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    Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film
    1.
    发明授权
    Fluorinated compound, fluoropolymer, resist composition, and composition for resist protective film 失效
    氟化合物，含氟聚合物，抗蚀剂组合物和抗蚀剂保护膜的组合物

    公开(公告)号：US07498393B2

    公开(公告)日：2009-03-03

    申请号：US11626913

    申请日：2007-01-25

    申请人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji ,  Takashi Sasaki

    发明人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji ,  Takashi Sasaki

    IPC分类号： C08F136/16

    CPC分类号： C07C43/30 ,  C07C33/423 ,  C07C43/17 ,  C08F36/20 ,  C08F214/18 ,  G03F7/0046 ,  G03F7/0392 ,  G03F7/0395 ,  G03F7/11 ,  Y10S430/115 ,  Y10S430/146

    摘要： A fluoropolymer having functional groups and having high transparency in a wide wavelength range is provided, and a resist composition and a composition for a resist protective film, comprising the fluoropolymer, wherein the fluoropolymer has monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (1): CF2═CFCF2C(CF3)(OR1)—(CH2)nCR2═CHR3  (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, or (CH2)aCOOR4 (wherein a is 0 or 1, and R4 is a hydrogen atom or an alkyl group having at most 20 carbon atoms), each of R2 and R3, which are independent of each other, is a hydrogen atom or an alkyl group having at most 12 carbon atoms, and n is 0 or 2, provided that when n is 0, at least one of R1, R2 and R3 is other than a hydrogen atom.

    摘要翻译： 提供具有官能团并且在宽波长范围内具有高透明度的含氟聚合物，以及抗蚀剂组合物和用于抗蚀剂保护膜的组合物，其包含含氟聚合物，其中所述含氟聚合物具有通过氟代二烯表示的氟化二烯的环化聚合形成的单体单元 CF2-CFCF2C（CF3）（OR1） - （CH2）nCR2-CHR3（1）<α-in-line-formula description =“In-line formula”end =“lead” line-formula description =“In-line Formulas”end =“tail”？>其中R1是氢原子，最多20个碳原子的烷基或（CH2）aCOOR4（其中a是0或1，R4 是氢原子或具有至多20个碳原子的烷基），R 2和R 3各自独立地为氢原子或至多12个碳原子的烷基，n为0或2 条件是当n为0时，R 1，R 2和R 3中的至少一个不是氢原子。

    Fluoropolymer and resist composition
    2.
    发明授权
    Fluoropolymer and resist composition 失效
    含氟聚合物和抗蚀剂组成

    公开(公告)号：US07091294B2

    公开(公告)日：2006-08-15

    申请号：US11100527

    申请日：2005-04-07

    申请人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji

    发明人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji

    IPC分类号： C08F18/20 ,  C08F118/00 ,  C08F220/22 ,  C08F12/20 ,  C08F214/18

    CPC分类号： C08F214/18 ,  C08F14/18 ,  C08F222/18 ,  C08F2/06

    摘要： A fluoropolymer (A) having units derived from monomer units formed by cyclopolymerization of at least one fluorinated diene selected from a fluorinated diene represented by the formula (1) and a fluorinated diene represented by the formula (2), and units derived from monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (3): CF2═CFCF2—C(CF3)(OR1)—CH2CH═CH2  (1) CF2═CFCH2—CH((CH2)nC(CF3)2(OR1))—CH2CH═CH2  (2) CF2═CFCH2—CH(COOR2)—CH2CH═CH2  (3) wherein R1 represents a hydrogen atom, a blocked group of a hydroxyl group capable of being converted into a hydrogen atom by an acid, or a blocked carboxyl group-containing organic group capable of being converted into a carboxyl group-containing organic group by an acid, R2 represents a hydrocarbon group having at most 20 carbon atoms, and n represents 0 or 1.

    摘要翻译： 具有衍生自由至少一种选自式（1）所示的氟化二烯和式（2）表示的氟化二烯的氟化二烯通过环化聚合形成的单体单元的单元的氟聚合物和由式（2）表示的单体单元 通过由式（3）表示的氟化二烯的环化聚合形成：<？in-line-formula description =“In-line Formulas”end =“lead”？> CF 2 -CFCF C 2 -C（CF 3）（OR 1）2 CH 2 CH-CH 2 2 / >（1）<？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> CF < C（CF 3）2 CH 2（CH 2）n（C 1 -C 3） ）2（OR 1）） - CH 2 CH-CH 2（2）＆lt;＆lt; 1＆gt; -formulae description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> CF -CH 2（CH 2 CH 2）-CH 2 CH-CH 其中R 1表示氢原子，被封闭的基团 的能够被酸转化为氢原子的羟基或被能够通过酸转化成含羧基的有机基团的被封端的含羧基的有机基团，R 2， 表示具有至多20个碳原子的烃基，n表示0或1。

    Fluorinated copolymer process for its production and resist composition containing it
    3.
    发明申请
    Fluorinated copolymer process for its production and resist composition containing it 审中-公开
    氟化共聚物工艺用于其生产和含有它的抗蚀剂组合物

    公开(公告)号：US20060135663A1

    公开(公告)日：2006-06-22

    申请号：US11353149

    申请日：2006-02-14

    申请人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji

    发明人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji

    IPC分类号： G03C1/76 ,  C08K5/42

    CPC分类号： C08F236/20 ,  G03F7/0046 ,  G03F7/0395 ,  G03F7/0397

    摘要： To provide a fluoropolymer having functional groups and having high transparency in a wide wavelength region, and a resist composition comprising the fluoropolymer. A fluorinated copolymer having units derived from a monomer unit formed by cyclopolymerization of a fluorinated diene represented by the following formula (1): CF2═CFCH2CH(CH2C(CF3)2(OR1))CH2CH═CH2   (1) wherein R1 is a hydrogen atom, an alkyl group having at most 20 carbon atoms, which may have an etheric oxygen atom, an alkoxycarbonyl group having at most 6 carbon atoms, or CH2R2 (wherein R2 is an alkoxycarbonyl group having at most 6 carbon atoms), and units derived from a monomer unit formed by cyclopolymerization of another monomer or units derived from a monomer unit formed by polymerization of an acrylic monomer, and a resist composition having such a fluorinated copolymer as a base polymer.

    摘要翻译： 提供具有官能团并且在宽波长区域具有高透明度的含氟聚合物，以及包含含氟聚合物的抗蚀剂组合物。 具有衍生自由下式（1）表示的氟化二烯的环化聚合形成的单体单元的单元的含氟共聚物：<？in-line-formula description =“In-line formula”end =“lead”？> CF < （CH 2 CH 2 CH 2 CH 2（OR 3）2（OR 2） （1）<2 in-line-formula description =“In-line Formulas”end = “尾”→其中R 1是氢原子，具有至多20个碳原子的烷基，其可以具有醚性氧原子，具有至多6个碳原子的烷氧基羰基或CH （其中R 2是具有至多6个碳原子的烷氧基羰基）和衍生自通过环化聚合形成的单体单元的单元 的衍生自通过丙烯酸类单体的聚合形成的单体单元的单体或者具有这样的含氟共聚物作为基础聚合物的抗蚀剂组合物。

    Fluorocopolymer, method for its production and resist composition containing it
    4.
    发明申请
    Fluorocopolymer, method for its production and resist composition containing it 审中-公开
    含氟共聚物，其生产方法和含有它的抗蚀剂组合物

    公开(公告)号：US20070083021A1

    公开(公告)日：2007-04-12

    申请号：US11593549

    申请日：2006-11-07

    申请人： Masataka Eda ,  Yoko Takebe ,  Osamu Yokokoji

    发明人： Masataka Eda ,  Yoko Takebe ,  Osamu Yokokoji

    IPC分类号： C08F236/16

    CPC分类号： G03F7/0397 ,  C08F214/18 ,  C08F236/20

    摘要： A fluorocopolymer having units derived from a monomer unit formed by cyclopolymerization of a fluorinated diene and units derived from a monomer unit formed by cyclopolymerization of a functional group-containing fluorinated diene having a specific structure or a monomer unit formed by polymerization of an acrylic monomer having a specific structure, a method for its production, and a resist composition.

    摘要翻译： 具有衍生自由氟化二烯的环化聚合形成的单体单元的单元和由具有特定结构的含官能团的含氟二烯或具有特定结构的官能团的氟化二烯的单体单元衍生的单元衍生的单元的含氟共聚物， 具体结构，其制造方法和抗蚀剂组合物。

    Fluoropolymer and resist composition
    5.
    发明申请
    Fluoropolymer and resist composition 失效
    含氟聚合物和抗蚀剂组成

    公开(公告)号：US20050234206A1

    公开(公告)日：2005-10-20

    申请号：US11100527

    申请日：2005-04-07

    申请人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji

    发明人： Yoko Takebe ,  Masataka Eda ,  Osamu Yokokoji

    IPC分类号： G03F7/033 ,  C08F14/18 ,  C08F18/20 ,  C08F214/18 ,  C08F222/18 ,  C08F236/20 ,  G03F7/039 ,  H01L21/027

    CPC分类号： C08F214/18 ,  C08F14/18 ,  C08F222/18 ,  C08F2/06

    摘要： A fluoropolymer (A) having units derived from monomer units formed by cyclopolymerization of at least one fluorinated diene selected from a fluorinated diene represented by the formula (1) and a fluorinated diene represented by the formula (2), and units derived from monomer units formed by cyclopolymerization of a fluorinated diene represented by the formula (3): CF2═CFCF2—C(CF3)(OR1)—CH2CH═CH2  (1) CF2═CFCH2—CH((CH2)nC(CF3)2(OR1))—CH2CH═CH2  (2) CF2═CFCH2—CH(COOR2)—CH2CH═CH2  (3) wherein R1 represents a hydrogen atom, a blocked group of a hydroxyl group capable of being converted into a hydrogen atom by an acid, or a blocked carboxyl group-containing organic group capable of being converted into a carboxyl group-containing organic group by an acid, R2 represents a hydrocarbon group having at most 20 carbon atoms, and n represents 0 or 1.

    摘要翻译： 具有衍生自由至少一种选自式（1）所示的氟化二烯和式（2）表示的氟化二烯的氟化二烯通过环化聚合形成的单体单元的单元的氟聚合物和由式（2）表示的单体单元 通过由式（3）表示的氟化二烯的环化聚合形成：<？in-line-formula description =“In-line Formulas”end =“lead”？> CF 2 -CFCF C 2 -C（CF 3）（OR 1）2 CH 2 CH-CH 2 2 / >（1）<？in-line-formula description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> CF < C（CF 3）2 CH 2（CH 2）n（C 1 -C 3） ）2（OR 1）） - CH 2 CH-CH 2（2）＆lt;＆lt; 1＆gt; -formulae description =“In-line Formulas”end =“tail”？> <？in-line-formula description =“In-line Formulas”end =“lead”？> CF -CH 2（CH 2）2 CH 2 CH- （3）<？in-line-formula description =“In-line Formulas”end =“tail”？>其中R 1表示氢原子，封闭基团 的能够被酸转化为氢原子的羟基或被能够通过酸转化成含羧基的有机基团的被封端的含羧基的有机基团，R 2， 表示具有至多20个碳原子的烃基，n表示0或1。

    Fluorinated compound, fluoropolymer and process for its production
    7.
    发明授权
    Fluorinated compound, fluoropolymer and process for its production 失效
    氟化合物，含氟聚合物及其生产工艺

    公开(公告)号：US07015366B2

    公开(公告)日：2006-03-21

    申请号：US11218472

    申请日：2005-09-06

    申请人： Shun-ichi Kodama ,  Isamu Kaneko ,  Osamu Yokokoji ,  Shinji Okada ,  Yoko Takebe ,  Yasuhide Kawaguchi

    发明人： Shun-ichi Kodama ,  Isamu Kaneko ,  Osamu Yokokoji ,  Shinji Okada ,  Yoko Takebe ,  Yasuhide Kawaguchi

    IPC分类号： C07C41/00 ,  C07C43/00 ,  C07C407/00 ,  C07C409/00 ,  C08F136/16

    CPC分类号： C08F36/20 ,  C08F36/16 ,  C08F214/18 ,  C08F2/60

    摘要： To provide a fluoropolymer which has a high concentration of functional groups to provide adequate characteristics of the functional groups and which brings about no decrease of Tg.A fluoropolymer having monomer units formed by cyclopolymerization of a functional group-containing fluorinated diene represented by the formula (1): CFR1═CR2—Q—CR3═CHR4   (1) wherein each of R1 to R4 which are independent of one another, represents a hydrogen atom, a fluorine atom, an alkyl group having at most 8 carbon atoms, or an alicyclic hydrocarbon group, and at least one of them is an alicyclic hydrocarbon group, provided that hydrogen atoms in the alkyl group or the alicyclic hydrocarbon group may be substituted by a fluorine atom, an alkyl group or a fluoroalkyl group; and Q represents a bivalent organic group having a blocked acidic group capable of developing an acidic group by an acid or a group capable of being converted into such a blocked acidic group.

    摘要翻译： 提供具有高浓度官能团的含氟聚合物以提供官能团的足够特性，并且不会降低Tg。 具有由式（1）表示的含官能团的氟化二烯的环化聚合形成的单体单元的含氟聚合物：<？in-line-formula description =“In-line formula”end =“lead”→CFR < 1 -CR 2 -Q-CR 3 -RR 4（1）<？在线公式描述=“ 其中独立的R 1〜R 4中的每一个表示氢原子，氟原子， 具有至多8个碳原子的烷基或脂环族烃基，并且其中至少一个是脂环族烃基，条件是烷基或脂环族烃基中的氢原子可以被氟原子取代， 烷基或氟代烷基; Q表示可以通过酸或能够转化为这种封端的酸性基团的基团而能够形成酸性基团的封端酸性基团的二价有机基团。

    Fluorinated compound, fluoropolymer and process for its production
    10.
    发明授权
    Fluorinated compound, fluoropolymer and process for its production 失效
    氟化合物，含氟聚合物及其生产工艺

    公开(公告)号：US07244545B2

    公开(公告)日：2007-07-17

    申请号：US11412191

    申请日：2006-04-27

    申请人： Yoko Takebe ,  Osamu Yokokoji

    发明人： Yoko Takebe ,  Osamu Yokokoji

    IPC分类号： G03C1/73 ,  C08F14/18 ,  C07C33/42 ,  C07C21/19

    CPC分类号： G03F7/0046 ,  C07C33/423 ,  C08F14/18 ,  C08F36/20 ,  G03F7/11 ,  Y10S430/108 ,  Y10S430/115 ,  C08F2/02

    摘要： The present invention provides a fluorinated compound having functional groups in a high concentration so that adequate characteristics of the functional groups can be obtained and having high transparency in a wide wavelength region, a fluoropolymer, and a process for its production.The present invention provides a fluorinated diene represented by the following formula (1): CF2═CFCH2CH(C(R1)(R2)(OH))CH2CH═CH2  (1) wherein each of R1 and R2 which are independent of each other, is a fluorine atom or a fluoroalkyl group having at most 5 carbon atoms.

    摘要翻译： 本发明提供了具有高浓度官能团的含氟化合物，从而可以获得足够的官能团特性，并且在宽波长范围内具有高透明度，含氟聚合物及其生产方法。 本发明提供由下式（1）表示的氟化二烯：<？in-line-formula description =“In-line formula”end =“lead”？> CF 2 -CFCH （C（R 1）2（CH 2）（OH））CH 2 CH-CH 1 （1）<？in-line-formula description =“In-line formula”end =“tail”？>其中R 1和R 2中的每一个， 彼此独立的是氟原子或具有至多5个碳原子的氟代烷基。