Abstract:
A method for manufacturing a coil as a sensing element (12) for a sensor device (15) comprising the following steps: optional tempering of green sheets (1, 2, 3), punching holes (1a) for through-contacts, forming channels (2b) and through-contacts (2a) by means of laser, stencil printing of metallization paste (6) in the channels (2b) and holes (2a), optional laser-cleaning the residual metallization between the channels (2d) filled with metallization paste (6), aligning, stacking, drying and sintering the raw ceramic entity for creating the tile (8) comprising the sensing elements (12), and finally separating the sensing elements (12) from the tile (8). A coil (11) and a sensing element (12) manufactured by the method are furthermore provided, for manufacture of a sensor device (15) for a turbocharger (22).
Abstract:
Disclosed is a method for manufacturing an optoelectronic semiconductor device having a p-n junction diode, which includes the steps of: (a) etching at least one surface of the p-n junction diode ina depth direction to form a plurality of continuous, isolated or mixed type electrode pattern grooves with a certain array; and (b) filling the formed grooves with a conductive ink containing a transparent conducting particle through an inkjet and then performing heat treatment to form a buried transparent electrode, the optoelectronic semiconductor device, and an apparatus for manufacturing the optoelectronic semiconductor device. In the present invention, covering loss is significantly reduced due to a buried transparent electrode so that the high efficiency of photoelectric conversion can be implemented, and there can be provided the easiness of a manufacturing process and the enhancement of productivity through the unification of etching and electrode forming processes.
Abstract:
A temperature-dependent measurement resistance with a fast reaction time is at least partially arranged on the electrically insulating surface of a ceramic substrate. Part of the printed circuit bridges a recess in the substrate and the remaining part of the printed circuit is fitted with contact fields in the marginal area of the substrate adjacent to the recess. The printed circuit is made of a platinum or Au layer and is partially provided with a covering layer made of glass which leaves free the contact fields. In another embodiment, the printed circuit is arranged together with the contact fields either on a screen-printed glass membrane or on a thin film membrane applied by a PVD process which covers the surface of the ceramic substrate, bridging the recess. When the substrate surface is covered by a glass membrane, the printed circuit covering layer is also selectively applied by screen printing. When the substrate surface is covered by a thin film membrane, the printed circuit covering layer is also selectively applied by a PVD process and may be made of the same material as the thin film membrane. The ceramic substrate preferably consists of aluminium oxide.
Abstract:
For use as a substrate (11) for a heat generating microelectric integrated circuit (12), a ceramic panel (11) is provided having small thickness in comparison to its length and breadth, having on at least the surface opposite the one bearing the microelectronic integrated circuit (12), a layer of heat conductive metal (13) and having a plurality of closely spaced, small cross section extensions (14) of the heat conductive metal layer (13) extending into the ceramic material (11) to a depth of at least about one fifth of its thickness. The substrate is particularly useful for the mounting of hybrid microelectronic circuits to improve the heat dissipation capability of the ceramic substrate (11).
Abstract:
A workpiece (101) and a method of forming through holes (115) in substrate (100) are disclosed. The method of forming a through hole (115) in a substrate (100; 101) by drilling includes affixing an exit sacrificial cover layer (130) to a laser beam exit surface (112) of the substrate (100), positioning a laser beam (20) in a predetermined location relative to the substrate (100) and corresponding to a desired location for the through hole 8115), and forming the through hole 8115) by repeatedly pulsing the laser beam (20) into an entrance surface (110) of the substrate (100) and through a bulk of the substrate (100). The method further includes forming a hole (135) in the exit sacrificial cover layer (130) by repeatedly pulsing the laser beam (20) into the through hole (115) formed in the substrate (100) such that the laser beam (20) passes through the laser beam exit surface (112) of the substrate (100) and into the exit sacrificial cover layer (130).