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16 条记录 (耗时 0.019 秒)

    Vacuum pump rotor and method of manufacturing the same
    1.
    发明授权
    Vacuum pump rotor and method of manufacturing the same 失效
    真空泵转子及其制造方法

    公开(公告)号：US6164945A

    公开(公告)日：2000-12-26

    申请号：US402805

    申请日：2000-01-03

    申请人： Yoshimitsu Ishibashi ,  Katsuaki Usui ,  Satoshi Arai

    发明人： Yoshimitsu Ishibashi ,  Katsuaki Usui ,  Satoshi Arai

    IPC分类号： F04C18/18 ,  F01C21/08 ,  F04C18/08 ,  F04C18/12 ,  F10C1/18

    CPC分类号： F04C18/126 ,  F04C18/084 ,  Y10T29/49242

    摘要： A rotor has an interior free from invasion of water and is resistant to deformation from applied stresses normally encountered during the operation of a vacuum pump. The rotor comprises a rotor shell formed to conform to an outline of lobes and side-plates for covering transverse ends of the rotor shell. A rotation shaft is secured to the side-plates. A hollow section is formed by the rotor shell and the side-plates which is under a vacuum environment.

    摘要翻译： PCT No.PCT / JP99 / 00637 Sec。 371日期2000年1月3日 102（e）日期2000年1月3日PCT提交1999年2月15日PCT公布。 WO99 /​​ 41503 PCT出版物 日期1999年8月19日转子具有不受水侵蚀的内部，并且耐真空泵操作期间通常遇到的施加应力的变形。 转子包括形成为符合用于覆盖转子壳体的横向端部的凸角和侧板的轮廓的转子壳体。 旋转轴固定在侧板上。 中空部分由转子壳体和真空环境下的侧板形成。

    Method of operating vacuum pump
    2.
    发明授权
    Method of operating vacuum pump 失效
    操作真空泵的方法

    公开(公告)号：US6088508A

    公开(公告)日：2000-07-11

    申请号：US143102

    申请日：1998-08-28

    申请人： Yoshimitsu Ishibashi ,  Katsuaki Usui

    发明人： Yoshimitsu Ishibashi ,  Katsuaki Usui

    IPC分类号： F04C25/02 ,  F04B37/16 ,  F04D19/04 ,  F04D27/02 ,  H02P5/00

    CPC分类号： F04D27/0261 ,  F04D19/04

    摘要： A vacuum pump for use in an evacuating system for a semiconductor fabrication apparatus is operated at a steady rotational speed to evacuate the semiconductor fabrication apparatus. Then, in response to a signal indicative of an operating state of the semiconductor fabrication apparatus which does not need to be evacuated, the rotational speed of the vacuum pump is reduced to an idling rotational speed, thereby to lower electric energy consumption by the vacuum pump.

    摘要翻译： 在半导体制造装置的排气系统中使用的真空泵以稳定的转速进行运转，以对半导体制造装置进行抽真空。 然后，响应于表示不需要抽真空的半导体制造装置的运行状态的信号，真空泵的旋转速度降低到空转速度，从而降低真空泵的电能消耗 。

    Evacuating unit with reduced diameter exhaust duct
    3.
    发明授权
    Evacuating unit with reduced diameter exhaust duct 失效
    疏散单元，直径减小的排气管

    公开(公告)号：US06474949B1

    公开(公告)日：2002-11-05

    申请号：US09700748

    申请日：2000-11-20

    申请人： Satoshi Arai ,  Katsuaki Usui ,  Takahiro Isozaki

    发明人： Satoshi Arai ,  Katsuaki Usui ,  Takahiro Isozaki

    IPC分类号： F04B4106

    CPC分类号： F04D27/0261 ,  F04B37/08 ,  F04B49/06 ,  F04B2203/0209 ,  F04D19/04

    摘要： An apparatus for and a method of evacuating a vacuum chamber (process chamber) or the like of a semiconductor fabrication facility, for example. The evacuating apparatus has a vacuum chamber to be evacuated, a discharge pipe connecting the vacuum chamber to an atmospheric port, a vacuum pump connected to the discharge pipe and operable at a variable rotational speed, and a controller for controlling the rotational speed of the vacuum pump.

    摘要翻译： 例如，对半导体制造设备的真空室（处理室）等进行排空的装置和方法。 排气装置具有抽真空室，将真空室连接到大气口的排出管，与排出管连接并以可变转速运转的真空泵，以及用于控制真空转速的控制器 泵。

    Flowmeter having a float and a displacement sensor
    6.
    发明授权
    Flowmeter having a float and a displacement sensor 失效
    具有浮子和位移传感器的流量计

    公开(公告)号：US07360454B2

    公开(公告)日：2008-04-22

    申请号：US11418142

    申请日：2006-05-05

    申请人： Hiroyasu Kawashima ,  Hiroaki Ogamino ,  Katsuaki Usui ,  Toshiharu Nakazawa

    发明人： Hiroyasu Kawashima ,  Hiroaki Ogamino ,  Katsuaki Usui ,  Toshiharu Nakazawa

    IPC分类号： G01F1/22

    CPC分类号： G01F1/28 ,  G01F1/22

    摘要： A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

    摘要翻译： 流量计可以测量流量小的流量，测量精度高，可制成小型化，可以处理各种类型的化学药品，并能以低成本轻松生产。 该流量计包括：具有放大部分并垂直设置的壳体; 以及包围在壳体的扩大部分中并且至少部分地具有检测表面的浮子。 浮子被从下方流入壳体的液体向上推，并在壳体内向上流动。 流量计还包括设置在壳体的扩大部分外部的至少一个位移传感器，用于通过磁化浮子的检测表面来检测浮子的轴向位移。

    Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor
    7.
    发明授权
    Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor 失效
    多轴电动机和正排量泵结合这样的多电动机

    公开(公告)号：US06761542B2

    公开(公告)日：2004-07-13

    申请号：US10195454

    申请日：2002-07-16

    申请人： Yoshinori Ojima ,  Kozo Matake ,  Genichi Sato ,  Yasushi Hisabe ,  Masami Nagayama ,  Katsuaki Usui ,  Hiroaki Ogamino

    发明人： Yoshinori Ojima ,  Kozo Matake ,  Genichi Sato ,  Yasushi Hisabe ,  Masami Nagayama ,  Katsuaki Usui ,  Hiroaki Ogamino

    IPC分类号： F04B3504

    CPC分类号： F04C28/08 ,  F04C29/0085 ,  H02K16/02 ,  H02K21/16 ,  H02K29/03

    摘要： A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.

    摘要翻译： 多层电动机具有多个并置的转子，其具有设置在其周围的各自的永磁体，以及分别围绕转子完全周向设置的多组电枢元件，相邻两个转子的永磁体具有多对不同的 用于通过永磁体之间的电枢元件将转子磁耦合的磁极。 正排量真空泵包括壳体，一对可旋转地设置在壳体中的泵转子，彼此面对的关系;以及耦合到泵转子的用于沿相反方向旋转泵转子的双轴电动机。 双轴电动机可以包括一对并置的转子和分别围绕转子完全周向设置的一对电枢元件。

    VACUUM PUMP UNIT
    8.
    发明申请
    VACUUM PUMP UNIT 有权
    真空泵单元

    公开(公告)号：US20090047142A1

    公开(公告)日：2009-02-19

    申请号：US12158819

    申请日：2007-01-29

    申请人： Takashi Hozumi ,  Nobuhito Miyashita ,  Takanori Inada ,  Kozo Matake ,  Yoshinori Ojima ,  Susumu Miyake ,  Katsuaki Usui

    发明人： Takashi Hozumi ,  Nobuhito Miyashita ,  Takanori Inada ,  Kozo Matake ,  Yoshinori Ojima ,  Susumu Miyake ,  Katsuaki Usui

    IPC分类号： F04B25/00 ,  F16M5/00

    CPC分类号： F04C28/24 ,  F04C18/16 ,  F04C23/00 ,  F04C23/001 ,  F04C25/02 ,  F04C29/0085 ,  H02K7/11 ,  H02K16/00

    摘要： The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump (15) disposed at an outside-pressure side, and a booster pump (16) disposed at a vacuum side. The booster pump (16) and the main pump (15) are coupled in series. The booster pump (16) has a higher pumping speed than that of the main pump (15). Each of the main pump (15) and the booster pump (16) includes a pair of pump rotors (52a and 52b), a casing (50) having an inlet port and an outlet port, and a pair of magnet rotors (54 and 54) rotatable with the pair of pump rotors.

    摘要翻译： 本发明涉及能够实现约1Pa的极限压力的干式真空泵单元，真空泵单元包括设置在外压侧的主泵（15）和设置在真空下的增压泵（16） 侧。 增压泵（16）和主泵（15）串联联接。 增压泵（16）的泵送速度高于主泵（15）的泵送速度。 主泵（15）和增压泵（16）中的每一个包括一对泵转子（52a和52b），具有入口和出口的壳体（50）和一对磁体转子（54和 54）可与一对泵转子一起旋转。

    Vacuum evacuation device and method, and substrate processing apparatus and method
    9.
    发明申请
    Vacuum evacuation device and method, and substrate processing apparatus and method 审中-公开
    真空抽气装置及方法，以及基板处理装置及方法

    公开(公告)号：US20070048145A1

    公开(公告)日：2007-03-01

    申请号：US11501793

    申请日：2006-08-10

    申请人： Katsutoshi Ishii ,  Ken Nakao ,  Takanobu Asano ,  Kota Umezawa ,  Hiroaki Ogamino ,  Tadashi Urata ,  Katsuaki Usui ,  Masafumi Inoue ,  Shinichi Sekiguchi ,  Hironobu Yamasaki

    发明人： Katsutoshi Ishii ,  Ken Nakao ,  Takanobu Asano ,  Kota Umezawa ,  Hiroaki Ogamino ,  Tadashi Urata ,  Katsuaki Usui ,  Masafumi Inoue ,  Shinichi Sekiguchi ,  Hironobu Yamasaki

    IPC分类号： F04B49/06

    CPC分类号： F04D19/042 ,  F04D27/0261

    摘要： A vacuum evacuation device 2 of the invention comprises a vacuum pump 4,5 for exhausting a gas G2 in a process chamber 21 into which a process gas G1 is introduced and in which a process reaction is performed, to form a vacuum in said process chamber 21; and a control means 6 for performing a first control that regulates the rotational speed of said vacuum pump 4,5 such that a pressure condition in said process chamber 21 reaches a pressure condition suitable for said process reaction during said process reaction, wherein said control means 6 calculates a specified rotational speed for said vacuum pump 4,5 based on process information related to said process reaction, and performs a second control that brings said vacuum pump 4,5 to said specified rotational speed before said first control. The vacuum evacuation device 2 is capable of bringing the pressure in a process chamber 21 to the target pressure in a short period without a vacuum pump 4,5 being overloaded, regardless of the process reaction condition.

    摘要翻译： 本发明的真空排气装置2包括：真空泵4,5，用于在处理室21中排出气体G 2，工艺气体G 1引入到该气体G 2中并进行处理反应，以在所述 处理室21; 以及用于执行调节所述真空泵4,5的转速的第一控制的控制装置6，使得所述处理室21中的压力条件达到在所述处理反应期间适用于所述处理反应的压力条件，其中所述控制装置 图6基于与所述处理反应相关的处理信息计算出所述真空泵4,5的指定转速，并且执行使所述真空泵4,5在所述第一控制之前达到所述指定转速的第二控制。 真空排气装置2能够在不使真空泵4,5过载的情况下在短时间内将处理室21内的压力提高到目标压力，而与过程反应条件无关。