利索-全球专利检索

  1. 登录
  2. 注册

搜索结果

56 条记录 (耗时 0.026 秒)

    Ceramic chuck
    1.
    发明申请
    Ceramic chuck 审中-公开
    陶瓷卡盘

    公开(公告)号：US20050128674A1

    公开(公告)日：2005-06-16

    申请号：US11003285

    申请日：2004-12-03

    申请人： Tsuneaki Ohashi ,  Naohito Yamada ,  Hiroya Sugimoto

    发明人： Tsuneaki Ohashi ,  Naohito Yamada ,  Hiroya Sugimoto

    IPC分类号： H01H1/00 ,  H01L21/68 ,  H01L21/683 ,  H02N13/00

    CPC分类号： H01L21/6831 ,  H02N13/00

    摘要： An object of the present invention is to provide a ceramic chuck for mounting a wafer so that the number of particles adhered onto the wafer after chucking can be reduced while maintaining a desired Young's Modulus of the chuck. A ceramic chuck 1 has a surface layer 2 contacting a wafer “W” and a substrate portion 6. The surface layer 2 and substrate portion 6 are produced by co-sintering and the surface layer 2 has a porosity of 1% or higher and 10% or lower and larger than that of the substrate portion 6.

    摘要翻译： 本发明的目的是提供一种用于安装晶片的陶瓷卡盘，从而可以在保持卡盘的期望的杨氏模量的同时减少在夹紧之后粘附到晶片上的颗粒的数量。 陶瓷卡盘1具有与晶片“W”接触的表面层2和基板部分6.表面层2和基板部分6通过共烧结制成，表面层2的孔隙率为1％以上，10 ％以下，大于基板部6的宽度。

    Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation
    3.
    发明授权
    Film of yttria-alumina complex oxide, a method of producing the same, a sprayed film, a corrosion resistant member, and a member effective for reducing particle generation 有权
    氧化钇 - 氧化铝复合氧化物的膜，其制造方法，喷涂膜，耐腐蚀构件和有效减少颗粒产生的构件

    公开(公告)号：US07138192B2

    公开(公告)日：2006-11-21

    申请号：US10633906

    申请日：2003-08-04

    申请人： Hirotake Yamada ,  Tsuneaki Ohashi

    发明人： Hirotake Yamada ,  Tsuneaki Ohashi

    IPC分类号： B32B9/00

    CPC分类号： C23C4/11 ,  Y10T428/249953 ,  Y10T428/25 ,  Y10T428/26

    摘要： The invention provides a film of an yttria-alumina complex oxide having a high peel strength with respect to a substrate. A mixed powder of powdery materials of yttria and alumina is sprayed on a substrate to form a sprayed film made of an yttria-alumina complex oxide. Preferably, the powdery material of yttria has a 50 percent mean particle diameter of not smaller than 0.1 μm and not larger than 100 μm, and the powdery material of alumina has a 50 percent mean particle diameter of not smaller than 0.1 μm and not larger than 100 μm. Preferably, the yttria-alumina complex oxide contains at least a garnet phase, and may further contain a perovskite phase.

    摘要翻译： 本发明提供了相对于基材具有高剥离强度的氧化钇 - 氧化铝复合氧化物膜。 将氧化钇和氧化铝的粉末状材料的混合粉末喷涂在基材上以形成由氧化钇 - 氧化铝复合氧化物制成的喷涂膜。 优选地，氧化钇的粉末状材料具有不小于0.1μm和不大于100μm的50％平均粒径，并且氧化铝的粉末材料具有不小于0.1μm的平均粒径的50％且不大于 100个妈妈 优选地，氧化钇 - 氧化铝复合氧化物至少含有石榴石相，并且还可以含有钙钛矿相。

    Joined body of aluminum nitride series ceramics, method of joining aluminum nitride series ceramics and joining agent
    7.
    发明授权
    Joined body of aluminum nitride series ceramics, method of joining aluminum nitride series ceramics and joining agent 失效
    氮化铝系列陶瓷的接合体，氮化铝系陶瓷的接合方法和接合剂

    公开(公告)号：US06261708B1

    公开(公告)日：2001-07-17

    申请号：US09013042

    申请日：1998-01-26

    申请人： Tsuneaki Ohashi ,  Tsutomu Imai

    发明人： Tsuneaki Ohashi ,  Tsutomu Imai

    IPC分类号： B32B516

    CPC分类号： C04B35/645 ,  C04B37/005 ,  C04B2235/6562 ,  C04B2235/658 ,  C04B2237/06 ,  C04B2237/064 ,  C04B2237/08 ,  C04B2237/10 ,  C04B2237/366 ,  C04B2237/708 ,  C04B2237/765 ,  Y10T403/479 ,  Y10T428/256

    摘要： A novel method is provided for joining substrates made of aluminum nitride series ceramics to each other, which can perform the joining substantially without leaving an intervening third phase other than aluminum nitride series ceramics at the joining interface of the substrates. The method is performed, for example, by providing a joining agent 3 containing at least an aluminum nitride series ceramics and a flux between the substrates 1 and 2, heat treating the joining agent to eutectically melt the aluminum nitride series ceramics and the flux, then precipitating a reprecipitated phase of the aluminum nitride series ceramics at the joining interface of the substrates. Alternatively, the method is performed by providing a joining agent 3 containing at least an aluminum nitride series ceramics and a flux between the substrates 1 and 2, heating the joining agent to a temperature range T1 which is higher than the melting point of the flux, subsequently heating the joining agent to a temperature range T2 which is higher than the temperature range T1 to exit the components of the flux from the joining interface, ten precipitating the reprecipitated phase of the aluminum nitride series ceramics at the joining interface.

    摘要翻译： 提供了一种用于将由氮化铝系列陶瓷制成的衬底彼此接合的新方法，其可以在基板的接合界面处基本上不会留下除氮化铝系列陶瓷之外的中间第三相而进行接合。 该方法例如通过提供至少包含氮化铝系陶瓷的接合剂3和在基板1和2之间的焊剂，对接合剂进行热处理以使氮化铝系列陶瓷和焊剂共晶化，然后 在基板的接合界面处沉淀出氮化铝系陶瓷的再沉淀相。 或者，该方法通过提供至少包含氮化铝系陶瓷的接合剂3和在基板1和2之间的焊剂，将接合剂加热到高于焊剂的熔点的温度范围T1， 随后将接合剂加热到高于温度范围T1的温度范围T2以从接合界面离开焊剂的组分，在接合界面处使氮化铝系陶瓷的再沉淀相沉淀10次。

    Phosphate compounds, sintered bodies thereof and manufacture of the sintered bodies
    8.
    发明授权
    Phosphate compounds, sintered bodies thereof and manufacture of the sintered bodies 失效
    磷酸盐化合物，其烧结体和烧结体的制造

    公开(公告)号：US5128288A

    公开(公告)日：1992-07-07

    申请号：US627412

    申请日：1990-12-14

    申请人： Tsuneaki Ohashi ,  Keiji Matsuhiro

    发明人： Tsuneaki Ohashi ,  Keiji Matsuhiro

    IPC分类号： C01B25/45 ,  C04B35/447

    CPC分类号： C04B35/447 ,  C01B25/45

    摘要： A heat resistant, low expansion phosphate compound and sintered bodies thereof, having a composition of RZr.sub.4 P.sub.6 O.sub.24 (R is one or more cations of IIa group in the periodic table, such as Ba, Sr and Ca): an average thermal expansion coefficient between room temperature and 1,400.degree. C. of -10.about.+10.times.10.sup.-7 /.degree.C.; and having a high temperature type crystalline structure having R3c symmetry at room temperature. The sintered body of the invention can be manufactured by mixing and shaping starting materials, firing the resulting shaped body at 1,400.degree. C..about.1,700.degree. C. to provide a sintered body with a composition of RZr.sub.4 P.sub.6 O.sub.24 and then, keeping the obtained sintered body at a high temperature of not lower than a temperature of phase transition between a high temperature type and a low temperature type crystalline structure, followed by quenching.

    摘要翻译： 具有RZr4P6O24组成的耐热，低膨胀的磷酸盐化合物及其烧结体（R是周期表中的IIa族的一种或多种阳离子，例如Ba，Sr和Ca）：室温下的平均热膨胀系数 和-100℃-10℃〜10℃/ 10℃。 并且在室温下具有R3c对称性的高温型晶体结构。 本发明的烧结体可以通过将原料混合和成形来制造，在1400℃的温度下烧结所得到的成型体，提供具有RZr4P6O24组成的烧结体，然后将得到的烧结体保持在 不低于高温型和低温型结晶结构之间的相变温度的高温，然后淬火。

    Heat-resisting phosphate based compound sintered bodies and production thereof
    9.
    发明授权
    Heat-resisting phosphate based compound sintered bodies and production thereof 失效
    耐热磷酸盐基复合烧结体及其制备

    公开(公告)号：US4968648A

    公开(公告)日：1990-11-06

    申请号：US379676

    申请日：1989-07-10

    申请人： Keiichiro Watanabe ,  Tsuneaki Ohashi ,  Tadaaki Matsuhisa

    发明人： Keiichiro Watanabe ,  Tsuneaki Ohashi ,  Tadaaki Matsuhisa

    IPC分类号： C04B35/48

    CPC分类号： C04B35/481

    摘要： Heat-resisting phosphate based compound sintered bodies are disclosed, which each contain not less than 10% by weight of a crystalline phase of RZr.sub.4 (PO.sub.4).sub.6 in which R is an element in Group IIa of the Periodic Table. A weight-reduced percentage of the sintered body when being thermally treated at 1,400.degree. C. for 100 hours is not more than 10%. A process for producing such phosphate based compound sintered bodies is also disclosed.

    摘要翻译： 公开了耐热磷酸盐系复合烧结体，其各自含有不少于10重量％的RZr4（PO4）6的结晶相，其中R为元素周期表IIa族元素。 当在1400℃下热处理100小时时，烧结体的重量减少百分比不大于10％。 还公开了一种生产这种磷酸盐基复合烧结体的方法。

    Heat resisting low expansion zirconyl phosphate-zircon composite
    10.
    发明授权
    Heat resisting low expansion zirconyl phosphate-zircon composite 失效
    耐热低膨胀型磷酸锆锆石复合材料

    公开(公告)号：US4883781A

    公开(公告)日：1989-11-28

    申请号：US94743

    申请日：1987-09-09

    申请人： Keiichiro Watanabe ,  Tsuneaki Ohashi

    发明人： Keiichiro Watanabe ,  Tsuneaki Ohashi

    IPC分类号： C04B35/447 ,  C04B35/48

    CPC分类号： C04B35/481 ,  C04B35/447

    摘要： Heat resisting low expansion zirconyl phosphate-zircon composite bodies are disclosed, which contain zirconyl phosphate and zircon as a main crystalline phase and a secondary crystalline phase, respectively. The heat resisting low expansion zirconyl phosphate-zircon composite bodies have a coefficient of thermal expansion in a temperature range from room temperature to 1,400.degree. C. being not more than 30.times.10-7/.degree. C. and a melting point being not less than 1,600.degree. C. The composite bodies have a chemical composition essentially consisting of 58.2 to 65.4% by weight of ZrO.sub.2, 17.4 to 37.1% by weight of P.sub.2 O.sub.5, and 1.5 to 19.0% by weight of SiO.sub.2. The heat resisting low expansion zirconyl phosphate-zircon composite bodies optionally contain MgO and Al.sub.2 O.sub.3 in a total amount of not more than 2.5% by weight or 0.1 to 4% by weight of Nb.sub.2 O.sub.5. A process for producing such zirconyl phosphate-zircon composite bodies is also disclosed.

    摘要翻译： 公开了耐热低膨胀性磷酸锆锆石复合体，其分别含有磷酸锆和锆石作为主结晶相和二次结晶相。 耐热低膨胀型磷酸锆锆锆复合体的体系在室温〜1400℃的温度范围内的热膨胀系数为30×10 -7 /℃以下，熔点为1600℃以上 复合体具有基本上由58.2至65.4重量％的ZrO 2，17.4至37.1重量％的P 2 O 5和1.5至19.0重量％的SiO 2组成的化学组成。 耐热低膨胀性磷酸锆锆锆复合体任意地含有MgO和Al 2 O 3，其总量不超过2.5重量％或0.1〜4重量％的Nb 2 O 5。 还公开了一种制备这种磷酸锆锆石复合体的方法。