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公开(公告)号：US06322247B1
公开(公告)日：2001-11-27
申请号：US09368621
申请日：1999-08-05
IPC分类号： G01K108
CPC分类号： G01N33/0014 , G01F1/6842 , G01F1/6845 , G01F5/00 , G01N1/2247 , G01N25/18 , G01N25/488 , G01N2001/2285
摘要： A microsensor housing having a structure with at least one inlet at one end and a thermal property sensor at the other end. Situated between the inlet and the sensor is a convection shield. Sampled fluid is taken in the inlet from a channel carrying the fluid to be sampled. The convection flow lines of the fluid are barred by the convection shield. The fluid is diffused into a cavity between the shield and sensor. The sensor detects a thermal property of the diffused fluid. One preferred shield has holes about its perimeter with a solid center part of the shield covering at a distance the sensor. The channel carrying the fluid may have screens to reduce turbulence noise and to aid in fluid transport to and from the sensor housing.
摘要翻译： 具有在一端具有至少一个入口的结构的微传感器外壳和另一端的热性传感器。 位于入口和传感器之间的是对流屏蔽。 采样流体从携带要采样的流体的通道进入入口。 流体的对流流线被对流屏蔽体所禁止。 流体扩散到屏蔽和传感器之间的空腔中。 传感器检测扩散流体的热性质。 一个优选的屏蔽件围绕其周边具有孔，屏蔽件的实心中心部分在传感器的一定距离处覆盖。 承载流体的通道可以具有筛网以减少湍流噪声并且有助于流体传输到传感器壳体和从传感器壳体传输。
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公开(公告)号：US5886249A
公开(公告)日：1999-03-23
申请号：US55621
申请日：1998-04-06
申请人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
发明人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
CPC分类号： G01N21/37 , G01N21/03 , G01N21/1702 , G01N21/3504 , G01N2021/0346
摘要： A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.
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公开(公告)号：US5869749A
公开(公告)日：1999-02-09
申请号：US841748
申请日：1997-04-30
申请人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
发明人： Ulrich Bonne , Barrett E. Cole , Robert E. Higashi
CPC分类号： G01N21/37 , G01N21/03 , G01N21/1702 , G01N21/3504 , G01N2021/0346
摘要： A micromachined integrated opto-fluidic or opto-acoustic sensor having a rapidly intensity-varying or pulsing light source, an interference filter, a gas cavity, which may or may not be an optical and/or acoustic resonator tuned to a particular wavelength of light, or sound frequency, into which the detected gas can diffuse into via a filter, and a fluidic or pressure sensor to detect the heating and cooling, and the resulting expansion and contraction of the gas due to the absorption of light at the particular wavelength by the specific gas being detected. The presence of other gases is inferred from the detected gas.
摘要翻译： 具有快速强度变化或脉冲光源的微加工的集成光流式或光声传感器，干涉滤光器，气腔，其可以或可以不是调谐到特定波长的光的光学和/或声学谐振器 或声音频率，检测到的气体可以通过过滤器扩散到其中;以及流体或压力传感器以检测加热和冷却，以及由于通过在特定波长处吸收光而导致的气体的膨胀和收缩 被检测的特定气体。 从检测到的气体推断其他气体的存在。
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公开(公告)号：US20100140670A1
公开(公告)日：2010-06-10
申请号：US12628889
申请日：2009-12-01
CPC分类号： H01L27/0617 , B81C1/00246 , H01L27/12
摘要： A method of forming CMOS circuitry integrated with MEMS devices includes bonding a wafer to a top surface layer having contacts formed to CMOS circuitry. A handle wafer is then removed from one of the top or bottom surfaces of the CMOS circuitry, and MEMS devices are formed in a remaining silicon layer.
摘要翻译： 形成与MEMS器件集成的CMOS电路的方法包括将晶片接合到具有形成于CMOS电路的触点的顶表面层。 然后从CMOS电路的顶表面或底表面中的一个去除处理晶片，并且MEMS器件形成在剩余的硅层中。
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公开(公告)号：US07703313B2
公开(公告)日：2010-04-27
申请号：US11675043
申请日：2007-02-14
申请人： Robert E. Higashi
发明人： Robert E. Higashi
IPC分类号： G01N25/00
CPC分类号： B81B3/0081 , B01L3/5027 , B01L3/502707 , B01L2200/14 , B01L2300/0627 , B01L2300/0816 , B01L2300/1827 , B81B2201/051 , B81B2201/058 , G01N30/6095 , G01N2030/025
摘要： Embodiments of the invention relate to a fluid containment structure for a micro analyzer comprising one or more shelled thermal structures in contact with a thermally isolated component of the analyzer and wherein the shelled thermal structure comprises a conformal film and also comprises three walls of a channel and the thermally isolated component forms the fourth wall.
摘要翻译： 本发明的实施例涉及一种用于微分析器的流体容纳结构，其包括与分析仪的热隔离部件接触的一个或多个外壳热结构，并且其中所述带壳热结构包括保形膜，并且还包括三个通道壁和 热隔离部件形成第四壁。
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公开(公告)号：US07391147B2
公开(公告)日：2008-06-24
申请号：US10735531
申请日：2003-12-12
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： H05H7/06
CPC分类号： G01J1/429
摘要： A light detector having a cathode wafer, a cavity wafer and an anode wafer. The cathode wafer may be bonded to one side of the cavity wafer and the anode wafer may be bonded to another side of the cavity wafer. The cathode wafer may have numerous cathodes, the anode wafer numerous anodes and the cavity wafer numerous cavities which may be aligned on a one-to-one basis to form a wafer structure of a plurality of detectors which may be diced into separable detector chips. When there is a voltage potential across a cathode and an anode, and a gas such as Ne or the like in the cavity, a reception of light such as ultra violet may result in an electronic discharge between the cathode and anode of the light detector.
摘要翻译： 具有阴极晶片，空腔晶片和阳极晶片的光检测器。 阴极晶片可以结合到空腔晶片的一侧，并且阳极晶片可以结合到空腔晶片的另一侧。 阴极晶片可以具有许多阴极，阳极晶片许多阳极和空腔晶片可以在一对一的基础上对准多个空腔，以形成可以切成可分离的检测器芯片的多个检测器的晶片结构。 当在阴极和阳极之间存在电压电势，并且在空腔中存在诸如Ne等的气体时，诸如紫外线的光的接收可能导致光检测器的阴极和阳极之间的电子放电。
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公开(公告)号：US07230432B2
公开(公告)日：2007-06-12
申请号：US11151902
申请日：2005-06-14
申请人： Barrett E. Cole , Robert E. Higashi
发明人： Barrett E. Cole , Robert E. Higashi
IPC分类号： G01N27/62
CPC分类号： G01N27/4146 , Y10S977/953
摘要： A sensor having a nanotube grown on and supported by thermal bimorph structures. The nanotube rests on a heat sink during sensing gas or a liquid and is moved from the heat sink when the nanotube is heated to desorb gas or liquid from it. The heatsink may function as a gate along with the bimorph structures as the other terminals of a transistor. Current-voltage and current-gate voltage characteristics may be obtained of the nanotube as a device like a transistor. These characteristics may provide information on a gas or liquid absorbed by the nanotube.
摘要翻译： 具有生长在热双晶体结构上并由其支撑的纳米管的传感器。 在感测气体或液体期间，纳米管位于散热器上，并且当加热纳米管以从其中解吸气体或液体时，其从散热器移动。 作为晶体管的其他端子，散热器可以与双压电晶片结构一起作为栅极。 作为像晶体管的器件，可以获得电流 - 电压和电流 - 栅极电压特性。 这些特性可以提供关于纳米管吸收的气体或液体的信息。
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公开(公告)号：US07145143B2
公开(公告)日：2006-12-05
申请号：US10749710
申请日：2003-12-31
CPC分类号： G01J3/26 , G01B11/272 , G01J3/36 , G01J3/427 , G01J5/023 , G01J5/10 , G01J5/20 , G02B5/284 , G02B26/001 , H01L27/14621 , H01L31/02024 , H01L31/02162 , H01L31/02325 , H01L2224/48091 , H01L2224/73204 , H01L2924/00014
摘要： A tunable bolometer device for detecting infrared light (IR) from a target at specific frequencies and in a broadband mode. The device may have an array of pixels of which each is controllable to be sensitive to a particular wavelength of light that is selected and detected. The detection of particular frequencies on a pixel level may result in spectral analysis of the target. Further, each pixel of the bolometer via an associated etalon may be tuned to detect a different frequency of IR or be switched to broadband detection of IR. The device may be packaged in an integrated vacuum package where the etalon array becomes the topcap which is bonded to the wafer containing the bolometer array.
摘要翻译： 一种用于在特定频率和宽带模式下从目标检测红外光（IR）的可调式辐射热量计装置。 该装置可以具有其每个可控制的像素阵列，以对被选择和检测的特定波长的光敏感。 像素级别上的特定频率的检测可能导致目标的频谱分析。 此外，测辐射热计的每个像素通过相关联的标准具可被调谐以检测IR的不同频率或被切换到IR的宽带检测。 该器件可以封装在集成的真空封装中，其中标准具阵列变成顶盖，其结合到包含测辐射热计阵列的晶片。
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9.发明授权
公开(公告)号：US5449910A
公开(公告)日：1995-09-12
申请号：US153066
申请日：1993-11-17
CPC分类号： H01L27/16
摘要： An infrared imaging array of thermoelectric sensors has a plurality of electrically connected microbridge subsensors comprising each sensor of the array. Each subsensor consists of a short span microbridge lying across a relatively small pit. The use of many of such subsensors for each sensor rather than a single large area microbridge sensor for a single pixel allows each pixel to be made large enough to give good sensitivity in either vacuum or gas-filled designs, and at the same time avoid the reduced fabrication yield which results when sensors span large pits.
摘要翻译： 热电传感器的红外成像阵列具有包括阵列的每个传感器的多个电连接的微桥子载体。 每个子传感器由跨越较小坑的短跨度微桥组成。 对于每个传感器而言，对于每个传感器而不是单个大面积微桥传感器使用许多这样的子传感器，允许每个像素被制成足够大以在真空或气体填充的设计中提供良好的灵敏度，并且同时避免 当传感器跨越大坑时，导致制造成品率降低。
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公开(公告)号：US4966037A
公开(公告)日：1990-10-30
申请号：US782188
申请日：1985-10-01
CPC分类号： G01P5/12 , G01F1/696 , H01L37/02 , H01L27/0211
摘要： A semiconductor device comprising a semiconductor body having a depression formed into the first surface of the body. The device further comprises member means comprising a thermal-to-electric transducer or static electric element, the member means having a predetermined configuration suspended over the depression. The member means is connected to the first surface so that the predetermined configuration is cantilevered over the depression, the depression opening to the first surface around at least a portion of the predetermined configuration. The depression provides substantial physical and thermal isolation between the element and the semiconductor body. In this manner, an integrated semiconductor device provides an environment of substantial physical and thermal isolation between the transducer or element and the semiconductor body.
摘要翻译： 一种半导体器件，包括半导体本体，其具有形成在本体的第一表面中的凹陷。 该装置还包括构件装置，该构件装置包括热电转换器或静电电元件，该构件装置具有悬挂在该凹部上的预定构型。 所述构件装置连接到所述第一表面，使得所述预定构型在所述凹部上悬臂，所述凹部开口至所述第一表面围绕所述预定构型的至少一部分。 凹陷在元件和半导体本体之间提供了实质的物理和热隔离。 以这种方式，集成半导体器件提供在换能器或元件与半导体主体之间的实质物理和热隔离的环境。
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