Extreme ultraviolet light source apparatus
    2.
    发明授权
    Extreme ultraviolet light source apparatus 有权
    极紫外光源设备

    公开(公告)号:US09052615B2

    公开(公告)日:2015-06-09

    申请号:US12543582

    申请日:2009-08-19

    IPC分类号: G21K5/04 G03F7/20

    摘要: An EUV light source apparatus by which detachment of a chamber or a part of the chamber, movement to a maintenance area, and highly accurate placement relative to projection optics can be performed easily for maintenance of the EUV light source apparatus. The EUV light source apparatus is an apparatus for generating plasma by applying a laser beam to a target material within a chamber and entering EUV light radiated from the plasma into projection optics of exposure equipment, and includes a positioning mechanism for positioning the chamber or a maintenance unit of the chamber in a predetermined location where an optical axis of the collected extreme ultraviolet light and an optical axis of the projection optics of the exposure equipment are aligned, and a movement mechanism for moving the chamber or the maintenance unit of the chamber between the predetermined location and a maintenance area.

    摘要翻译: EUV光源装置能够容易地进行EUV光源装置的维护,EUV光源装置能够容易地进行腔室或腔室的一部分的移动,到维护区域的移动以及相对于投影光学元件的高精度放置。 EUV光源装置是通过将激光束施加到室内的目标材料并且将从等离子体辐射的EUV光输入到曝光设备的投影光学器件中来产生等离子体的装置,并且包括用于定位腔室或维护的定位机构 在所述收集的极紫外光的光轴和所述曝光设备的投影光学元件的光轴对准的预定位置处的所述室的单元,以及用于将所述室或所述室的维护单元移动到所述室 预定位置和维护区域。

    Optical pickup unit and optical pickup device having same and information writing/reading device having same
    3.
    发明授权
    Optical pickup unit and optical pickup device having same and information writing/reading device having same 有权
    光拾取单元和具有其的光学拾取装置和具有该拾取单元的信息写入/读取装置

    公开(公告)号:US08189434B2

    公开(公告)日:2012-05-29

    申请号:US11579127

    申请日:2005-04-27

    IPC分类号: G11B7/00 G11B7/135

    摘要: An optical pickup device includes: a splitting section for splitting a beam; a light-receiving section for receiving the split beams. The light-receiving section includes: a tracking-use main light-receiving region and tracking-use sub light-receiving regions, and auxiliary light-receiving regions. Each of the auxiliary light-receiving regions receives only a light beam reflected off a recording layer other than a recording layer subjected to an information writing/reading process. A light-receiving area of each of the auxiliary light-receiving area is smaller than a light-receiving area of each tracking-use light-receiving region. Further, an optical pickup device includes: a splitting section for splitting a beam; and a light-receiving section for receiving the split beams. The light-receiving section includes a sub light-receiving regions for receiving tracking-use sub beams. The tracking-use sub beams are arranged so as not to allow entering of a focusing-use main beam reflected off a non-targeted recording layer.

    摘要翻译: 一种光学拾取装置,包括:用于分割光束的分离部分; 用于接收分束的光接收部分。 光接收部分包括:跟踪用主光接收区域和跟踪用子光接收区域以及辅助光接收区域。 每个辅助光接收区域仅接收经过信息写入/读取处理的记录层以外的记录层反射的光束。 每个辅助光接收区域的光接收区域小于每个跟踪用光接收区域的光接收区域。 此外,光学拾取装置包括:用于分割光束的分离部分; 以及用于接收分束的光接收部分。 光接收部分包括用于接收跟踪用子束的子光接收区域。 跟踪使用子光束被布置成不允许从非目标记录层反射的聚焦用主光束的进入。

    Optical pickup device recording and/or reproducing information on and/or from a plurality of kinds of recording media
    4.
    发明授权
    Optical pickup device recording and/or reproducing information on and/or from a plurality of kinds of recording media 有权
    光拾取装置在多种记录介质上记录和/或再现信息

    公开(公告)号:US07990834B2

    公开(公告)日:2011-08-02

    申请号:US11495907

    申请日:2006-07-28

    IPC分类号: G11B7/135

    CPC分类号: G11B7/1353 G11B7/0903

    摘要: An optical pickup device has a semiconductor laser emitting light which is in turn branched via a diffraction grating into at least three beams of light including a main beam and two sub beams which are in turn condensed via an objective lens on an optical disk at a guide groove and reflected by the optical disk to provide three reflections of light which are in turn received by detectors, each divided into two regions, respectively, to generate a tracking error signal. The diffraction grating is divided into three regions including a first region, a second region and a third region located intermediate therebetween, each having a periodical structure out of phase, the periodical structure having grating grooves in a direction determined depending on the phase of the second region to incline relative to a direction perpendicular to the guide groove of the optical disk.

    摘要翻译: 光学拾取装置具有发射光的半导体激光器,该半导体激光器又通过衍射光栅分支成至少三束光束,所述至少三束光包括主光束和两个子光束,所述至少三个光束又通过物镜在光盘上以引导 凹槽并由光盘反射以提供三次反射的光,这些反射又被检测器接收,每个被分成两个区域以产生跟踪误差信号。 衍射光栅分为三个区域,包括第一区域,第二区域和位于其间的第三区域,每个区域具有异相的周期性结构,该周期结构具有根据第二区域的相位确定的方向的光栅槽 区域相对于垂直于光盘的引导槽的方向倾斜。

    Optical Pickup Unit and Optical Pickup Device Having Same and Information Writing/Reading Device Having Same
    5.
    发明申请
    Optical Pickup Unit and Optical Pickup Device Having Same and Information Writing/Reading Device Having Same 有权
    具有相同功能的光学拾取单元和光学拾取装置,以及具有相同功能的信息写入/读取装置

    公开(公告)号:US20080062826A1

    公开(公告)日:2008-03-13

    申请号:US11579127

    申请日:2005-04-27

    IPC分类号: G11B7/00

    摘要: An optical pickup device includes: a splitting section for splitting a beam; a light-receiving section for receiving the split beams. The light-receiving section includes: a tracking-use main light-receiving region and tracking-use sub light-receiving regions, and auxiliary light-receiving regions. Each of the auxiliary light-receiving regions receives only a light beam reflected off a recording layer other than a recording layer subjected to an information writing/reading process. A light-receiving area of each of the auxiliary light-receiving area is smaller than a light-receiving area of each tracking-use light-receiving region. Further, an optical pickup device includes: a splitting section for splitting a beam; and a light-receiving section for receiving the split beams. The light-receiving section includes a sub light-receiving regions for receiving tracking-use sub beams. The tracking-use sub beams are arranged so as not to allow entering of a focusing-use main beam reflected off a non-targeted recording layer.

    摘要翻译: 一种光学拾取装置,包括:用于分割光束的分离部分; 用于接收分束的光接收部分。 光接收部分包括:跟踪用主光接收区域和跟踪用子光接收区域以及辅助光接收区域。 每个辅助光接收区域仅接收经过信息写入/读取处理的记录层以外的记录层反射的光束。 每个辅助光接收区域的光接收区域小于每个跟踪用光接收区域的光接收区域。 此外,光学拾取装置包括:用于分割光束的分离部分; 以及用于接收分束的光接收部分。 光接收部分包括用于接收跟踪用子束的子光接收区域。 跟踪使用子光束被布置成不允许进入从非目标记录层反射的聚焦用主光束。

    Laser oscillation element and optical pickup device
    7.
    发明申请
    Laser oscillation element and optical pickup device 审中-公开
    激光振荡元件和光学拾取装置

    公开(公告)号:US20070159954A1

    公开(公告)日:2007-07-12

    申请号:US10589739

    申请日:2005-01-28

    IPC分类号: G11B7/00

    CPC分类号: G11B7/1275 G11B7/123

    摘要: In a light-emitting section (2) for emitting semiconductor laser for CD (4) and semiconductor laser for DVD (5), a radiation angle width θ2 of the DVD semiconductor laser (5) is at least 1.3 times a radiation angle width θ1 of the CD semiconductor laser (4), said radiation angle width being defined as a width of an angle created by two straight lines, which extend respectively from a laser-emitting point to two points where a radiation intensity of laser becomes half of an intensity of the center of laser, which points reside within a plane parallel to a pn junction plane.

    摘要翻译: 在用于发射用于CD(4)的半导体激光器和DVD(5)的半导体激光器的发光部分(2)中,DVD半导体激光器(5)的辐射角宽度θ2至少为辐射角宽度的1.3倍 所述辐射角宽度被定义为由两条直线产生的角度的宽度,所述两条直线分别从激光发射点延伸到两点,其中激光的辐射强度变为 激光中心的强度位于平行于pn结面的平面内。

    Catalyst combustion device and method of producing frame body portion thereof
    9.
    发明授权
    Catalyst combustion device and method of producing frame body portion thereof 失效
    催化剂燃烧装置及其制造方法

    公开(公告)号:US06669469B2

    公开(公告)日:2003-12-30

    申请号:US10258366

    申请日:2003-01-13

    IPC分类号: F23D1144

    摘要: A low-cost, high-mass-productivity catalytic combustion apparatus having a construction that permits easy maintenance is realized. There is provided a catalytic combustion apparatus in which, by means of a combustion chamber having a fuel supply portion 1 and a combustion air supply portion on the upstream side thereof and a combustion gas exhaust port on the downstream side thereof and a catalytic combustion portion with an upstream surface and a downstream surface provided in the combustion chamber, the upstream surface and the downstream surface being substantially parallel to each other, a fuel-air mixture supplied to the interior of the combustion chamber is caused to react to liberate heat. The catalytic combustion apparatus includes a heat exchange portion, which constitutes part of walls of the combustion chamber, and a fin-type radiant heat-receiving portion, which protrudes from the heat exchange portion into the combustion chamber and being provided in the vicinity of the catalytic combustion portion. In this catalytic combustion apparatus, the surface of the fin-type radiant heat-receiving portion and the surface of the heat exchange portion face in the same direction.

    摘要翻译: 实现了具有允许容易维护的结构的低成本,高批量生产率的催化燃烧装置。 提供了一种催化燃烧装置,其中通过具有燃料供应部分1和在其上游侧的燃烧空气供应部分的燃烧室和其下游侧的燃烧气体排出口和具有下游侧的燃烧气体排出口的燃烧室, 设置在燃烧室中的上游表面和下游表面,上游表面和下游表面基本上彼此平行,供应到燃烧室内部的燃料 - 空气混合物反应以释放热量。 催化燃烧装置包括构成燃烧室的一部分的热交换部,以及从热交换部向燃烧室突出并设置在燃烧室附近的翅片式辐射热接收部 催化燃烧部分。 在该催化燃烧装置中,翅片式辐射热接收部分的表面和热交换部分的表面在相同的方向上面对。

    Control rod drive mechanism
    10.
    发明授权
    Control rod drive mechanism 失效
    控制杆驱动机构

    公开(公告)号:US5793826A

    公开(公告)日:1998-08-11

    申请号:US722765

    申请日:1996-09-27

    摘要: A control rod mechanism for transmitting the rotation of an electric motor via a drive shaft to an elevator apparatus for raising and lowering a hollow piston on an upper end thereof, which is provided a control rod that controls the output of a nuclear reactor. The control rod mechanism is used to insert the control rod into a reactor core or remove it therefrom, and also to rapidly insert the control rod into the reactor core by the injection of hot water to force the hollow piston upward. The control rod mechanism includes a magnetic coupling having an inner magnet, which is divided into a plurality of parts and is disposed at a lower portion of the drive shaft in order to transmit the rotational power of the electric motor to the drive shaft. The control rod mechanism also includes a drive-side outer magnet, which is divided into a plurality of parts and is provided on a rotary shaft of the electric motor in an arrangement on an outer side of the inner magnet. The control rod mechanism further includes a circular cylindrical outer yoke on an inner surface of which the outer magnet is mounted on. The radial-direction position of an outer magnet installation surface on the outer yoke is the same as or further inward with respect to the radial-direction position of an inner surface of the outer yoke that is above the outer magnet installation surface.

    摘要翻译: 一种控制杆机构,用于通过驱动轴将电动机的旋转传递到用于升高和降低其上端的中空活塞的电梯装置,该控制棒设置有控制核反应堆的输出的控制棒。 控制杆机构用于将控制棒插入反应堆芯或从其中移除,并通过注入热水将控制杆快速插入反应堆芯,以迫使中空活塞向上。 控制杆机构包括具有内部磁体的磁耦合器,该内部磁体被分成多个部分并且设置在驱动轴的下部,以将电动机的旋转动力传递到驱动轴。 控制杆机构还包括驱动侧外部磁体,该驱动侧外部磁体被分成多个部分,并且设置在电动机的旋转轴上,该内部磁体在外部的外侧。 控制杆机构还包括在外表面上安装外磁体的圆柱形外磁轭。 外磁轭的外磁铁安装面的径向位置相对于位于外磁铁安装面以上的外磁轭的内表面的径向位置相同或更靠内侧。