Composite frequency-adjustable shock absorber

    公开(公告)号:US09746123B2

    公开(公告)日:2017-08-29

    申请号:US15376654

    申请日:2016-12-12

    摘要: A composite frequency-adjustable shock absorber is provided, comprising a motion main machine stand bar and a shock absorption device, which are arranged on a foundation carrier platform; the shock absorption device is divided into an upper shock absorption device and a lower shock absorption device, the shock absorption device is arranged on a base with an inner cavity, and the upper shock absorption device for suppressing the low-frequency vibration and the lower shock absorption device for absorbing additional high-frequency vibration are connected in series; the upper shock absorption device comprises an elastic component based on a flexible hinge group and a prestress adjusting device, the flexible hinge group is arranged in the inner cavity of the base, the prestress adjusting device for adjusting the inherent frequency of the flexible hinge group is connected with the flexible hinge group, and the motion main machine stand bar is fixed on a load bearing portion of the flexible hinge group. The inherent frequency of the whole flexible hinge group is changed, so the high frequency band and the low frequency band of vibration systems with different masses and different excitation frequencies are effectively isolated, the structure is simple, the adjustment is convenient, and the cost is not high.

    COMPOSITE FREQUENCY-ADJUSTABLE SHOCK ABSORBER

    公开(公告)号:US20170089505A1

    公开(公告)日:2017-03-30

    申请号:US15376654

    申请日:2016-12-12

    IPC分类号: F16M7/00 F16F15/073 F16F15/02

    摘要: A composite frequency-adjustable shock absorber is provided, comprising a motion main machine stand bar and a shock absorption device, which are arranged on a foundation carrier platform; the shock absorption device is divided into an upper shock absorption device and a lower shock absorption device, the shock absorption device is arranged on a base with an inner cavity, and the upper shock absorption device for suppressing the low-frequency vibration and the lower shock absorption device for absorbing additional high-frequency vibration are connected in series; the upper shock absorption device comprises an elastic component based on a flexible hinge group and a prestress adjusting device, the flexible hinge group is arranged in the inner cavity of the base, the prestress adjusting device for adjusting the inherent frequency of the flexible hinge group is connected with the flexible hinge group, and the motion main machine stand bar is fixed on a load bearing portion of the flexible hinge group. The inherent frequency of the whole flexible hinge group is changed, so the high frequency band and the low frequency band of vibration systems with different masses and different excitation frequencies are effectively isolated, the structure is simple, the adjustment is convenient, and the cost is not high.

    Fan module
    5.
    发明授权
    Fan module 有权
    风扇模块

    公开(公告)号:US09249808B2

    公开(公告)日:2016-02-02

    申请号:US13794962

    申请日:2013-03-12

    摘要: A fan module includes a casing, a fan, and two vibration absorption assemblies. The casing has an accommodating space. The fan is located in the accommodating space and keeps a distance from the casing. Each of the two vibration absorption assemblies includes two first vibration absorption components and a second vibration absorption component. The two first vibration absorption components are respectively in contact with the fan and separated from the casing, respectively. The second vibration absorption component is connected with two first vibration absorption components and the casing, respectively. The first vibration absorption components and the second vibration absorption components are adapted for absorbing the vibration waves having different frequency ranges.

    摘要翻译: 风扇模块包括壳体,风扇和两个振动吸收组件。 壳体具有容纳空间。 风扇位于容纳空间中并与壳体保持一定距离。 两个振动吸收组件中的每一个包括两个第一振动吸收部件和第二振动吸收部件。 两个第一振动吸收组件分别与风扇接触并与壳体分离。 第二振动吸收部件分别与两个第一振动吸收部件和壳体连接。 第一振动吸收部件和第二振动吸收部件适于吸收具有不同频率范围的振动波。

    VIBRATION ISOLATION MODULE AND SUBSTRATE PROCESSING SYSTEM
    7.
    发明申请
    VIBRATION ISOLATION MODULE AND SUBSTRATE PROCESSING SYSTEM 有权
    振动隔离模块和基板加工系统

    公开(公告)号:US20140197330A1

    公开(公告)日:2014-07-17

    申请号:US14241109

    申请日:2012-09-10

    摘要: The invention relates to a vibration isolation module (101) for a lithographic apparatus or an inspection apparatus. The module comprises a support frame (102), an intermediate body (103) and a support body (104) for accommodating the lithographic apparatus. The intermediate body is connected to the support frame by means of at least one spring element such that the intermediate body is a hanging body. The support body is connected to the intermediate body by means of at least one pendulum rod (108) such that the support body is a hanging body. The invention further relates to a substrate processing system comprising such vibration isolation module.

    摘要翻译: 本发明涉及一种用于光刻设备或检查设备的隔振模块(101)。 模块包括用于容纳光刻设备的支撑框架(102),中间体(103)和支撑体(104)。 中间体通过至少一个弹簧元件连接到支撑框架,使得中间体是悬挂体。 支撑体通过至少一个摆杆(108)连接到中间体,使得支撑体是悬挂体。 本发明还涉及包括这种隔振模块的基板处理系统。

    Vibration damping apparatus for saddle riding type vehicle
    8.
    发明授权
    Vibration damping apparatus for saddle riding type vehicle 有权
    用于骑马式车辆的减振装置

    公开(公告)号:US08602152B2

    公开(公告)日:2013-12-10

    申请号:US13047162

    申请日:2011-03-14

    IPC分类号: B60K1/00 B62D21/00

    摘要: A vibration damping apparatus for a saddle riding type vehicle that easily secures stiffness of a vehicle body frame, simplifies structure, and improves a degree of freedom in layout. The vibration damping apparatus includes at least a pair of mutually facing surfaces disposed on the vehicle body frame, the surfaces not being relatively displaceable while the vehicle is stationary, and being relatively displaceable while the vehicle is running. A damping member is fixed to each of the surfaces and is disposed therebetween. The damping member is not subject to load while the vehicle is stationary. One of the surfaces is disposed on a side of a first main frame of a pair of left and right main frames and the other of the surfaces is disposed on a side of a second main frame.

    摘要翻译: 一种用于骑乘式车辆的减振装置,其容易地固定车体框架的刚度,简化结构,并且提高了布局的自由度。 所述减震装置具有至少一对相对面对的设置在所述车体框架上的面,所述表面在所述车辆静止时不能相对移动,并且在所述车辆行驶时能够相对移动。 阻尼构件被固定到每个表面并且设置在它们之间。 当车辆静止时,阻尼构件不受负载的影响。 一个表面设置在一对左右主框架的第一主框架的一侧,另一个表面设置在第二主框架的一侧。

    Damper support assembly for a supercritical drive shaft
    9.
    发明授权
    Damper support assembly for a supercritical drive shaft 有权
    用于超临界驱动轴的减振器支撑组件

    公开(公告)号:US07109619B2

    公开(公告)日:2006-09-19

    申请号:US10798279

    申请日:2004-03-12

    IPC分类号: H02K5/16

    摘要: A support system, a bracket assembly, and a damping member for use in supporting a rotating shaft. A support system including a fixed bracket; a bracket assembly; and a bearing. The bracket assembly having a first damping member having a first fixed end and a second movable end, the first fixed end being securably attached to the fixed bracket and the second movable end being movable in a first plane aligned with the shaft. The bracket assembly further having a brace securably attached to the second movable end of the first damping member. The bracket assembly further having a second damping member having a first end and a second end, the first end being securably attached to the brace and the second end being movable in a second plane that is aligned with the shaft and is generally perpendicular to the first plane. The bearing being securably attached to the second end of the second damping member and being constructed and arranged to provide a mechanical interconnection between the second end of the damping member and the shaft.

    摘要翻译: 支撑系统,支架组件和用于支撑旋转轴的阻尼构件。 支撑系统,包括固定支架; 支架组件 和轴承。 所述支架组件具有第一阻尼构件,所述第一阻尼构件具有第一固定端和第二可移动端,所述第一固定端牢固地附接到所述固定支架,所述第二可移动端可在与所述轴对齐的第一平面中移动。 支架组件还具有可固定地附接到第一阻尼构件的第二可动端的支架。 所述支架组件还具有第二阻尼件,所述第二阻尼件具有第一端和第二端,所述第一端牢固地连接到所述支架上,所述第二端可在与所述轴对准的第二平面中移动并且大致垂直于所述第一端 飞机 所述轴承牢固地附接到所述第二阻尼构件的第二端,并被构造和布置成在所述阻尼构件的第二端和所述轴之间提供机械互连。

    Attenuation device
    10.
    发明申请
    Attenuation device 审中-公开
    衰减装置

    公开(公告)号:US20060145026A1

    公开(公告)日:2006-07-06

    申请号:US10536929

    申请日:2002-12-04

    IPC分类号: B64G1/00

    摘要: The attenuation device of the present invention comprises a surface of revolution (11) of circular cross section, such that a set of slots (14) is distributed between the sides of the surface of revolution (11) and adapted to confine an elastic material (15) within the limits defined by the slots (14), generating a structural labyrinth for load passage from a lower interface of the surface of revolution (11) to an upper interface.

    摘要翻译: 本发明的衰减装置包括圆形横截面的旋转表面(11),使得一组槽(14)分布在旋转表面(11)的侧面之间并且适于限制弹性材料( 15),在由槽(14)限定的限度内,产生用于从旋转表面(11)的下界面到上界面的负载通道的结构迷宫。