公开(公告)号：US08558299B2

公开(公告)日：2013-10-15

申请号：US13157164

申请日：2011-06-09

申请人： Yong Cao ,  Xianmin Tang ,  Srinivas Gandikota ,  Wei D. Wang ,  Zhendong Liu ,  Kevin Moraes ,  Muhammad M. Rasheed ,  Thanh X. Nguyen ,  Ananthkrishna Jupudi

发明人： Yong Cao ,  Xianmin Tang ,  Srinivas Gandikota ,  Wei D. Wang ,  Zhendong Liu ,  Kevin Moraes ,  Muhammad M. Rasheed ,  Thanh X. Nguyen ,  Ananthkrishna Jupudi

IPC分类号： H01L29/788

CPC分类号： H01L21/28079 ,  C23C14/165 ,  C23C14/345 ,  C23C14/35 ,  H01L21/28088 ,  H01L21/2855 ,  H01L29/4966 ,  H01L29/517 ,  H01L29/78

摘要： Embodiments described herein provide a semiconductor device and methods and apparatuses of forming the same. The semiconductor device includes a substrate having a source and drain region and a gate electrode stack on the substrate between the source and drain regions. The gate electrode stack includes a conductive film layer on a gate dielectric layer, a refractory metal nitride film layer on the conductive film layer, a silicon-containing film layer on the refractory metal nitride film layer, and a tungsten film layer on the silicon-containing film layer. In one embodiment, the method includes positioning a substrate within a processing chamber, wherein the substrate includes a source and drain region, a gate dielectric layer between the source and drain regions, and a conductive film layer on the gate dielectric layer. The method also includes depositing a refractory metal nitride film layer on the conductive film layer, depositing a silicon-containing film layer on the refractory metal nitride film layer, and depositing a tungsten film layer on the silicon-containing film layer.

摘要翻译： 本文所述的实施例提供了一种半导体器件及其形成方法和装置。 半导体器件包括在源极和漏极区域之间的衬底上具有源极和漏极区域以及栅电极堆叠的衬底。 栅极电极堆叠包括在栅极介电层上的导电膜层，导电膜层上的难熔金属氮化物膜层，难熔金属氮化物膜层上的含硅膜层，以及硅 - 含有膜层。 在一个实施例中，该方法包括将衬底定位在处理室内，其中衬底包括源极和漏极区域，源极和漏极区域之间的栅极介电层以及栅极电介质层上的导电膜层。 该方法还包括在导电膜层上沉积难熔金属氮化物膜层，在难熔金属氮化物膜层上沉积含硅膜层，并在含硅膜层上沉积钨膜层。

公开(公告)号：US20080190760A1

公开(公告)日：2008-08-14

申请号：US11838796

申请日：2007-08-14

申请人： XIANMIN TANG ,  Arvind Sundarrajan ,  Daniel Lubben ,  Qian Luo ,  Tza-Jing Gung ,  Anantha Subramani ,  Hua Chung ,  Xinyu Fu ,  Rongjun Wang ,  Yong Cao ,  Jick Yu ,  John Forster ,  Praburam Gopalraja

发明人： XIANMIN TANG ,  Arvind Sundarrajan ,  Daniel Lubben ,  Qian Luo ,  Tza-Jing Gung ,  Anantha Subramani ,  Hua Chung ,  Xinyu Fu ,  Rongjun Wang ,  Yong Cao ,  Jick Yu ,  John Forster ,  Praburam Gopalraja

IPC分类号： C23C14/32

CPC分类号： C23C14/165 ,  C23C14/046 ,  C23C14/358 ,  C23C14/5826 ,  C23C14/584 ,  H01J37/3408 ,  H01J37/3455 ,  H01L21/2855 ,  H01L21/76865 ,  H01L21/76873 ,  H01L21/76877

摘要： An integrated copper deposition process, particularly useful for forming a copper seed layer in a narrow via prior to electrochemical plating of copper, including at least one cycle of sputter deposition of copper followed by sputter etching of the deposited copper, preferably performed in a same sputter chamber. The deposition is performed under conditions promoting high copper ionization fractions and strong wafer biasing to draw the copper ions into the via. The etching may be done with argon ions, preferably inductively excited by an RF coil around the chamber, or by copper ions, which may be formed with high target power and intense magnetron or by use of the RF coil. Two or more cycles of deposition/etch may be performed. A final flash deposition may be performed with high copper ionization and low wafer biasing.

摘要翻译： 一种集成的铜沉积工艺，特别适用于在铜的电化学电镀之前在窄通孔中形成铜籽晶层，包括至少一个铜的溅射沉积循环，然后溅射蚀刻沉积的铜，优选在相同的溅射 房间。 沉积在促进高铜离子化分数和强晶片偏置的条件下进行以将铜离子吸入通孔。 蚀刻可以用氩离子进行，优选地通过围绕室的RF线圈进行感应激励，或者通过可以用高目标功率和强磁控管形成的铜离子或通过使用RF线圈进行。 可以执行两个或更多个沉积/蚀刻循环。 最终的闪蒸沉积可以用高铜离子化和低晶片偏压进行。

公开(公告)号：US20100096253A1

公开(公告)日：2010-04-22

申请号：US12256428

申请日：2008-10-22

申请人： Yong Cao ,  Xianmin Tang ,  Tza-Jing Gung ,  Praburam Gopalraja

发明人： Yong Cao ,  Xianmin Tang ,  Tza-Jing Gung ,  Praburam Gopalraja

IPC分类号： C23C14/34

CPC分类号： C23C14/185 ,  C23C14/046 ,  C23C14/5833 ,  H01L21/2855 ,  H01L21/76843 ,  H01L21/76865 ,  H01L21/76871 ,  H01L21/76883

摘要： A method and apparatus for depositing metal on a patterned substrate are provided. A metal layer is formed in a physical vapor deposition process having a first energy. A second physical vapor deposition process is performed on the metal layer, using a second energy, wherein deposition interacts with brittle and plastic surface modification processes to form a substantially conformal metal layer on the substrate.

摘要翻译： 提供了一种用于在图案化衬底上沉积金属的方法和设备。 在具有第一能量的物理气相沉积工艺中形成金属层。 使用第二能量在金属层上进行第二物理气相沉积工艺，其中沉积与脆性和塑性表面改性方法相互作用以在基底上形成基本上保形的金属层。

公开(公告)号：US20090308732A1

公开(公告)日：2009-12-17

申请号：US12482713

申请日：2009-06-11

申请人： Yong Cao ,  Maurice E. Ewert ,  Xianmin Tang ,  Keith A. Miller ,  Daniel C. Lubben ,  Umesh M. Kelkar ,  Tza-Jing Gung ,  Anantha K. Subramani

发明人： Yong Cao ,  Maurice E. Ewert ,  Xianmin Tang ,  Keith A. Miller ,  Daniel C. Lubben ,  Umesh M. Kelkar ,  Tza-Jing Gung ,  Anantha K. Subramani

IPC分类号： C23C14/34

CPC分类号： C23C14/35 ,  C23C14/046 ,  H01J37/34 ,  H01J37/3447

摘要： Embodiments of the present invention generally relate to an apparatus and method for uniform sputter depositing of materials into the bottom and sidewalls of high aspect ratio features on a substrate. In one embodiment, a sputter deposition system includes a collimator that has apertures having aspect ratios that decrease from a central region of the collimator to a peripheral region of the collimator. In one embodiment, the collimator is coupled to a grounded shield via a bracket member that includes a combination of internally and externally threaded fasteners. In another embodiment, the collimator is integrally attached to a grounded shield. In one embodiment, a method of sputter depositing material includes pulsing the bias on the substrate support between high and low values.

摘要翻译： 本发明的实施例一般涉及用于均匀溅射沉积到衬底上的高纵横比特征的底部和侧壁中的装置和方法。 在一个实施例中，溅射沉积系统包括准直器，其具有从准直器的中心区域到准直器的外围区域的纵横比减小的孔。 在一个实施例中，准直器经由包括内螺纹紧固件和外螺纹紧固件的组合的支架构件联接到接地屏蔽件。 在另一个实施例中，准直器一体地附接到接地屏蔽。 在一个实施例中，溅射沉积材料的方法包括在高和低值之间使衬底支撑上的偏压脉动。

公开(公告)号：US09092424B2

公开(公告)日：2015-07-28

申请号：US12569912

申请日：2009-09-30

申请人： Zaiqing Nie ,  Yong Cao ,  Ji-Rong Wen ,  Chunyu Yang

发明人： Zaiqing Nie ,  Yong Cao ,  Ji-Rong Wen ,  Chunyu Yang

IPC分类号： G06F17/00 ,  G06F17/27

CPC分类号： G06F17/278

摘要： Described is a technology for understanding entities of a webpage, e.g., to label the entities on the webpage. An iterative and bidirectional framework processes a webpage, including a text understanding component (e.g., extended Semi-CRF model) that provides text segmentation features to a structure understanding component (e.g., extended HCRF model). The structure understanding component uses the text segmentation features and visual layout features of the webpage to identify a structure (e.g., labeled block). The text understanding component in turn uses the labeled block to further understand the text. The process continues iteratively until a similarity criterion is met, at which time the entities may be labeled. Also described is the use of multiple mentions of a set of text in the webpage to help in labeling an entity.

摘要翻译： 描述了一种用于理解网页的实体的技术，例如标记网页上的实体。 迭代和双向框架处理网页，包括向结构理解组件（例如，扩展HCRF模型）提供文本分段特征的文本理解组件（例如，扩展Semi-CRF模型）。 结构理解组件使用网页的文本分割特征和视觉布局特征来识别结构（例如，标记块）。 文本理解组件依次使用标记块来进一步理解文本。 该过程继续迭代直到满足相似性标准，此时实体可以被标记。 还描述了使用多个提及网页中的一组文本来帮助标注一个实体。

公开(公告)号：US08356987B2

公开(公告)日：2013-01-22

申请号：US12207072

申请日：2008-09-09

申请人： Huaming Guo ,  Jun You ,  Yong Cao

发明人： Huaming Guo ,  Jun You ,  Yong Cao

IPC分类号： F04C18/00 ,  F04C2/00

CPC分类号： F04C23/008 ,  F01C21/10 ,  F04C18/0215 ,  F04C2230/603 ,  F04C2240/30 ,  F16C2360/42 ,  Y10T29/49229 ,  Y10T29/49236 ,  Y10T29/4924 ,  Y10T137/7857 ,  Y10T137/7891 ,  Y10T137/7892 ,  Y10T137/85978

摘要： A compressor may include a shell and a housing fixed within the shell. A compression mechanism may be supported by the housing and may include an orbiting scroll member and a non-orbiting scroll member that are meshingly engaged to form a series of compression pockets. A retaining assembly may include an axial retention member and a rotational retention member, each of which is engaged with the non-orbiting scroll member to limit axial translation and rotation of the non-orbiting scroll member relative to the housing.

摘要翻译： 压缩机可以包括壳体和固定在壳体内的壳体。 压缩机构可以由壳体支撑，并且可以包括绕动涡旋构件和非绕动涡旋构件，其啮合地接合以形成一系列压缩腔。 保持组件可以包括轴向保持构件和旋转保持构件，每个构件与非绕动涡旋构件接合以限制非绕动涡旋构件相对于壳体的轴向平移和旋转。

公开(公告)号：US20110283205A1

公开(公告)日：2011-11-17

申请号：US12780522

申请日：2010-05-14

申请人： Zaiqing Nie ,  Yong Cao ,  Gang Luo ,  Ruochi Zhang ,  Xiaojiang Liu ,  Yunxiao Ma ,  Bo Zhang ,  Ying-Qing Xu ,  Ji-Rong Wen

发明人： Zaiqing Nie ,  Yong Cao ,  Gang Luo ,  Ruochi Zhang ,  Xiaojiang Liu ,  Yunxiao Ma ,  Bo Zhang ,  Ying-Qing Xu ,  Ji-Rong Wen

IPC分类号： G06F3/048 ,  G06F17/30 ,  G06F15/16

CPC分类号： G06F17/30867

摘要： The automated social networking graph mining and visualization technique described herein mines social connections and allows creation of a social networking graph from general (not necessarily social-application specific) Web pages. The technique uses the distances between a person's/entity's name and related people's/entities names on one or more Web pages to determine connections between people/entities and the strengths of the connections. In one embodiment, the technique lays out these connections, and then clusters them, in a 2-D layout of a social networking graph that represents the Web connection strengths among the related people's or entities' names, by using a force-directed model.

摘要翻译： 本文描述的自动化社交网络图挖掘和可视化技术挖掘社会关系，并允许从通用（不一定是社交应用专用）网页创建社交网络图。 该技术使用个人/实体的名称与一个或多个网页上的相关人员/实体名称之间的距离来确定人员/实体之间的连接以及连接的优势。 在一个实施例中，该技术设置了这些连接，然后通过使用力导向模型将它们聚类在代表相关人或实体名称中的Web连接强度的社交网络图的二维布局中。

公开(公告)号：US20090068044A1

公开(公告)日：2009-03-12

申请号：US12207072

申请日：2008-09-09

申请人： Huaming Guo ,  Jun You ,  Yong Cao

发明人： Huaming Guo ,  Jun You ,  Yong Cao

IPC分类号： F01C1/02

CPC分类号： F04C23/008 ,  F01C21/10 ,  F04C18/0215 ,  F04C2230/603 ,  F04C2240/30 ,  F16C2360/42 ,  Y10T29/49229 ,  Y10T29/49236 ,  Y10T29/4924 ,  Y10T137/7857 ,  Y10T137/7891 ,  Y10T137/7892 ,  Y10T137/85978

摘要： A compressor may include a shell and a housing fixed within the shell. A compression mechanism may be supported by the housing and may include an orbiting scroll member and a non-orbiting scroll member that are meshingly engaged to form a series of compression pockets. A retaining assembly may include an axial retention member and a rotational retention member, each of which is engaged with the non-orbiting scroll member to limit axial translation and rotation of the non-orbiting scroll member relative to the housing.

摘要翻译： 压缩机可以包括壳体和固定在壳体内的壳体。 压缩机构可以由壳体支撑，并且可以包括绕动涡旋构件和非绕动涡旋构件，其啮合地接合以形成一系列压缩腔。 保持组件可以包括轴向保持构件和旋转保持构件，每个构件与非绕动涡旋构件接合以限制非绕动涡旋构件相对于壳体的轴向平移和旋转。

公开(公告)号：US5798170A

公开(公告)日：1998-08-25

申请号：US609113

申请日：1996-02-29

申请人： Chi Zhang ,  Gang Yu ,  Yong Cao

发明人： Chi Zhang ,  Gang Yu ,  Yong Cao

IPC分类号： H01L27/32 ,  H01L51/30 ,  H01L51/50 ,  H01L51/52 ,  H05B33/00

CPC分类号： H01L51/5088 ,  H01L51/0035 ,  H01L27/3281 ,  Y10S428/917 ,  Y10T428/24917 ,  Y10T428/24942 ,  Y10T428/31678

摘要： Long-lived organic light-emitting diodes are achieved by positioning a layer comprising polyaniline in the emeraldine salt form directly contiguous with the anode side of the active light-emitting layer. Particular advantages are achieved if the emeraldine salt-containing layer has a sheet resistance of at least about 10.sup.3 ohms per square which can be achieved by casting the layer from solution in a polar solvent, most particularly, DMSO. The LED's can find advantageous application in displays where they exhibit long life and marked resistance to blurring, spreading or other degradations over time.

摘要翻译： 长寿命的有机发光二极管通过将包含聚苯胺的层定位成与活性发光层的阳极侧直接邻接的翠绿亚胺盐形式来实现。 如果含有翠绿亚胺盐的层具有至少约103欧姆/平方的薄层电阻，则可以实现特别的优点，这可以通过在极性溶剂（最特别是DMSO）中从溶液中浇铸该层而实现。 LED可以在显示器中发现有益的应用，它们具有长寿命，并且具有显着的抵抗模糊，扩散或随时间的其他劣化的阻力。

公开(公告)号：US08538898B2

公开(公告)日：2013-09-17

申请号：US13118404

申请日：2011-05-28

申请人： Zhengdong Lu ,  Zaiqing Nie ,  Gang Luo ,  Yong Cao ,  Ji-Rong Wen ,  Wei-Ying Ma

发明人： Zhengdong Lu ,  Zaiqing Nie ,  Gang Luo ,  Yong Cao ,  Ji-Rong Wen ,  Wei-Ying Ma

IPC分类号： G06N5/00

CPC分类号： G06N99/005 ,  G06F17/30616

摘要： A “Name Disambiguator” provides various techniques for implementing an interactive framework for resolving or disambiguating entity names (associated with objects such as publications) for entity searches where two or more same or similar names may refer to different entities. More specifically, the Name Disambiguator uses a combination of user input and automatic models to address the disambiguation problem. In various embodiments, the Name Disambiguator uses a two part process, including: 1) a global SVM trained from large sets of documents or objects in a simulated interactive mode, and 2) further personalization of local SVM models (associated with individual names or groups of names such as, for example, a group of coauthors) derived from the global SVM model. The result of this process is that large sets of documents or objects are rapidly and accurately condensed or clustered into ordered sets by that are organized by entity names.

摘要翻译： “名称歧义者”提供了各种技术，用于实现用于解析或消除实体名称（与诸如出版物的对象相关联）的交互式框架，用于实体搜索，其中两个或多个相同或相似的名称可以指代不同的实体。 更具体地说，名称消歧器使用用户输入和自动模型的组合来解决消歧问题。 在各种实施例中，名称消歧器使用两部分过程，包括：1）以模拟交互模式从大量文档或对象训练的全局SVM，以及2）本地SVM模型的进一步个性化（与个体名称或组相关联 来自全球SVM模型的名称，例如一组合作者。 这个过程的结果是，大量的文档或对象可以通过按实体名称组织的快速，准确的浓缩或聚类成有序集。