内设置两组磁通密度传感器。 四组传感器的采样信号分别用倍频运算进行处理，得到4个细分信号，检测四个细分信号的过零点，然后产生两组正交脉冲信号。 对正交脉冲信号的脉冲数进行计数，分别检测两组正交脉冲信号的相位差。
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公开(公告)号：US20150097508A1
公开(公告)日：2015-04-09
申请号：US14382221
申请日：2013-02-21
发明人： Yu Zhu , Jinchun Hu , Dengfeng Xu , Yuting Sun , Wensheng Yin , Ming Zhang , Kaiming Yang , Haihua Mu
摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value. B ksx B cx - B kcx B sx B M 2 ≥ Δ x ( I ) B ksy B cy - B kcy B sy B M 2 ≥ Δ y ( II )
摘要翻译： 一种用于测量平面电动机转子的位移的方法。 测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。 本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksxB cx - B kcx B B sx B M 2≥＆Dgr; x（I）B yBsy sy y（II）
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公开(公告)号：US09310782B2
公开(公告)日：2016-04-12
申请号：US14382221
申请日：2013-02-21
发明人： Yu Zhu , Jinchun Hu , Dengfeng Xu , Yuting Sun , Wensheng Yin , Ming Zhang , Kaiming Yang , Haihua Mu
摘要： A method for measuring the displacement of a planar motor rotor. The measuring method comprises: four magnetic induction intensity sensors are distributed on the planar motor rotor; sampled signals of the four distributed sensors are processed to obtain signals Bsx, Bcx, Bsy and Bcy and magnetic field reference values Bksx, Bkcx, Bksy and Bkcy; and X-direction displacement and Y-direction displacement can be measured respectively according to inequalities (I) and (II) by judgments, wherein Δx and Δy are X-direction displacement resolution and Y-direction displacement resolution respectively, and BM is the magnetic induction intensity amplitude of the magnetic field of said planar motor. The method provided by the invention is simple in calculation, can avoid calculation of a transcendental function and solve the quadrant judgment problem, is favorable to real-time high-speed operation and has a high engineering value. B ksx B cx - B kcx B sx B M 2 ≥ Δ x ( I ) B ksy B cy - B kcy B sy B M 2 ≥ Δ y ( II )
摘要翻译： 一种用于测量平面电动机转子的位移的方法。 测量方法包括：四个磁感应强度传感器分布在平面电机转子上; 处理四个分布式传感器的采样信号以获得信号Bsx，Bcx，Bsy和Bcy以及磁场参考值Bksx，Bkcx，Bksy和Bkcy; 并且可以通过判断根据不等式（I）和（II）分别测量X方向位移和Y方向位移，其中＆Dgr; x和＆Dgr; y分别是X方向位移分辨率和Y方向位移分辨率， BM是所述平面电动机的磁场的磁感应强度振幅。 本发明提供的方法计算简单，可以避免超验函数的计算，解决象限判断问题，有利于实时高速运行，具有很高的工程价值。 B ksx B cx - B kcx B sx B M 2ß≥＆Dgr; x（I）B ksy B cy-B kcy B sy B M 2ß≥＆Dgr; y（II）
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公开(公告)号：US20150311099A1
公开(公告)日：2015-10-29
申请号：US14651385
申请日：2013-12-06
发明人： Yu Zhu , Ming Zhang , Zhao Liu , Kaiming Yang , Dengfeng Xu , Li Tian , Li Zhang , Huichao Qin , Ping an Wang , Wensheng Yin , Jinchun Hu , Haihua Mu
IPC分类号： H01L21/673
CPC分类号： H01L21/67346
摘要： A silicon wafer platform with anti-collision function comprises a silicon wafer platform body (1) and a cable platform (2). The cable platform (2) is mounted on one side of the silicon wafer platform. The silicon wafer platform comprises three airbags (3), four damping buffer elements (4) and an air source (6), the three airbags (3) being connected in series and respectively secured on the other three sides of the silicon wafer platform by an airbag support (5), two adjacent airbags (3) communicating with a gas pipeline by one damping buffer element (4), and the gas pipeline being secured on the cable platform (2) and communicating with the air source. When two silicon platforms collide, the collision is buffered by the airbags and the silicon wafer platforms are not bounced off.
摘要翻译： 具有防碰撞功能的硅晶片平台包括硅晶片平台主体（1）和电缆平台（2）。 电缆平台（2）安装在硅晶片平台的一侧。 硅晶片平台包括三个安全气囊（3），四个阻尼缓冲元件（4）和空气源（6），三个安全气囊（3）串联连接，并分别固定在硅晶片平台的另外三个侧面上 安全气囊支撑件（5），两个相邻的安全气囊（3），其通过一个阻尼缓冲元件（4）与气体管道连通，并且所述气体管道固定在所述电缆平台（2）上并与所述空气源连通。 当两个硅平台碰撞时，碰撞由气囊缓冲，硅晶片平台不会反弹。
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公开(公告)号：US11703361B2
公开(公告)日：2023-07-18
申请号：US17257173
申请日：2019-06-26
发明人： Ming Zhang , Yu Zhu , Fuzhong Yang , Leijie Wang , Rong Cheng , Xin Li , Weinan Ye , Jinchun Hu
CPC分类号： G01D5/3537 , G01D5/344
摘要： A five-degree-of-freedom heterodyne grating interferometry system comprises: a single-frequency laser for emitting single-frequency laser light, the single-frequency laser light can be split into a reference light beam and a measurement light beam; an interferometer lens set and a measurement grating for converting the reference light and the measurement light into a reference interference signal and a measurement interference signal; and multiple optical fiber bundles respectively receiving the measurement interference signal and the reference interference signal, wherein each optical fiber bundle has multiple multi-mode optical fibers respectively receiving interference signals at different positions on the same plane. The system is not over-sensitive to the environment, is small and light, and is easy to arrange. Six-degree-of-freedom ultra-precision measurement can be achieved by arranging multiple five-degree-of-freedom interferometry systems and using redundant information, thereby meeting the needs of a lithography machine worktable for six-degree-of-freedom position and orientation measurement.
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公开(公告)号：US11022423B2
公开(公告)日：2021-06-01
申请号：US16759294
申请日：2018-10-25
申请人： TSINGHUA UNIVERSITY
发明人： Yu Zhu , Jinchun Hu , Shengwu Du , Enyao Shang , Ming Zhang , Wensheng Yin , Kaiming Yang , Rong Cheng
摘要： Provided is a method for calibrating an error of installation of an interferometer in a multi-axis laser displacement measurement system, including: adding one or more redundant interferometers in a laser interferometer displacement measurement system; then establishing displacement calculating equations containing installation error of the laser interferometer and obtaining redundant measurement information by continuously measuring displacement information of multiple points, wherein the number of the combined displacement calculating equations is equal to the number of unknown quantities; and further solving the equation set to obtain the installation error of the interferometer. With a redundant arrangement of the laser interferometer, self-calibration of the installation error thereof can be achieved. A problem of difficulty in calibration of the installation error of the multi-axis interferometer in industrial application can be solved without assistance of other displacement sensors with higher precision.
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公开(公告)号：US10532832B2
公开(公告)日：2020-01-14
申请号：US15568581
申请日：2016-03-15
发明人： Ming Zhang , Yu Zhu , Anlin Chen , Kaiming Yang , Rong Cheng , Feng Liu , Jinchun Hu , Chuxiong Hu , Dengfeng Xu , Haihua Mu
摘要： A magnetic levitation reaction sphere includes a spherical-housing-shaped rotor and three groups of stators. Each group includes two stators using the sphere center of the rotor as a symcenter. Axes of the three groups are mutually orthogonal. Each stator comprises a stator core and a coil array. An air gap is reserved between an inner surface of each stator core and the outer surface of the rotor. Through grooves are radially formed in the stator cores. The coil arrays are disc-type motor stator windings. Two effective sides of each coil in each coil array are respectively placed in two through grooves of the corresponding stator core. The magnetic levitation reaction sphere has low cost; levitation and rotation driving are integrated; the magnetic levitation reaction sphere has a simple and compact structure, a small size and a low mass, and relates to inherent stable levitation; and the levitation control is simple.
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10.发明授权公开(公告)号：US09995569B2
公开(公告)日：2018-06-12
申请号：US15568118
申请日：2016-03-15
发明人： Yu Zhu , Ming Zhang , Anlin Chen , Rong Cheng , Kaiming Yang , Feng Liu , Yujing Song , Fan Zhi , Jinchun Hu , Dengfeng Xu , Haihua Mu , Chuxiong Hu
CPC分类号： G01B11/14 , G01B11/002 , G01B11/272 , G01D5/38 , G03F7/70758 , G03F7/70775 , G03F9/7046
摘要： A six-degree-of-freedom displacement measurement method for an exposure region on a wafer stage, the wafer stage comprises a coil array and a movable platform. A planar grating is fixed below a permanent magnet array of the movable platform. A reading head is fixed in a gap of the coil array. A measurement region is formed on the planar grating by an incident measurement light beam of the reading head. The reading head measures the six-degree-of-freedom displacement of the measurement region, so that the six-degree-of-freedom displacement of the exposure region is obtained through calculation. In the method, the six-degree-of-freedom displacement of the exposure region at any time is measured; the measurement complexity is reduced and the measurement precision is improved, and especially, the six-degree-of-freedom displacement of the exposure region can be precisely measured at any time even if the movable platform has high flexibility.
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