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    Semiconductor device having a pair of fins and method of manufacturing the same
    1.
    发明授权
    Semiconductor device having a pair of fins and method of manufacturing the same 失效
    具有一对翅片的半导体器件及其制造方法

    公开(公告)号：US07833890B2

    公开(公告)日：2010-11-16

    申请号：US12457366

    申请日：2009-06-09

    申请人： Won-joo Kim ,  June-mo Koo ,  Seung-hwan Song ,  Suk-pil Kim ,  Yoon-dong Park ,  Jong-jin Lee

    发明人： Won-joo Kim ,  June-mo Koo ,  Seung-hwan Song ,  Suk-pil Kim ,  Yoon-dong Park ,  Jong-jin Lee

    IPC分类号： H01L21/4763

    CPC分类号： H01L21/28273 ,  H01L21/28282 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/785 ,  H01L29/7881 ,  H01L29/792

    摘要： Example embodiments relate to a semiconductor device and a method of manufacturing the same. A semiconductor device according to example embodiments may have reduced disturbances during reading operations and a reduced short channel effect. The semiconductor device may include a semiconductor substrate having a body and a pair of fins protruding from the body. Inner spacer insulating layers may be formed on an upper portion of an inner sidewall of the pair of fins so as to reduce the entrance to the region between the pair of fins. A gate electrode may cover a portion of the external sidewalls of the pair of fins and may extend across the inner spacer insulating layers so as to define a void between the pair of fins. Gate insulating layers may be interposed between the gate electrode and the pair of fins.

    摘要翻译： 示例性实施例涉及半导体器件及其制造方法。 根据示例实施例的半导体器件可以在读取操作期间具有减小的干扰，并且减少短信道效应。 半导体器件可以包括具有主体和从主体突出的一对鳍片的半导体衬底。 可以在一对翅片的内侧壁的上部形成内隔离层绝缘层，以减少对一对翅片之间的区域的入口。 栅极电极可以覆盖一对鳍片的外部侧壁的一部分，并且可以跨越内部间隔物绝缘层延伸，以便在一对鳍片之间限定空隙。 栅绝缘层可以插入在栅电极和一对鳍之间。

    Semiconductor device having a pair of fins and method of manufacturing the same
    2.
    发明申请
    Semiconductor device having a pair of fins and method of manufacturing the same 失效
    具有一对翅片的半导体器件及其制造方法

    公开(公告)号：US20090253255A1

    公开(公告)日：2009-10-08

    申请号：US12457366

    申请日：2009-06-09

    申请人： Won-joo Kim ,  June-mo Koo ,  Seung-hwan Song ,  Suk-pil Kim ,  Yoon-dong Park ,  Jong-jin Lee

    发明人： Won-joo Kim ,  June-mo Koo ,  Seung-hwan Song ,  Suk-pil Kim ,  Yoon-dong Park ,  Jong-jin Lee

    IPC分类号： H01L21/28

    CPC分类号： H01L21/28273 ,  H01L21/28282 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/785 ,  H01L29/7881 ,  H01L29/792

    摘要： Example embodiments relate to a semiconductor device and a method of manufacturing the same. A semiconductor device according to example embodiments may have reduced disturbances during reading operations and a reduced short channel effect. The semiconductor device may include a semiconductor substrate having a body and a pair of fins protruding from the body. Inner spacer insulating layers may be formed on an upper portion of an inner sidewall of the pair of fins so as to reduce the entrance to the region between the pair of fins. A gate electrode may cover a portion of the external sidewalls of the pair of fins and may extend across the inner spacer insulating layers so as to define a void between the pair of fins. Gate insulating layers may be interposed between the gate electrode and the pair of fins.

    摘要翻译： 示例性实施例涉及半导体器件及其制造方法。 根据示例实施例的半导体器件可以在读取操作期间具有减小的干扰，并且减少短信道效应。 半导体器件可以包括具有主体和从主体突出的一对鳍片的半导体衬底。 可以在一对翅片的内侧壁的上部形成内隔离层绝缘层，以减少对一对翅片之间的区域的入口。 栅极电极可以覆盖一对鳍片的外部侧壁的一部分，并且可以跨越内部间隔物绝缘层延伸，以便在一对鳍片之间限定空隙。 栅绝缘层可以插入在栅电极和一对鳍之间。

    Semiconductor device having a pair of fins and method of manufacturing the same
    3.
    发明申请
    Semiconductor device having a pair of fins and method of manufacturing the same 失效
    具有一对翅片的半导体器件及其制造方法

    公开(公告)号：US20080111199A1

    公开(公告)日：2008-05-15

    申请号：US11976004

    申请日：2007-10-19

    申请人： Suk-pil KIM ,  Yoon-dong Park ,  Jong-Jin Lee ,  Won-joo Kim ,  June-mo Koo ,  Seung-hwan Song

    发明人： Suk-pil KIM ,  Yoon-dong Park ,  Jong-Jin Lee ,  Won-joo Kim ,  June-mo Koo ,  Seung-hwan Song

    IPC分类号： H01L29/76 ,  H01L21/336

    CPC分类号： H01L21/28273 ,  H01L21/28282 ,  H01L29/66795 ,  H01L29/66825 ,  H01L29/66833 ,  H01L29/785 ,  H01L29/7881 ,  H01L29/792

    摘要： Example embodiments relate to a semiconductor device and a method of manufacturing the same. A semiconductor device according to example embodiments may have reduced disturbances during reading operations and a reduced short channel effect. The semiconductor device may include a semiconductor substrate having a body and a pair of fins protruding from the body. Inner spacer insulating layers may be formed on an upper portion of an inner sidewall of the pair of fins so as to reduce the entrance to the region between the pair of fins. A gate electrode may cover a portion of the external sidewalls of the pair of fins and may extend across the inner spacer insulating layers so as to define a void between the pair of fins. Gate insulating layers may be interposed between the gate electrode and the pair of fins.

    摘要翻译： 示例性实施例涉及半导体器件及其制造方法。 根据示例实施例的半导体器件可以在读取操作期间具有减小的干扰，并且减少短信道效应。 半导体器件可以包括具有主体和从主体突出的一对鳍片的半导体衬底。 可以在一对翅片的内侧壁的上部形成内隔离层绝缘层，以减少对一对翅片之间的区域的入口。 栅极电极可以覆盖一对鳍片的外部侧壁的一部分，并且可以跨越内部间隔物绝缘层延伸，以便在一对鳍片之间限定空隙。 栅绝缘层可以插入在栅电极和一对鳍之间。

    Method of fabricating non-volatile memory device
    8.
    发明申请
    Method of fabricating non-volatile memory device 有权
    制造非易失性存储器件的方法

    公开(公告)号：US20080242011A1

    公开(公告)日：2008-10-02

    申请号：US11978567

    申请日：2007-10-30

    申请人： Seung-hwan Song ,  Yoon-dong Park ,  June-mo Koo ,  Suk-pil Kim ,  Jae-woong Hyun ,  Choong-ho Lee ,  Tae-hun Kim

    发明人： Seung-hwan Song ,  Yoon-dong Park ,  June-mo Koo ,  Suk-pil Kim ,  Jae-woong Hyun ,  Choong-ho Lee ,  Tae-hun Kim

    IPC分类号： H01L21/84

    CPC分类号： H01L21/84 ,  H01L27/105 ,  H01L27/1052 ,  H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L27/1203

    摘要： A method of fabricating a non-volatile memory device according to example embodiments may include forming a semiconductor layer on a substrate. A plurality of lower charge storing layers may be formed on a bottom surface of the semiconductor layer. A plurality of lower control gate electrodes may be formed on the plurality of lower charge storing layers. A plurality of upper charge storing layers may be formed on a top surface of the semiconductor layer. A plurality of upper control gate electrodes may be formed on the plurality of upper charge storing layers, wherein the plurality of lower and upper control gate electrodes may be arranged alternately.

    摘要翻译： 根据示例性实施例的制造非易失性存储器件的方法可包括在衬底上形成半导体层。 多个下电荷存储层可以形成在半导体层的底表面上。 可以在多个下电荷存储层上形成多个下控制栅电极。 多个上电荷存储层可以形成在半导体层的顶表面上。 多个上部控制栅极电极可以形成在多个上部电荷存储层上，其中多个下部和上部控制栅电极可以交替布置。

    Non-volatile memory device and operation method of the same
    9.
    发明申请
    Non-volatile memory device and operation method of the same 有权
    非易失性存储器件及其操作方法相同

    公开(公告)号：US20090091975A1

    公开(公告)日：2009-04-09

    申请号：US12081679

    申请日：2008-04-18

    申请人： Tae-hee Lee ,  Won-joo Kim ,  Yoon-dong Park ,  June-mo Koo ,  Suk-pil Kim ,  Tae-eung Yoon

    发明人： Tae-hee Lee ,  Won-joo Kim ,  Yoon-dong Park ,  June-mo Koo ,  Suk-pil Kim ,  Tae-eung Yoon

    IPC分类号： G11C16/06

    CPC分类号： G11C16/0483 ,  H01L27/11521 ,  H01L27/11568

    摘要： Provided are a non-volatile memory device and an operation method of the same. The non-volatile memory device may include one or more main strings each of which may include first and second substrings which may separately include a plurality of memory cell transistors; and a charge supply line which may be configured to provide charges to or block charges from the first and second substrings of each of the main strings, wherein each of the main strings may include a first ground selection transistor which may be connected to the first substring; a first substring selection transistor which may be connected to the first ground selection transistor; a second ground selection transistor which may be connected to the second substring; and a second substring selection transistor which may be connected to the second ground selection transistor.

    摘要翻译： 提供了一种非易失性存储器件及其操作方法。 非易失性存储器件可以包括一个或多个主串，每个主弦可以包括可以分别包括多个存储单元晶体管的第一和第二子串; 以及电荷供给线，其可以被配置为向每个主串的第一和第二子串提供电荷或阻止电荷，其中每个主串可以包括第一接地选择晶体管，其可以连接到第一子串 ; 可以连接到第一接地选择晶体管的第一子串选择晶体管; 可以连接到第二子串的第二接地选择晶体管; 以及可以连接到第二接地选择晶体管的第二子串选择晶体管。

    Nonvolatile memory device and method of fabricating the same
    10.
    发明申请
    Nonvolatile memory device and method of fabricating the same 失效
    非易失性存储器件及其制造方法

    公开(公告)号：US20080157176A1

    公开(公告)日：2008-07-03

    申请号：US11902511

    申请日：2007-09-21

    申请人： Won-joo Kim ,  Yoon-dong Park ,  June-mo Koo ,  Suk-pil Kim ,  Sung-jae Byun

    发明人： Won-joo Kim ,  Yoon-dong Park ,  June-mo Koo ,  Suk-pil Kim ,  Sung-jae Byun

    IPC分类号： H01L27/115 ,  H01L21/8247

    CPC分类号： H01L27/115 ,  H01L27/11521 ,  H01L27/11524 ,  H01L27/11568 ,  H01L29/42336 ,  H01L29/66803

    摘要： A nonvolatile memory device having lower bit line contact resistance and a method of fabricating the same is provided. In the nonvolatile memory device, a semiconductor substrate of a first conductivity type may include first and second fins. A common bit line electrode may connect one end of the first fin to one end of the second fin. A plurality of control gate electrodes may cover the first and second fins and expand across the top surface of each of the first and second fins. A first string selection gate electrode may be positioned between the common bit line electrode and the plurality of control gate electrodes. The first string selection gate electrode may cover the first and second fins and expand across the top surface of each of the first and second fins. A second string selection gate electrode may be positioned between the first string selection gate electrode and the plurality of control gate electrodes. The second string selection gate electrode may cover the first and second fins and expand across the top surface of each of the first and second fins. The first fin under the first string selection gate electrode and the second fin under the second string selection gate electrode may have a second conductivity type opposite to the first conductivity type.

    摘要翻译： 提供一种具有较低位线接触电阻的非易失性存储器件及其制造方法。 在非易失性存储器件中，第一导电类型的半导体衬底可以包括第一和第二鳍片。 公共位线电极可将第一鳍片的一端连接到第二鳍片的一端。 多个控制栅极电极可以覆盖第一和第二鳍片并且跨越第一和第二鳍片中的每一个的顶表面膨胀。 第一串选择栅极可以位于公共位线电极和多个控制栅电极之间。 第一串选择栅电极可以覆盖第一和第二鳍片并且横跨第一和第二鳍片中的每一个的顶表面扩展。 第二串选择栅电极可以位于第一串选择栅电极和多个控制栅电极之间。 第二串选择栅电极可以覆盖第一和第二鳍片并且横跨第一和第二鳍片中的每一个的顶表面扩展。 第一串选择栅电极下的第一鳍和第二串选择栅电极下的第二鳍可以具有与第一导电类型相反的第二导电类型。