摘要:
L'invention se rapporte à un guide d'onde optique, en particulier une fibre optique comprenant un cœur, formé d'un matériau à base de silice dopé avec des ions de terres rares, recouvert d'une gaine optique. Des nanoparticuies, dont au moins une partie est en métal, sont dispersées dans le matériau du cœur, Des dispositifs optiques, tels que notamment des amplificateurs optiques≥ comportent une fibre optique comprenant un cœur forméd'un matériau à base de silice dopé avec des ions de terres rares recouvert d'une gaine optique, des nanoparticules, dont au moins une parue est en meta!, étant dispersée dans le matériau du cœur, et une source de pompage délivrant un rayonnement électromagnétique d'excitation se propageant dans le cœur.
摘要:
The invention relates to an optical fibre comprising a gain medium which is equipped with: a core (22) which is formed from a transparent material and nanoparticles (24) comprising a doping element and at least one element for enhancing the use of said doping element; and an outer sheath (26) which surrounds the core. The invention is characterised in that the doping element is erbium (Er) and in that the enhancing element is selected from among antimony (Sb), bismuth (Bi) and a combination of antimony (Sb) and bismuth (Bi). According to the invention, one such fibre is characterised in that the size of the nanoparticles is variable and included between 1 and 500 nanometers and preferably greater than 20 nm.
摘要:
High purity silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The doped glass (20) is made by providing an O 2 doping atmosphere (26) to a silicon oxyfluoride glass (22) in a doping vessel (28). The inventive silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a "dry," silicon oxyfluoride glass which contains doped O 2 molecules and which exhibits very high transmittance and laser transmission durability in the vacuum ultraviolet (VUV) wavelength region. In addition to containing fluorine and having little or no OH content, the inventive silicon oxyfluoride glass contains intersticial O 2 molecules which provide improved endurance to laser exposure. Preferably the O 2 doped silicon oxyfluoride glass is characterized by having less than 1x10 17 molecules/cm3 of molecular hydrogen and low chlorine levels.
摘要:
High purity direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrates for photolithography applications in the VUV wavelength region below 190 nm is disclosed. The inventive direct deposit vitrified silicon oxyfluoride glass is transmissive at wavelengths around 157 nm, making it particularly useful as a photomask substrate at the 157 nm wavelength region. The inventive photomask substrate is a dry direct deposit vitrified silicon oxyfluoride glass which exhibits very high transmittance in the vacuum ultraviolet (VUV) wavelength region while maintaining the excellent thermal and physical properties generally associated with high purity fused silica. In addition to containing fluorine and having little or no OH content, the inventive direct deposit vitrified silicon oxyfluoride glass suitable for use as a photomask substrate at 157 nm is also characterized by having less than 1x10 molecules/cm of molecular hydrogen and low chlorine levels.
摘要翻译:公开了适用于在190nm以下的VUV波长区域中用于光刻应用的光掩模基板的高纯度直接沉积玻璃化硅氧氟化物玻璃。 本发明的直接沉积玻璃化硅氧氟化物玻璃在157nm波长附近是透射的,使其特别适用于157nm波长区域的光掩模衬底。 本发明的光掩模基材是在真空紫外(VUV)波长区域中显示非常高的透射率的干直接沉积玻璃化硅氧氟化物玻璃,同时保持通常与高纯度熔融石英相关的优异的热和物理性能。 除了含氟并且具有很少或不具有OH含量之外,本发明的适用于157nm的光掩模衬底的玻璃化玻璃化氟氧化硅玻璃的特征还在于具有小于1×10 17分子/ cm 3的分子 氢和低氯水平。
摘要:
The methods and apparatus make substantially water-free fused silica preforms or glass by removing water as a reaction product, from the atmosphere, removing water from the transport process, or combinations thereof. Substantially water-free soot, preforms or glass are achieved by using a hydrogen-free fuel, such as carbon monoxide, in the deposition process. Alternatively, a soot producing burner has parameters that enable operation on a substantially hydrogen-free fuel. End burners, which minimize water production, are also described. Such water-free methods are useful in depositing fluorine-doped soot efficiently. Glassy barrier layer methods and apparatus are also described for minimizing dopant migration, especially fluorine and laser and induction methods and apparatus for forming the barrier layer. A chlorine, fluorine and silica precursor, such as chlorofluorosilane, may be used. One embodiment is directed to combustion enhancing additives to the substantially hydrogen-free fuels. The methods and apparatus are useful for producing photomask substrates and optical fiber preforms.
摘要:
A method is disclosed for forming a GeO2-doped SiO2 glass article by depositing glass particles to form a porous preform and then drying and sintering the porous preform. A precursor of SnO2 is also present in the reactant stream used to form the particles, whereby the reaction produces particles of glass that contain GeO2, SiO2 and SnO2. The presence of SnO2 in the particles reduces the reaction of GeO2 with chlorine to form GeCl4 during the drying step. The GeC14 that would have formed would have either escaped from the porous preform or caused GeO2 to be re-deposited in an undesirable portion of the preform. The retention of GeO2 in the article is therefore enhanced.
摘要:
A method of forming a doped silica-titania glass is provided. The method includes blending batch materials comprising silica, titania, and at least one dopant. The method also includes heating the batch materials to form a glass melt. The method further includes consolidating the glass melt to form a glass article, and annealing the glass article.
摘要:
Ultralow expansion titania-silica glass. The glass has high hydroxyl content and optionally include one or more dopants. Representative optional dopants include boron, alkali elements, alkaline earth elements or metals such as Nb, Ta, Al, Mn, Sn Cu and Sn. The glass is prepared by a process that includes steam consolidation to increase the hydroxyl content. The high hydroxyl content or combination of dopant(s) and high hydroxyl content lowers the fictive temperature of the glass to provide a glass having a very low coefficient of thermal expansion (CTE), low fictive temperature (T f ), and low expansivity slope.
摘要:
L'invention concerne une fibre optique (100) pour la détection et/ou la mesure quantitative d'hydrogène comportant un cœur (110) de fibre et au moins une gaine optique (120) entourant le cœur (110), au moins l'un parmi le cœur (110) et la gaine optique (120) étant réalisé majoritairement en verre de silice. La fibre optique (100) comporte du palladium sous forme métallique inclus dans au moins une partie de fibre réalisée majoritairement en verre de silice sélectionnée parmi le cœur (110) et la gaine optique (120). L'invention concerne également un procédé de fabrication d'une telle fibre optique (100), une utilisation de cette fibre optique (100), et un système de détection et/ou de mesure quantitative d'hydrogène comportant une telle fibre optique (100).