Spectrophotometer
    1.
    发明授权
    Spectrophotometer 有权
    分光光度计

    公开(公告)号:US06525813B2

    公开(公告)日:2003-02-25

    申请号:US09752733

    申请日:2001-01-03

    Applicant: Kazumi Yokota

    Inventor: Kazumi Yokota

    CPC classification number: G01J3/42 G01J3/08

    Abstract: In a spectrophotometer, light emitted from a light source is processed to provide monochromatic light by a monochromator, and reaches a sector mirror having a chopper function. The sector mirror is rotated by a motor, and a rotational frequency of the motor can be controlled by a controller. By rotation of the sector mirror, monochromatic light is alternately distributed to a sample cell and a reference cell through a mirror. In measuring a wavelength range where a detector having a photomultiplier with a fast response speed is used, the motor is rotated at a high speed, so that time for scanning a wavelength is shortened. In measuring a wavelength range where a detector having lead sulfide with a slow response speed is used, the motor is rotated at a low speed to obtain a sufficiently strong signal intensity. Accordingly, in the spectrophotometer, the analysis time can be shortened, and the sufficiently strong signal can be outputted at the same time.

    Abstract translation: 在分光光度计中,对从光源发出的光进行处理,由单色仪提供单色光,并到达具有斩波功能的扇形镜。 扇形镜由电动机旋转,电动机的转速可由控制器控制。 通过扇形镜的旋转,单色光通过反射镜交替地分布到样品池和参考池。 在测量使用具有快速响应速度的光电倍增管的检测器的波长范围时,马达以高速旋转,从而缩短了扫描波长的时间。 在测量使用具有缓慢响应速度的具有硫化铅的检测器的波长范围时,马达以低速旋转以获得足够强的信号强度。 因此,在分光光度计中,能够缩短分析时间,能够同时输出足够强的信号。

    Automatic color-tone test device and automatic controlling system for dye liquor
    2.
    发明授权
    Automatic color-tone test device and automatic controlling system for dye liquor 有权
    自动色调测试装置和染液自动控制系统

    公开(公告)号:US06507397B1

    公开(公告)日:2003-01-14

    申请号:US09536714

    申请日:2000-03-28

    Abstract: An automatic color-tone test device comprises: a measurement cell 4 to which there are communication-connected dye liquor introduction tubes 16, 18 for passing through a controlling dye liquor that is a measurement object and dye liquor discharge tubes 17, 19; a spectrophotometer adapted such that a light transmission distance in the measurement cell 4 can be variably set in compliance with a concentration level of the controlling dye liquor that is a measurement object; and a statistical test computer section for operation-judging whether or not concentration and hue agree with desired values.

    Abstract translation: 一种自动色调测试装置,包括:测量单元4,与测量单元4有连通的染液引入管16,18,用于通过作为测量对象的控制染液和染液排放管17,19; 分光光度计,其适于使得测量单元4中的光传输距离可以根据作为测量对象的控制染液的浓度水平可变地设定; 以及用于操作判断浓缩和色调是否与期望值一致的统计测试计算机部分。

    Calibration mode recognition and calibration algorithm for spectrophotometric instrument
    4.
    发明授权
    Calibration mode recognition and calibration algorithm for spectrophotometric instrument 失效
    分光光度仪的校准模式识别和校准算法

    公开(公告)号:US06667803B1

    公开(公告)日:2003-12-23

    申请号:US09584990

    申请日:2000-06-01

    Abstract: A spectrophotometric instrument including light signal sources, a detector, a processor/controller, a probe and a calibration device. The light signal sources include a source of measurement light signals having measurement light wavelengths and a source of a calibration light signal at a calibration detection wavelength which is different than the measurement light wavelengths. The probe has one or more send fibers coupled to the measurement and calibration light signal sources for transmitting the measurement light signals and the calibration light signal into tissue, and one or more receive fibers for receiving light including the measurement light signals and the calibration light signal. The calibration device is adapted to receive the probe and has an optical filter for transmitting the measurement light signals but not the calibration light signal. The detector is coupled to the receive fibers to generate electrical signals representative of the light received at the receive fibers. The processor/controller is coupled to the detector and initiates a calibration procedure when the calibration light signal is not detected.

    Abstract translation: 包括光信号源,检测器,处理器/控制器,探针和校准装置的分光光度仪器。 光信号源包括具有测量光波长的测量光信号源和与测量光波长不同的校准检测波长的校准光信号源。 探头具有耦合到测量和校准光信号源的一个或多个发送光纤,用于将测量光信号和校准光信号传输到组织中,以及一个或多个接收光纤,用于接收包括测量光信号和校准光信号的光 。 校准装置适于接收探头并且具有用于传送测量光信号而不是校准光信号的滤光器。 检测器耦合到接收光纤以产生代表在接收光纤处接收的光的电信号。 当未检测到校准光信号时,处理器/控制器耦合到检测器并启动校准程序。

    Color imager bar based spectrophotometer for color printer color control system

    公开(公告)号:US06621576B2

    公开(公告)日:2003-09-16

    申请号:US09862247

    申请日:2001-05-22

    Abstract: An improved and lower cost color spectrophotometer, especially suitable for on-line color printer color control systems, incorporating a low cost commercial imaging chip, which normally only forms part of a three row, three color, document imaging bar used for imaging documents in scanners, digital copiers, or multifunction products, having multiple photo-sites with at least three different color filters in three rows. This multiple photo-sites chip may be modified to also provide unfiltered photo-sites. This spectrophotometer may have a substantially reduced number of different LED or other spectral illumination sources, one of which may be for white light, yet provide multiple spectral data outputs from the differently filtered photo-sites being simultaneous illuminated by the light reflected from a color test target area which is being sequentially illuminated by the respective limited number of LEDs, enabling broad spectrum information and color control.

    Method and apparatus for identification of plastic materials by optical measurements
    7.
    发明授权
    Method and apparatus for identification of plastic materials by optical measurements 失效
    用于通过光学测量识别塑料材料的方法和装置

    公开(公告)号:US06563119B1

    公开(公告)日:2003-05-13

    申请号:US09626609

    申请日:2000-07-27

    Inventor: Evangelos Zoidis

    CPC classification number: G01N21/31

    Abstract: The present invention relates to a method for identification of plastic materials of interest by optical measurements, preferably spectroscopic measurements, comprising the steps of measuring a sample and providing a sample spectrum, providing reference spectra for a given group of reference materials of interest, determining spectral distances between sample spectrum and reference spectra, material identification by associating the sample to the material having the reference spectrum with the smallest spectral distance to the sample spectrum. In this method at least one identification frequency range having a high absolute deviation ratio D and/or a high smoothed deviation ratio D′ between all pairs of possible plastic materials of interest is determined, and that said spectral distance is only determined within said at least one identification frequency range.

    Abstract translation: 本发明涉及通过光学测量,优选光谱测量来识别感兴趣的塑料材料的方法,包括以下步骤:测量样品并提供样品光谱,为给定的感兴趣的参考材料组提供参考光谱,确定光谱 样品光谱和参考光谱之间的距离,通过将样品与具有与样品光谱的最小光谱距离的参考光谱的材料相关联的材料鉴定。 在该方法中,确定具有高绝对偏差比D和/或所有目标可能的塑料材料对之间的高平滑偏差比D'的至少一个识别频率范围,并且所述光谱距离仅在所述至少 一个识别频率范围。

    Angular, azimuthal and displacement insensitive spectrophotometer for color printer color control systems
    8.
    发明授权
    Angular, azimuthal and displacement insensitive spectrophotometer for color printer color control systems 有权
    角度,方位角和位移不敏感分光光度计,用于彩色打印机色彩控制系统

    公开(公告)号:US06809855B2

    公开(公告)日:2004-10-26

    申请号:US10385408

    申请日:2003-03-07

    Abstract: An improved and lower cost color spectrophotometer, especially suitable for an on-line color printer color control system, in which plural different spectra LEDs sequentially perpendicularly illuminate a common and substantially circularly illuminated color test area, which may be variably spaced and variably oriented relative to the spectrophotometer, through a common central lens system, and also the reflected illumination therefrom may be measured at 45 degrees thereto by averaging the outputs of photodetectors spaced around that circularly illuminated color test area, to provide reduced sensitivity to the variable angular or azimuthal orientation of the color test area relative to the spectrophotometer, and which photodetectors may be so illuminated by 1:1 optics for spatial insensitivity.

    Abstract translation: 一种改进且成本较低的彩色分光光度计,特别适用于在线彩色打印机色彩控制系统,其中多个不同的光谱LED顺序地垂直照射常见且基本上圆形照明的彩色测试区域,该区域可相对于 分光光度计,通过共同的中心透镜系统,以及其中的反射照明可以通过对围绕该循环照射的彩色测试区域间隔开的光电检测器的输出进行平均而在其45度测量,以提供对可变角度或方位取向的灵敏度的降低 相对于分光光度计的颜色测试区域,以及哪些光电探测器可以由1:1光学器件照亮以用于空间不敏感。

    Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopy
    9.
    发明授权
    Methods and systems for controlling the concentration of a component in a composition with absorption spectroscopy 失效
    用吸收光谱法控制组合物中组分浓度的方法和系统

    公开(公告)号:US06762832B2

    公开(公告)日:2004-07-13

    申请号:US10064222

    申请日:2002-06-21

    CPC classification number: G05D11/138 G01J3/42 G01N21/33 G01N2021/3155

    Abstract: Provided are methods and systems for controlling the concentration of a component in a composition, and semiconductor processing methods and systems. One exemplary method of controlling the concentration of a component in a composition involves: providing a composition which has a liquid portion, wherein the liquid portion contains a component to be monitored; performing an absorption spectroscopy measurement on a sample of the composition; and controlling the concentration of the component in the composition based on the absorption spectroscopy measurement using a feedback control loop. The invention allows for controlling the concentration of a component in a composition, for example, a corrosion inhibitor in a chemical planarization (CMP) chemical, as well as in pre- and post-CMP storage/treatment chemicals, and can provide real time, accurate process control in a simple and robust manner.

    Abstract translation: 提供了用于控制组合物中组分浓度的方法和系统,以及半导体加工方法和系统。 一种控制组合物中组分浓度的示例性方法包括:提供具有液体部分的组合物,其中液体部分包含待监测的组分; 对组合物的样品进行吸收光谱测量; 并且使用反馈控制回路基于吸收光谱测量来控制组合物中组分的浓度。 本发明允许控制组合物中组分的浓度,例如化学平面化(CMP)化学品中的腐蚀抑制剂以及CMP前/后CMP储存/处理化学品中的浓度,并且可以提供实时, 精确的过程控制以简单而鲁棒的方式。

    Filtering to measure gas concentrations from spectral features
    10.
    发明授权
    Filtering to measure gas concentrations from spectral features 有权
    过滤以测量光谱特征中的气体浓度

    公开(公告)号:US06615142B1

    公开(公告)日:2003-09-02

    申请号:US09640566

    申请日:2000-08-16

    CPC classification number: G06F17/10

    Abstract: A spectrographic apparatus and method comprising providing a spectrometer, digitizing a sample spectrum in a spectral range that includes at least one feature of an analyte, and comparing, via a linear least squares computation, the sample spectrum to a spectrum known to closely approximate the sample spectrum at a reference condition and to one or more derivatives of the known spectrum taken with respect to one or more parameters of the reference condition.

    Abstract translation: 一种光谱设备和方法,包括提供光谱仪,在包括分析物的至少一个特征的光谱范围内数字化样品光谱,并且通过线性最小二乘法计算将样品光谱与已知紧密接近的光谱进行比较 参考条件下的频谱以及相对于参考条件的一个或多个参数所采用的已知频谱的一个或多个导数。

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