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公开(公告)号:US20090152459A1
公开(公告)日:2009-06-18
申请号:US12268802
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
发明人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
IPC分类号: G01N23/00
CPC分类号: H01J37/3005 , G03F1/74 , G03F1/86 , H01J37/20 , H01J37/3056 , H01J2237/006 , H01J2237/202 , H01J2237/31744
摘要: A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
摘要翻译: 提供了一种用于处理和检查物体的系统和方法,其中所述系统包括粒子束柱,物体保持器和气体供应装置。 因此,物体保持器形成为包括基部,相对于基部可移动的第一台,相对于第一台可移动的第二台和可相对于第二台转动的第三台,其中气体供应装置的插管固定 在第一张桌子
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公开(公告)号:US07923702B2
公开(公告)日:2011-04-12
申请号:US12268802
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
发明人: Wolfram Buhler , Alexander Rosenthal , Emmerich Bertagnolli , Heinz Wanzenbock , Markus Fischer , Gottfried Hochleitner
IPC分类号: C23C16/458 , C23C16/48 , H01J49/00
CPC分类号: H01J37/3005 , G03F1/74 , G03F1/86 , H01J37/20 , H01J37/3056 , H01J2237/006 , H01J2237/202 , H01J2237/31744
摘要: A system and a method for processing and inspecting an object are provided, wherein the system comprises a particle beam column, an object holder and a gas supply apparatus. Thereby, the object holder is formed comprising a base, a first table displaceable relative to the base, a second table displaceable relative to the first table and a third table rotatable relative to the second table, wherein the cannula of the gas supply apparatus is fixed at the first table.
摘要翻译: 提供了一种用于处理和检查物体的系统和方法,其中所述系统包括粒子束柱,物体保持器和气体供应装置。 因此,物体保持器形成为包括基部,相对于基部可移动的第一台,相对于第一台可移动的第二台和可相对于第二台转动的第三台,其中气体供应装置的插管固定 在第一张桌子
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公开(公告)号:US08008639B2
公开(公告)日:2011-08-30
申请号:US12268822
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
发明人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
IPC分类号: H01J37/317 , G03F7/20
CPC分类号: H01J37/3056 , H01J2237/0041 , H01J2237/006 , H01J2237/31744
摘要: A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
摘要翻译: 一种处理系统包括:气体供给装置,通过该气体供给装置向处理对象物供给处理气体。 激活光束激活气体,从而导致物体表面的材料与处理气体之间的化学反应,导致材料从表面烧蚀或在表面沉积材料。 气体供应装置由一堆板形成,其在至少一个气体入口和至少一个气体出口之间提供气体导管系统。
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公开(公告)号:US20090152460A1
公开(公告)日:2009-06-18
申请号:US12268822
申请日:2008-11-11
申请人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
发明人: Wolfram Buhler , Alexander Rosenthal , Camille Stebler , Emmerich Bertagnolli , Heinz Wanzenbock
IPC分类号: G01N23/00
CPC分类号: H01J37/3056 , H01J2237/0041 , H01J2237/006 , H01J2237/31744
摘要: A processing system comprises a gas supply apparatus with which process gas is supplied to an object. An activation beam activates the gas thereby inducing a chemical reaction between material at the surface of the object and the process gas causing ablation of material from the surface or deposition of material at the surface. The gas supply apparatus is formed from a stack of plates providing a gas conduit system between at least one gas inlet and at least one gas outlet.
摘要翻译: 一种处理系统包括:气体供给装置,通过该气体供给装置向处理对象物供给处理气体。 激活光束激活气体,从而导致物体表面的材料与处理气体之间的化学反应,导致材料从表面烧蚀或在表面沉积材料。 气体供应装置由一堆板形成,其在至少一个气体入口和至少一个气体出口之间提供气体导管系统。
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公开(公告)号:US20100102223A1
公开(公告)日:2010-04-29
申请号:US12460166
申请日:2009-07-14
申请人: Michael Albiez , Wolfram Buhler
发明人: Michael Albiez , Wolfram Buhler
IPC分类号: G01N23/00
CPC分类号: G01N23/2251 , H01J37/026 , H01J37/28 , H01J37/3056 , H01J2237/0044 , H01J2237/006 , H01J2237/2002 , H01J2237/2809
摘要: A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.
摘要翻译: 用于处理物体的表面的方法和特别适用于执行该方法的装置提供了借助于粒子束来检查物体的表面以抵消物体上的电荷累积的方法。 供应气体以将电荷从表面输送和/或中和。
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公开(公告)号:US20070052210A1
公开(公告)日:2007-03-08
申请号:US10573150
申请日:2004-09-23
申请人: Gordon Schweizer , Lars Melde , Wolfram Buhler , Thomas Jahn , Jurgen Zimmerle , Klaus Bamberg
发明人: Gordon Schweizer , Lars Melde , Wolfram Buhler , Thomas Jahn , Jurgen Zimmerle , Klaus Bamberg
IPC分类号: B60R21/20
CPC分类号: B60R21/2165 , B29C44/1233 , B32B5/18 , B32B27/32 , B32B27/40
摘要: Described is an interior trim part for covering an airbag, which may include a two-dimensional carrier, a surface decor and a foamed intermediate layer. A through-opening for the airbag is recessed in the carrier, and an inlay covering the through-opening is applied into the intermediate layer, such that the inlay projects beyond an edge of the through-opening on one side and there, in an overlapping region of the inlay and of the carrier, serves as a hinge for an airbag flap formed by the surface decor and the intermediate layer with the inlay. Furthermore, with a folding open of the airbag flap, an energy amount which is dependent on the intensity of an opening impact of the airbag, may be absorbed by way of a release of the intermediate layer with the inlay from the carrier, away from the edge in the overlapping region.
摘要翻译: 描述了一种用于覆盖气囊的内饰件,其可以包括二维载体,表面装饰和泡沫中间层。 用于安全气囊的通孔凹陷在载体中,并且覆盖通孔的嵌入物被施加到中间层中,使得嵌入物在一侧和那里突出超过通孔的边缘,重叠 嵌体和载体的区域用作由表面装饰和具有嵌体的中间层形成的安全气囊的铰链。 此外,通过气囊折叠打开,取决于气囊的开口冲击强度的能量量可以通过中间层与载体的离开而被吸收,远离 边缘在重叠区域。
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公开(公告)号:US08481933B2
公开(公告)日:2013-07-09
申请号:US12460166
申请日:2009-07-14
申请人: Michael Albiez , Wolfram Buhler
发明人: Michael Albiez , Wolfram Buhler
IPC分类号: H01J37/26
CPC分类号: G01N23/2251 , H01J37/026 , H01J37/28 , H01J37/3056 , H01J2237/0044 , H01J2237/006 , H01J2237/2002 , H01J2237/2809
摘要: A method for treating a surface of an object and a device suitable in particular for performing this method provide for examining the surface of the object with the aid of a particle beam to counteract the charge buildup on the object. A gas is supplied to convey the charge away from the surface and/or to neutralize it.
摘要翻译: 用于处理物体的表面的方法和特别适用于执行该方法的装置提供了借助于粒子束来检查物体的表面以抵消物体上的电荷累积的方法。 供应气体以将电荷从表面输送和/或中和。
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公开(公告)号:US20110062686A1
公开(公告)日:2011-03-17
申请号:US12919196
申请日:2009-02-24
申请人: Wolfram Buhler
发明人: Wolfram Buhler
IPC分类号: B60R21/20
CPC分类号: B60R21/2165
摘要: An internal paneling part conceals a passage area of an airbag. The internal paneling part includes a planar carrier and a textile fabric covering at least part of the passage area. The textile fabric includes at least one initial weakening for tearing along a defined tear line to release the airbag. The defined tear line runs along an X direction, with the textile fabric having a further tearing force in the X direction that is less than in any other direction.
摘要翻译: 内部镶板部分隐藏气囊的通道区域。 内部镶片部分包括平面载体和覆盖通道区域的至少一部分的纺织织物。 纺织织物包括至少一个初始弱化,用于沿着限定的撕裂线撕裂以释放气囊。 定义的撕裂线沿着X方向延伸,纺织织物在X方向上具有比任何其它方向上的进一步撕裂力。
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