公开(公告)号：US09165890B2

公开(公告)日：2015-10-20

申请号：US13941854

申请日：2013-07-15

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Shih-Chin Chen ,  Yi-Ming Chang ,  Chien-Hui Chen ,  Chia-Ming Cheng ,  Wei-Luen Suen ,  Chen-Han Chiang

IPC: H01L23/544 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L21/78 ,  H01L23/31 ,  H01L23/00

CPC classification number: H01L23/544 ,  H01L21/78 ,  H01L23/3185 ,  H01L24/05 ,  H01L24/06 ,  H01L24/13 ,  H01L24/14 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2224/02371 ,  H01L2224/02377 ,  H01L2224/03462 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05554 ,  H01L2224/05567 ,  H01L2224/05569 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05669 ,  H01L2224/06155 ,  H01L2224/0616 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/14155 ,  H01L2224/1416 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2224/05552

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and an opposite second surface; a device region disposed in the substrate; a dielectric layer located on the first surface of the semiconductor substrate; a plurality of conducting pads located in the dielectric layer and electrically connected to the device region; at least one alignment mark disposed in the semiconductor substrate and extending from the second surface towards the first surface.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有第一表面和相对的第二表面的半导体衬底; 设置在所述基板中的装置区域; 位于半导体衬底的第一表面上的电介质层; 位于所述电介质层中并电连接到所述器件区域的多个导电焊盘; 设置在所述半导体衬底中并且从所述第二表面朝向所述第一表面延伸的至少一个对准标记。