Capacitors Having Dielectric Regions That Include Multiple Metal Oxide-Comprising Materials
    3.
    发明申请
    Capacitors Having Dielectric Regions That Include Multiple Metal Oxide-Comprising Materials 失效
    具有包含多种金属氧化物的材料的介电区域的电容器

    公开(公告)号:US20100315760A1

    公开(公告)日:2010-12-16

    申请号:US12483474

    申请日:2009-06-12

    IPC分类号: H01G4/10

    CPC分类号: H01L28/56 H01G4/10 H01L27/108

    摘要: Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.

    摘要翻译: 公开了形成电容器的电容器和方法,其包括内部导电金属电容器电极和外部导电金属电容器电极。 电容器电介质区域被容纳在内导电金属电容电极和外导电金属电容器电极之间,并且具有不大于150埃的厚度。 公开了厚度和关系的材料的各种组合,其相互之间可以实现和导致电介质区域的介电常数k至少为35,而在-1.1V至-1.0V的范围内漏电流不大于1×10-7Aps / cm 2 + 1.1V。

    Capacitors Having Dielectric Regions That Include Multiple Metal Oxide-Comprising Materials
    5.
    发明申请
    Capacitors Having Dielectric Regions That Include Multiple Metal Oxide-Comprising Materials 有权
    具有包含多种金属氧化物的材料的介电区域的电容器

    公开(公告)号:US20120320494A1

    公开(公告)日:2012-12-20

    申请号:US13597708

    申请日:2012-08-29

    IPC分类号: H01G4/10

    CPC分类号: H01L28/56 H01G4/10 H01L27/108

    摘要: Capacitors and methods of forming capacitors are disclosed, and which include an inner conductive metal capacitor electrode and an outer conductive metal capacitor electrode. A capacitor dielectric region is received between the inner and the outer conductive metal capacitor electrodes and has a thickness no greater than 150 Angstroms. Various combinations of materials of thicknesses and relationships relative one another are disclosed which enables and results in the dielectric region having a dielectric constant k of at least 35 yet leakage current no greater than 1×10−7 amps/cm2 at from −1.1V to +1.1V.

    摘要翻译: 公开了形成电容器的电容器和方法,其包括内部导电金属电容器电极和外部导电金属电容器电极。 电容器电介质区域被容纳在内导电金属电容电极和外导电金属电容器电极之间,并且具有不大于150埃的厚度。 公开了厚度和关系的材料的各种组合,其相互之间可以实现和导致电介质区域的介电常数k至少为35,而在-1.1V至-1.0V的范围内漏电流不大于1×10-7Aps / cm 2 + 1.1V。