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公开(公告)号：US20110291022A1
公开(公告)日：2011-12-01
申请号：US12944407
申请日：2010-11-11
CPC分类号： H01L21/67213 , H01J37/185 , H01J37/3171 , H01J2237/006 , H01J2237/184 , H01J2237/2001 , H01J2237/24585 , H01L21/67115 , H01L21/67201 , H01L21/67248
摘要： An ion implantation system, method, and apparatus for abating condensation in a cold ion implant is provided. An ion implantation apparatus is configured to provide ions to a workpiece positioned in a process chamber. A sub-ambient temperature chuck supports the workpiece during an exposure of the workpiece to the plurality of ions. The sub-ambient temperature chuck is further configured to cool the workpiece to a processing temperature, wherein the process temperature is below a dew point of an external environment. A load lock chamber isolates a process environment of the process chamber from the external environment. A light source provides a predetermined wavelength of electromagnetic radiation to the workpiece concurrent with the workpiece residing within the load lock chamber, wherein the predetermined wavelength or range of wavelengths is associated with a maximum radiant energy absorption range of the workpiece, wherein the light source is configured to selectively heat the workpiece.
摘要翻译： 提供了一种用于减少冷离子注入中的冷凝的离子注入系统，方法和装置。 离子注入装置被配置为向位于处理室中的工件提供离子。 在工件暴露于多个离子的过程中，亚环境温度卡盘支撑工件。 次环境温度卡盘进一步构造成将工件冷却至加工温度，其中工艺温度低于外部环境的露点。 加载锁定室将处理室的处理环境与外部环境隔离。 光源向驻留在负载锁定室内的工件提供与工件同时的预定波长的电磁辐射，其中预定波长或波长范围与工件的最大辐射能吸收范围相关联，其中光源是 被配置为选择性地加热所述工件。
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公开(公告)号：US20110291023A1
公开(公告)日：2011-12-01
申请号：US13116661
申请日：2011-05-26
IPC分类号： B01J19/08
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/166 , H01J2237/2001 , H01J2237/20214
摘要： A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
摘要翻译： 提供了一种工件扫描系统，其具有围绕第一轴线旋转的扫描臂以及围绕第二轴可旋转地联接到扫描臂的冷冻末端执行器，用于选择性地固定工件。 冷冻末端执行器具有夹紧板和用于冷却夹紧板的一个或多个冷却机构。 轴承沿着第二轴线定位并且将端部执行器可旋转地联接到扫描臂，并且沿着第二轴线定位密封件以在外部环境和内部环境之间提供压力障碍。 轴承和密封件中的一个或多个可以具有与其相关联的铁磁流体。 加热器组件靠近轴承和密封定位，其中加热器组件选择性地向轴承和密封提供预定量的热量，其中增加端部执行器围绕第二轴线旋转的倾向。
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公开(公告)号：US08692215B2
公开(公告)日：2014-04-08
申请号：US13116661
申请日：2011-05-26
CPC分类号： H01J37/20 , H01J37/3171 , H01J2237/166 , H01J2237/2001 , H01J2237/20214
摘要： A workpiece scanning system is provided having a scan arm that rotates about a first axis and a chilled end effector rotatably coupled to the scan arm about a second axis for selectively securing a workpiece. The chilled end effector has a clamping plate and one or more cooling mechanisms for cooling the clamping plate. A bearing is positioned along the second axis and rotatably couples the end effector to the scan arm, and a seal is positioned along the second axis to provide a pressure barrier between an external environment and an internal environment. One or more of the bearing and seal can have a ferrofluid associated therewith. A heater assembly is positioned proximate to the bearing and seal, wherein the heater assembly selectively provides a predetermined amount of heat to the bearing and seal, therein increasing a propensity of the end effector to rotate about the second axis.
摘要翻译： 提供了一种工件扫描系统，其具有围绕第一轴线旋转的扫描臂以及围绕第二轴可旋转地联接到扫描臂的冷冻末端执行器，用于选择性地固定工件。 冷冻末端执行器具有夹紧板和用于冷却夹紧板的一个或多个冷却机构。 轴承沿着第二轴线定位并且将端部执行器可旋转地联接到扫描臂，并且沿着第二轴线定位密封件以在外部环境和内部环境之间提供压力障碍。 轴承和密封件中的一个或多个可以具有与其相关联的铁磁流体。 加热器组件靠近轴承和密封定位，其中加热器组件选择性地向轴承和密封提供预定量的热量，其中增加端部执行器围绕第二轴线旋转的倾向。
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公开(公告)号：US08023247B2
公开(公告)日：2011-09-20
申请号：US12331813
申请日：2008-12-10
IPC分类号： H01L21/683 , C23C16/42
CPC分类号： H01L21/6831 , H02N13/00
摘要： The present invention is directed to an electrostatic chuck (ESC) with a compliant layer formed from TT-Kote® and a method of forming a clamping plate for an ESC. The ESC comprises a compliant layer having a low friction surface for reducing or eliminating particulates generated from thermal expansion. The method comprises forming a clamping member for a substrate comprising a ceramic material and a ceramic surface, and coating the ceramic surface with a compliant layer comprising an organic silicide or TT-Kote®.
摘要翻译： 本发明涉及一种具有由TT-Kote制成的顺应层的静电卡盘（ESC）和形成ESC用夹板的方法。 ESC包括具有低摩擦表面的柔顺层，用于减少或消除由热膨胀产生的微粒。 该方法包括形成用于包括陶瓷材料和陶瓷表面的基底的夹紧构件，并且用包含有机硅化物或TT-Kote的柔性层涂覆陶瓷表面。
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公开(公告)号：US20100110604A1
公开(公告)日：2010-05-06
申请号：US12262990
申请日：2008-10-31
IPC分类号： H01L21/683
CPC分类号： H01L21/6831
摘要： An electrostatic chuck and method for clamping a workpiece is provided. The ESC comprises a clamping plate having a clamping surface, and one or more electrodes. An electric potential applied to the one or more electrodes selectively clamps the workpiece to the clamping surface. A punch is operably coupled to the clamping plate and an electrical ground, wherein the punch comprises a trigger mechanism and a punch tip. The punch tip translates between extended and retracted positions, wherein a point of the punch tip is proud of the clamping surface when the punch tip is in the extended position. The punch tip is configured to translate toward the clamping surface upon clamping the workpiece to the clamping plate. Upon reaching the retracted position, the trigger mechanism imparts an impact force to the punch tip, forcing the punch tip into the workpiece and providing an electrical ground connection to the workpiece.
摘要翻译： 提供一种用于夹持工件的静电卡盘和方法。 ESC包括具有夹紧表面的夹板和一个或多个电极。 施加到一个或多个电极的电位选择性地将工件夹紧到夹紧表面。 冲头可操作地联接到夹板和电接地，其中冲头包括扳机机构和冲头。 冲头顶端在延伸位置和缩回位置之间平移，其中当冲头顶端处于延伸位置时，冲头尖端的点对夹紧表面感到骄傲。 冲压头被配置成在将工件夹紧到夹紧板上时朝向夹紧表面平移。 在到达缩回位置时，触发机构向冲头提供冲击力，迫使冲头尖端进入工件并提供与工件的电接地连接。
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公开(公告)号：US20080144251A1
公开(公告)日：2008-06-19
申请号：US11641334
申请日：2006-12-19
IPC分类号： H01L21/687 , H01T23/00
CPC分类号： H01L21/6833
摘要： An electrostatic clamp (ESC), system, and method for clamping a workpiece is provided. A clamping plate of the ESC has central disk and an annulus encircling the central disk, wherein the central disk is recessed from the annulus by a gap distance, therein defining a volume. Backside gas delivery apertures are positioned proximate to an interface between the annulus and the central disk. A first voltage to a first electrode of the annulus clamps a peripheral region of the workpiece to a first layer. A second voltage to a second electrode of the central disk generally compensates for a pressure of a backside gas within the volume. The ESC can be formed of J-R- or Coulombic-type materials. A cooling plate associated with the clamping plate further provides cooling by one or more cooling channels configured to route a cooling fluid therethrough.
摘要翻译： 提供了用于夹紧工件的静电夹（ESC），系统和方法。 ESC的夹紧板具有中心盘和围绕中心盘的环形空间，其中中心盘从环形空间中间隙距离定义一个体积。 背侧气体输送孔位于环形区域与中央盘之间的界面附近。 环形物的第一电极的第一电压将工件的周边区域夹持到第一层。 中心盘的第二电极的第二电压通常补偿体积内的背侧气体的压力。 ESC可由J-R-或库仑型材料形成。 与夹紧板相关联的冷却板还通过一个或多个冷却通道提供冷却，所述冷却通道被配置成使冷却流体从其中引导。
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公开(公告)号：US20080141899A1
公开(公告)日：2008-06-19
申请号：US12027079
申请日：2008-02-06
申请人： Paul J. Buras , William D. Lee , James R. Butler
发明人： Paul J. Buras , William D. Lee , James R. Butler
IPC分类号： C09D195/00 , C08L95/00
CPC分类号： C09D195/00 , C08K3/20 , C08L95/00 , C08L2666/02
摘要： Asphalt compositions and methods of forming such are described herein. The asphalt compositions and methods of forming such are generally adapted to enable open air processing while producing asphalt compositions that exhibit properties capable of meeting SUPERPAVE™ specifications.
摘要翻译： 本文描述了沥青组合物及其形成方法。 沥青组合物及其形成方法通常适于在露出空气处理的同时生产具有能够达到SUPERPAVE TM规格的性能的沥青组合物。
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公开(公告)号：USD414279S
公开(公告)日：1999-09-21
申请号：US83144
申请日：1998-02-05
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公开(公告)号：US09236216B2
公开(公告)日：2016-01-12
申请号：US13566013
申请日：2012-08-03
IPC分类号： H01J37/18 , H01L21/677 , H01J37/20 , H01J37/317 , H01L21/67 , H01L21/02
CPC分类号： H01J37/18 , H01J37/20 , H01J37/3171 , H01J2237/2001 , H01J2237/2002 , H01J2237/2007 , H01J2237/201 , H01J2237/204 , H01J2237/31705 , H01L21/02002 , H01L21/67109 , H01L21/67201 , H01L21/67213 , H01L21/67742 , H01L21/67766
摘要： An ion implantation system provides ions to a workpiece positioned in a vacuum environment of a process chamber on a cooled chuck. A pre-chill station within the process chamber has a chilled workpiece support configured to cool the workpiece to a first temperature, and a post-heat station within the process chamber, has a heated workpiece support configured to heat the workpiece to a second temperature. The first temperature is lower than a process temperature, and the second temperature is greater than an external temperature. A workpiece transfer arm is further configured to concurrently transfer two or more workpieces between two or more of the chuck, a load lock chamber, the pre-chill station, and the post-heat station.
摘要翻译： 离子注入系统向位于冷却卡盘上的处理室的真空环境中的工件提供离子。 处理室内的预冷站具有构造成将工件冷却到第一温度的冷冻工件支撑件，并且处理室内的后加热站具有被配置为将工件加热到第二温度的加热工件支撑件。 第一温度低于处理温度，第二温度大于外部温度。 工件传送臂还被构造成在卡盘，加载锁定室，预冷站和后加热站之间的两个或更多个之间同时传送两个或更多个工件。
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公开(公告)号：US09048276B2
公开(公告)日：2015-06-02
申请号：US13116732
申请日：2011-05-26
申请人： William D. Lee , Ashwin M. Purohit
发明人： William D. Lee , Ashwin M. Purohit
IPC分类号： B23B31/28 , H01L21/687 , H01L21/683 , H01L21/67
CPC分类号： H01L21/6831 , B23B31/28 , H01L21/67103 , H01L21/6833 , Y10T29/49117 , Y10T279/23
摘要： An apparatus and method are provided for selecting materials for forming an electrostatic clamp. The electrostatic clamp has a backing plate having a first coefficient of thermal expansion, wherein the backing plate provides structural support and rigidity to the electrostatic clamp. The electrostatic clamp further has a clamping plate having a clamping surface associated with contact with a workpiece, wherein the clamping plate has a second coefficient of thermal expansion associated therewith. The clamping plate is bonded, attached or grown to the backing plate, wherein minimal deflection of the clamping plate is evident across a predetermined temperature range. The first coefficient of thermal expansion and second coefficient of thermal expansion, for example, are substantially similar, and vary by no greater than a factor of three.
摘要翻译： 提供了用于选择用于形成静电夹的材料的装置和方法。 静电夹具具有第一热膨胀系数的背板，其中背板为静电夹具提供结构支撑和刚性。 静电夹具还具有夹持板，该夹板具有与工件接触的夹紧表面，其中夹持板具有与之相关联的第二热膨胀系数。 夹板被粘合，附接或生长到背板，其中夹板的最小偏转在预定温度范围内是明显的。 例如，第一热膨胀系数和第二热膨胀系数基本相似，并且变化不大于三分之一。
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