A method of fabricating a silicon carbide vertical mosfet
    26.
    发明公开
    A method of fabricating a silicon carbide vertical mosfet 失效
    一种制造碳化硅垂直mosfet的方法

    公开(公告)号:EP0635882A3

    公开(公告)日:1995-10-11

    申请号:EP94109896.4

    申请日:1994-06-27

    申请人: MOTOROLA, INC.

    IPC分类号: H01L21/34 H01L29/78

    摘要: A silicon carbide vertical MOSFET (30, 60) formed on a silicon carbide substrate (35, 65) with portions of epitaxial layers (39, 48 or 69, 78) defining the various transistor electrodes, rather than defining the electrodes with implants and diffusion. An opening (40, 70) is formed in some of the epitaxial layers and a conductive layer (48, 85) is formed therein to electrically connect a drain contact (95) on the rear of the substrate to the components on the front of the substrate.

    摘要翻译: 碳化硅垂直MOSFET(30,60)形成在碳化硅衬底(35,65)上,外延层(39,48或69,78)的一部分限定各种晶体管电极,而不是用注入和扩散来限定电极 。 在一些外延层中形成开口(40,70),并在其中形成导电层(48,85),以将衬底背面上的漏极触点(95)电连接到衬底背面上的元件 基质。

    Photovoltaic cell
    29.
    发明公开
    Photovoltaic cell 失效
    Lichtelektrische Zelle。

    公开(公告)号:EP0050925A2

    公开(公告)日:1982-05-05

    申请号:EP81304611.7

    申请日:1981-10-05

    申请人: PHOTON POWER INC.

    发明人: Singh, Vijay Pal

    IPC分类号: H01L31/18 H01L31/06 H01L21/34

    摘要: A photovoltaic cell is formed by combining a spray process, forming a crystalline layer containing cadmium and sulfur, and an evaporation process, depositing copper chloride for converting to Cu x S. The crystals containing cadmium and sulfur are heated in an atmosphere of cadmium and chlorides to obtain crystals having at least one dimension greater than 0.5 micron and a planar layer of Cu x S is formed on the large crystals. A layer of Cu x S having a thickness of 0.5-1.0 micron is obtained. Electrodes are formed from evaporated gold or chromium or a metallic paste including silver or copper. Zn x Cd 1-x S may be substituted for CdS through at least part of the crystalline layer for improved Voc.

    摘要翻译: 通过组合喷射法,形成含有镉和硫的结晶层和蒸发法形成光伏电池,将氯化铜沉积以转化为CuxS。 含有镉和硫的晶体在镉和氯化物的气氛中加热,得到至少一个尺寸大于0.5微米的晶体,并在大晶体上形成一层CuxS平面层。 得到厚度为0.5-1.0微米的CuxS层。 电极由蒸发的金或铬或包括银或铜的金属膏形成。 Zn x C d 1-x S可以通过至少部分结晶层代替CdS以改善Voc。