摘要:
A vehicle includes a wheel and a vehicle body connected with each other via a suspension having a spring. An oscillation detection unit detects an oscillation of the vehicle body in forward and backward directions. A resonance frequency detection unit detects a resonance frequency of the vehicle body according to a detection result of the oscillation detection unit. A weight determination unit determines a weight of the vehicle body according to the resonance frequency detected by the resonance frequency detection unit.
摘要:
A semiconductor device has an alignment mark which can be recognized by a conventional wafer prober. A redistribution layer connects electrodes of the semiconductor device to electrode pads located in predetermined positions of the redistribution layer. Metal posts configured to be provided with external connection electrodes are formed on the electrode pads of the redistribution layer. A mark member made of the same material as the metal posts is formed on the redistribution layer. The mark member serves as an alignment mark located in a predetermined positional relationship with the metal posts.
摘要:
A semiconductor device has an alignment mark which can be recognized by a conventional wafer prober. A redistribution layer connects electrodes of the semiconductor device to electrode pads located in predetermined positions of the redistribution layer. Metal posts configured to be provided with external connection electrodes are formed on the electrode pads of the redistribution layer. A mark member made of the same material as the metal posts is formed on the redistribution layer. The mark member serves as an alignment mark located in a predetermined positional relationship with the metal posts.
摘要:
A semiconductor memory device includes: a capacitor formed on a substrate and including a lower electrode, a dielectric film and an upper electrode; a selection transistor formed at the substrate; an electrically conductive plug for providing electrical connection between the selection transistor and the capacitor; and a diffusion barrier film provided between the electrically conductive plug and the lower electrode of the capacitor. The diffusion barrier film is a TaxSi1−xNy film or a HfxSi1−xNy film (where 0.2
摘要:
In a semiconductor memory device, a tantalum silicon nitride film or hafnium silicon nitride film is provided, as a diffusion barrier layer, between a polysilicon plug which electrically connects a source/drain region to a lower platinum electrode of a capacitor, formed on a silicon substrate, and the lower platinum electrode.The tantalum silicon nitride film has a composition of Ta.sub.X Si.sub.1-X N.sub.Y wherein 0.75 .ltoreq.X.ltoreq.0.95 and 1.0 .ltoreq.Y.ltoreq.1.1.The hafnium silicon nitride film has a composition of Hf.sub.X Si.sub.1-X N.sub.Y wherein 0.2
摘要:
A method for etching a ferroelectric film made of a compound containing lead of the present invention, includes the steps of: forming an insulating film, metal films, and a ferroelectric film on a substrate in this order; forming an etching resistant film on the ferroelectric film, followed by patterning; and etching the ferroelectric film with a mixed gas containing an inert gas and a halogen gas or a halogenated gas as an etching gas, using the patterned etching resistant film as an etching mask.
摘要:
It is determined whether a vehicle enters a halting state or a slow moving state. It is detected that an accelerator opening degree of the vehicle is zero during a deceleration duration up to the time to enter the halting state or the slow moving state. Further, an accelerator zero duration is calculated which is a duration for which the vehicle is in the halting state or the slow moving state while the accelerator opening degree is zero. Furthermore, an accelerator zero travel distance is calculated which the vehicle runs during the calculated accelerator zero duration. Based on the accelerator zero travel distance, it is determined whether the fuel saving driving operation is performed in traveling during the accelerator zero travel duration. Even in the state where the travel speed of the vehicle changes more than needs during inertia travel, the fuel saving driving operation is diagnosed appropriately.
摘要:
In a semiconductor storage device in a stack structure wherein a capacitor section having an upper electrode, a dielectric layer, and a lower electrode is connected with a transistor section by a plug, the lower electrode is formed in contact with the plug. The lower electrode is formed of at least an oxide of a platinum-rhodium alloy. In addition to the oxide of a platinum-rhodium alloy, platinum and/or a platinum-rhodium alloy can be used as materials for forming the lower electrode. The plug is formed of polysilicon or tungsten. When the plug is formed of polysilicon, the lower electrode is formed by sequentially laminating, for example, a film of the oxide of the platinum-rhodium alloy, a film of the platinum-rhodium alloy, and a film of the oxide of the platinum-rhodium alloy on the plug.
摘要:
An electromagnetic wave matching element makes it possible to reduce the cost of a transmission system to a great degree. An electromagnetic wave matching element is adapted to allow electromagnetic wave beams incident from an entrance to be reflected by using plural mirrors to couple these reflected electromagnetic wave beams to an external transmission system through an exit. Mirrors are used that have a shape adapted to receive the plural electromagnetic waves in a beam form and to output electromagnetic wave beams having a predetermined distribution in which the number of the output electromagnetic waves is different from the number of the received electromagnetic waves.
摘要:
When an accelerator is put in an OFF state to decelerate a vehicle and perform inertia travel with supply of fuel being cut off, measurement of an accelerator OFF lapse time is started. When a travel speed falls down to be lower than a pre-stop speed, a measured lapse time is stored in a memory, with the measurement of the lapse time being further continued. After finishing a travel of a downward slope, the travel speed is reduced to fall down to the pre-stop speed again, a lapse time continuously measured up to that time is updated in the memory. When the travel speed falls to a stop speed, the measurement of the lapse time is finished and the continuously-measured lapse time is determined as a required stop time of the vehicle. As the required stop time increases, driving is diagnosed as being fuel-efficient.