IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
    3.
    发明申请
    IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 审中-公开
    印刷装置和制品制造方法

    公开(公告)号:US20170028598A1

    公开(公告)日:2017-02-02

    申请号:US15302680

    申请日:2015-04-07

    IPC分类号: B29C43/58 G03F7/00

    摘要: Provided is an imprint apparatus for contacting a resin applied to a substrate with a mold to perform patterning on the substrate. The imprint apparatus includes a substrate holding unit for holding the substrate, wherein the substrate holding unit comprises a plurality of holding areas arranged in a predetermined direction, the plurality of holding areas has different width dimension in the direction respectively based on positions in the direction, a surface ratio between two holding areas of the plurality of holding areas with different width dimension respectively is within a range of 0.8 to 1.2.

    摘要翻译: 提供了一种用于使施加到基板上的树脂与模具接触以在基板上进行图案化的压印装置。 压印装置包括用于保持基板的基板保持单元,其中基板保持单元包括沿预定方向布置的多个保持区域,多个保持区域分别沿着方向上的位置在该方向上具有不同的宽度尺寸, 具有不同宽度尺寸的多个保持区域的两个保持区域之间的表面比分别在0.8至1.2的范围内。

    IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD
    4.
    发明申请
    IMPRINT APPARATUS AND ARTICLE MANUFACTURING METHOD 有权
    印刷装置和制品制造方法

    公开(公告)号:US20110169181A1

    公开(公告)日:2011-07-14

    申请号:US13004469

    申请日:2011-01-11

    申请人: Eigo KAWAKAMI

    发明人: Eigo KAWAKAMI

    IPC分类号: B29C43/58

    摘要: An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which forms a space for removing the mold supported by the support member, between the support member and the substrate stage, and a controller. The controller determines a release force required to detach the mold from the cured resin, based on a detection result from the detector, compares the determined release force with a first threshold value, and causes the mechanism to form the space if the determined release force is larger than the first threshold value.

    摘要翻译: 压印装置包括:支撑模具的支撑构件; 支撑基板的基板台; 检测器,其检测施加到模具的力; 形成用于移除由支撑构件支撑的模具,支撑构件和基板台之间的空间的机构以及控制器。 控制器基于检测器的检测结果确定从固化树脂分离模具所需的释放力,将确定的释放力与第一阈值进行比较,并且如果所确定的释放力是 大于第一阈值。

    SAFETY DEVICE FOR PUNCHES IN A COMPRESSION MOULDING APPARATUS
    6.
    发明申请
    SAFETY DEVICE FOR PUNCHES IN A COMPRESSION MOULDING APPARATUS 有权
    用于压缩成型设备中的打孔的安全装置

    公开(公告)号:US20120121747A1

    公开(公告)日:2012-05-17

    申请号:US13320051

    申请日:2010-05-11

    申请人: Gianluca Aldigeri

    发明人: Gianluca Aldigeri

    IPC分类号: B29C43/58

    摘要: A safety device for an apparatus for compression-moulding objects that includes a moulding carousel provided with a plurality of punches and with a plurality of corresponding moulding elements, each mould element being movable between a first position in which it does not interact with the respective punch and a second position in which it interacts with the respective punch to mould an object. Each punch is associated with an extracting device suitable for extracting from the respective punch a moulded object. The extracting device is driven by a cam track obtained in a fixed frame of the moulding carousel. The cam track includes a cam track portion that is movable between an operating position in which it interacts with the extracting device and a non-operating position in which it does not interact with the extracting device.

    摘要翻译: 一种用于压缩成型物体的装置的安全装置,其包括设置有多个冲头的成型转盘和多个相应的模制元件,每个模具元件可在第一位置和第二位置之间移动,在第一位置, 以及第二位置,其中它与相应的冲头相互作用以模制物体。 每个冲头与适于从相应冲头提取模制物体的提取装置相关联。 提取装置由在成型转盘的固定框架中获得的凸轮轨道驱动。 凸轮轨道包括可在其与提取装置相互作用的操作位置和不与提取装置相互作用的非操作位置之间移动的凸轮轨道部分。

    Imprint apparatus and article manufacturing method
    9.
    发明授权
    Imprint apparatus and article manufacturing method 有权
    印刷装置及制品制造方法

    公开(公告)号:US08770964B2

    公开(公告)日:2014-07-08

    申请号:US13004469

    申请日:2011-01-11

    申请人: Eigo Kawakami

    发明人: Eigo Kawakami

    IPC分类号: B29C59/00

    摘要: An imprint apparatus includes: a support member which supports the mold; a substrate stage which supports the substrate; a detector which detects a force applied to the mold; a mechanism which forms a space for removing the mold supported by the support member, between the support member and the substrate stage, and a controller. The controller determines a release force required to detach the mold from the cured resin, based on a detection result from the detector, compares the determined release force with a first threshold value, and causes the mechanism to form the space if the determined release force is larger than the first threshold value.

    摘要翻译: 压印装置包括:支撑模具的支撑构件; 支撑基板的基板台; 检测器,其检测施加到模具的力; 形成用于移除由支撑构件支撑的模具,支撑构件和基板台之间的空间的机构以及控制器。 控制器基于检测器的检测结果确定从固化树脂分离模具所需的释放力,将确定的释放力与第一阈值进行比较,并且如果所确定的释放力是 大于第一阈值。

    Safety device for punches in a compression moulding apparatus
    10.
    发明授权
    Safety device for punches in a compression moulding apparatus 有权
    压缩成型设备中的冲头用安全装置

    公开(公告)号:US08506279B2

    公开(公告)日:2013-08-13

    申请号:US13320051

    申请日:2010-05-11

    申请人: Gianluca Aldigeri

    发明人: Gianluca Aldigeri

    IPC分类号: B29C43/08 B29C43/50 B29C43/58

    摘要: A safety device for an apparatus for compression-moulding objects that includes a moulding carousel provided with a plurality of punches and with a plurality of corresponding moulding elements, each mould element being movable between a first position in which it does not interact with the respective punch and a second position in which it interacts with the respective punch to mould an object. Each punch is associated with an extracting device suitable for extracting from the respective punch a moulded object. The extracting device is driven by a cam track obtained in a fixed frame of the moulding carousel. The cam track includes a cam track portion that is movable between an operating position in which it interacts with the extracting device and a non-operating position in which it does not interact with the extracting device.

    摘要翻译: 一种用于压缩成型物体的装置的安全装置,其包括设置有多个冲头的成型转盘和多个相应的模制元件,每个模具元件可在第一位置和第二位置之间移动,在第一位置, 以及第二位置,其中它与相应的冲头相互作用以模制物体。 每个冲头与适于从相应冲头提取模制物体的提取装置相关联。 提取装置由在成型转盘的固定框架中获得的凸轮轨道驱动。 凸轮轨道包括可在其与提取装置相互作用的操作位置和不与提取装置相互作用的非操作位置之间移动的凸轮轨道部分。