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1.发明授权公开(公告)号：US06522801B1
公开(公告)日：2003-02-18
申请号：US09685883
申请日：2000-10-10
申请人： Vladimir A. Aksyuk , Sungho Jin , Jungsang Kim , Hareesh Mavoori , Flavio Pardo , Ainissa Ramirez
发明人： Vladimir A. Aksyuk , Sungho Jin , Jungsang Kim , Hareesh Mavoori , Flavio Pardo , Ainissa Ramirez
IPC分类号： G02B642
CPC分类号： G02B26/0841 , B81B2201/042 , B81B2203/0127 , B81C1/00666 , B81C2201/0164 , G02B6/122 , G02B6/266 , G02B2006/12104
摘要： The present invention provides a micro-electro-mechanical system (MEMS) optical device. The micro-electro-mechanical system (MEMS) optical device includes a mirror having a substrate with an implanted light reflective optical layer thereover, and a mounting substrate on which the mirror is movably mounted. The inclusion of the dopant within the light reflective optical layer increases the tensile stress of the device and tends to correct the concave curvature of the mirror structure toward a desirably flat configuration.
摘要翻译： 本发明提供一种微电子机械系统（MEMS）光学装置。 微电子机械系统（MEMS）光学器件包括具有其上具有注入光反射光学层的衬底的反射镜，以及安装衬底，反射镜可移动地安装在该安装衬底上。 掺杂剂在光反射光学层中的包含增加了器件的拉伸应力，并且倾向于将反射镜结构的凹曲线朝向期望的平坦构型进行校正。
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2.发明授权公开(公告)号：US06998758B2
公开(公告)日：2006-02-14
申请号：US10455082
申请日：2003-06-05
CPC分类号： G02B26/06
摘要： A MEMS device having a deformable mirror. In a representative embodiment, the MEMS device includes a deformable membrane supporting a plurality of light-reflecting segments that form the deformable mirror. One or more actuators, at least one of which is configured to apply torque to a side of the membrane, are used to deform the membrane. Membrane deformation causes the segments to change orientation and thereby change the shape of the minor. A representative MEMS device of the invention enables segment displacements in two directions and thereby realizes effective mirror curvature values in the range from about −2 mm−1 to about +2 mm−1.
摘要翻译： 具有可变形反射镜的MEMS器件。 在代表性的实施例中，MEMS器件包括支撑形成可变形反射镜的多个光反射段的可变形膜。 用于使膜变形的一个或多个致动器（其中至少一个构造成向膜的一侧施加扭矩）。 膜变形导致片段改变取向，从而改变镜子的形状。 本发明的代表性的MEMS器件使得能够在两个方向上的段位移，从而实现在约-2mm -1至约+2mm -1的范围内的有效镜曲率值 >。
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公开(公告)号：US06781744B1
公开(公告)日：2004-08-24
申请号：US10459108
申请日：2003-06-11
IPC分类号： G02B2600
CPC分类号： G02B6/357 , B81B3/0062 , B81B2201/042 , G02B6/3518 , G02B26/0841
摘要： A MEMS device having a movable mirror and a movable actuator plate mechanically coupled together such that a relatively small displacement of the plate results in mirror rotation by a relatively large angle. In a representative embodiment, the mirror and actuator plate are supported on a substrate. The actuator plate moves in response to a voltage difference applied between the plate and an electrode located on the substrate beneath that plate. One or more springs attached to the plate provide a counteracting restoring force when they are stretched from their rest positions by the plate motion. A spring attached between the actuator plate and the mirror transfers the motion of the actuator plate to the mirror such that, when the actuator plate moves toward the substrate, the mirror moves away from the substrate. A representative MEMS device of the invention configured with a mirror that is about 100 &mgr;m in length is capable of producing the mirror rotation angle of about 15 degrees using an actuator voltage of only about 50 V.
摘要翻译： MEMS器件具有可移动反射镜和机械耦合在一起的可移动致动器板，使得板的相对小的位移导致反射镜旋转相对较大的角度。 在代表性的实施例中，反射镜和致动器板被支撑在基板上。 致动器板响应于施加在板和位于该板下方的衬底上的电极之间的电压差而移动。 连接到板上的一个或多个弹簧当它们通过板运动从其静止位置拉伸时提供抵消恢复力。 附接在致动器板和反射镜之间的弹簧将致动器板的运动传递到反射镜，使得当致动器板向基板移动时，反射镜远离基板移动。 配置有长度大约为100微米的反射镜的本发明的代表性MEMS器件能够使用仅约50V的致动器电压产生约15度的反射镜旋转角度。
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公开(公告)号：US20090142016A1
公开(公告)日：2009-06-04
申请号：US11949216
申请日：2007-12-03
申请人： Vladimir A. Aksyuk , Girsh Blumberg
发明人： Vladimir A. Aksyuk , Girsh Blumberg
CPC分类号： G02B6/1226 , B82Y20/00 , G02B3/00 , G02B3/04 , G02B5/04
摘要： According to one embodiment, a circuit element for a plasmonic circuit is formed using a dielectric layer having two portions, each characterized by a different electric permittivity. The dielectric layer is adjacent to a metal layer, with the interface between the layers defining a conduit for propagation of surface plasmons. A dielectric boundary between the two portions of the dielectric layer is shaped to enable the circuit element to change one or more of propagation direction, cross-section, spectral composition, and intensity distribution for a beam of surface plasmons received by the circuit element.
摘要翻译： 根据一个实施例，用于等离子体激元电路的电路元件使用具有两部分的介电层形成，每个部分的特征在于不同的介电常数。 电介质层与金属层相邻，层之间的界面限定了用于表面等离子体激元传播的导管。 电介质层的两部分之间的电介质边界被成形为使得电路元件能够改变由电路元件接收的表面等离子体束的传播方向，横截面，光谱组成和强度分布中的一个或多个。
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公开(公告)号：US5974207A
公开(公告)日：1999-10-26
申请号：US997173
申请日：1997-12-23
CPC分类号： G02B6/29383 , G02B6/29317 , G02B6/29395 , H04J14/0209 , H04J14/0212 , H04J14/0216 , H04Q11/0001 , H04J14/0219
摘要： A wavelength-selective add-drop multiplexer is disclosed for adding and/or dropping spectral components from a wavelength-division-multiplexed optical signal. (1.times.1) or (2.times.2) optical switches are used, either alone or in conjunction with other optical elements, to separate spectral components identified for drop from other spectral components.
摘要翻译： 公开了一种用于从波分复用光信号中添加和/或丢弃频谱分量的波长选择性分插复用器。 （1x1）或（2x2）光学开关单独使用或与其他光学元件结合使用，以分离识别为与其他光谱分量相关的光谱分量。
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公开(公告)号：US07502160B2
公开(公告)日：2009-03-10
申请号：US11681376
申请日：2007-03-02
申请人： Vladimir A. Aksyuk , Randy C. Giles , Omar D. Lopez , Roland Ryf
发明人： Vladimir A. Aksyuk , Randy C. Giles , Omar D. Lopez , Roland Ryf
CPC分类号： G02B26/0833 , G02B27/48
摘要： A laser projector having a configurable spatial light modulator (SLM) adapted to display various spatial modulation patterns and redirect illumination from a laser to form an image on the viewing screen. The laser projector drives the SLM to change spatial modulation patterns at a rate that causes the corresponding sequence of projected images to fuse to mitigate appearance of speckle in the resulting fused image. The SLM can be designed to redirect the illumination using either diffraction or specular reflection of light from the displayed spatial modulation pattern. In one embodiment, the SLM is a MEMS device having an array of individually addressable mirrors supported over a substrate and adapted to move (e.g., translate and/or rotate) with respect to the substrate.
摘要翻译： 一种具有可配置空间光调制器（SLM）的激光投影仪，其适于显示各种空间调制图案，并且从激光器重定向照明以在观看屏幕上形成图像。 激光投影机驱动SLM以以使得相应的投影图像序列融合的速率来改变空间调制图案，以减轻所得融合图像中斑点的外观。 SLM可以被设计成使用来自显示的空间调制图案的光的衍射或镜面反射来重定向照明。 在一个实施例中，SLM是具有支撑在衬底上并适于相对于衬底移动（例如平移和/或旋转）的单独可寻址镜的阵列的MEMS器件。
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公开(公告)号：US20070278699A1
公开(公告)日：2007-12-06
申请号：US11445072
申请日：2006-05-31
申请人： Vladimir A. Aksyuk , Nagesh R. Basavanhally , Avinoam Kornblit , Warren Yiu-Cho Lai , Joseph Ashley Taylor , Robert Francis Fullowan
发明人： Vladimir A. Aksyuk , Nagesh R. Basavanhally , Avinoam Kornblit , Warren Yiu-Cho Lai , Joseph Ashley Taylor , Robert Francis Fullowan
IPC分类号： H01L23/48
CPC分类号： H01L21/6835 , B81B7/0006 , B81B7/04 , H01L21/486 , H01L21/6836 , H01L23/147 , H01L23/5384 , H01L24/11 , H01L24/12 , H01L24/16 , H01L24/81 , H01L25/0655 , H01L2221/68318 , H01L2221/68327 , H01L2221/68372 , H01L2224/0401 , H01L2224/0557 , H01L2224/05572 , H01L2224/1147 , H01L2224/11472 , H01L2224/13025 , H01L2224/13099 , H01L2224/13109 , H01L2224/13111 , H01L2224/16 , H01L2224/81001 , H01L2224/81801 , H01L2924/0002 , H01L2924/01006 , H01L2924/01015 , H01L2924/01033 , H01L2924/01049 , H01L2924/0105 , H01L2924/014 , H01L2924/14 , H01L2924/1461 , H01L2924/00 , H01L2224/05552
摘要： Apparatus including a chip substrate having a first chip surface facing away from a second chip surface; an array of microelectronic elements on the first chip surface; and an array of conductors each in communication with one of the microelectronic elements, the conductors passing through the chip substrate and fully spanning a distance between the first and second chip surfaces. Process including: providing an apparatus including a chip substrate having a first chip surface facing away from a second chip surface, an array of microelectronic elements being on the first chip surface, an array of conductors each being in communication with one of the microelectronic elements and partially spanning an average distance between the first and second chip surfaces; bonding a temporary support carrier onto the array of microelectronic elements; removing a portion of the chip substrate, thereby reducing the average distance between the first and second chip surfaces; and forming an under bump metallization pad at the second chip surface in electrical communication with a conductor.
摘要翻译： 一种装置，包括具有背离第二芯片表面的第一芯片表面的芯片衬底; 第一芯片表面上的微电子元件阵列; 以及每个与所述微电子元件中的一个连通的导体阵列，所述导体穿过所述芯片基板并且完全跨越所述第一和第二芯片表面之间的距离。 该方法包括：提供包括芯片衬底的装置，该芯片衬底具有背离第二芯片表面的第一芯片表面，位于第一芯片表面上的微电子元件阵列，每个导体阵列与微电子元件中的一个连接， 部分跨越第一和第二芯片表面之间的平均距离; 将临时支撑载体接合到微电子元件阵列上; 去除所述芯片基板的一部分，从而减小所述第一和第二芯片表面之间的平均距离; 以及在所述第二芯片表面处形成与导体电连通的凸块下金属化焊盘。
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8.发明授权公开(公告)号：US06204946B1
公开(公告)日：2001-03-20
申请号：US08968935
申请日：1997-11-12
IPC分类号： H04J1402
CPC分类号： G02B6/2931 , G02B6/29313 , G02B6/29383 , G02B6/3512 , G02B6/356 , H04J14/0206 , H04J14/021 , H04J14/0213 , H04Q11/0005 , H04Q2011/0015 , H04Q2011/0016 , H04Q2011/0026 , H04Q2011/0032 , H04Q2011/0035 , H04Q2011/0041
摘要： A WDM add/drop device for use in an optic communications system for adding and dropping optical wavelengths from a multiple-wavelength optical system. The device includes a set of lenses, a planar grating wavelength multiplexer and a micromirror array switchable for individual wavelengths of the multiple-wavelength signal between a transmit mode and a reflect mode. The grating angularly demultiplexes a multiple-wavelength optical signal in a first direction and the individual wavelengths are processed by the micromirror array and directed to the grating in a second direction. The micromirror array will either reflect select wavelengths to a first port or transmit select wavelengths to a second port. In a preferred embodiment, ports on a first multiport circulator input the multiple-wavelength optical signal to the WDM add/drop device and output the multiple-wavelength optical signal from the WDM add/drop device. A second multiport circulator provides to-be-added wavelengths to the WDM add/drop device and removes to-be-dropped wavelengths from the WDM add/drop device.
摘要翻译： 一种用于光通信系统中用于从多波长光学系统添加和丢弃光波长的WDM加分装置。 该装置包括一组透镜，平面光栅波长多路复用器和可在发射模式和反射模式之间的多波长信号的各波长切换的微镜阵列。 光栅在第一方向上对多波长光信号进行角度分解，并且各个波长由微镜阵列处理，并在第二方向上被引导到光栅。 微镜阵列将将选择波长反射到第一端口或将选择波长发射到第二端口。 在优选实施例中，第一多端口循环器上的端口将多波长光信号输入到WDM分插装置，并从WDM分插装置输出多波长光信号。 第二个多端口环行器向WDM加/减设备提供待添加的波长，并从WDM添加/删除设备中删除波长丢失的波长。
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公开(公告)号：US6108466A
公开(公告)日：2000-08-22
申请号：US154797
申请日：1998-09-17
CPC分类号： G02B6/3514 , G02B6/122 , G02B6/262 , G02B6/3532 , G02B6/3546 , G02B6/357 , G02B6/3818
摘要： One-by-three and two-by-two optical switches comprising optical waveguides or fibers with tapered ends that utilize electrostatically-driven actuators are disclosed. Tapering of the fiber ends allow the ends to be positioned in close proximity to one another to yield an optical switch with low insertion loss. In one embodiment the optical switch comprises: (1) four optical waveguides each having a tapered end comprising two tapered edges and disposed on a support such that each tapered edge of each waveguide is in opposed and near-abutting relation with a tapered edge of another optical waveguide, said near abutment defining a space between each pair of opposes tapered edges; (2) a first electromechanical actuator operable to move at least a first optical device into and out of a path of an optical signal travelling between two of the waveguides, wherein the first optical device moves in the space between a first pair of opposed tapered edges; and (3) a second electromechanical actuator operable to move at least a second optical device into and out of the path of the optical signal, wherein the second optical device moves in the space between a second pair of opposed tapered edges, wherein one tapered edge of the first pair and one tapered edge of the second pair are common to one of the optical waveguides.
摘要翻译： 公开了一种包括使用静电驱动致动器的光波导或具有锥形末端的光纤的一对三和两乘二光学开关。 纤维端部的锥形允许端部彼此靠近地定位，以产生具有低插入损耗的光学开关。 在一个实施例中，光开关包括：（1）四个光波导，每个光波导具有包括两个锥形边缘并且设置在支撑件上的锥形端，使得每个波导的每个锥形边缘与另一个波导的锥形边缘处于相对且近邻的关系 光波导，所述近邻台在每对相对的锥形边缘之间限定空间; （2）第一机电致动器，其可操作以将至少第一光学装置移入和移出在两个波导之间行进的光信号的路径，其中第一光学装置在第一对相对的锥形边缘 ; 和（3）第二机电致动器，其可操作以将至少第二光学装置移入和移出光信号的路径，其中第二光学装置在第二对相对的锥形边缘之间的空间内移动，其中一个锥形边缘 第一对的一个锥形边缘和第二对的一个锥形边缘对于一个光波导是共同的。
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10.发明申请公开(公告)号：US20080316563A1
公开(公告)日：2008-12-25
申请号：US12199236
申请日：2008-08-27
IPC分类号： G02B26/08
CPC分类号： B81C1/00476 , B81B2201/038 , B81C1/00801
摘要： The present invention provides an apparatus. The apparatus, may include an actuator located over a substrate, a movable feature located over and coupled to the actuator, and a layer of material located above the actuator and movable feature and not constituting part of a beam/spring associated with the movable feature, the layer of material configured as a reservoir having an interior capable of holding a liquid, the movable feature being exposed to the interior.
摘要翻译： 本发明提供一种装置。 该装置可以包括位于基板上的致动器，位于致动器上方并联接到致动器的可移动特征，以及位于致动器和可移动特征上方的材料层，并且不构成与可移动特征相关联的梁/弹簧的一部分， 所述材料层被构造为具有能够保持液体的内部的储存器，所述可移动特征暴露于内部。
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