公开(公告)号：US10109663B2

公开(公告)日：2018-10-23

申请号：US15258594

申请日：2016-09-07

Applicant: XINTEC INC.

Inventor： Yu-Lung Huang ,  Tsang-Yu Liu ,  Yi-Ming Chang ,  Hsin Kuan

IPC: H01L27/146

Abstract: A chip package including a substrate is provided. The substrate has a first surface and a second surface opposite thereto. The substrate includes a sensing region. A cover plate is on the first surface and covers the sensing region. A shielding layer covers a sidewall of the cover plate and extends towards the second surface. The shielding layer has an inner surface adjacent to the cover plate and has an outer surface away from the cover plate. The length of the outer surface extending towards the second surface is less than that of the inner surface extending towards the second surface, and is not less than that of the sidewall of the cover plate. A method of forming the chip package is also provided.

公开(公告)号：US09685354B2

公开(公告)日：2017-06-20

申请号：US14676478

申请日：2015-04-01

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Sheng Lin ,  Yi-Ming Chang

IPC: B26D1/09 ,  H01L21/67 ,  H01L21/683 ,  B26D7/18

CPC classification number: H01L21/67092 ,  B26D1/095 ,  B26D7/1863 ,  H01L21/6838 ,  Y10T83/0267 ,  Y10T225/10 ,  Y10T225/12 ,  Y10T225/364

Abstract: An embodiment of this invention provides a separation apparatus for separating a stacked article, such as a semiconductor chip package with sensing functions, comprising a substrate and a cap layer formed on the substrate. The separation apparatus comprises a vacuum nozzle head including a suction pad having a top surface and a bottom surface, a through hole penetrating the top surface and the bottom surface of the suction pad, and a hollow vacuum pipe connecting the through hole to a vacuum pump; a stage positing under the vacuum nozzle head and substantially aligning with the suction pad; a control means coupling to the vacuum nozzle head to lift upward or lower down the vacuum nozzle head; and a first cutter comprising a first cutting body and a first knife connecting to the first cutting body. The cap layer is pressed against by the bottom surface of the suction pad and sucked by the suction pad of the vacuum nozzle head after the vacuum pump begins to vacuum the air within the hollow vacuum pipe and the through hole. Then, the first cutter cuts into the interface between the substrate and the cap layer, and the cap lay is separated from the substrate by the suction force of the vacuum nozzle head and the lift force generated by the upward movement of the vacuum nozzle head.

公开(公告)号：US09653422B2

公开(公告)日：2017-05-16

申请号：US14673657

申请日：2015-03-30

Applicant: XINTEC INC.

Inventor： Chia-Lun Shen ,  Yi-Ming Chang ,  Tsang-Yu Liu ,  Yen-Shih Ho

IPC: H01L23/00 ,  H01L21/78 ,  H01L21/306 ,  H01L21/48

CPC classification number: H01L24/32 ,  H01L21/30604 ,  H01L21/48 ,  H01L21/78 ,  H01L24/05 ,  H01L24/09 ,  H01L24/33 ,  H01L24/48 ,  H01L24/49 ,  H01L24/73 ,  H01L24/83 ,  H01L2224/02371 ,  H01L2224/02373 ,  H01L2224/05611 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05655 ,  H01L2224/05669 ,  H01L2224/32057 ,  H01L2224/32225 ,  H01L2224/451 ,  H01L2224/48091 ,  H01L2224/48106 ,  H01L2224/48227 ,  H01L2224/73265 ,  H01L2224/8385 ,  H01L2224/8389 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/12042 ,  H01L2924/37001 ,  H01L2924/00 ,  H01L2224/45099

Abstract: A method for forming a chip package is provided. The method includes providing a first substrate and a second substrate. The first substrate is attached onto the second substrate by an adhesive layer. A first opening is formed to penetrate the first substrate and the adhesive layer and separate the first substrate and the adhesive layer into portions. A chip package formed by the method is also provided.

公开(公告)号：US09640488B2

公开(公告)日：2017-05-02

申请号：US15008202

申请日：2016-01-27

Applicant: XINTEC INC.

Inventor： Yi-Min Lin ,  Yi-Ming Chang ,  Shu-Ming Chang ,  Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Ming Cheng

IPC: H01L23/552 ,  H01L21/48 ,  H01L21/78 ,  H01L29/06 ,  H01L23/00 ,  H01L23/544 ,  H01L25/065

CPC classification number: H01L23/552 ,  H01L21/4814 ,  H01L21/78 ,  H01L23/544 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/45 ,  H01L24/48 ,  H01L24/85 ,  H01L24/92 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2223/5446 ,  H01L2224/02313 ,  H01L2224/0235 ,  H01L2224/02371 ,  H01L2224/0239 ,  H01L2224/03614 ,  H01L2224/04042 ,  H01L2224/04105 ,  H01L2224/05548 ,  H01L2224/05571 ,  H01L2224/451 ,  H01L2224/48225 ,  H01L2224/48227 ,  H01L2224/4847 ,  H01L2224/92 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10157 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/01078 ,  H01L2924/01028 ,  H01L2924/0105 ,  H01L2924/01013 ,  H01L2924/01047 ,  H01L2924/01022 ,  H01L2924/01074 ,  H01L2924/00012 ,  H01L2224/85 ,  H01L2924/014 ,  H01L2224/85399 ,  H01L2224/05599

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and a second surface; a first recess extending from the first surface towards the second surface; a second recess extending from a bottom of the first recess towards the second surface, wherein a sidewall and the bottom of the first recess and a second sidewall and a second bottom of the second recess together form an exterior side surface of the semiconductor substrate; a wire layer disposed over the first surface and extending into the first recess and/or the second recess; an insulating layer positioned between the wire layer and the semiconductor substrate; and a metal light shielding layer disposed over the first surface and having at least one hole, wherein a shape of the at least one hole is a quadrangle.

公开(公告)号：US09275958B2

公开(公告)日：2016-03-01

申请号：US14207224

申请日：2014-03-12

Applicant: XINTEC INC.

Inventor： Yi-Min Lin ,  Yi-Ming Chang ,  Shu-Ming Chang ,  Yen-Shih Ho ,  Tsang-Yu Liu ,  Chia-Ming Cheng

IPC: H01L27/146 ,  H01L23/552 ,  H01L21/48 ,  H01L21/78 ,  H01L29/06 ,  H01L23/00 ,  H01L25/065

CPC classification number: H01L23/552 ,  H01L21/4814 ,  H01L21/78 ,  H01L23/544 ,  H01L24/02 ,  H01L24/03 ,  H01L24/05 ,  H01L24/45 ,  H01L24/48 ,  H01L24/85 ,  H01L24/92 ,  H01L25/0657 ,  H01L29/0657 ,  H01L2223/5446 ,  H01L2224/02313 ,  H01L2224/0235 ,  H01L2224/02371 ,  H01L2224/0239 ,  H01L2224/03614 ,  H01L2224/04042 ,  H01L2224/04105 ,  H01L2224/05548 ,  H01L2224/05571 ,  H01L2224/451 ,  H01L2224/48225 ,  H01L2224/48227 ,  H01L2224/4847 ,  H01L2224/92 ,  H01L2924/00014 ,  H01L2924/10155 ,  H01L2924/10156 ,  H01L2924/10157 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/00 ,  H01L2924/01029 ,  H01L2924/01079 ,  H01L2924/01078 ,  H01L2924/01028 ,  H01L2924/0105 ,  H01L2924/01013 ,  H01L2924/01047 ,  H01L2924/01022 ,  H01L2924/01074 ,  H01L2924/00012 ,  H01L2224/85 ,  H01L2924/014 ,  H01L2224/85399 ,  H01L2224/05599

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and a second surface; a first recess extending from the first surface towards the second surface; a second recess extending from a bottom of the first recess towards the second surface, wherein a sidewall and the bottom of the first recess and a second sidewall and a second bottom of the second recess together form an exterior side surface of the semiconductor substrate; a wire layer disposed over the first surface and extending into the first recess and/or the second recess; an insulating layer positioned between the wire layer and the semiconductor substrate; and a metal light shielding layer disposed over the first surface and having at least one hole, wherein a shape of the at least one hole is a quadrangle.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有第一表面和第二表面的半导体衬底; 从所述第一表面延伸到所述第二表面的第一凹部; 从所述第一凹部的底部朝向所述第二表面延伸的第二凹部，其中所述第一凹部的侧壁和所述底部以及所述第二凹部的第二侧壁和第二底部一起形成所述半导体衬底的外侧表面; 布置在所述第一表面上并延伸到所述第一凹部和/或所述第二凹部中的导线层; 位于所述导线层和所述半导体基板之间的绝缘层; 以及设置在所述第一表面上并且具有至少一个孔的金属遮光层，其中所述至少一个孔的形状是四边形。

公开(公告)号：US09165890B2

公开(公告)日：2015-10-20

申请号：US13941854

申请日：2013-07-15

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Shih-Chin Chen ,  Yi-Ming Chang ,  Chien-Hui Chen ,  Chia-Ming Cheng ,  Wei-Luen Suen ,  Chen-Han Chiang

IPC: H01L23/544 ,  H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L21/78 ,  H01L23/31 ,  H01L23/00

CPC classification number: H01L23/544 ,  H01L21/78 ,  H01L23/3185 ,  H01L24/05 ,  H01L24/06 ,  H01L24/13 ,  H01L24/14 ,  H01L2223/5442 ,  H01L2223/54426 ,  H01L2223/54453 ,  H01L2223/5446 ,  H01L2224/02371 ,  H01L2224/02377 ,  H01L2224/03462 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/05554 ,  H01L2224/05567 ,  H01L2224/05569 ,  H01L2224/05624 ,  H01L2224/05644 ,  H01L2224/05647 ,  H01L2224/05669 ,  H01L2224/06155 ,  H01L2224/0616 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/131 ,  H01L2224/14155 ,  H01L2224/1416 ,  H01L2224/97 ,  H01L2924/00014 ,  H01L2924/13091 ,  H01L2924/1461 ,  H01L2924/15788 ,  H01L2224/03 ,  H01L2224/11 ,  H01L2924/014 ,  H01L2924/00 ,  H01L2224/05552

Abstract: An embodiment of the invention provides a chip package which includes: a semiconductor substrate having a first surface and an opposite second surface; a device region disposed in the substrate; a dielectric layer located on the first surface of the semiconductor substrate; a plurality of conducting pads located in the dielectric layer and electrically connected to the device region; at least one alignment mark disposed in the semiconductor substrate and extending from the second surface towards the first surface.

Abstract translation: 本发明的实施例提供一种芯片封装，其包括：具有第一表面和相对的第二表面的半导体衬底; 设置在所述基板中的装置区域; 位于半导体衬底的第一表面上的电介质层; 位于所述电介质层中并电连接到所述器件区域的多个导电焊盘; 设置在所述半导体衬底中并且从所述第二表面朝向所述第一表面延伸的至少一个对准标记。

公开(公告)号：US08748926B2

公开(公告)日：2014-06-10

申请号：US13720649

申请日：2012-12-19

Applicant: Xintec Inc.

Inventor： Kuo-Hua Liu ,  Yi-Ming Chang ,  Hsi-Chien Lin

IPC: H01L33/00 ,  H01L21/00

CPC classification number: H01L21/78 ,  H01L21/50 ,  H01L21/561 ,  H01L23/10 ,  H01L23/48 ,  H01L27/14618 ,  H01L27/14632 ,  H01L27/14687 ,  H01L2924/0002 ,  H01L2924/00

Abstract: A chip package includes: a substrate having a first and a second surfaces; a device region formed in or disposed on the substrate; a dielectric layer disposed on the first surface; at least one conducting pad disposed in the dielectric layer and electrically connected to the device region; a planar layer disposed on the dielectric layer, wherein a vertical distance between upper surfaces of the planar layer and the conducting pad is larger than about 2 μm; a transparent substrate disposed on the first surface; a first spacer layer disposed between the transparent substrate and the planar layer; and a second spacer layer disposed between the transparent substrate and the substrate and extending into an opening of the dielectric layer to contact with the conducting pad, wherein there is substantially no gap between the second spacer layer and the conducting pad.

Abstract translation: 芯片封装包括：具有第一和第二表面的衬底; 形成在基板上或设置在基板上的器件区域; 设置在所述第一表面上的电介质层; 至少一个导电焊盘，其布置在所述电介质层中并电连接到所述器件区域; 设置在所述电介质层上的平面层，其中所述平面层的上表面与所述导电焊盘之间的垂直距离大于约2μm; 设置在所述第一表面上的透明基板; 设置在所述透明基板和所述平面层之间的第一间隔层; 以及第二间隔层，其设置在所述透明基板和所述基板之间并且延伸到所述电介质层的与所述导电焊盘接触的开口中，其中所述第二间隔层和所述导电焊盘之间基本上没有间隙。

公开(公告)号：US09947716B2

公开(公告)日：2018-04-17

申请号：US15358852

申请日：2016-11-22

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Hsiao-Lan Yeh ,  Chia-Sheng Lin ,  Yi-Ming Chang ,  Po-Han Lee ,  Hui-Hsien Wu ,  Jyun-Liang Wu ,  Shu-Ming Chang ,  Yu-Lung Huang ,  Chien-Min Lin

IPC: H01L27/146 ,  H01L21/48 ,  H01L21/67 ,  H01L23/18

CPC classification number: H01L27/14698 ,  H01L21/4803 ,  H01L21/67017 ,  H01L21/67132 ,  H01L23/18 ,  H01L27/14618 ,  H01L27/14634 ,  H01L27/14636 ,  H01L27/14687

Abstract: A chip package includes a chip, an adhesive layer, and a dam element. The chip has a sensing area, a first surface, and a second surface that is opposite to the first surface. The sensing area is located on the first surface. The adhesive layer covers the first surface of the chip. The dam element is located on the adhesive layer and surrounds the sensing area. The thickness of the dam element is in a range from 20 μm to 750 μm, and the wall surface of the dam element surrounding the sensing area is a rough surface.

公开(公告)号：US09875912B2

公开(公告)日：2018-01-23

申请号：US15358098

申请日：2016-11-21

Applicant: XINTEC INC.

Inventor： Yen-Shih Ho ,  Hsiao-Lan Yeh ,  Chia-Sheng Lin ,  Yi-Ming Chang ,  Po-Han Lee ,  Hui-Hsien Wu ,  Jyun-Liang Wu

IPC: H01L23/48 ,  H01L23/52 ,  H01L29/40 ,  H01L21/56 ,  H01L21/683 ,  H01L21/78 ,  G06K9/00 ,  H01L23/31

CPC classification number: H01L21/561 ,  G06K9/0004 ,  H01L21/6836 ,  H01L21/78 ,  H01L23/3114 ,  H01L23/481 ,  H01L2224/16225

Abstract: A chip package includes a chip, a first adhesive layer, a second adhesive layer, and a protection cap. The chip has a sensing area, a first surface, a second surface that is opposite to the first surface, and a side surface adjacent to the first and second surfaces. The sensing area is located on the first surface. The first adhesive layer covers the first surface of the chip. The second adhesive layer is located on the first adhesive layer, such that the first adhesive layer is between the first surface and the second adhesive layer. The protection cap has a bottom board and a sidewall that surrounds the bottom board. The bottom board covers the second adhesive layer, and the sidewall covers the side surface of the chip.

公开(公告)号：US09426894B2

公开(公告)日：2016-08-23

申请号：US14282457

申请日：2014-05-20

Applicant: XINTEC INC.

Inventor： Yi-Ming Chang ,  I-Min Lin ,  Po-Shen Lin

IPC: H05K3/06 ,  H01L21/48 ,  H01L21/768 ,  H01L23/532 ,  H05K3/40 ,  H05K3/24 ,  H01L23/00

CPC classification number: H05K3/06 ,  H01L21/4853 ,  H01L21/7685 ,  H01L21/76852 ,  H01L21/76885 ,  H01L23/53238 ,  H01L24/05 ,  H01L24/11 ,  H01L24/13 ,  H01L2224/02311 ,  H01L2224/02313 ,  H01L2224/02317 ,  H01L2224/02319 ,  H01L2224/02331 ,  H01L2224/0235 ,  H01L2224/0239 ,  H01L2224/0401 ,  H01L2224/05548 ,  H01L2224/1148 ,  H01L2224/13022 ,  H01L2224/13024 ,  H01L2224/13111 ,  H01L2924/01029 ,  H01L2924/12041 ,  H01L2924/14 ,  H05K3/244 ,  H05K3/4007 ,  H05K2201/0367 ,  H01L2924/01082 ,  H01L2924/01047 ,  H01L2924/00014 ,  H01L2924/01028 ,  H01L2924/01079 ,  H01L2924/00

Abstract: A wiring structure for improving a crown-like defect and a fabrication method thereof are provided. The method includes the following steps. A substrate, on which a seed layer and a patterned photoresist layer with an opening are formed, is provided. A copper layer, having a bottom covering the seed layer, is formed in the opening. A barrier layer covering at least one top portion of the copper layer is formed on the copper layer. An oxidation potential of the barrier layer is greater than that of the copper layer. The patterned photoresist layer is removed to perform an etching process, wherein the copper layer and a portion of the seed layer exposed are etched to form a wiring layer. An immersion process is performed to form an anti-oxidation layer comprehensively on exposed surfaces of the barrier layer and the wiring layer.

Abstract translation: 提供了一种用于改善冠状缺陷的布线结构及其制造方法。 该方法包括以下步骤。 提供了其上形成有种子层和具有开口的图案化光致抗蚀剂层的衬底。 在开口中形成有覆盖种子层的底部的铜层。 覆盖铜层的至少一个顶部的阻挡层形成在铜层上。 阻挡层的氧化电位大于铜层的氧化电位。 去除图案化的光致抗蚀剂层以进行蚀刻工艺，其中铜层和暴露的种子层的一部分被蚀刻以形成布线层。 进行浸渍处理以在阻挡层和布线层的暴露表面上综合地形成抗氧化层。