公开(公告)号：US20100289075A1

公开(公告)日：2010-11-18

申请号：US12536504

申请日：2009-08-06

Applicant: Wei-Chieh Lin ,  Li-Cheng Lin ,  Hsin-Yu Hsu ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Guo-Liang Yang ,  Chia-Hui Chen ,  Shih-Chieh Hung

Inventor： Wei-Chieh Lin ,  Li-Cheng Lin ,  Hsin-Yu Hsu ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Guo-Liang Yang ,  Chia-Hui Chen ,  Shih-Chieh Hung

IPC: H01L27/06 ,  H01L21/8234 ,  H01L21/336

CPC classification number: H01L27/0629 ,  H01L29/8725

Abstract: A semiconductor device having integrated MOSFET and Schottky diode includes a substrate having a MOSFET region and a Schottky diode region defined thereon; a plurality of first trenches formed in the MOSFET region; and a plurality of second trenches formed in the Schottky diode region. The first trenches respectively including a first insulating layer formed over the sidewalls and bottom of the first trench and a first conductive layer filling the first trench serve as a trenched gate of the trench MOSFET. The second trenches respectively include a second insulating layer formed over the sidewalls and bottom of the second trench and a second conductive layer filling the second trench. A depth and a width of the second trenches are larger than that of the first trenches; and a thickness of the second insulating layer is larger than that of the first insulating layer.

Abstract translation: 具有集成MOSFET和肖特基二极管的半导体器件包括其上限定有MOSFET区和肖特基二极管区的衬底; 形成在所述MOSFET区域中的多个第一沟槽; 以及形成在肖特基二极管区域中的多个第二沟槽。 分别包括形成在第一沟槽的侧壁和底部上的第一绝缘层的第一沟槽和填充第一沟槽的第一导电层用作沟槽MOSFET的沟槽栅极。 第二沟槽分别包括形成在第二沟槽的侧壁和底部上的第二绝缘层和填充第二沟槽的第二导电层。 第二沟槽的深度和宽度大于第一沟槽的深度和宽度; 并且所述第二绝缘层的厚度大于所述第一绝缘层的厚度。

公开(公告)号：US08241978B2

公开(公告)日：2012-08-14

申请号：US12536504

申请日：2009-08-06

Applicant: Wei-Chieh Lin ,  Li-Cheng Lin ,  Hsin-Yu Hsu ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Guo-Liang Yang ,  Chia-Hui Chen ,  Shih-Chieh Hung

Inventor： Wei-Chieh Lin ,  Li-Cheng Lin ,  Hsin-Yu Hsu ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Guo-Liang Yang ,  Chia-Hui Chen ,  Shih-Chieh Hung

IPC: H01L27/06 ,  H01L21/336

CPC classification number: H01L27/0629 ,  H01L29/8725

Abstract: A semiconductor device having integrated MOSFET and Schottky diode includes a substrate having a MOSFET region and a Schottky diode region defined thereon; a plurality of first trenches formed in the MOSFET region; and a plurality of second trenches formed in the Schottky diode region. The first trenches respectively including a first insulating layer formed over the sidewalls and bottom of the first trench and a first conductive layer filling the first trench serve as a trenched gate of the trench MOSFET. The second trenches respectively include a second insulating layer formed over the sidewalls and bottom of the second trench and a second conductive layer filling the second trench. A depth and a width of the second trenches are larger than that of the first trenches; and a thickness of the second insulating layer is larger than that of the first insulating layer.

Abstract translation: 具有集成MOSFET和肖特基二极管的半导体器件包括其上限定有MOSFET区和肖特基二极管区的衬底; 形成在所述MOSFET区域中的多个第一沟槽; 以及形成在肖特基二极管区域中的多个第二沟槽。 分别包括形成在第一沟槽的侧壁和底部上的第一绝缘层的第一沟槽和填充第一沟槽的第一导电层用作沟槽MOSFET的沟槽栅极。 第二沟槽分别包括形成在第二沟槽的侧壁和底部上的第二绝缘层和填充第二沟槽的第二导电层。 第二沟槽的深度和宽度大于第一沟槽的深度和宽度; 并且所述第二绝缘层的厚度大于所述第一绝缘层的厚度。

公开(公告)号：US08168480B2

公开(公告)日：2012-05-01

申请号：US12563172

申请日：2009-09-21

Applicant: Wei-Chieh Lin ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin ,  Shih-Chieh Hung

Inventor： Wei-Chieh Lin ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin ,  Shih-Chieh Hung

IPC: H01L21/332

CPC classification number: H01L29/7395 ,  H01L29/0834 ,  H01L29/66333

Abstract: An integrated structure of an IGBT and a diode includes a plurality of doped cathode regions, and a method of forming the same is provided. The doped cathode regions are stacked in a semiconductor substrate, overlapping and contacting with each other. As compared with other doped cathode regions, the higher a doped cathode region is disposed, the larger implantation area the doped cathode region has. The doped cathode regions and the semiconductor substrate have different conductive types, and are applied as a cathode of the diode and a collector of the IGBT. The stacked doped cathode regions can increase the thinness of the cathode, and prevent the wafer from being overly thinned and broken.

Abstract translation: IGBT和二极管的集成结构包括多个掺杂的阴极区域，并且提供其形成方法。 掺杂阴极区域堆叠在半导体衬底中，彼此重叠并接触。 与其他掺杂阴极区域相比，掺杂阴极区域越高，掺杂阴极区域的注入面积越大。 掺杂阴极区域和半导体衬底具有不同的导电类型，并且被施加作为二极管的阴极和IGBT的集电极。 堆叠的掺杂阴极区域可以增加阴极的薄度，并且防止晶片过度变薄和破裂。

公开(公告)号：US20100301386A1

公开(公告)日：2010-12-02

申请号：US12563172

申请日：2009-09-21

Applicant: Wei-Chieh Lin ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin ,  Shih-Chieh Hung

Inventor： Wei-Chieh Lin ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin ,  Shih-Chieh Hung

IPC: H01L27/06 ,  H01L21/77

CPC classification number: H01L29/7395 ,  H01L29/0834 ,  H01L29/66333

Abstract: An integrated structure of an IGBT and a diode includes a plurality of doped cathode regions, and a method of forming the same is provided. The doped cathode regions are stacked in a semiconductor substrate, overlapping and contacting with each other. As compared with other doped cathode regions, the higher a doped cathode region is disposed, the larger implantation area the doped cathode region has. The doped cathode regions and the semiconductor substrate have different conductive types, and are applied as a cathode of the diode and a collector of the IGBT. The stacked doped cathode regions can increase the thinness of the cathode, and prevent the wafer from being overly thinned and broken.

Abstract translation: IGBT和二极管的集成结构包括多个掺杂的阴极区域，并且提供其形成方法。 掺杂阴极区域堆叠在半导体衬底中，彼此重叠并接触。 与其他掺杂阴极区域相比，掺杂阴极区域越高，掺杂阴极区域的注入面积越大。 掺杂阴极区域和半导体衬底具有不同的导电类型，并且被施加作为二极管的阴极和IGBT的集电极。 堆叠的掺杂阴极区域可以增加阴极的薄度，并且防止晶片过度变薄和破裂。

公开(公告)号：US20100258853A1

公开(公告)日：2010-10-14

申请号：US12477121

申请日：2009-06-02

Applicant: Wei-Chieh Lin ,  Li-Cheng Lin

Inventor： Wei-Chieh Lin ,  Li-Cheng Lin

IPC: H01L29/78 ,  H01L29/772 ,  H01L21/336

CPC classification number: H01L29/7813 ,  H01L27/0255 ,  H01L29/0692 ,  H01L29/0696 ,  H01L29/66734 ,  H01L29/7808 ,  H01L29/866

Abstract: A trench semiconductor device and a method of making the same are provided. The trench semiconductor device includes a trench MOS device and a trench ESD protection device. The trench ESD protection device is electrically connected between the gate electrode and source electrode of the trench MOS device so as to provide ESD protection. The fabrication of the ESD protection device is integrated into the process of the trench MOS device, and therefore no extra mask is required to define the doped regions of the trench ESD protection device. Consequently, the trench semiconductor device is advantageous for its simplified manufacturing process and low cost.

Abstract translation: 提供了沟槽半导体器件及其制造方法。 沟槽半导体器件包括沟槽MOS器件和沟槽ESD保护器件。 沟槽ESD保护器件电连接在沟槽MOS器件的栅电极和源电极之间，以提供ESD保护。 ESD保护器件的制造集成到沟槽MOS器件的工艺中，因此不需要额外的掩模来限定沟槽ESD保护器件的掺杂区域。 因此，沟槽半导体器件有利于其简化的制造工艺和低成本。

公开(公告)号：US20100055857A1

公开(公告)日：2010-03-04

申请号：US12334492

申请日：2008-12-14

Applicant: Wei-Chieh Lin ,  Hsin-Yu Hsu ,  Hsin-Yen Chiu ,  Shih-Chieh Hung ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin

Inventor： Wei-Chieh Lin ,  Hsin-Yu Hsu ,  Hsin-Yen Chiu ,  Shih-Chieh Hung ,  Ho-Tai Chen ,  Jen-Hao Yeh ,  Li-Cheng Lin

IPC: H01L21/336

CPC classification number: H01L29/7813 ,  H01L21/26586 ,  H01L29/4236 ,  H01L29/456 ,  H01L29/66734

Abstract: A method of forming a power device includes providing a substrate, a semiconductor layer having at least a trench and being disposed on the substrate, a gate insulating layer covering the semiconductor layer, and a conductive material disposed in the trench, performing an ion implantation process to from a body layer, performing a tilted ion implantation process to from a heavy doped region, forming a first dielectric layer overall, performing a chemical mechanical polishing process until the body layer disposed under the heavy doped region is exposed to form source regions on the opposite sides of the trench, and forming a source trace directly covering the source regions disposed on the opposite sides of the trench.

Abstract translation: 一种形成功率器件的方法包括提供衬底，至少具有沟槽并设置在衬底上的半导体层，覆盖半导体层的栅极绝缘层和设置在沟槽中的导电材料，执行离子注入工艺 从体层进行倾斜的离子注入工艺，从重掺杂区域进行倾斜的离子注入工艺，整体形成第一介电层，进行化学机械抛光工艺，直到布置在重掺杂区域之下的体层露出，形成源区 并且形成直接覆盖设置在沟槽的相对侧上的源极区域的源极迹线。

公开(公告)号：US07952137B2

公开(公告)日：2011-05-31

申请号：US12477121

申请日：2009-06-02

Applicant: Wei-Chieh Lin ,  Li-Cheng Lin

Inventor： Wei-Chieh Lin ,  Li-Cheng Lin

IPC: H01L23/60

CPC classification number: H01L29/7813 ,  H01L27/0255 ,  H01L29/0692 ,  H01L29/0696 ,  H01L29/66734 ,  H01L29/7808 ,  H01L29/866

Abstract: A trench semiconductor device and a method of making the same are provided. The trench semiconductor device includes a trench MOS device and a trench ESD protection device. The trench ESD protection device is electrically connected between the gate electrode and source electrode of the trench MOS device so as to provide ESD protection. The fabrication of the ESD protection device is integrated into the process of the trench MOS device, and therefore no extra mask is required to define the doped regions of the trench ESD protection device. Consequently, the trench semiconductor device is advantageous for its simplified manufacturing process and low cost.

Abstract translation: 提供了沟槽半导体器件及其制造方法。 沟槽半导体器件包括沟槽MOS器件和沟槽ESD保护器件。 沟槽ESD保护器件电连接在沟槽MOS器件的栅电极和源电极之间，以提供ESD保护。 ESD保护器件的制造集成到沟槽MOS器件的工艺中，因此不需要额外的掩模来限定沟槽ESD保护器件的掺杂区域。 因此，沟槽半导体器件有利于其简化的制造工艺和低成本。

公开(公告)号：US07851310B2

公开(公告)日：2010-12-14

申请号：US12483237

申请日：2009-06-11

Applicant: Li-Cheng Lin ,  Wei-Chieh Lin

Inventor： Li-Cheng Lin ,  Wei-Chieh Lin

IPC: H01L21/338

CPC classification number: H01L29/4236 ,  H01L29/66621 ,  H01L29/78

Abstract: A method for forming semiconductor device, which simultaneously forms a trench MOS transistor device, and an embedded schottky barrier diode (SBD) device in a semiconductor substrate. The embedded SBD device has lower forward voltage drop, which reduces power dissipation. In addition, the voltage bearing ability may be modified easily by virtue of altering the dopant concentration or the width of the voltage bearing dopant region, or the thickness of epitaxial silicon layer. Furthermore, extra cost of purchasing SBD diode may be saved.

Abstract translation: 一种在半导体衬底中同时形成沟槽MOS晶体管器件和嵌入肖特基势垒二极管（SBD）器件的半导体器件的形成方法。 嵌入式SBD器件具有较低的正向压降，从而降低功耗。 此外，由于改变掺杂剂掺杂剂区域的掺杂剂浓度或宽度，或外延硅层的厚度，可以容易地改变电压承载能力。 此外，可以节省购买SBD二极管的额外成本。

公开(公告)号：US20100216290A1

公开(公告)日：2010-08-26

申请号：US12483237

申请日：2009-06-11

Applicant: Li-Cheng Lin ,  Wei-Chieh Lin

Inventor： Li-Cheng Lin ,  Wei-Chieh Lin

IPC: H01L21/336

CPC classification number: H01L29/4236 ,  H01L29/66621 ,  H01L29/78

Abstract: A method for forming semiconductor device, which simultaneously forms a trench MOS transistor device, and an embedded schottky barrier diode (SBD) device in a semiconductor substrate. The embedded SBD device has lower forward voltage drop, which reduces power dissipation. In addition, the voltage bearing ability may be modified easily by virtue of altering the dopant concentration or the width of the voltage bearing dopant region, or the thickness of epitaxial silicon layer. Furthermore, extra cost of purchasing SBD diode may be saved.

公开(公告)号：US08049273B2

公开(公告)日：2011-11-01

申请号：US12371618

申请日：2009-02-15

Applicant: Wei-Chieh Lin ,  Ho-Tai Chen ,  Li-Cheng Lin ,  Jen-Hao Yeh ,  Hsin-Yen Chiu ,  Hsin-Yu Hsu ,  Shih-Chieh Hung

Inventor： Wei-Chieh Lin ,  Ho-Tai Chen ,  Li-Cheng Lin ,  Jen-Hao Yeh ,  Hsin-Yen Chiu ,  Hsin-Yu Hsu ,  Shih-Chieh Hung

IPC: H01L26/66

CPC classification number: H01L29/7813 ,  H01L29/0696 ,  H01L29/1095 ,  H01L29/41741 ,  H01L29/41766 ,  H01L29/42376 ,  H01L29/4238 ,  H01L29/456 ,  H01L29/4916

Abstract: A power semiconductor device includes a backside metal layer, a substrate formed on the backside metal layer, a semiconductor layer formed on the substrate, and a frontside metal layer. The semiconductor layer includes a first trench structure including a gate oxide layer formed around a first trench with poly-Si implant, a second trench structure including a gate oxide layer formed around a second trench with poly-Si implant, a p-base region formed between the first trench structure and the second trench structure, a plurality of n+ source region formed on the p-base region and between the first trench structure and the second trench structure, a dielectric layer formed on the first trench structure, the second trench structure, and the plurality of n+ source region. The frontside metal layer is formed on the semiconductor layer and filling gaps formed between the plurality of n+ source region on the p-base region.

Abstract translation: 功率半导体器件包括背面金属层，形成在背面金属层上的衬底，形成在衬底上的半导体层和前侧金属层。 半导体层包括第一沟槽结构，其包括围绕具有多晶硅注入的第一沟槽形成的栅极氧化层，第二沟槽结构，包括围绕具有多晶硅注入的第二沟槽形成的栅极氧化层，形成的p基区 在所述第一沟槽结构和所述第二沟槽结构之间形成有多个n +源极区，形成在所述p基区上以及所述第一沟槽结构和所述第二沟槽结构之间，形成在所述第一沟槽结构上的介电层，所述第二沟槽结构 ，以及多个n +源极区域。 前半导体金属层形成在半导体层上并填充形成在p基区上的多个n +源极区之间的间隙。