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公开(公告)号：US10158061B2
公开(公告)日：2018-12-18
申请号：US14163790
申请日：2014-01-24
发明人： Connie P. Wang , Paul Murphy , Paul Sullivan
摘要： In one embodiment, a method to form a superconductor device includes depositing a crystalline layer having a preferred crystallographic orientation on a substrate and forming an oriented superconductor layer comprising an oriented superconductor material on the crystalline layer. A metallic layer is formed on the superconductor layer and a mask is provided proximate the substrate to define a protected portion of the oriented superconductor layer and an exposed portion of the oriented superconductor layer. The exposed portion of the oriented superconductor layer is removed without etching the protected portion of the oriented superconductor layer.
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公开(公告)号：US20160160344A1
公开(公告)日：2016-06-09
申请号：US14091510
申请日：2013-11-27
发明人： Connie P. Wang , Paul Murphy , Paul Sullivan , Ludovic Godet , Frank Sinclair , Morgan Evans
CPC分类号： C23C14/48 , C23C14/025 , C23C14/5806 , H01B12/02 , H01B13/0016 , H01B13/0036 , H01L39/143 , H01L39/2464
摘要： A method of forming a superconductor tape, includes depositing a superconductor layer on a substrate, forming a metal layer comprising a first metal on a surface of the superconductor layer, and implanting an alloy species into the metal layer where the first metal forms a metal alloy after the implanting the alloy species.
摘要翻译： 一种形成超导体带的方法，包括在衬底上沉积超导体层，在超导体层的表面上形成包含第一金属的金属层，并将合金种类注入金属层中，其中第一金属形成金属合金 植入合金种类后。
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公开(公告)号：US20130108799A1
公开(公告)日：2013-05-02
申请号：US13662110
申请日：2012-10-26
CPC分类号： H01J37/20 , H01J37/3023 , H01J37/3171 , H01J2237/024 , H01J2237/31711 , H01L21/266 , H01L21/67213 , H01L31/18 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： One embodiment of this ion implanter includes an ion source and a process chamber. This process chamber is connected to the ion source and separated from the ion source by a plurality of extraction electrodes. A carrier holds multiple workpieces. A mask loader in the process chamber connects a mask to the carrier. A transfer chamber and load lock may be connected to the process chamber. The ion implanter is configured to perform either blanket or selective implantation of the workpieces.
摘要翻译： 该离子注入机的一个实施例包括离子源和处理室。 该处理室与离子源连接并通过多个提取电极与离子源分离。 托架支撑多个工件。 处理室中的掩模加载器将掩模连接到载体。 传送室和加载锁可以连接到处理室。 离子注入机被配置为执行工件的橡皮布或选择性植入。
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公开(公告)号：US09768370B2
公开(公告)日：2017-09-19
申请号：US14029351
申请日：2013-09-17
CPC分类号： H01L39/18 , H01L39/143 , H01L39/2464
摘要： A superconductor tape includes a plurality of conductive strips having respective long directions parallel to a long tape direction of the superconductor tape, where each of the plurality of conductive strips separated from one another by a inter-strip region. The superconductor tape further includes a superconductor layer disposed adjacent the plurality of conductive strips, having a length along the long tape direction, where the superconductor layer comprises a plurality of superconductor strips disposed under the respective plurality of conductive strips, and a non-superconductor strip disposed adjacent the inter-strip region.
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公开(公告)号：US09590161B2
公开(公告)日：2017-03-07
申请号：US14092296
申请日：2013-11-27
发明人： Connie P. Wang , Paul Murphy , Paul Sullivan , Sukti Chatterjee
CPC分类号： H01L39/128 , H01L39/2464 , H01L39/249 , Y10T428/24174
摘要： A method of forming a superconductor includes exposing a layer disposed on a substrate to an oxygen ambient, and selectively annealing a portion of the layer to form a superconducting region within the layer.
摘要翻译： 形成超导体的方法包括将设置在衬底上的层暴露于氧环境中，并且选择性地退火该层的一部分以在该层内形成超导区域。
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公开(公告)号：US20150348682A1
公开(公告)日：2015-12-03
申请号：US14077901
申请日：2013-11-12
发明人： Connie P. Wang , Paul Murphy , Paul Sullivan
CPC分类号： H01B12/06 , H01B13/30 , H01L39/143 , H01L39/16 , H01L39/2458 , H01L39/2461 , H01L39/2464 , H01L39/249 , H02H9/023
摘要： An integrated superconductor device may include a substrate base and an intermediate layer disposed on the substrate base and comprising a preferred crystallographic orientation. The integrated superconductor device may further include an oriented superconductor layer disposed on the intermediate layer and a conductive strip disposed on a portion of the oriented superconductor layer, The conductive strip may define a superconductor region of the oriented superconductor layer thereunder, and an exposed region of the oriented superconductor layer adjacent the superconductor region.
摘要翻译： 集成超导体器件可以包括衬底基底和设置在衬底基底上并包括优选晶体取向的中间层。 集成超导体器件还可以包括设置在中间层上的取向超导体层和设置在取向超导体层的一部分上的导电条。导电条可以限定其下面的定向超导体层的超导体区域， 与超导体区域相邻的取向超导体层。
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公开(公告)号：US20150348680A1
公开(公告)日：2015-12-03
申请号：US14029351
申请日：2013-09-17
CPC分类号： H01L39/18 , H01L39/143 , H01L39/2464
摘要： A superconductor tape includes a plurality of conductive strips having respective long directions parallel to a long tape direction of the superconductor tape, where each of the plurality of conductive strips separated from one another by a inter-strip region. The superconductor tape further includes a superconductor layer disposed adjacent the plurality of conductive strips, having a length along the long tape direction, where the superconductor layer comprises a plurality of superconductor strips disposed under the respective plurality of conductive strips, and a non-superconductor strip disposed adjacent the inter-strip region.
摘要翻译： 超导带包括多个导电条，其具有平行于超导带的长带方向的相应长方向，其中多个导电条中的每一个通过条带间隔彼此分开。 超导体带还包括与多个导电条相邻设置的超导体层，其具有沿着长带方向的长度，其中超导体层包括设置在相应的多个导电条下的多个超导体条，以及非超导带 设置在带间区域附近。
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公开(公告)号：US09947441B2
公开(公告)日：2018-04-17
申请号：US14077901
申请日：2013-11-12
发明人： Connie P. Wang , Paul Murphy , Paul Sullivan
CPC分类号： H01B12/06 , H01B13/30 , H01L39/143 , H01L39/16 , H01L39/2458 , H01L39/2461 , H01L39/2464 , H01L39/249 , H02H9/023
摘要： An integrated superconductor device may include a substrate base and an intermediate layer disposed on the substrate base and comprising a preferred crystallographic orientation. The integrated superconductor device may further include an oriented superconductor layer disposed on the intermediate layer and a conductive strip disposed on a portion of the oriented superconductor layer, The conductive strip may define a superconductor region of the oriented superconductor layer thereunder, and an exposed region of the oriented superconductor layer adjacent the superconductor region.
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公开(公告)号：US09437392B2
公开(公告)日：2016-09-06
申请号：US13662110
申请日：2012-10-26
IPC分类号： H01J37/00 , H01J37/20 , H01J37/302 , H01J37/317 , H01L21/266 , H01L21/67 , H01L31/18
CPC分类号： H01J37/20 , H01J37/3023 , H01J37/3171 , H01J2237/024 , H01J2237/31711 , H01L21/266 , H01L21/67213 , H01L31/18 , H01L31/1804 , Y02E10/547 , Y02P70/521
摘要： One embodiment of this ion implanter includes an ion source and a process chamber. This process chamber is connected to the ion source and separated from the ion source by a plurality of extraction electrodes. A carrier holds multiple workpieces. A mask loader in the process chamber connects a mask to the carrier. A transfer chamber and load lock may be connected to the process chamber. The ion implanter is configured to perform either blanket or selective implantation of the workpieces.
摘要翻译： 该离子注入机的一个实施例包括离子源和处理室。 该处理室与离子源连接并通过多个提取电极与离子源分离。 托架支撑多个工件。 处理室中的掩模加载器将掩模连接到载体。 传送室和加载锁可以连接到处理室。 离子注入机被配置为执行工件的橡皮布或选择性植入。
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公开(公告)号：US20150148236A1
公开(公告)日：2015-05-28
申请号：US14092296
申请日：2013-11-27
发明人： Connie P. Wang , Paul Murphy , Paul Sullivan , Sukti Chatterjee
CPC分类号： H01L39/128 , H01L39/2464 , H01L39/249 , Y10T428/24174
摘要： A method of forming a superconductor includes exposing a layer disposed on a substrate to an oxygen ambient, and selectively annealing a portion of the layer to form a superconducting region within the layer.
摘要翻译： 形成超导体的方法包括将设置在衬底上的层暴露于氧环境中，并且选择性地退火该层的一部分以在该层内形成超导区域。
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