Normally closed in-channel micro check valve
    10.
    发明授权
    Normally closed in-channel micro check valve 有权
    常闭通道微型止回阀

    公开(公告)号:US06470904B1

    公开(公告)日:2002-10-29

    申请号:US09670010

    申请日:2000-09-25

    IPC分类号: F16K1514

    摘要: In an embodiment, a check valve assembly may include an in-channel check valve connected between the front and rear portions of a channel attached to a silicon substrate. The channel may have a width between about 10 &mgr;m and about 400 &mgr;m, and the check valve may have a width between about 50 &mgr;m and about 500 &mgr;m. The check valve may be generally circular in shape. The check valve may also be normally closed, that is, sealed in the absence of a pressure differential between the front and rear portions of the channel. The check valve may include a sealing cap that contacts a valve seat to seal the valve. The sealing cap and the valve seat may each be formed from Parylene C membranes that are about 1 &mgr;m to about 5 &mgr;m thick. The valve seat may include a metal layer to separate the contacting surfaces of the valve seat and the sealing cap in the closed position. The check valve may open for forward pressures that match or exceed a threshold pressure and remain closed for forward pressures below the threshold pressure and reverse pressures.

    摘要翻译: 在一个实施例中,止回阀组件可以包括连接在连接到硅衬底的通道的前部和后部之间的通道内止回阀。 通道的宽度可以在大约10um到大约400μm之间,并且止回阀的宽度可以在大约50μm到大约500μm之间。 止回阀的形状大致为圆形。 止回阀也可以是常闭的,即在通道的前部和后部之间没有压差的情况下被密封。 止回阀可以包括接触阀座以密封阀的密封盖。 密封帽和阀座可以由约1μm至约5μm厚的聚对二甲苯膜形成。 阀座可以包括金属层,以在闭合位置分离阀座和密封盖的接触表面。 止回阀可以打开,其正向压力匹配或超过阈值压力,并保持关闭,以使正压低于阈值压力和反向压力。