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    Holding arrangement for an optical element
    3.
    发明授权
    Holding arrangement for an optical element 失效
    保持光学元件的布置

    公开(公告)号：US08508868B2

    公开(公告)日：2013-08-13

    申请号：US13359341

    申请日：2012-01-26

    申请人： Ulrich Weber ,  Armin Schoeppach ,  Hubert Holderer

    发明人： Ulrich Weber ,  Armin Schoeppach ,  Hubert Holderer

    IPC分类号： G02B7/02 ,  G02B15/14

    CPC分类号： G02B7/004 ,  G02B7/023

    摘要： A holding arrangement for an optical element, in particular for a cylindrical lens, includes a basic structure surrounding an optical element and a mounting device by which the optical element is supported on the basic structure. The mounting device has two degrees of freedom so that the optical element can be supported by the mounting device in a manner that allows the optical element to rotate about both about an optical axis and an axis perpendicular to the optical axis. If the optical element is a cylindrical lens, the axis perpendicular to the optical axis can be an axis perpendicular to an axial direction of the cylindrical lens. The disclosure further relates to a manipulator unit for an optical system which includes a holding arrangement.

    摘要翻译： 用于光学元件的保持装置，特别是用于圆柱形透镜的保持装置包括围绕光学元件的基本结构和安装装置，光学元件通过该安装装置支撑在基本结构上。 安装装置具有两个自由度，使得光学元件可以以允许光学元件围绕光轴和垂直于光轴的轴线旋转的方式由安装装置支撑。 如果光学元件是圆柱形透镜，则垂直于光轴的轴线可以是垂直于柱面透镜轴向的轴线。 本发明还涉及一种用于光学系统的操纵器单元，其包括保持装置。

    Apparatus for tilting a carrier for optical elements
    6.
    发明授权
    Apparatus for tilting a carrier for optical elements 有权

    公开(公告)号：US07014328B2

    公开(公告)日：2006-03-21

    申请号：US10119182

    申请日：2002-04-08

    申请人： Ulrich Weber ,  Hubert Holderer ,  Alexander Kohl

    发明人： Ulrich Weber ,  Hubert Holderer ,  Alexander Kohl

    IPC分类号： G02B7/18 ,  G02B7/182

    CPC分类号： G02B7/182

    摘要： The invention relates to an apparatus for tilting a carrier for optical elements with two optical faces which are arranged together on a carrier and are fixed at a fixed angle to one another, the carrier being fastened on a base plate via articulated connections. The carrier can be pivoted about three tilting axes, a first tilting axis preferably being located in the plane of the first optical face and extending normal to the plane of the second optical face, the second tilting axis preferably being located in the plane of the second optical face and extending normal to the plane of the first optical face, and the third tilting axis being located parallel to the line of intersection between the two planes of the optical element.

    Device for manipulating the angular position of an object relative to a fixed structure
    8.
    发明申请
    Device for manipulating the angular position of an object relative to a fixed structure 审中-公开
    用于操纵物体相对于固定结构的角位置的装置

    公开(公告)号：US20050110447A1

    公开(公告)日：2005-05-26

    申请号：US10942638

    申请日：2004-09-16

    申请人： Ulrich Weber ,  Hubert Holderer ,  Hartmut Muenker

    发明人： Ulrich Weber ,  Hubert Holderer ,  Hartmut Muenker

    IPC分类号： G03F7/20 ,  G05G11/00 ,  B25J9/18 ,  B66C1/00

    CPC分类号： G03F7/70825 ,  Y10T74/20207

    摘要： The invention relates to a device for manipulation of the angular position of an object relative to a fixed structure, into which the object, in particular an optical element of a lens group for microlithography, is introduced, about three rotational axes, intersecting at a point. The object can also be held in a support frame. The support frame, with the object is connected to the fixed structure by means of three connection limbs each with three rotational degrees of freedom and one translational degree of freedom. The angular position of the support frame is adjustable about each one of the three rotational axes by means of one of the connection limbs.

    摘要翻译： 本发明涉及一种用于操纵物体相对于固定结构的角位置的装置，其中物体（特别是用于微光刻的透镜组的光学元件）被引入到该三维旋转轴中，在一个点处相交 。 物体也可以保持在支撑框架中。 具有该物体的支撑框架通过三个连接臂连接到固定结构，每个连接臂具有三个旋转自由度和一个平移自由度。 支撑框架的角位置可以通过连接四肢中的一个围绕三个旋转轴线中的每一个来调节。

    HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT
    9.
    发明申请
    HOLDING ARRANGEMENT FOR AN OPTICAL ELEMENT 失效
    光学元件的安装

    公开(公告)号：US20120140341A1

    公开(公告)日：2012-06-07

    申请号：US13359368

    申请日：2012-01-26

    申请人： Ulrich Weber ,  Hubert Holderer

    发明人： Ulrich Weber ,  Hubert Holderer

    IPC分类号： G02B7/02

    CPC分类号： G03F7/70825 ,  B23K26/02 ,  B23K26/035 ,  G02B7/003 ,  G02B7/028

    摘要： A holding arrangement for an optical element includes a basic structure surrounding an optical element and a mounting device by which the optical element can be supported on the basic structure with two degrees of freedom for a rotational movement about an optical axis and a translational movement along a first axis which extends perpendicularly to the optical axis and intersects the optical axis in a center. The mounting device includes four joint locations arranged point-symmetrically with respect to the center and at least one parallel rocker which is displaceable parallel to the first axis. A manipulator unit includes a holding arrangement.

    摘要翻译： 用于光学元件的保持装置包括围绕光学元件的基本结构和安装装置，通过该安装装置，光学元件可以以两个自由度支撑在基本结构上，用于围绕光轴的旋转运动和沿着光轴的平移运动 第一轴线垂直于光轴延伸并与中心的光轴相交。 安装装置包括相对于中心点对称布置的四个关节位置和平行于第一轴线移动的至少一个平行摇杆。 操纵器单元包括保持装置。