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    Machine tool displacement correcting apparatus
    2.
    发明授权
    Machine tool displacement correcting apparatus 失效
    机床位移校正装置

    公开(公告)号：US06341245B1

    公开(公告)日：2002-01-22

    申请号：US09101275

    申请日：1998-07-08

    申请人： Toshihiro Ueta ,  Kazuo Nagashima

    发明人： Toshihiro Ueta ,  Kazuo Nagashima

    IPC分类号： G06F1900

    CPC分类号： G05B19/404 ,  G05B2219/49169 ,  G05B2219/49178 ,  G05B2219/49212 ,  Y10T409/300896

    摘要： A history of function values of a spindle rotation frequency in each time period from present to past is stored in a data table 22D and corrective coefficients are stored in advance in a corrective coefficient table 22C relating the coefficients to the location in the data table 22D. Each location and corrective coefficient are read out from the corrective coefficient table 22C and the function value of the spindle rotation frequency corresponding to the location is read out from the data table 22D. The compensation value is calculated from the total sum of each product of the function value and the corrective coefficient in each location and compensate the NC command position with the compensation value.

    摘要翻译： 从现在到过去的每个时间段中的主轴旋转频率的功能值的历史被存储在数据表22D中，校正系数被预先存储在将系数与数据表22D中的位置相关联的校正系数表22C中。 从校正系数表22C读出每个位置和校正系数，并从数据表22D中读出对应于位置的主轴旋转频率的功能值。 补偿值根据功能值的每个乘积和每个位置的校正系数的总和计算，并用补偿值补偿NC指令位置。

    Electric discharge machine
    3.
    发明授权
    Electric discharge machine 失效
    放电机

    公开(公告)号：US4885449A

    公开(公告)日：1989-12-05

    申请号：US224852

    申请日：1988-08-05

    申请人： Toshio Suzuki ,  Takuji Magara

    发明人： Toshio Suzuki ,  Takuji Magara

    IPC分类号： B23H7/20 ,  G05B19/23 ,  G05B19/404

    CPC分类号： B23H7/20 ,  G05B19/232 ,  G05B19/404 ,  G05B2219/41036 ,  G05B2219/45221 ,  G05B2219/49169 ,  G05B2219/49194 ,  G05B2219/49219

    摘要： In an electric discharge machine in which electric discharge is cause to take place between a workpiece (6) and an electrode (1) such as a wire electrode or die sinking electrode which are confronted through a machining solution (7) with each other with a small gap therebetween while the electrode (1) and the workpiece (6) are moved relative to each other with drive shafts (37 and 67) such as ball screws, so that the workpiece (6) is machined as required; correcting data for the amounts of movement of the drive shafts are obtained under a plurality of different load conditions or temperature conditions and stored in a memory (41) in advance, and out of the correcting data thus stored, the most suitable ones for actual machining conditions are selected, so that amounts of movements to given to the drive shafts (37 and 67) are corrected according to the correcting data thus selected, whereby, even when the drive shafts (37 and 67) are expanded or contracted by the ambient temperature or deformed by a load such as the weight of the workpiece (6) or machining solution (7), the amounts of movement of the drive shafts (37 and 67) can be accurately corrected; that is, the relative position of the workpiece (6) and the electrode (1) is accurately corrected so that the workpiece is machined with high accuracy.

    摘要翻译： PCT No.PCT / JP87 / 00815 Sec。 371日期1988年8月5日 102（e）日期1988年8月5日PCT提交1987年10月23日PCT公布。 出版物WO88 / 03074 日期：1988年5月5日。在通过加工液（7）面对的工件（6）和电极（1）（例如线电极或模具浸渍电极）之间发生放电的放电机中， ）彼此之间具有小间隙，而电极（1）和工件（6）通过诸如滚珠丝杠的驱动轴（37和67）相对于彼此移动，使得工件（6）被加工为 需要; 在多个不同的负载条件或温度条件下获得驱动轴的移动量的校正数据，并且预先存储在存储器（41）中，并且从这样存储的校正数据中，最适合用于实际加工 条件被选择，使得根据所选择的校正数据校正给予驱动轴（37和67）的移动量，由此即使当驱动轴（37和67）被环境温度膨胀或收缩时 或通过诸如工件（6）或加工液（7）的重量的负载变形，可以精确地校正驱动轴（37和67）的移动量; 也就是说，精确地校正工件（6）和电极（1）的相对位置，从而高精度地加工工件。

    Industrial robot system
    4.
    发明授权
    Industrial robot system 失效
    工业机器人系统

    公开(公告)号：US4668157A

    公开(公告)日：1987-05-26

    申请号：US804422

    申请日：1985-12-04

    申请人： Hisao Kato ,  Akira Sato

    发明人： Hisao Kato ,  Akira Sato

    IPC分类号： G05D3/12 ,  B25J9/16 ,  B25J9/18 ,  B25J19/02 ,  B25J19/06 ,  G05B19/18 ,  G05B19/404 ,  B25J9/06

    CPC分类号： G05B19/404 ,  B25J19/02 ,  B25J19/06 ,  B25J9/1692 ,  G05B2219/49169 ,  G05B2219/49219 ,  Y02P90/083

    摘要： In an industrial robot system, the robot is first moved to a starting position, and, when the temperature of the robot exceeds a predetermined value, a position checking operation is effected to move the robot towards the starting position so that, according to the difference between the starting position and the position where the robot has been stopped by the position checking operation, a compensation value is provided for temperature compensation of the robot, whereby, even when the working arms of the robot are extended or contracted by temperature variations, the robot can perform its working operation correctly.

    摘要翻译： 在工业机器人系统中，机器人首先被移动到起始位置，并且当机器人的温度超过预定值时，进行位置检查操作以使机器人朝向起始位置移动，使得根据差异 通过位置检查操作在起始位置和机器人已经停止的位置之间提供了用于机器人的温度补偿的补偿值，由此即使当机器人的工作臂由于温度变化而伸长或收缩时， 机器人可以正确地执行其工作操作。

    Machine tool spindle calibration method and apparatus
    5.
    发明授权
    Machine tool spindle calibration method and apparatus 失效
    机床主轴校准方法及装置

    公开(公告)号：US3945297A

    公开(公告)日：1976-03-23

    申请号：US460802

    申请日：1974-04-15

    申请人： Clive P. Hohberger

    发明人： Clive P. Hohberger

    IPC分类号： G01N3/58 ,  G05B19/416 ,  B23Q11/04 ,  G05B5/00

    CPC分类号： G05B19/4163 ,  G01N3/58 ,  G05B2219/37357 ,  G05B2219/49169 ,  Y10T409/30112 ,  Y10T409/308624 ,  Y10T82/2502

    摘要： A simple method and apparatus is disclosed for the calibration of a numerically controlled milling machine or the like, to determine the compliance for a particular set-up of the machine. The apparatus includes a hydraulic cylinder mounted on the machine bed, with the end of the hydraulic piston bearing against a non-rotating cutting tool that is mounted in the spindle. A pressure gauge or pressure switch indicates fluid pressure in the hydraulic cylinder to determine force of the piston on the cutting tool, and a deflection sensor measures the static deflection of the spindle. In one apparatus, hydraulic fluid from a high pressure source passes through a pressure-reducing valve into the rear of the hydraulic cylinder to push the piston rod end against the cutting tool, without requiring motion of the spindle relative to the bed, the valve being adjusted to maintain a desired fluid pressure behind the piston despite leakage of fluid past the piston.

    摘要翻译： 公开了用于校准数控铣床等的简单方法和装置，以确定机器的特定装置的顺应性。 该装置包括安装在机床上的液压缸，液压活塞轴承的端部抵靠安装在主轴中的非旋转切削工具。 压力表或压力开关指示液压缸中的流体压力以确定活塞在切割工具上的力，并且偏转传感器测量主轴的静态偏转。 在一个装置中，来自高压源的液压流体通过减压阀进入液压缸的后部，以将活塞杆端推靠在切割工具上，而不需要主轴相对于床的运动，阀是 调节以保持活塞后面的期望流体压力，尽管流体经过活塞泄漏。

    MACHINE TOOL
    7.
    发明申请
    MACHINE TOOL 审中-公开

    公开(公告)号：US20180050433A1

    公开(公告)日：2018-02-22

    申请号：US15558414

    申请日：2016-03-09

    申请人： TOSHIBA KIKAI KABUSHIKI KAISHA

    发明人： KATSUMI HIRABAYASHI ,  ATSUSHI TADA

    IPC分类号： B23Q17/22 ,  B23Q5/04

    CPC分类号： B23Q17/2233 ,  B23Q5/04 ,  B23Q11/0007 ,  B23Q11/0028 ,  B23Q15/18 ,  B23Q17/22 ,  G05B19/401 ,  G05B19/404 ,  G05B2219/37619 ,  G05B2219/49169

    摘要： A machine tool of the present embodiment includes: a column that is disposed in a vertically standing manner and has a predetermined linear expansion coefficient; a spindle head that is supported by the column and supports a horizontal spindle for attaching a tool thereto; and a reference bar that is disposed separately from the column and has a linear expansion coefficient that is different from the linear expansion coefficient of the column wherein the column has a column-side measurement target zone, the reference bar has a reference bar-side measurement target zone, and a measurement means measures a distance between the column-side measurement target zone and the reference bar-side measurement target zone.

    Method for determining a position of a robot
    9.
    发明申请
    Method for determining a position of a robot 有权
    用于确定机器人的位置的方法

    公开(公告)号：US20040199291A1

    公开(公告)日：2004-10-07

    申请号：US10406644

    申请日：2003-04-03

    申请人： Applied Materials, Inc.

    发明人： Marvin L. Freeman ,  Jeffrey C. Hudgens ,  Damon Keith Cox ,  Chris Holt Pencis ,  Michael Rice ,  David A. Van Gogh

    IPC分类号： G06F019/00

    CPC分类号： H01L21/67259 ,  B25J9/0009 ,  B25J9/107 ,  G05B19/404 ,  G05B2219/37608 ,  G05B2219/39192 ,  G05B2219/49169 ,  G05B2219/49207 ,  H01L21/67742 ,  H01L21/67748 ,  H01L21/68 ,  Y10S414/136 ,  Y10S414/137 ,  Y10S414/139

    摘要： Generally, a method of determining a position of a robot is provided. In one embodiment, a method of determining a position of a robot comprises acquiring a first set of positional metrics, acquiring a second set of positional metrics and resolving the position of the robot due to thermal expansion using the first set and the second set of positional metrics. Acquiring the first and second set of positional metrics may occur at the same location within a processing system, or may occur at different locations. For example, in another embodiment, the method may comprise acquiring a first set of positional metrics at a first location proximate a processing chamber and acquiring a second set of positional metrics in another location. In another embodiment, substrate center information is corrected using the determined position of the robot.

    摘要翻译： 通常，提供了一种确定机器人的位置的方法。 在一个实施例中，一种确定机器人位置的方法包括获取第一组位置度量，获取第二组位置度量并且利用第一组和第二组位置来解决由于热膨胀引起的机器人的位置 指标 获取第一和第二组位置度量可以发生在处理系统内的相同位置处，或者可以在不同位置处发生。 例如，在另一个实施例中，该方法可以包括在靠近处理室的第一位置获取第一组位置度量，并在另一位置获取第二组位置度量。 在另一个实施例中，使用所确定的机器人的位置校正基板中心信息。

    High temperature substrate transfer robot
    10.
    发明申请
    High temperature substrate transfer robot 审中-公开
    高温基板传送机器人

    公开(公告)号：US20030012631A1

    公开(公告)日：2003-01-16

    申请号：US09928923

    申请日：2001-08-13

    发明人： Christopher H. Pencis ,  Jeffrey C. Hudgens ,  Damon Keith Cox ,  Michael Rice ,  James R. Ciulik

    IPC分类号： B25J018/00

    CPC分类号： H01L21/67748 ,  B25J9/0009 ,  B25J9/107 ,  B25J9/1628 ,  G05B19/404 ,  G05B2219/39192 ,  G05B2219/45031 ,  G05B2219/49169 ,  G05B2219/49207 ,  H01L21/67103 ,  H01L21/67259 ,  H01L21/67742 ,  H01L21/68

    摘要： Generally, a robot for transferring a substrate in a processing system is provided. In one embodiment, a robot for transferring a substrate in a processing system includes a body, a linkage and an end effector that is adapted to retain the substrate thereon. The linkage couples the end effector to the body. The end effector and/or the linkage is comprised of a material having a coefficient of thermal expansion less than about 5 m/(mnullKelvin). In another embodiment, the end effector and/or the linkage is comprised of a material having a ratio of thermal conductivity/thermal expansion greater than about 10 W/m(Kelvin)/(Kelvin). In yet another embodiment, the end effector and/or the linkage is comprised of a material having a ratio of thermal conductivity/thermal expansion greater than about 10 W/m(Kelvin)/(Kelvin) and a coefficient of fracture toughness less than about 1null106 Panullm0.5.

    摘要翻译： 通常，提供了用于在处理系统中传送基板的机器人。 在一个实施例中，用于在处理系统中传送衬底的机器人包括主体，连杆以及适于将衬底保持在其上的端部执行器。 连杆将末端执行器连接到身体。 端部执行器和/或连杆由具有小于约5m /（m·k·开尔文）的热膨胀系数的材料构成。 在另一个实施方案中，末端执行器和/或连杆由具有大于约10W / m（开尔文）/（开尔文）的热导率/热膨胀率的材料构成。 在另一个实施方案中，端部执行器和/或连接件由具有大于约10W / m（开尔文）/（开尔文）的热导率/热膨胀比的材料组成，并且断裂韧性系数小于约 1x106 Paxm0.5。