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    Vacuum tube and vacuum tube manufacturing apparatus and method
    1.
    发明授权
    Vacuum tube and vacuum tube manufacturing apparatus and method 失效
    真空管及真空管制造装置及方法

    公开(公告)号：US08502450B2

    公开(公告)日：2013-08-06

    申请号：US10594896

    申请日：2005-03-31

    申请人： Tadahiro Ohmi ,  Akihiro Morimoto

    发明人： Tadahiro Ohmi ,  Akihiro Morimoto

    IPC分类号： H01J61/12 ,  H01J61/22 ,  H01J17/20

    CPC分类号： H01J9/395 ,  H01J7/02 ,  H01J9/38 ,  H01J9/385 ,  H01J17/20 ,  H01J21/00 ,  H01J37/18 ,  H01J61/20 ,  H01J61/24

    摘要： With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.

    摘要翻译： 对于具有密封在其中的放电气体的减压容器的真空管，常规地发生诸如由于有机材料引起的排出效率降低，残留在减压容器中的水分或氧气的问题。 现在已经发现，选择水分子的数量，有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言，选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量，可以减少上述剩余气体的不利影响。

    System and method for introducing aluminum to an ion source
    3.
    发明授权
    System and method for introducing aluminum to an ion source 有权

    公开(公告)号：US11996281B1

    公开(公告)日：2024-05-28

    申请号：US18206910

    申请日：2023-06-07

    申请人： Applied Materials, Inc.

    发明人： Graham Wright ,  Ori Noked ,  Craig R. Chaney ,  Adam M. McLaughlin

    IPC分类号： H01J7/02 ,  H01J1/20 ,  H01J7/24

    CPC分类号： H01J7/02 ,  H01J1/20 ,  H01J7/24

    摘要： An ion source that may be used to introduce a dopant material into the arc chamber is disclosed. A component containing the dopant material is disposed in the path of an etching gas, which also enters the arc chamber. In some embodiments, the dopant material is in liquid form, and the etching gas travels through the liquid. In other embodiments, the dopant material is a solid material. In some embodiments, the solid material is formed as a porous structure, such that the etching gas flows through the solid material. In other embodiments, one or more components of the ion source are manufactured using a material that includes the dopant material, such that the etching gas etches the component to release the dopant material.

    VACUUM TUBE AND VACUUM TUBE MANUFACTURING APPARATUS AND METHOD
    6.
    发明申请
    VACUUM TUBE AND VACUUM TUBE MANUFACTURING APPARATUS AND METHOD 审中-公开
    真空管和真空管制造设备和方法

    公开(公告)号：US20130307404A1

    公开(公告)日：2013-11-21

    申请号：US13934488

    申请日：2013-07-03

    申请人： Tadahiro OHMI ,  Akihiro MORIMOTO

    发明人： Tadahiro OHMI ,  Akihiro MORIMOTO

    IPC分类号： H01J9/395 ,  H01J21/00

    CPC分类号： H01J9/395 ,  H01J7/02 ,  H01J9/38 ,  H01J9/385 ,  H01J17/20 ,  H01J21/00 ,  H01J37/18 ,  H01J61/20 ,  H01J61/24

    摘要： With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.

    摘要翻译： 对于具有密封在其中的放电气体的减压容器的真空管，常规地发生诸如由于有机材料引起的排出效率降低，残留在减压容器中的水分或氧气的问题。 现在已经发现，选择水分子的数量，有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言，选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量，可以减少上述剩余气体的不利影响。

    Vacuum Tube And Vacuum Tube Manufacturing Apparatus And Method
    7.
    发明申请
    Vacuum Tube And Vacuum Tube Manufacturing Apparatus And Method 失效
    真空管及真空管制造装置及方法

    公开(公告)号：US20070210715A1

    公开(公告)日：2007-09-13

    申请号：US10594896

    申请日：2005-03-31

    申请人： Tadahiro Ohmi ,  Akihiro Morimoto

    发明人： Tadahiro Ohmi ,  Akihiro Morimoto

    IPC分类号： H01J7/02 ,  H01J9/38 ,  H01J9/46

    CPC分类号： H01J9/395 ,  H01J7/02 ,  H01J9/38 ,  H01J9/385 ,  H01J17/20 ,  H01J21/00 ,  H01J37/18 ,  H01J61/20 ,  H01J61/24

    摘要： With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.

    摘要翻译： 对于具有密封在其中的放电气体的减压容器的真空管，常规地发生诸如由于有机材料引起的排出效率降低，残留在减压容器中的水分或氧气的问题。 现在已经发现，选择水分子的数量，有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言，选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量，可以减少上述剩余气体的不利影响。