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    METHODS FOR MAKING IN-PLANE AND OUT-OF-PLANE SENSING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS)
    1.
    发明申请
    METHODS FOR MAKING IN-PLANE AND OUT-OF-PLANE SENSING MICRO-ELECTRO-MECHANICAL SYSTEMS (MEMS) 有权
    用于制造平面和平面外感测微电子机械系统（MEMS）的方法

    公开(公告)号：US20120001277A1

    公开(公告)日：2012-01-05

    申请号：US12827848

    申请日：2010-06-30

    申请人： Woo Tae Park ,  Lisa H. Karlin ,  Lianjun Liu ,  Heinz Loreck ,  Hemant D. Desai

    发明人： Woo Tae Park ,  Lisa H. Karlin ,  Lianjun Liu ,  Heinz Loreck ,  Hemant D. Desai

    IPC分类号： H01L29/84 ,  H01L21/28

    CPC分类号： B81C1/00182 ,  B81B2201/0235 ,  B81C2203/0792 ,  G01P15/0802 ,  G01P15/125 ,  H01L29/84

    摘要： A device structure is made using a first conductive layer over a first wafer. An isolated conductive region is formed in the first conductive layer surrounded by a first opening in the conductive layer. A second wafer has a first insulating layer and a conductive substrate, wherein the conductive substrate has a first major surface adjacent to the first insulating layer. The insulating layer is attached to the isolated conductive region. The conductive substrate is thinned to form a second conductive layer. A second opening is formed through the second conductive layer and the first insulating layer to the isolated conductive region. The second opening is filled with a conductive plug wherein the conductive plug contacts the isolated conductive region. The second conductive region is etched to form a movable finger over the isolated conductive region. A portion of the insulating layer under the movable finger is removed.

    摘要翻译： 使用第一晶片上的第一导电层制造器件结构。 在由导电层中的第一开口包围的第一导电层中形成隔离的导电区域。 第二晶片具有第一绝缘层和导电衬底，其中导电衬底具有与第一绝缘层相邻的第一主表面。 绝缘层附接到隔离导电区域。 导电基板被薄化以形成第二导电层。 通过第二导电层和第一绝缘层形成第二开口到隔离的导电区域。 第二开口填充有导电插头，其中导电插头接触隔离的导电区域。 蚀刻第二导电区域以在隔离的导电区域上形成可移动的手指。 去除可动指状物下面的绝缘层的一部分。

    Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS)
    2.
    发明授权
    Device structures for in-plane and out-of-plane sensing micro-electro-mechanical systems (MEMS) 有权
    用于平面内和平面外感测微机电系统（MEMS）的器件结构

    公开(公告)号：US08461656B2

    公开(公告)日：2013-06-11

    申请号：US12827848

    申请日：2010-06-30

    申请人： Woo Tae Park ,  Lisa H. Karlin ,  Lianjun Liu ,  Heinz Loreck ,  Hemant D. Desai

    发明人： Woo Tae Park ,  Lisa H. Karlin ,  Lianjun Liu ,  Heinz Loreck ,  Hemant D. Desai

    IPC分类号： H04R23/00

    CPC分类号： B81C1/00182 ,  B81B2201/0235 ,  B81C2203/0792 ,  G01P15/0802 ,  G01P15/125 ,  H01L29/84

    摘要： A device structure is made using a first conductive layer over a first wafer. An isolated conductive region is formed in the first conductive layer surrounded by a first opening in the conductive layer. A second wafer has a first insulating layer and a conductive substrate, wherein the conductive substrate has a first major surface adjacent to the first insulating layer. The insulating layer is attached to the isolated conductive region. The conductive substrate is thinned to form a second conductive layer. A second opening is formed through the second conductive layer and the first insulating layer to the isolated conductive region. The second opening is filled with a conductive plug wherein the conductive plug contacts the isolated conductive region. The second conductive region is etched to form a movable finger over the isolated conductive region. A portion of the insulating layer under the movable finger is removed.

    摘要翻译： 使用第一晶片上的第一导电层制造器件结构。 在由导电层中的第一开口包围的第一导电层中形成隔离的导电区域。 第二晶片具有第一绝缘层和导电衬底，其中导电衬底具有与第一绝缘层相邻的第一主表面。 绝缘层附接到隔离导电区域。 导电基板被薄化以形成第二导电层。 通过第二导电层和第一绝缘层形成第二开口到隔离的导电区域。 第二开口填充有导电插头，其中导电插头接触隔离的导电区域。 蚀刻第二导电区域以在隔离的导电区域上形成可移动的手指。 去除可动指状物下面的绝缘层的一部分。

    Method and circuit for transmitting information on rotational speed and additional data
    4.
    发明授权
    Method and circuit for transmitting information on rotational speed and additional data 失效
    用于传送关于转速和附加数据的信息的方法和电路

    公开(公告)号：US06687644B1

    公开(公告)日：2004-02-03

    申请号：US09319344

    申请日：1999-08-12

    申请人： Olaf Zinke ,  Wolfgang Fey ,  Michael Zydek ,  Heinz Loreck

    发明人： Olaf Zinke ,  Wolfgang Fey ,  Michael Zydek ,  Heinz Loreck

    IPC分类号： G01P300

    CPC分类号： G08C15/00 ,  B60C23/04 ,  B60G17/018 ,  B60G17/0195 ,  B60T8/171 ,  G01P3/481

    摘要： To transmit data which is supplied by a rotational speed sensor in the form of an alternating signal as well as additional data via a signal line, a sequence of current pulses of a predetermined duration is derived from the alternating signal, the pulse intervals or interpulse periods containing the information on rotational speed. The additional data is transmitted in the interpulse periods, and transmission of the additional data is synchronized by the individual rotating signal sensor pulses. Preferably, the method is employed for active sensors, and both the sensor pulses and the additional data are transmitted in the form of current signals. During standstill, in the absence of a sensor pulse, transmission of the additional data is triggered by auxiliary synchronization pulses.

    摘要翻译： 为了以交替信号的形式发送由转速传感器提供的数据以及经由信号线的附加数据，从交替信号，脉冲间隔或脉冲间隔导出预定持续时间的电流脉冲序列 包含关于转速的信息。 附加数据在脉冲间期间发送，附加数据的发送通过各个旋转信号传感器脉冲同步。 优选地，该方法用于有源传感器，并且传感器脉冲和附加数据都以电流信号的形式传输。 在停止状态下，在没有传感器脉冲的情况下，附加数据的传输由辅助同步脉冲触发。

    System for a detecting wheel rotation
    5.
    发明授权
    System for a detecting wheel rotation 有权
    检测轮旋转系统

    公开(公告)号：US06339322B1

    公开(公告)日：2002-01-15

    申请号：US09254158

    申请日：1999-05-21

    申请人： Heinz Loreck ,  Michael Zydek ,  Wolfgang Fey ,  Peter Lohberg

    发明人： Heinz Loreck ,  Michael Zydek ,  Wolfgang Fey ,  Peter Lohberg

    IPC分类号： G01P344

    CPC分类号： G01P3/44

    摘要： An arrangement for determining the rotational behavior of a rotating body or encoder (3) includes a sensor module (1) which comprises a sensor element (2; 2.1 to 2.4), a controllable power source (4) supplying a load-independent current representative of the rotational behavior, a modulator (5) that controls the power source (4) as a function of signals of the sensor element (2; 2.1 to 2.4) and of signals supplied by an external signal source through an additional port (K5), and an evaluating circuit (9). The sensor module (1) is magnetically coupled to the encoder (3). The output signal of the sensor module (1) is a signal, representative of the rotational behavior, with a superimposed status signal and/or additional signal.

    摘要翻译： 用于确定旋转体或编码器（3）的旋转行为的装置包括传感器模块（1），其包括传感器元件（2; 2.1至2.4），可控电源（4），其提供与负载无关的电流代表 根据传感器元件（2; 2.1至2.4）的信号和由外部信号源通过附加端口（K5）提供的信号来控制电源（4）的调制器（5） ，和评估电路（9）。 传感器模块（1）磁耦合到编码器（3）。 传感器模块（1）的输出信号是具有叠加状态信号和/或附加信号的代表旋转行为的信号。

    Method and circuit configuration for processing the output signals of a rotational speed sensor
    6.
    发明授权
    Method and circuit configuration for processing the output signals of a rotational speed sensor 失效
    用于处理转速传感器的输出信号的方法和电路配置

    公开(公告)号：US4764685A

    公开(公告)日：1988-08-16

    申请号：US937067

    申请日：1986-12-02

    申请人： Hans W. Bleckmann ,  Heinz Loreck ,  Michael Zydek

    发明人： Hans W. Bleckmann ,  Heinz Loreck ,  Michael Zydek

    IPC分类号： G01P3/481 ,  G01D5/244 ,  G01D5/245 ,  G01P3/44 ,  G01P3/48 ,  G01P3/42

    CPC分类号： G01P3/48 ,  G01P3/44 ,  Y10T307/793

    摘要： To process the output signal of a rotational speed sensor (2) which generates an alternating voltage dependent in respect of frequency and amplitude on the rotational speed, two low-pass filters (TP1, TP2) serve to produce a useful signal (I1), on the one hand, and a reference signal (I2), on the other hand. The two signals are compared. In dependence on the difference of these signals (I1, I2) a pulse-shaped output signal, namely the processed sensor signal, is generated by means of a comparator (7). The reference signal dynamically follows the useful signal with the aid of a control signal issue by an adapter circuit (20,21).

    摘要翻译： 为了处理转速传感器（2）的输出信号，它产生与转速相关的频率和振幅相关的交流电压，两个低通滤波器（TP1，TP2）用于产生有用的信号（I1）， 另一方面是参考信号（I2）。 比较两个信号。 根据这些信号（I1，I2）的差异，通过比较器（7）产生脉冲形状的输出信号，即经处理的传感器信号。 参考信号借助于适配器电路（20,21）的控制信号发生动态地跟随有用信号。

    Motion sensor having a timer and a switch for measuring absolute field strength
    7.
    发明授权
    Motion sensor having a timer and a switch for measuring absolute field strength 失效
    运动传感器具有定时器和用于测量绝对场强的开关

    公开(公告)号：US06184677B2

    公开(公告)日：2001-02-06

    申请号：US08952810

    申请日：1998-03-09

    申请人： Hans-Wilhelm Bleckmann ,  Peter Lohberg ,  Heinz Loreck

    发明人： Hans-Wilhelm Bleckmann ,  Peter Lohberg ,  Heinz Loreck

    IPC分类号： G01P344

    CPC分类号： G01P3/488 ,  G01D5/145

    摘要： In normal operation, a sensor element emits information only as to whether two or more field-sensitive components are located in peripheral zones of identical or different electromagnetic field strengths of a pulse generator. In order to permit sensor elements of this type determining immediately upon activation of a supply voltage whether an identical electromagnetic field strength on both components corresponds to a zone of low (L) or high (H) field strength, according to the present invention, the sensor element, upon activation of the supply voltage, is initially operated so that the absolute field strength is measured for a given time. If there is a difference circuit between two field-sensitive components (3, 4), the measurement is carried out because one of the components is temporarily switched off, both components are connected in parallel, or both components are connected in series.

    摘要翻译： 在正常操作中，传感器元件仅发出关于两个或更多个场敏感元件是否位于脉冲发生器的相同或不同电磁场强度的周边区域中的信息。 为了允许这种类型的传感器元件在激活电源电压时立即确定两个部件上的相同电磁场强度是否对应于低（L）或高（H）场强的区域，根据本发明， 传感器元件在启动电源电压时初始运行，以便在给定时间内测量绝对磁场强度。 如果两个场敏感部件（3,4）之间存在差分电路，则由于其中一个部件暂时关闭，两个部件并联连接，或两个部件串联连接，因此进行测量。

    Method and circuit configuration for conditioning the output signal of a rotational speed sensor
    8.
    发明授权
    Method and circuit configuration for conditioning the output signal of a rotational speed sensor 失效
    用于调节转速传感器的输出信号的方法和电路配置

    公开(公告)号：US5451867A

    公开(公告)日：1995-09-19

    申请号：US81638

    申请日：1993-06-24

    申请人： Heinz Loreck ,  Michael Zydek ,  Wolfgang Fey

    发明人： Heinz Loreck ,  Michael Zydek ,  Wolfgang Fey

    IPC分类号： B60T8/172 ,  G01P3/481 ,  H03K5/08 ,  G01P3/46 ,  G01P3/48

    CPC分类号： H03K5/08 ,  B60T8/172 ,  G01P3/481

    摘要： A circuit configuration which serves to condition the output signal of a rotational speed sensor, e.g., the wheel sensor of an automotive vehicle. The circuit configuration includes a trigger circuit, the "hysteresis" or trigger thresholds thereof being controllable, and includes circuits for determining a coupling factor which, multiplied by the frequency of the sensor signal corresponding to the speed of rotation, forms the amplitude of the sensor output signal. To determine the coupling factor, and to adjust the hysteresis, threshold values are predefined for the output signal of the rotational speed sensor. Upon start of the vehicle, the coupling factor is determined from the frequency of the sensor signal at the point of time the threshold values are reached, and the hysteresis is adjusted accordingly.

    摘要翻译： 用于调节转速传感器（例如机动车辆的车轮传感器）的输出信号的电路结构。 电路结构包括触发电路，“迟滞”或其触发阈值是可控的，并且包括用于确定耦合因子的电路，该耦合因子乘以与旋转速度对应的传感器信号的频率，形成传感器的振幅 输出信号。 为了确定耦合因子并调整滞后，对于转速传感器的输出信号预先设定阈值。 在车辆开始时，根据传感器信号在达到阈值的时间点的频率来确定耦合因子，并相应地调节滞后。

    Method and a device for monitoring an antiskid system
    10.
    发明授权
    Method and a device for monitoring an antiskid system 失效
    用于监控防滑系统的方法和装置

    公开(公告)号：US4750126A

    公开(公告)日：1988-06-07

    申请号：US466261

    申请日：1983-02-14

    申请人： Hans W. Bleckmann ,  Heinz Loreck

    发明人： Hans W. Bleckmann ,  Heinz Loreck

    IPC分类号： B60T8/70 ,  B60T8/88 ,  B60T8/34

    CPC分类号： B60T8/885

    摘要： To avoid dangerous pressure decreases in antiskid systems, it is necessary to continuously monitor the operability of the electrical components. The present invention ensures maximum reliablity and a simple circuit configuration. Electrical signals are generated during the period of time in which a pressure decrease occurs and/or by the speed of pressure decrease at each wheel of a vehicle axis and are subtracted from one another. If the absolute value of the difference reaches a limiting value, the disturbed part of the system will be prevented from causing a further pressure decrease.

    摘要翻译： 为了避免防滑系统的危险压力降低，有必要持续监控电气部件的可操作性。 本发明确保了最大的可靠性和简单的电路配置。 在发生压力下降的时间段和/或车辆轴线的每个车轮处的压力降低速度的时间段内产生电信号，并且彼此相减。 如果差值的绝对值达到限制值，则系统的受扰部分将被阻止进一步降低压力。