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    RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY
    1.
    发明申请
    RADIATION GENERATING DEVICE, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND DEVICE MANUFACTURED THEREBY 审中-公开
    辐射发生器件，光刻设备，器件制造方法及其制造的器件

    公开(公告)号：WO2008140305A1

    公开(公告)日：2008-11-20

    申请号：PCT/NL2008/050260

    申请日：2008-04-28

    Applicant: ASML NETHERLANDS B.V. ,  SOER, Wouter Anthon ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus

    Inventor： SOER, Wouter Anthon ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus

    IPC: H05G2/00

    CPC classification number: H05G2/003 ,  H05G2/005

    Abstract: A device constructed to generate radiation includes a liquid bath, and a pair of electrodes. At least a part of one of the electrodes is formed by a cable part moveable with respect to the liquid bath. The device also includes an actuator arranged to move the cable part from a liquid-adhering position to an ignition position, and an ignition source configured to trigger a discharge produced radiating plasma from the liquid adherent to the cable part, when the cable part is in the ignition position, by a discharge between the electrodes. The liquid-adhering position is a position for adhering a liquid from the bath to the part of the electrode.

    Abstract translation: 构造成产生辐射的装置包括液槽和一对电极。 电极中的至少一部分由可相对于液槽移动的电缆部分形成。 该装置还包括致动器，其被布置成将电缆部分从液体粘附位置移动到点火位置，并且点火源被配置为触发从电极附着于电缆部分的液体辐射等离子体的放电，当电缆部分处于 点火位置，通过电极之间的放电。 液体粘附位置是将液体从熔池粘附到电极的一部分的位置。

    DEBRIS PREVENTION SYSTEM AND LITHOGRAPHIC APPARATUS
    6.
    发明申请
    DEBRIS PREVENTION SYSTEM AND LITHOGRAPHIC APPARATUS 审中-公开
    防破坏系统和平面设备

    公开(公告)号：WO2009014439A2

    公开(公告)日：2009-01-29

    申请号：PCT/NL2008/050502

    申请日：2008-07-22

    Applicant: ASML NETHERLANDS B.V. ,  SOER, Wouter Anthon ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus

    Inventor： SOER, Wouter Anthon ,  VAN HERPEN, Maarten Marinus Johannes Wilhelmus

    IPC: G03F7/20 ,  B08B1/00

    CPC classification number: G03F7/70925 ,  B08B1/00 ,  B82Y10/00 ,  G03F7/70166 ,  G03F7/70916

    Abstract: A debris prevention system is constructed and arranged to prevent debris emanating from a radiation source from propagating with radiation from the radiation source into or within a lithographic apparatus. The debris prevention system includes a first foil trap that is rotatable around an axis of rotation, and a second foil trap that at least partly encloses the first foil trap. The second foil trap includes a plurality of foils optically open respective to a central location for placement of a radiation source and optically closed respective to directions perpendicular to the axis of rotation.

    Abstract translation: 构建和布置防碎片系统，以防止从辐射源发出的碎屑从辐射源的辐射传播到光刻设备内或其内。 碎片防止系统包括可围绕旋转轴线旋转的第一箔捕获器和至少部分地包围第一箔捕获器的第二箔阱。 第二箔捕获器包括多个箔片，其相应于中心位置光学地打开，用于放置辐射源并且相应于垂直于旋转轴线的方向光学地闭合。

    CONTACT DETECTION TUBES, METHODS AND SYSTEMS FOR MEDICAL PROCEDURES
    9.
    发明申请
    CONTACT DETECTION TUBES, METHODS AND SYSTEMS FOR MEDICAL PROCEDURES 审中-公开
    接触检测管，医疗程序的方法和系统

    公开(公告)号：WO2010073134A1

    公开(公告)日：2010-07-01

    申请号：PCT/IB2009/054990

    申请日：2009-11-10

    Applicant: KONINKLIJKE PHILIPS ELECTRONICS, N.V. ,  TROVATO, Karen, Irene ,  SOER, Wouter, Anthon

    Inventor： TROVATO, Karen, Irene ,  SOER, Wouter, Anthon

    IPC: A61B17/34 ,  A61B17/00 ,  A61B19/00

    CPC classification number: A61B17/3421 ,  A61B17/3494 ,  A61B34/30 ,  A61B2017/00026 ,  A61B2017/003 ,  A61B2017/00991 ,  A61B2017/3443 ,  A61B2034/301 ,  A61B2090/0801

    Abstract: A contact detection method (70) involves a navigation of a contact detection tube (20') within an open space of an anatomical region (50) of a body. The contact detection tube includes a tubular wall (21) having an interior surface (23) defining a working channel (24), and an electrode (30) integrated in the tubular wall (21). The electrode (30) electrically connects the contact detection tube (20') to an electrically conductive object (41, 52) (e.g., biological tissue or a medical instrument/tool) in physical contact with an exterior surface (22) of the tubular wall (21) and electrically isolates the working channel (24) from any electrical connection of the tube (20') to the object (41, 52). The method (70) further involves a determination of a contact status of the contact detection tube (20') between an open state (i.e., no physical contact) and a closed state (i.e., physical contact).

    Abstract translation: 接触检测方法（70）涉及在身体的解剖区域（50）的开放空间内的接触检测管（20'）的导航。 接触检测管包括具有限定工作通道（24）的内表面（23）和集成在管状壁（21）中的电极（30））的管状壁（21）。 电极（30）将接触检测管（20'）电连接到与管状物的外表面（22）物理接触的导电物体（41,42）（例如，生物组织或医疗仪器/工具） 壁（21）并且将工作通道（24）与管（20'）的任何电连接与物体（41,42）电隔离。 方法（70）还包括在打开状态（即，没有物理接触）和闭合状态（即物理接触）之间确定接触检测管（20'）的接触状态。

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