公开(公告)号：US20060067001A1

公开(公告)日：2006-03-30

申请号：US10955691

申请日：2004-09-30

申请人： Yimin Hsu ,  Chie Poon ,  Timothy Strand

发明人： Yimin Hsu ,  Chie Poon ,  Timothy Strand

IPC分类号： G11B5/60

CPC分类号： G11B5/314 ,  G11B5/02 ,  G11B5/1278 ,  G11B2005/0005 ,  G11B2005/0021

摘要： A magnetic head including a media heating device including an optical cavity resonator that produces a high intensity near-field optical beam adjacent to the write pole. Optical energy is coupled into the resonant cavity through a waveguide that is placed proximate the cavity, and optical energy is coupled out of the cavity through an aperture that is placed proximate an antinode or post within the cavity. The write pole tip may serve as the post in certain embodiments. The media heating device is preferably fabricated between the first and second magnetic pole layers of a perpendicular magnetic head and close to the ABS surface of the head. An alternative embodiment may include a near field aperture disposed between the resonant cavity and the ABS.

摘要翻译： 一种磁头，包括介质加热装置，该介质加热装置包括产生与写入极相邻的高强度近场光束的光腔谐振器。 光能通过放置在腔附近的波导耦合到谐振腔中，并且光能通过放置在腔内的波腹或柱附近的孔耦合到空腔外。 在某些实施例中，写极尖可以用作柱。 介质加热装置优选地制造在垂直磁头的第一和第二磁极层之间并且靠近头部的ABS表面。 替代实施例可以包括设置在谐振腔和ABS之间的近场孔。

公开(公告)号：US08503131B2

公开(公告)日：2013-08-06

申请号：US13339310

申请日：2011-12-28

申请人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

发明人： Yi Zheng ,  Yimin Hsu ,  Wen-Chien David Hsiao ,  Ming Jiang ,  Aron Pentek ,  Sue Siyang Zhang ,  Edward Hin Pong Lee ,  Hung-chin Guthrie ,  Ning Shi ,  Vladimir Nikitin ,  Prabodh Ratnaparkhi ,  Yinshi Liu

IPC分类号： G11B5/147

CPC分类号： G11B5/3166 ,  G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052 ,  Y10T428/11 ,  Y10T428/1186

摘要： A magnetic write head for perpendicular magnetic data recording. The write head includes a substrate and a magnetic write pole formed on the substrate, the write pole having a trailing edge and first and second sides. A magnetic stitched pole is formed over a portion of the magnetic write pole, the stitched pole having a front edge that defines a secondary flare point. First and second non-magnetic side walls are formed at the first and second sides of the write pole. The non-magnetic side walls extend from the substrate at least to the trailing edge of the write pole in a first region near an air bearing surface and wherein the first and second non-magnetic side walls extend from the substrate to a point between the substrate and the trailing edge, allowing the stitched magnetic pole to extend partially over the sides of the write pole.

摘要翻译： 用于垂直磁数据记录的磁写头。 写入头包括形成在衬底上的衬底和磁性写入磁极，写入极具有后缘和第一和第二侧。 在磁性写入磁极的一部分上形成有磁性的缝合磁极，缝合的磁极具有限定二次闪光点的前部边缘。 第一和第二非磁性侧壁形成在写入极的第一和第二侧。 所述非磁性侧壁在靠近空气支承表面的第一区域中从所述基板至少延伸到所述写柱的后缘，并且其中所述第一和第二非磁性侧壁从所述基板延伸到所述基板之间的点 和后缘，允许缝合的磁极部分地延伸在写柱的侧面上。

公开(公告)号：US07848054B2

公开(公告)日：2010-12-07

申请号：US11744054

申请日：2007-05-03

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Vladimir Nikitin ,  Aron Pentek ,  Yi Zheng

IPC分类号： G11B5/127

CPC分类号： G11B5/112 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A perpendicular magnetic write head having a conformal wrap around trailing shield. The write head includes a write pole that can be configured with a trapezoidal shape as viewed from the Air Bearing Surface (ABS) and which includes a wrap around trailing magnetic shield. The magnetic shield has a trailing portion that is separated from the leading edge of the write pole by a non-magnetic trailing gap, and has side shield portions that are separated from first and second side portions of the write pole by first and second non-magnetic side gaps. The magnetic shield can be configured with notches at either side of the trailing portion of magnetic shield. These notches can extend in the trailing direction by a distance that is preferably ¼ to 1 times the trailing gap thickness. The width of the straight, trailing portion of the shield is preferable ½ to 1 times of the main pole width.

摘要翻译： 垂直磁性写头，其具有围绕后屏蔽的保形包裹。 写入头包括写入极，其可以被配置为从空气轴承表面（ABS）观察到的梯形形状，并且包括围绕尾部磁屏蔽的包裹。 磁屏蔽具有通过非磁性拖尾间隔与写入极的前端分离的后部，并且具有通过第一和第二非间隙与写入极的第一和第二侧部分离的侧面屏蔽部分， 磁侧隙。 磁屏蔽可以在磁屏蔽的尾部的任一侧配置有凹口。 这些凹口可以在拖尾方向上延伸一段距离，优选为后缘间隙厚度的1/4至1倍。 屏蔽的直的后部的宽度优选为主极宽度的1/2至1倍。

公开(公告)号：US07841068B2

公开(公告)日：2010-11-30

申请号：US11772665

申请日：2007-07-02

申请人： Tsung Yuan Chen ,  Yimin Hsu ,  Yinshi Liu

发明人： Tsung Yuan Chen ,  Yimin Hsu ,  Yinshi Liu

IPC分类号： G11B5/127 ,  H04R31/00

CPC分类号： G11B5/1871 ,  G11B5/1278 ,  G11B5/3116 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49044 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： A method of fabricating a single-pole perpendicular magnetic recording head to contain a bevel angle promotion layer that facilitates the fabrication of the bevel angle in a trapezoidal main pole. The bevel angle promotion layer is made of a non-magnetic material that is softer than the material (e.g., Al2O3) that normally underlies the main pole. In one embodiment, the bevel angle promotion layer is formed between an end of the yoke and the air bearing surface (ABS), with the top surface of the bevel angle promotion layer being substantially coplanar with the top surface of the yoke. In other embodiment the bevel angle promotion layer is integrated with a leading edge taper material, which is formed of a magnetic material, to broaden the magnetic flux path between the yoke and the main pole.

摘要翻译： 一种制造单极垂直磁记录头的方法，其包含有助于在梯形主极中制造斜角的斜角促进层。 斜角促进层由比通常位于主极下方的材料（例如Al 2 O 3）更软的非磁性材料制成。 在一个实施例中，斜角促进层形成在轭的端部和空气支承表面（ABS）之间，斜角促进层的顶表面与轭的顶表面基本共面。 在其他实施例中，斜角促进层与由磁性材料形成的前缘锥形材料整合，以扩大轭和主极之间的磁通路径。

公开(公告)号：US07804662B2

公开(公告)日：2010-09-28

申请号：US11645390

申请日：2006-12-26

申请人： Tsung Yuan Chen ,  Hung-Chin Guthrie ,  Yimin Hsu ,  Ming Jiang

发明人： Tsung Yuan Chen ,  Hung-Chin Guthrie ,  Yimin Hsu ,  Ming Jiang

IPC分类号： G11B5/127

CPC分类号： G11B5/1278 ,  G11B5/3116 ,  G11B5/315 ,  G11B5/3163

摘要： In a perpendicular recording head, a notch is formed in the top write gap at a location on top of the main pole. A perpendicular head with this notched top write gap structure has less transition curvature and better writability while reducing the adjacent track interference (ATI). Also, the process used to fabricate the head ensures that the trailing edge (writing edge) of the main pole is extremely flat with no corner rounding.

摘要翻译： 在垂直记录头中，在主极顶部的位置处，在顶部写入间隙中形成凹口。 具有该切口顶部写入间隙结构的垂直头部具有较小的转变曲率和较好的可编写性，同时减小了相邻的轨道干涉（ATI）。 此外，用于制造头的过程确保主极的后缘（书写边缘）非常平坦，没有圆角。

公开(公告)号：US20100214693A1

公开(公告)日：2010-08-26

申请号：US12391242

申请日：2009-02-23

申请人： John Thomas Contreras ,  Yimin Hsu ,  Manfred Ernst Schabes ,  Xinzhi Xing

发明人： John Thomas Contreras ,  Yimin Hsu ,  Manfred Ernst Schabes ,  Xinzhi Xing

IPC分类号： G11B5/127

CPC分类号： G11B5/3123 ,  G11B5/02 ,  G11B5/1278 ,  G11B2005/0005

摘要： A perpendicular magnetic recording system has a write head with a main perpendicular write pole connected to a yoke with first and second electrical coils. The first coil is wrapped around the yoke on one side of the main pole, and the second coil is wrapped around the yoke on the other side of the main pole. The first end of each coil is connected to a respective terminal. The second ends of the two coils are connected together and connected to a common terminal. A lead-time circuit is connected between the common terminal and the first end of one of the coils. Immediately after the direction of write current is switched by the write driver, the lead-time circuit causes the current in one of the coils to lead the current in the other coil. The current displacement between the two coils creates a precession of the magnetic flux reversal, thereby reducing the switching time of the write head.

摘要翻译： 垂直磁记录系统具有写头，其具有与第一和第二电线圈的轭连接的主垂直写极。 第一线圈缠绕在主极的一侧上的轭架上，并且第二线圈缠绕在主极的另一侧上的轭。 每个线圈的第一端连接到相应的端子。 两个线圈的第二端连接在一起并连接到公共端子。 在公共端子和一个线圈的第一端之间连接有引线时间电路。 在写入驱动器切换写入电流的方向之后，引线时间电路使一个线圈中的电流导致另一个线圈中的电流。 两个线圈之间的电流位移产生了磁通反转的进动，从而减小了写入头的切换时间。

公开(公告)号：US07593183B2

公开(公告)日：2009-09-22

申请号：US11411590

申请日：2006-04-25

申请人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Katalin Pentek

发明人： Wen-Chien David Hsiao ,  Yimin Hsu ,  Edward Hin Pong Lee ,  Vladimir Nikitin ,  Katalin Pentek

IPC分类号： G11B5/17 ,  G11B5/147

CPC分类号： G11B5/1278 ,  G11B5/3133 ,  G11B5/3136

摘要： A magnetic write pole having a structure that prevents thermally induced pole tip protrusion. The write head has a return pole with a magnetic pedestal formed at the air bearing surface (ABS) and a back gap at an end opposite the ABS. An electrically conductive write coil having a plurality of turns passes over the return pole. A fill layer of a material having a low coefficient of thermal expansion, such as alumina is disposed between the coil and the pedestal, and may extend over the top of the coil to the back gap. A photoresist coil insulation layer may be provided between the turns of the coil to insulate the turns of the coil from one another. The photoresist coil insulation layer can also extend to the back gap. A write pole, formed above the return pole and coil is magnetically connected with the back gap layer and return pole by a magnetic shaping layer.

摘要翻译： 具有防止热感应极尖突出的结构的磁性写入极。 写头具有在空气轴承表面（ABS）形成的磁性基座的返回极和与ABS相对的一端的后部间隙。 具有多个匝的导电写入线圈通过返回极。 具有低热膨胀系数的材料的填充层（例如氧化铝）设置在线圈和基座之间，并且可以在线圈的顶部延伸到后部间隙。 可以在线圈的匝之间设置光致抗蚀剂线圈绝缘层，以将线圈的匝彼此绝缘。 光致抗蚀剂线圈绝缘层也可以延伸到后隙。 在返回极和线圈之上形成的写极通过磁性成形层与后间隙层和返回极磁连接。

公开(公告)号：US20080313885A1

公开(公告)日：2008-12-25

申请号：US11767330

申请日：2007-06-22

申请人： Wen-Chien Hsiao ,  Yimin Hsu ,  Vladimir Nikitin

发明人： Wen-Chien Hsiao ,  Yimin Hsu ,  Vladimir Nikitin

IPC分类号： G11B5/10 ,  G11B5/33

CPC分类号： G11B5/11 ,  G11B33/1493 ,  Y10T29/49021 ,  Y10T29/49028 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49155 ,  Y10T29/49165

摘要： Methods are provided for fabricating a write head with a self aligned wrap around shield and a self aligned flared region of a write pole. A flare point and a track width of a write pole may be fabricated using multiple processes. The multiple processes utilize several masking structures to define the track width and the flare point of the write pole. A mask structure is formed to cover a first portion of the write pole. An edge of the mask structure adjacent to an exposed second portion of the write pole defines a flare point of the write pole. Various structures of the write head, including shield gap layers, a wrap around shield and a flared region (e.g., the yoke) of the write pole may be fabricated from the flare point defined by the mask structure.

摘要翻译： 提供了用于制造具有围绕屏蔽件的自对准包裹和写入极的自对准扩口区域的写入头的方法。 可以使用多个工艺来制造写极点的闪点和轨道宽度。 多个过程利用几个掩模结构来定义磁道宽度和写入磁极的扩展点。 形成掩模结构以覆盖写入极的第一部分。 掩模结构的与写入极的暴露的第二部分相邻的边缘限定了写入极的扩张点。 写磁头的各种结构，包括屏蔽间隙层，环绕屏蔽层和写磁极的扩口区域（例如磁轭）可以由掩模结构限定的扩口来制造。

公开(公告)号：US20080113514A1

公开(公告)日：2008-05-15

申请号：US11595654

申请日：2006-11-10

申请人： Amanda Baer ,  Hung-chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Aron Pentek

发明人： Amanda Baer ,  Hung-chin Guthrie ,  Yimin Hsu ,  Ming Jiang ,  Aron Pentek

IPC分类号： H01L21/311

CPC分类号： G11B5/1278 ,  G11B5/112 ,  G11B5/3163 ,  Y10T29/49032 ,  Y10T29/49043 ,  Y10T29/49046 ,  Y10T29/49048 ,  Y10T29/49052

摘要： Methods for improving within wafer and wafer to wafer yields during fabrication of notched trailing shield structures are disclosed. Ta/Rh CMP stop layers are deposited prior to planarization and notch formation to ensure a planar surface for trailing shield structures. These stop layers may be blanket deposited or patterened prior to CMP. Patterned stop layers produce the highest yields.

摘要翻译： 公开了在制造缺口尾部屏蔽结构期间在晶片和晶片之间改善晶片产量的方法。 在平坦化和切口形成之前沉积Ta / Rh CMP停止层以确保用于尾部屏蔽结构的平坦表面。 这些停止层可以在CMP之前被铺平或沉积。 图案化的停止层产生最高的产量。

公开(公告)号：US20070258167A1

公开(公告)日：2007-11-08

申请号：US11411556

申请日：2006-04-25

申请人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

发明人： Donald Allen ,  Amanda Baer ,  Michael Feldbaum ,  Hung-Chin Guthrie ,  Wen-Chien Hsiao ,  Yimin Hsu ,  Ming Jiang ,  Yinshi Liu ,  Aron Neuhaus ,  Vladimir Nikitin ,  Aron Pentek ,  Katalin Pentek ,  Yi Zheng

IPC分类号： G11B5/147

CPC分类号： G11B5/3116 ,  G11B5/11 ,  G11B5/1278 ,  G11B5/1871 ,  G11B5/3146 ,  G11B5/315 ,  G11B5/3163

摘要： A magnetic write head for perpendicular magnetic recording having a write pole with a concave trailing edge. The magnetic write pole can have a trapezoidal shape with first and second laterally opposed sides that are further apart at the trailing edge than at the leading edge. The write head may or may not include a magnetic trailing shield, and if a trailing shield is included it is separated from the trailing edge by a non-magnetic write gap layer. The concave trailing edge improves magnetic performance such as by improving the transition curvature. A method for constructing the write head includes forming a magnetic write pole by forming a mask structure over a deposited write pole material, the mask structure having an alumina hard mask and an image transfer layer such as DURAMIDE®. An alumina fill layer is then deposited and a chemical mechanical polish is performed to open up the image transfer layer. A reactive on etch is performed to remove the image transfer layer and a reactive ion mill or reactive ion etch is performed to remove the alumina hard mask and form a concave surface on the write pole.

摘要翻译： 用于垂直磁记录的磁写头，具有带有凹后缘的写极。 磁性写入极可以具有梯形形状，其中第一和第二横向相对侧在后缘处比在前缘处更远地分开。 写头可以包括或可以不包括磁性后屏蔽，并且如果包括后屏蔽，则其通过非磁性写间隙层与后缘分离。 凹形后边缘提高磁性能，例如通过改善转变曲率。 构成写入头的方法包括通过在沉积的写入极材料上形成掩模结构来形成磁性写入极，掩模结构具有氧化铝硬掩模和诸如DURAMIDE的图像转移层。 然后沉积氧化铝填充层，并执行化学机械抛光以打开图像转印层。 执行反应性蚀刻以去除图像转印层，并且执行反应性离子磨或反应离子蚀刻以除去氧化铝硬掩模并在写入极上形成凹面。