Method and device for removing harmonics in semiconductor plasma processing systems
    2.
    发明申请
    Method and device for removing harmonics in semiconductor plasma processing systems 有权
    用于去除半导体等离子体处理系统中的谐波的方法和装置

    公开(公告)号:US20050001555A1

    公开(公告)日:2005-01-06

    申请号:US10859603

    申请日:2004-06-03

    IPC分类号: H01J7/24 H01J37/32

    CPC分类号: H01J37/32082 H01J37/32183

    摘要: A system and method for maintaining a plasma in a plasma region by supplying RF power at a fundamental frequency to the plasma region together with a gas in order to create an RF electromagnetic field which interacts with the gas to create a plasma that contains electromagnetic energy components at frequencies that are harmonics of the fundamental frequency. The components at frequencies that are harmonics of the fundamental frequency are reduced by placing RF energy absorbing resistive loads in energy receiving communication with the plasma, the resistive loads having a frequency dependent attenuation characteristic such that the resistive loads attenuate electrical energy at frequencies higher than the fundamental frequency more strongly than energy at the fundamental frequency.

    摘要翻译: 一种用于通过将基本频率的RF功率与气体一起提供到等离子体区域来维持等离子体的等离子体的系统和方法,以便产生与气体相互作用的RF电磁场,以产生包含电磁能量分量的等离子体 在基频的谐波频率上。 通过将RF能量吸收阻性负载放置在与等离子体的能量接收通信中,减少了基频谐波的分量,电阻负载具有频率相关的衰减特性,使得电阻性负载衰减高于 基频比基频的能量强。

    System and method for monitoring and controlling gas plasma processes
    3.
    发明授权
    System and method for monitoring and controlling gas plasma processes 失效
    用于监测和控制气体等离子体工艺的系统和方法

    公开(公告)号:US06351683B1

    公开(公告)日:2002-02-26

    申请号:US09508105

    申请日:2000-04-19

    IPC分类号: G06F1900

    摘要: A system and method for monitoring the conditions in a gas plasma processing system while varying or modulating the RF power supplied to the system, so that resulting signals of the electrical circuits of the system provide information regarding operational parameters of the system or the state of a process. Significant improvements in sensitivity and accuracy over conventional techniques are thereby achieved. In addition, the plasma processing system can be thoroughly tested and characterized before delivery, to allow more accurate monitoring of and greater control over a process, thereby improving quality control/assurance of substrates being produced by the system. The information obtained by the modulation technique can be displayed on a monitor screen, in order to allow an operator to accurately monitor the system/process and diagnose any problems with the system/process.

    摘要翻译: 一种用于在改变或调制提供给系统的RF功率的同时监视气体等离子体处理系统中的状况的系统和方法,使得系统的电路的结果信号提供关于系统的操作参数或状态的信息 处理。 从而实现了与常规技术相比,灵敏度和精度的显着改善。 此外,等离子体处理系统可以在交货之前被彻底测试和表征,以允许对工艺进行更准确的监控和更大的控制,从而改善由系统生产的基板的质量控制/保证。 通过调制技术获得的信息可以显示在监视器屏幕上,以便操作者准确地监视系统/过程并诊断系统/处理中的任何问题。

    CABLE EXIT TROUGH WITH INSERT
    4.
    发明申请
    CABLE EXIT TROUGH WITH INSERT 有权
    电缆出口通过插入

    公开(公告)号:US20120224822A1

    公开(公告)日:2012-09-06

    申请号:US13274123

    申请日:2011-10-14

    IPC分类号: G02B6/44

    摘要: A cable exit trough with pivoting cover. The cover having a cover plate and a pivot plate hingedly mounted thereto for easy access to the trough. The exit trough may define an insert aperture for receiving modular cable management inserts. The modular insert providing an additional cable management device such as a curved guidewall. The cable management device may alternatively be fixed to the cable exit trough. Removable snap-mounted flanges may also be included in the exit trough.

    摘要翻译: 带枢轴盖的电缆出口槽。 盖子具有盖板和铰链安装在其上的枢轴板,以便于进入槽。 出口槽可以限定用于接收模块化电缆管理插入件的插入孔。 模块化插入件提供附加的电缆管理装置,例如弯曲导向壁。 电缆管理装置可以可选地固定到电缆出口槽。 可拆卸的卡扣式法兰也可以包括在出口槽中。

    Cable exit trough with cover
    5.
    发明申请
    Cable exit trough with cover 有权
    带盖的电缆出口槽

    公开(公告)号:US20100266255A1

    公开(公告)日:2010-10-21

    申请号:US12798448

    申请日:2010-04-01

    IPC分类号: G02B6/00

    摘要: A cable exit trough with pivoting cover. The cover having a cover plate and a pivot plate hingedly mounted thereto for easy access to the trough. The exit trough may define an insert aperture for receiving modular cable management inserts. The modular insert providing an additional cable management device such as a curved guidewall. The cable management device may alternatively be fixed to the cable exit trough. Removable snap-mounted flanges may also be included in the exit trough.

    摘要翻译: 带枢轴盖的电缆出口槽。 盖子具有盖板和铰链安装在其上的枢轴板,以便于进入槽。 出口槽可以限定用于接收模块化电缆管理插入件的插入孔。 模块化插入件提供附加的电缆管理装置,例如弯曲导向壁。 电缆管理装置可以可选地固定到电缆出口槽。 可拆卸的卡扣式法兰也可以包括在出口槽中。

    Apparatus for rotating an electrodeless light source
    9.
    发明授权
    Apparatus for rotating an electrodeless light source 失效
    用于旋转无电极光源的装置

    公开(公告)号:US4947080A

    公开(公告)日:1990-08-07

    申请号:US391011

    申请日:1989-08-09

    IPC分类号: H01J61/52 H01J65/04

    CPC分类号: H01J61/52 H01J65/044

    摘要: A microwave generated light source including a lamp envelope having apparatus for rotating the envelope about an axis which includes an electric motor with a hollow shaft, an elongated stem attached to the envelope and extending within the hollow shaft and a wire-like spring clip for retaining the stem within the hollow shaft.

    摘要翻译: 一种微波产生的光源,包括灯壳,其具有用于使包围绕轴线旋转的装置,所述装置包括具有空心轴的电动机,附接到信封并在空心轴内延伸的细长杆和用于保持的线状弹簧夹 空心轴内的杆。

    Topical skin salve and associated use therefor
    10.
    发明授权
    Topical skin salve and associated use therefor 失效
    局部皮肤药膏及其相关用途

    公开(公告)号:US08021700B1

    公开(公告)日:2011-09-20

    申请号:US12455072

    申请日:2009-05-28

    申请人: Wayne Johnson

    发明人: Wayne Johnson

    摘要: A general healing ointment for use on cracked lips, rashes, burns and the like is herein disclosed. The ointment is manufactured from an all natural blend of petroleum jelly, vitamin E cream and oil, cocoa butter, and pine pitch. It provides relief for a variety of ailments such as cracked skin, cold sores, rashes, acne, boils, and the like. It is readily absorbed by the skin and not visible to others, but won't dry out the skin afterwards.

    摘要翻译: 本文公开了用于破裂的嘴唇,皮疹,烧伤等的一般治疗软膏。 软膏是由凡士林,维生素E奶油和油,可可脂和松沥等天然混合物制成的。 它可以缓解各种疾病,如皮肤破裂,疮疮,皮疹,痤疮,痘痘等。 它容易被皮肤吸收并且对其他人不可见,但是后来不会干燥皮肤。