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21.发明公开
公开(公告)号：EP3490018A1
公开(公告)日：2019-05-29
申请号：EP18208711.4
申请日：2018-11-27
摘要： A micro-electro-mechanic actuator device (1; 85; 95) comprising: a fixed structure (4); and a mobile structure (2), which includes a first deformable band (47c) and a further second deformable band (47a) and a further third deformable band (47b), which extend on opposite sides of the first deformable band, each carrying a piezoelectric actuator (50i-50j). In a working condition, in which the second and third piezoelectrics are biased by a working voltage, the second and third deformable bands (47a, 47b) are subjected to a negative bending, while the first deformable band (47c) is subjected to a positive bending. There are thus generated two translations that add together, causing a displacement of the first deformable band greater than the one that may be obtained by a single membrane of equal base area.
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22.发明公开
公开(公告)号：EP3441358A1
公开(公告)日：2019-02-13
申请号：EP18187742.4
申请日：2018-08-07
发明人： PACI, Dario , GIUSTI, Domenico
IPC分类号： B81B3/00
摘要： MEMS device (21; 61; 91; 101) including: a semiconductor support body (22) having a first cavity (24); a membrane (26; 56; 106) including a peripheral portion, fixed to the support body (22), and a suspended portion; a first deformable structure (45; 68; 98) at a distance from a central part of the suspended portion of the membrane (26; 56; 106); a second deformable structure (44; 66; 96) laterally offset relative to the first deformable structure (45; 68; 98) towards the peripheral portion of the membrane (26; 56; 106); and a projecting region (40) fixed under the membrane (26; 56; 106); and wherein the second deformable structure (44; 66; 96) is deformable so as to translate the central part of the suspended portion of the membrane (26; 56; 106) along a first direction; and wherein the first deformable structure (45; 68; 98) is deformable so as to translate the central part of the suspended portion of the membrane (26; 56; 106) along a second direction.
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23.发明公开
公开(公告)号：EP3343265A1
公开(公告)日：2018-07-04
申请号：EP17172096.4
申请日：2017-05-19
IPC分类号： G02B26/08
CPC分类号： G02B26/0858 , B81B3/0083 , B81B2201/032 , B81B2203/0118 , G02B26/105 , H04N9/3129
摘要： A MEMS device comprising a fixed structure (22) and a suspended structure (26) including an internal structure (29; 109) and a first arm (B1) and a second arm (B2), each of which has a respective first end and a respective second end, the first ends being fixed to the fixed structure and being angularly arranged at a distance apart, the second ends being fixed to the internal structure, being angularly arranged at a distance apart and being arranged angularly in a same direction of rotation with respect to the corresponding first ends. The MEMS device further includes a number of piezoelectric actuators (50, 52, 54, 56), each of which can be driven so as to cause deformation of a corresponding arm, thus causing a rotation of the internal structure. In resting conditions, each of the first and second arms has a respective elongated portion (30, 32) with a respective concavity. The internal structure extends in part within the concavities of the elongated portions of the first and second arms.
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24.发明公开MICROMECHANICAL DEVICE HAVING A STRUCTURE TILTABLE BY A QUASI-STATIC PIEZOELECTRIC ACTUATION 审中-公开食品加工食品加工食品加工食品加工食品加工食品加工食品加工机械
公开(公告)号：EP3178783A1
公开(公告)日：2017-06-14
申请号：EP16175301.7
申请日：2016-06-20
CPC分类号： G02B26/105 , B81B3/0048 , B81B3/0083 , B81B2201/042 , G02B26/0858 , H04N9/3173
摘要： A micromechanical device (50) having an tiltable structure (52) rotatable about a first rotation axis (B); a fixed structure (51); and an actuation structure (54) of a piezoelectric type, coupled between the tiltable structure and the fixed structure. The actuation structure (54) is formed by spring elements (55, 56) having a spiral shape. The spring elements (55, 56) are each formed by a plurality of actuation arms (70-73) extending transversely to the first rotation axis (B), each actuation arm carrying a respective piezoelectric band (74, 75) of piezoelectric material. The actuation arms are divided into two sets biased in phase opposition to obtain rotation in opposite directions of the tiltable structure about the first rotation axis (B).
摘要翻译： 具有可围绕第一旋转轴线（B）旋转的可倾斜结构（52）的微机械装置（50）; 固定结构（51）; 以及耦合在可倾斜结构和固定结构之间的压电型致动结构（54）。 致动结构（54）由具有螺旋形状的弹簧元件（55,56）形成。 弹簧元件（55,56）各自由横向于第一旋转轴线（B）延伸的多个致动臂（70-73）形成，每个致动臂承载压电材料的相应压电带（74,75）。 致动臂被分成两组，它们以相位相反的方式偏置，以绕第一旋转轴线（B）绕可倾斜结构的相反方向旋转。
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25.发明公开FLUID EJECTION DEVICE WITH RESTRICTION CHANNEL, AND MANUFACTURING METHOD THEREOF 审中-公开具有限流通道的流体喷射装置及其制造方法
公开(公告)号：EP3173235A1
公开(公告)日：2017-05-31
申请号：EP16175467.6
申请日：2016-06-21
CPC分类号： B41J2/14201 , B41J2/14233 , B41J2/1607 , B41J2/161 , B41J2/1623 , B41J2/1626 , B41J2/1628 , B41J2/1629 , B41J2/1631 , B41J2/1642 , B41J2002/14241 , B41J2002/14411 , B41J2202/12
摘要： A fluid ejection device (1), comprising: a first semiconductor body (2) including an actuator (3), which is operatively coupled to a chamber (6) for containing the fluid and is configured to cause ejection of the fluid; and a channel (11a) for inlet of the fluid, which extends in a first direction (Z) and has a section having a first dimension (A 1 ); and a second semiconductor body (8), which is coupled to the first semiconductor body (2) and has an ejection nozzle (13) configured to expel the fluid. The second semiconductor body (8) further comprises a first restriction channel (16), which is fluidically coupled to the inlet channel (11a), extends in a second direction (X) orthogonal to the first direction (Z) and has a respective section with a second dimension (A 3 ) smaller than the first dimension (A 1 ) so as to form a restriction between the inlet channel (11a) and the chamber (6).
摘要翻译： 1。一种流体喷射装置（1），包括：第一半导体本体（2），所述第一半导体本体包括致动器（3），所述致动器可操作地联接到用于容纳所述流体的腔室（6）并且构造成引起所述流体的喷射; 和用于流体入口的通道（11a），所述通道（11a）沿第一方向（Z）延伸并具有第一尺寸（A1）的截面; 以及第二半导体本体（8），其耦合到第一半导体本体（2）并具有构造成排出流体的喷嘴（13）。 第二半导体本体（8）还包括流体耦合到入口通道（11a）的第一限制通道（16），其沿与第一方向（Z）正交的第二方向（X）延伸并且具有相应的区段 具有小于第一尺寸（A1）的第二尺寸（A3），以在入口通道（11a）和腔室（6）之间形成限制。
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26.发明公开
公开(公告)号：EP4283272A1
公开(公告)日：2023-11-29
申请号：EP23172036.8
申请日：2023-05-08
发明人： GIUSTI, Domenico , QUAGLIA, Fabio , FERRERA, Marco
摘要： Micromachined pressure transducer including: a fixed body (5) of semiconductor material, which laterally delimits a main cavity (7); a transduction structure (6), which is suspended on the main cavity (7) and includes at least a pair of deformable structures (10) and a movable region (8), which is formed by semiconductor material and is mechanically coupled to the fixed body (5) through the deformable structures (10). Each deformable structure (10) includes: a support structure (15) of semiconductor material, which includes a first and a second beam (20,22), each of which has ends fixed respectively to the fixed body (5) and to the movable region (8), the first beam (20) being superimposed, at a distance, on the second beam (22); and at least one piezoelectric transduction structure (12,14), mechanically coupled to the first beam (20). The piezoelectric transduction structures (12,14) are electrically controllable so that they cause corresponding deformations of the respective support structures (15) and a consequent translation of the movable region (8) along a translation direction (H).
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公开(公告)号：EP3975273A1
公开(公告)日：2022-03-30
申请号：EP21199247.4
申请日：2021-09-27
发明人： GIUSTI, Domenico , MARTINI, Irene , ASSANELLI, Davide , FERRARINI, Paolo , PRELINI, Carlo Luigi , QUAGLIA, Fabio
IPC分类号： H01L41/08 , H01L41/09 , H01L41/319 , B06B1/06
摘要： A piezoelectric microelectromechanical structure (10), provided with a piezoelectric layer structure (11) having a main extension in a horizontal plane (xy) and a variable cross-section in a plane (xz) transverse to the horizontal plane, comprises a bottom electrode (12), a piezoelectric material (14) constituted by a PZT film arranged on the bottom electrode, and a top electrode (16) arranged on the piezoelectric material, wherein the piezoelectric material has a first thickness (w1) along a vertical axis (z) at a first area (14') and a second thickness (w2) along the vertical axis (z) at a second area (14"), the second thickness being smaller than the first thickness. A corresponding manufacturing process is also disclosed.
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公开(公告)号：EP3933460A1
公开(公告)日：2022-01-05
申请号：EP21182607.8
申请日：2021-06-29
摘要： The MEMS actuator (10) is formed by a main body (15) that has a central portion (29A), couplable to a substrate (11), and a peripheral portion (29B), which is suspended over the substrate when the central portion is coupled to the substrate and has a deformable structure (35*), which at rest has a spiral planar shape, extends around the central portion (29A), and forms a plurality of membranes (35) arranged in succession. The MEMS actuator has a plurality of bearing structures (38, 39) and, for each bearing structure, a corresponding piezoelectric actuator (40). The bearing structures are fixed at the top to the deformable structure (35*) and laterally delimit corresponding cavities (37), each having a lateral opening (AP) facing the central portion (29A) of the main body (15) and closed at the top by a corresponding membrane (35), of which a fixed part is fixed to the underlying bearing structure and a suspended part is laterally offset with respect to the underlying bearing structure. The piezoelectric actuators are controllable so as to cause a deformation of the corresponding membrane and a rotation of the bearing structures around the central portion of the main body.
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公开(公告)号：EP3907178A1
公开(公告)日：2021-11-10
申请号：EP21171642.8
申请日：2021-04-30
发明人： GIUSTI, Domenico , PRELINI, Carlo Luigi , FERRERA, Marco , LAZZARI, Carla Maria , SEGHIZZI, Luca , BONI, Nicolò , CARMINATI, Roberto , QUAGLIA, Fabio
IPC分类号： B81B7/00
摘要： The MEMS actuator (150) is formed by a substrate (50'), which surrounds a cavity (100); by a deformable structure (105) suspended on the cavity; by an actuation structure (65) formed by a first piezoelectric region (61) of a first piezoelectric material, supported by the deformable structure and configured to cause a deformation of the deformable structure; and by a detection structure (90) formed by a second piezoelectric region (80) of a second piezoelectric material, supported by the deformable structure and configured to detect the deformation of the deformable structure.
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30.发明公开
公开(公告)号：EP3907177A1
公开(公告)日：2021-11-10
申请号：EP21171635.2
申请日：2021-04-30
摘要： The MEMS actuator (50) is formed by a body (51), which surrounds a cavity (52) and by a deformable structure (54), which is suspended on the cavity and is formed by a movable portion (56) and by a plurality of deformable elements (55). The deformable elements are arranged consecutively to each other, connect the movable portion to the body and are each subject to a deformation. The MEMS actuator (50) further comprises at least one plurality of actuation structures (80A, 80B), which are supported by the deformable elements (55) and are configured to cause a translation of the movable portion greater than the deformation of each deformable element (55). The actuation structures each have a respective first piezoelectric region (82).
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