摘要:
A SAW element (13) is formed of a piezoelectric substrate (14), on which are provided IDT electrodes (15), connection electrodes (16), underlying metal layers (17), and acoustic materials (18) placed on the underlying metal layers (17) and having surfaces parallel to the main surface of the piezoelectric substrate (14). The SAW element is mounted in a package (10), which is provided with external terminals (11) connected with the connection electrodes (16), and the package is hermetically sealed with a lid (20) to form a SAW device. When such a SAW element (13) is mounted faceup in a package (10) using a vacuum chuck (30), its piezoelectric substrate (14) can be protected against damage. When a SAW element (13) provided with bumps (23) on its connection electrodes (16) is mounted facedown in a package (10), the failure of electrical connections can be prevented.
摘要:
SAW filter package which can reduce an electromagnetic feed-through for improving an SAW filter performance including a base having a frame around a periphery, a ground part formed of a metal plating on an inside surface of the base for attaching an acoustic surface wave filter thereto, cut-away portions formed by cutting the metal plating of the ground part in two steps, and a metal piece electrically separated from the metal plating by the cut-away portions.
摘要:
In a SAW filter module in which a SAW chip is mounted in a recess of a substrate, the recess is closed off by a sealing plate, and end-face electrodes are provided on external surfaces including the side surfaces of the substrate. An insulation layer having a smooth surface is provided on the side opposite to the sealing plate side of the substrate, and a thin film circuit, such as circuit elements, is formed on the insulation layer. A thin film circuit of high accuracy can be formed on the insulation layer, the number of chip components whose pitch between components is severely limited, and miniaturization of the entire module can be achieved.
摘要:
The surface acoustic wave elements and the other surface mounting elements are mounted on a ceramic multi-layer substrate. The surface acoustic wave elements may be flip chips face-down-bonded to the gold coated mounting electrodes of the multi-layer ceramic substrate by gold-to-gold bonding. At least the surface acoustic wave elements are covered as sealed airtight with the side walls fixed to the multi-layer ceramic substrate and a cover closing the opening of the side walls.
摘要:
A package for a piezoelectric resonator, includes an insulating base that has a rectangular box shape and made of laminated thin ceramics sheets, and a lid that is made of a thin rectangular sheet of transparent glass material and bonded on the top surface of the base. A tuning fork type quartz crystal resonator element is hermetically sealed in the package. The corners of the lid are cut off diagonally at an angle of approximately 45 degrees or rounded so as to correspond to the cutouts of quarter circles at the corners of the base that result from via holes for wiring inside the base. A predetermined sealing width on the top surface of the base between the lid and the inner periphery of the base and a sufficient margin width between the periphery of the lid and the outer periphery of the base are ensured at the corners. The base has a through hole which enables the inside of the package to communicate with the outside and is hermetically sealed in a vacuum atmosphere with sealing medium after the lid is bonded. Sufficient bonding and sealing strength between the base and lid is ensured while miniaturization and flattening of a piezoelectric resonator are implemented. Gas within the package is minimized and the package can be sealed with the inside being subject to a high vacuum.