公开(公告)号：US20090046293A1

公开(公告)日：2009-02-19

申请号：US11972586

申请日：2008-01-10

申请人： John Cabaniss ,  Tom Chaffee

发明人： John Cabaniss ,  Tom Chaffee

IPC分类号： G01J3/45

CPC分类号： G01J9/02 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0234 ,  H04B10/676

摘要： Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.

摘要翻译： 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。

公开(公告)号：US5220403A

公开(公告)日：1993-06-15

申请号：US954282

申请日：1992-09-30

申请人： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

发明人： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

IPC分类号： G01J3/42 ,  G01J3/44 ,  G01J9/02 ,  G01N21/35 ,  G01N21/95 ,  G02B3/00 ,  G02B21/00

CPC分类号： G01N21/9505 ,  G02B21/0016 ,  G02B3/00 ,  G01J2003/421 ,  G01J2009/0207 ,  G01J3/44 ,  G01N2021/1725 ,  G01N2021/1782 ,  G01N2021/8822 ,  G01N21/3563 ,  G01N21/359 ,  G01N2201/0638 ,  G01N2201/1087

摘要： Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.

摘要翻译： 在半导体晶片的内部特征的近红外线中执行高分辨率光学成像的装置和方法使用由具有高折射率的材料制成的光学装置，并且保持非常靠近晶片。 光学器件可以是棱镜或平凸透镜。 平凸透镜可以保持与晶片接触或通过空气轴承或光耦合流体与晶片分离，以允许样品在透镜下面导航。 透镜可以用于许多光学仪器，例如明视野显微镜，Schlieren显微镜，暗视野显微镜，Linnik干涉仪，拉曼光谱仪和吸收光谱仪。

公开(公告)号：US5493395A

公开(公告)日：1996-02-20

申请号：US436598

申请日：1995-05-08

申请人： Masaru Otsuka

发明人： Masaru Otsuka

IPC分类号： G01B9/02 ,  G01J9/02 ,  G01J9/04 ,  H01S3/131

CPC分类号： G01J9/0246 ,  G01J2009/0207 ,  G01J9/04

摘要： A wavelength variation measuring apparatus is disclosed. A light beam from a light source device capable of controlling an oscillation wavelength is divided into two light beams by a light divider. A predetermined optical path length difference is imparted to the divided light beams to synthesize the beams by a light synthesizer. A part of the synthesized light is used as detection light and the rest of the synthesized light is used as measuring light. A beat signal is detected from the detection light by a photodetector. A feedback control is effected to the light source device by use of the beat signal to thereby stabilize the oscillated wavelength of the light source device and to direct the measuring light to an object to be measured. The beat signal is rendered as a measurement data correction signal, and measurement data obtained by directing the measuring light to the object to be measured is corrected.

摘要翻译： 公开了一种波长变化测量装置。 来自能够控制振荡波长的光源装置的光束被分光器分成两束光束。 通过光合成器对划分的光束赋予预定的光程长度差以合成光束。 合成光的一部分用作检测光，其余的合成光用作测量光。 通过光检测器从检测光检测拍频信号。 通过使用拍频信号对光源装置进行反馈控制，从而稳定光源装置的振荡波长并将测量光引导到待测物体。 将拍频信号作为测量数据校正信号，并且通过将测量光指向待测量对象而获得的测量数据被校正。

公开(公告)号：US5208648A

公开(公告)日：1993-05-04

申请号：US667773

申请日：1991-03-11

申请人： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt ,  Douglas W. Cooper

发明人： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt ,  Douglas W. Cooper

IPC分类号： G01N21/88 ,  G01J3/42 ,  G01J3/44 ,  G01J9/02 ,  G01N21/35 ,  G01N21/95 ,  G01N21/956 ,  G01Q30/02 ,  G02B3/00 ,  G02B21/00 ,  G02B27/00 ,  H01L21/66

CPC分类号： G01N21/9505 ,  G02B21/0016 ,  G02B3/00 ,  G01J2003/421 ,  G01J2009/0207 ,  G01J3/44 ,  G01N2021/1725 ,  G01N2021/1782 ,  G01N2021/8822 ,  G01N21/3563 ,  G01N21/359 ,  G01N2201/0638 ,  G01N2201/1087

摘要： Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.

公开(公告)号：US4764013A

公开(公告)日：1988-08-16

申请号：US28987

申请日：1987-03-23

申请人： Roger G. Johnston

发明人： Roger G. Johnston

IPC分类号： G01J9/02 ,  G01J9/04 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01B9/02

CPC分类号： G01N15/0205 ,  G01J2009/0207 ,  G01J9/04 ,  G01N15/0211 ,  G01N15/14 ,  G01N2021/4792 ,  G01N21/21

摘要： Interferometric apparatus and method for detection and characterization of particles using light scattered therefrom. Differential phase measurements on scattered light from particles are possible using the two-frequency Zeeman effect laser which emits two frequencies of radiation 250 kHz apart. Excellent discrimination and reproducibility for various pure pollen and bacterial samples in suspension have been observed with a single polarization element. Additionally, a 250 kHz beat frequency was recorded from an individual particle traversing the focused output from the laser in a flow cytometer.

摘要翻译： 用于使用从其散射的光来检测和表征颗粒的干涉仪和方法。 使用双频塞曼效应激光器发射来自粒子的散射光的差分相位测量是可能的，其发射两个频率为250kHz的两个频率。 已经用单一的偏振元件观察到各种纯粹的花粉和细菌样品在悬浮液中的极好的辨别和再现性。 另外，在流式细胞仪中从穿过激光的聚焦输出的单个粒子记录250kHz拍频。

公开(公告)号：US07796268B2

公开(公告)日：2010-09-14

申请号：US11972586

申请日：2008-01-10

申请人： John Cabaniss ,  Tom Chaffee

发明人： John Cabaniss ,  Tom Chaffee

IPC分类号： G01B9/02

CPC分类号： G01J9/02 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0234 ,  H04B10/676

摘要： Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.

摘要翻译： 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。

公开(公告)号：US4907886A

公开(公告)日：1990-03-13

申请号：US297866

申请日：1989-02-06

申请人： Rene Dandliker

发明人： Rene Dandliker

IPC分类号： G01B9/02 ,  G01J9/02 ,  G01J9/04

CPC分类号： G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02067 ,  G01J9/04 ,  G01B2290/70 ,  G01J2009/0207 ,  G01J2009/0253 ,  G01J2009/0261

摘要： An apparatus for measuring changes in a variable interference section of an interferometer comprises a laser source for producing beams of the frequency n.sub.1 and the frequency n.sub.2, polarizing beam splitters for producing cross-polarized partial beams of frequency n.sub.1 or n.sub.2, modulators for displacing the frequency of one of the partial beams by frequency f.sub.1 or f.sub.2, a pair of deflecting mirrors in each case and polarizing beam splitters for combining the partial beam n.sub.1, n.sub.1 +f.sub.1, n.sub.2, n.sub.2 +f.sub.2. The apparatus further includes two photodetectors, upstream of which are arranged a polarizer, a Michelson interferometer, a non-polarizing beam splitter for splitting the partial beams in each case into a measuring light beam or a reference light beam. The reference light beam passes to an associated photodetector. The measuring light beam passes into the Michelson interferometer and then to the associated photodetector. The signals of the photodetectors are demodulated according to the amplitude and the phase difference between the two demodulated signals is determined. This phase difference is only dependent on the position of a measurement object and the equivalent wavelength of the difference n.sub.1 -n.sub.2. A method for measuring changes by determining positions or distances is performed by the apparatus.

摘要翻译： PCT No.PCT / CH88 / 00070 Sec。 371日期1989年2月6日 102（e）日期1989年2月6日PCT PCT 3月30日PCT公布。 第WO88 / 08519号公报 用于测量干涉仪的可变干涉部分的变化的装置包括用于产生频率n1和频率n2的光束的激光源，用于产生频率为n1的交叉偏振分光束的偏振分束器或 n2，用于通过频率f1或f2移位部分光束中的一个的频率的调制器，每种情况下的一对偏转镜和用于组合部分光束n1，n1 + f1，n2，n2 + f2的偏振光束分离器。 该装置还包括两个光电检测器，其上游设置有偏振器，迈克尔逊干涉仪，用于将每个情况下的部分光束分成测量光束或参考光束的非偏振分束器。 参考光束传递到相关联的光电检测器。 测量光束进入迈克尔逊干涉仪，然后进入相关的光电检测器。 光电探测器的信号根据振幅进行解调，确定两个解调信号之间的相位差。 该相位差仅取决于测量对象的位置和差值n1-n2的等效波长。 通过确定位置或距离来测量变化的方法由该装置执行。

公开(公告)号：US4906095A

公开(公告)日：1990-03-06

申请号：US147468

申请日：1988-01-25

申请人： Roger G. Johnston

发明人： Roger G. Johnston

IPC分类号： G01J9/02 ,  G01N21/17 ,  G01N21/19

CPC分类号： G01J9/02 ,  G01N21/171 ,  G01J2009/0207 ,  G01J2009/0261 ,  G01J2009/0269 ,  G01N21/19

摘要： The present apparatus includes a two-frequency, Zeeman-effect laser and matched, doubly refracting crystals in the construction of an accurate interferometer. Unlike other interferometric devices, the subject invention exhibits excellent phase stability owing to the use of single piece means for producing parallel interferometer arms, making the interferometer relatively insensitive to thermal and mechanical instabilities. Interferometers respond to differences in optical path length between their two arms. Unlike many interferometric techniques, which require the measurement of the location of interference fringes in a brightly illuminated background, the present invention permits the determination of the optical path length difference by measuring the phase of an electronic sine wave. The present apparatus is demonstrated as a differential thermooptic spectrometer for measuring differential optical absorption simply and accurately which is but one of many applications therefor. The relative intensities of the heating beams along each arm of the interferometer can be easily adjusted by observing a zero phase difference with identical samples when this condition is obtained.

摘要翻译： 本设备包括一个双频塞曼效应激光器和匹配的双折射晶体，构建精确的干涉仪。 与其他干涉仪装置不同，本发明由于使用用于产生平行干涉仪臂的单件装置显示出优异的相位稳定性，使得干涉仪对热和机械不稳定性相对不敏感。 干涉仪响应两臂之间光程长度的差异。 与需要在明亮照明背景中测量干涉条纹的位置的许多干涉测量技术不同，本发明允许通过测量电子正弦波的相位来确定光程长度差异。 本装置被证明是用于简单且精确地测量差分光吸收的差分热光谱仪，其仅是许多应用之一。 当获得该条件时，可以通过观察相同样品的零相位差来容易地调节沿着干涉仪的每个臂的加热束的相对强度。

公开(公告)号：US4900150A

公开(公告)日：1990-02-13

申请号：US199858

申请日：1988-05-27

申请人： David B. Hall

发明人： David B. Hall

IPC分类号： G01J9/02 ,  G01J9/04 ,  G01N21/41 ,  H01S3/00

CPC分类号： H01S3/0014 ,  G01N21/41 ,  G01J2009/0207 ,  G01J9/04

摘要： A variety of techniques for deriving cavity linewidth that share the use of multiple input sources of known frequency separation is disclosed allowing the measurement of resonator cavity linewidth. Among the techniques include a double peak ratio method for measuring cavity linewidth through use of a low pass filter. The double peak ratio method allows vertical measurements which are noise immune and independent of swept frequency errors as a method of determining cavity linewidth in a straightforward and accurate manner.

摘要翻译： 公开了用于导出共享使用已知频率分离的多个输入源的腔线宽度的各种技术，允许谐振腔腔线宽的测量。 这些技术包括通过使用低通滤波器来测量空腔线宽的双峰比方法。 双峰值比方法允许垂直测量，其是噪声免疫的，并且与扫频频率误差无关，作为以简单和准确的方式确定空腔线宽的方法。