Abstract:
A laser processing method for performing processing such as perforation etc. on a ceramic green sheet etc. by more effectively using laser light. Light path systems (30, 40) are provided between a laser oscillator (1) in the laser processing device and a radiation position-controlling optical system for radiating laser light to a predetermined position on a piece of work to be processed. A first light path system (30) and a second light path system (40) are arranged, and they are used appropriately depending on the condition of processing. The first light path system (30) guides laser light emitted from the laser oscillator to the radiation position-controlling optical system without changing a cross-sectional shape of the laser light in the direction perpendicular to the axis of the laser light. The second light path system (40) guides the laser light with varied cross-sectional shapes.
Abstract:
A process for forming electrically conductive circuitry on a metallic nonconductive substrate or insulating layer which includes the steps of providing a nonconductive ceramic substrate having a metallic component and which can dissociate into its constituent components to provide dissociated metal bonded to the ceramic substrate upon application of laser energy. Laser energy is then applied to predetermined areas of the surface of the nonconductive ceramic substrate to provide dissociated metallic conductors in the predetermined areas. The disclosed process further includes the formation of metallized through holes by application of laser energy to the nonconductive ceramic substrate to form a through hole, whereby dissociated metal is formed on the inside of the through hole. The disclosed process also includes the capability to down trim a thick film or thin film resistor which is conductively coupled between two areas of metallization. Laser energy is applied to a portion of the thick film or thin film resistor and to a portion of the metallic nonconductive ceramic substrate in a predetermined pattern to provide a continuous dissociated metallic conductor which passes through the thick film or thin film resistor and is conductively connected to one of two areas of electrically conductive metallization.